Continuous loading and unloading into and out of a processing chamber

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CPC
H01L21/6776

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6776Continuous loading and unloading into and out of a processing chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Reduced footprint wafer handling platform
- Patent number 12,272,583
- Issue date Apr 8, 2025
- Lam Research Corporation
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for shifting at least one sub-assembly between a provisionin...
- Patent number 12,246,387
- Issue date Mar 11, 2025
- SIEGFRIED HOFMANN GMBH
- Daniel Feseker
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting container and system for storing contain...
- Patent number 12,240,701
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Jun Sang Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking device with moveable frame and sealing component
- Patent number 12,237,196
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control system for wafer transport vehicle and method for operating...
- Patent number 12,230,524
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai Ping Chan
- B60 - VEHICLES IN GENERAL
Information Patent Grant
High-speed layout method and layout device for photovoltaic modules
- Patent number 12,224,371
- Issue date Feb 11, 2025
- SUZHOU SC-SOLAR EQUIPMENT CO., LTD
- Jiliang Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method and substrate transfer system
- Patent number 12,224,193
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for improving transfer efficiency of an automat...
- Patent number 12,217,992
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor storage apparatus with integrated sorter
- Patent number 12,198,956
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,198,961
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tape mounter
- Patent number 12,191,172
- Issue date Jan 7, 2025
- Disco Corporation
- Toshiyasu Rikiishi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,183,613
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method of controlling vacuum proces...
- Patent number 12,165,908
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Storage device
- Patent number 12,159,801
- Issue date Dec 3, 2024
- Murata Machinery, Ltd.
- Kokai Jo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure system having walls comprising sidewalls and radio-freque...
- Patent number 12,159,795
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated semiconductor substrate polishing and cleaning
- Patent number 12,154,810
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- ShinBae Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus
- Patent number 12,148,644
- Issue date Nov 19, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Yuki Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Transport apparatus with linear bearing
- Patent number 12,142,505
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device
- Patent number 12,136,561
- Issue date Nov 5, 2024
- Samsung Electronics Co., Ltd.
- Sanglyong Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mapping using deep neural-networks
- Patent number 12,131,454
- Issue date Oct 29, 2024
- Onto Innovation, Inc.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate storage apparatus and substrate processing system
- Patent number 12,125,729
- Issue date Oct 22, 2024
- Kioxia Corporation
- Kohei Watabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection system
- Patent number 12,117,485
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Magnetic levitation system, base and carrier of a magnetic levitati...
- Patent number 12,119,173
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Henning Aust
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20250087524
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD
- Publication number 20250087503
- Publication date Mar 13, 2025
- SEMES CO., LTD.
- Changhoon OK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250087515
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20250087502
- Publication date Mar 13, 2025
- KIOXIA Corporation
- Kohei YUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250079220
- Publication date Mar 6, 2025
- SCREEN Holdings Co., Ltd.
- Satoshi KAKINOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250079215
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER DETECTION USING CONTACTLESS COMMUNICATION
- Publication number 20250079209
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Nithiyanantham Balasubramaniam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR PACKAGING WAFER CASSETTES
- Publication number 20250069927
- Publication date Feb 27, 2025
- Siltronic AG
- Franz SOLLINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS
- Publication number 20250062148
- Publication date Feb 20, 2025
- GLOBALWAFERS CO., LTD.
- ShinBae Park
- B08 - CLEANING
Information Patent Application
SHELF STATUS DETERMINATION
- Publication number 20250054795
- Publication date Feb 13, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Guancyun LI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER
- Publication number 20250054787
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCES...
- Publication number 20250046648
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Kiyoshi MORI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM
- Publication number 20250029861
- Publication date Jan 23, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT
- Publication number 20250029860
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250029854
- Publication date Jan 23, 2025
- Lavorro, Inc.
- Akshay OBEROI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250022731
- Publication date Jan 16, 2025
- Lavorro, Inc.
- Akshay OBEROI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20250014873
- Publication date Jan 9, 2025
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20250014930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS PLATFORM
- Publication number 20250014931
- Publication date Jan 9, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Haiwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND WET BENCH FOR THE IN-LINE PROCESSING OF SOLAR-CELL SUBST...
- Publication number 20250015223
- Publication date Jan 9, 2025
- SINGULUS TECHNOLOGIES AG
- Philipp NOACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MAPPING USING DEEP NEURAL-NETWORKS
- Publication number 20250014165
- Publication date Jan 9, 2025
- ONTO INNOVATION INC.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR TRANSFER DEVICE
- Publication number 20250006534
- Publication date Jan 2, 2025
- Samsung Electronics Co., Ltd.
- Seong Won Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Cassette Handling Apparatus, Substrate Processing Apparat...
- Publication number 20250006526
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Akinari HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOUP HAVING END EFFECTOR DETECTION SENSOR, AND INTEGRATED DATA MANA...
- Publication number 20240429082
- Publication date Dec 26, 2024
- Samsung Electronics Co., Ltd.
- Kyu Ok LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES
- Publication number 20240421244
- Publication date Dec 19, 2024
- SUZHOU SC-SOLAR EQUIPMENT CO., LTD
- Jiliang Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING STRUCTURE AND INSPECTION EQUIPMENT THEREFOF AND CALIBRAT...
- Publication number 20240412996
- Publication date Dec 12, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- MING-CHIEN CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK
- Publication number 20240412992
- Publication date Dec 12, 2024
- KLA Corporation
- Jaime Poris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...
- Publication number 20240385582
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Kiminari SAKAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240387217
- Publication date Nov 21, 2024
- ASM IP HOLDING B.V.
- Hsuan Te Lin
- H01 - BASIC ELECTRIC ELEMENTS

Continuous loading and unloading into and out of a processing chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Reduced footprint wafer handling platform

Device for shifting at least one sub-assembly between a provisionin...

Substrate transport apparatus and substrate transport method

Apparatus for transporting container and system for storing contain...

Substrate transporter and substrate processing apparatus including...

Docking device with moveable frame and sealing component

Substrate processing system and substrate processing method

Control system for wafer transport vehicle and method for operating...

High-speed layout method and layout device for photovoltaic modules

Control method and substrate transfer system

Methods and systems for improving transfer efficiency of an automat...

Semiconductor storage apparatus with integrated sorter

Substrate processing apparatus and substrate processing method

Tape mounter

Substrate processing system and substrate processing method

Substrate processing apparatus for processing substrates

Process kit enclosure system

Vacuum processing apparatus and method of controlling vacuum proces...

Storage device

Enclosure system having walls comprising sidewalls and radio-freque...

Automated semiconductor substrate polishing and cleaning

Laser irradiation apparatus

Transport apparatus with linear bearing

Side storage pods, equipment front end modules, and methods for pro...

Substrate transfer device

Substrate mapping using deep neural-networks

Substrate storage apparatus and substrate processing system

Wafer inspection system

Magnetic levitation system, base and carrier of a magnetic levitati...

Substrate processing apparatus and method of manufacturing semicond...

Patents Applicationslast 30 patents

PROCESS KIT ENCLOSURE SYSTEM

SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CARRIER DETECTION USING CONTACTLESS COMMUNICATION

DEVICE FOR PACKAGING WAFER CASSETTES

AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS

SHELF STATUS DETERMINATION

ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER

VACUUM PROCESSING APPARATUS AND METHOD OF CONTROLLING VACUUM PROCES...

SUBSTRATE TREATMENT SYSTEM

NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT

AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

PROCESS PLATFORM

METHOD AND WET BENCH FOR THE IN-LINE PROCESSING OF SOLAR-CELL SUBST...

SUBSTRATE MAPPING USING DEEP NEURAL-NETWORKS

SEMICONDUCTOR TRANSFER DEVICE

Substrate Cassette Handling Apparatus, Substrate Processing Apparat...

FOUP HAVING END EFFECTOR DETECTION SENSOR, AND INTEGRATED DATA MANA...

HIGH-SPEED LAYOUT METHOD AND LAYOUT DEVICE FOR PHOTOVOLTAIC MODULES

SUPPORTING STRUCTURE AND INSPECTION EQUIPMENT THEREFOF AND CALIBRAT...

SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND CONTROL MET...

EQUIPMENT FRONT END MODULE