Continuous loading and unloading into and out of a processing chamber

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CPC
H01L21/6776

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6776Continuous loading and unloading into and out of a processing chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Loader device and substrate transport system
- Patent number 12,365,095
- Issue date Jul 22, 2025
- Samsung Electronics Co., Ltd.
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Information processing apparatus for teaching transfer position of...
- Patent number 12,367,602
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Stage, testing apparatus, and stage operating method
- Patent number 12,354,898
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Masahito Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module and destructive analysis automation appa...
- Patent number 12,343,881
- Issue date Jul 1, 2025
- Samsung Electronics Co., Ltd.
- Youn Gon Oh
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Parallel transfer apparatus
- Patent number 12,341,045
- Issue date Jun 24, 2025
- Samsung Electronics Co., Ltd.
- Hyunjae Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Guide unit, transfer assembly and die bonding apparatus including t...
- Patent number 12,334,381
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Do-Youn Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus
- Patent number 12,334,387
- Issue date Jun 17, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Masaya Yoshida
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
FOUP transfer device
- Patent number 12,327,746
- Issue date Jun 10, 2025
- Rorze Corporation
- Yoshiyuki Fujishiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for managing chip manufacturing equipment, apparatus, electr...
- Patent number 12,327,769
- Issue date Jun 10, 2025
- Saimeite Technology Co, Ltd.
- Wang Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate processing method, and recor...
- Patent number 12,322,631
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring electronic component from flexible carri...
- Patent number 12,322,630
- Issue date Jun 3, 2025
- MICRAFT SYSTEM PLUS CO., LTD.
- Chingju Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput polishing modules and modular polishing systems
- Patent number 12,308,272
- Issue date May 20, 2025
- Applied Materials, Inc.
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer frame sorter and stocker
- Patent number 12,300,532
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus with a rotatable table
- Patent number 12,288,710
- Issue date Apr 29, 2025
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Humidity control device for equipment front end module of semicondu...
- Patent number 12,283,506
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-vacuum twin-arm robot
- Patent number 12,283,508
- Issue date Apr 22, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring apparatus
- Patent number 12,283,494
- Issue date Apr 22, 2025
- RORZE SYSTEMS CORPORATION
- Seung Bae Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus
- Patent number 12,278,123
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jingfeng Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced footprint wafer handling platform
- Patent number 12,272,583
- Issue date Apr 8, 2025
- Lam Research Corporation
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for shifting at least one sub-assembly between a provisionin...
- Patent number 12,246,387
- Issue date Mar 11, 2025
- SIEGFRIED HOFMANN GMBH
- Daniel Feseker
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transporting container and system for storing contain...
- Patent number 12,240,701
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Jun Sang Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Docking device with moveable frame and sealing component
- Patent number 12,237,196
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control system for wafer transport vehicle and method for operating...
- Patent number 12,230,524
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai Ping Chan
- B60 - VEHICLES IN GENERAL
Information Patent Grant
High-speed layout method and layout device for photovoltaic modules
- Patent number 12,224,371
- Issue date Feb 11, 2025
- SUZHOU SC-SOLAR EQUIPMENT CO., LTD
- Jiliang Mao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method and substrate transfer system
- Patent number 12,224,193
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for improving transfer efficiency of an automat...
- Patent number 12,217,992
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor storage apparatus with integrated sorter
- Patent number 12,198,956
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BATCH-TYPE SUBSTRATE PROCESSING APPARATUS
- Publication number 20250226252
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Sekeun KWAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...
- Publication number 20250218834
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Hau Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER POLISHING SYSTEM, LOADING METHOD AND USING METHOD THEREOF
- Publication number 20250214196
- Publication date Jul 3, 2025
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Xiaoyu XU
- B24 - GRINDING POLISHING
Information Patent Application
STOCKER DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250218839
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Chang Suk OH
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250210390
- Publication date Jun 26, 2025
- SCREEN Holdings Co., Ltd.
- Takahiro YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20250201586
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAN FILTER UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME,...
- Publication number 20250201590
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Dae-Woong CHOI
- B08 - CLEANING
Information Patent Application
ARTICLE TRANSPORT FACILITY
- Publication number 20250191947
- Publication date Jun 12, 2025
- SEMES CO., LTD.
- Mei Xiang JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIAGE DRIVING SYSTEM AND METHOD
- Publication number 20250191951
- Publication date Jun 12, 2025
- SEMES CO., LTD.
- Dasom KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...
- Publication number 20250178845
- Publication date Jun 5, 2025
- ASMPT SINGAPORE PTE. LTD
- Chak Tong SZE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED MATERIAL HANDLING SYSTEM
- Publication number 20250183078
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Zhu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER
- Publication number 20250174479
- Publication date May 29, 2025
- Samsung Electronics Co., Ltd.
- Wonguk SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...
- Publication number 20250166167
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Yusuke MIYAKUBO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
- Publication number 20250167017
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATION SYSTEM FOR A REMOVABLE REACTION UNIT OF AN EPITAXIAL REA...
- Publication number 20250167028
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20250157842
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLAR CELL FABRICATION
- Publication number 20250160038
- Publication date May 15, 2025
- National University of Singapore
- Jai PRAKASH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250149355
- Publication date May 8, 2025
- TOKYO ELECTRON LIMITED
- Susumu HAYAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER
- Publication number 20250149360
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIE BONDING APPARATUS AND DIE BONDING METHOD USING THE SAME
- Publication number 20250140588
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Ilyoung HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Improving Transfer Efficiency of an Automat...
- Publication number 20250125177
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20250087524
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD
- Publication number 20250087503
- Publication date Mar 13, 2025
- SEMES CO., LTD.
- Changhoon OK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250087515
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kouzou KANAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20250087502
- Publication date Mar 13, 2025
- KIOXIA Corporation
- Kohei YUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250079220
- Publication date Mar 6, 2025
- SCREEN Holdings Co., Ltd.
- Satoshi KAKINOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250079215
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER DETECTION USING CONTACTLESS COMMUNICATION
- Publication number 20250079209
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Nithiyanantham Balasubramaniam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR PACKAGING WAFER CASSETTES
- Publication number 20250069927
- Publication date Feb 27, 2025
- Siltronic AG
- Franz SOLLINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS
- Publication number 20250062148
- Publication date Feb 20, 2025
- GLOBALWAFERS CO., LTD.
- ShinBae Park
- B08 - CLEANING

Continuous loading and unloading into and out of a processing chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Loader device and substrate transport system

Information processing apparatus for teaching transfer position of...

Stage, testing apparatus, and stage operating method

Equipment front end module and destructive analysis automation appa...

Parallel transfer apparatus

Guide unit, transfer assembly and die bonding apparatus including t...

Substrate transfer apparatus

FOUP transfer device

Method for managing chip manufacturing equipment, apparatus, electr...

Substrate processing system, substrate processing method, and recor...

Apparatus for transferring electronic component from flexible carri...

High throughput polishing modules and modular polishing systems

Wafer frame sorter and stocker

Wafer processing apparatus with a rotatable table

Humidity control device for equipment front end module of semicondu...

In-vacuum twin-arm robot

Substrate transferring apparatus

Semiconductor processing apparatus

Reduced footprint wafer handling platform

Device for shifting at least one sub-assembly between a provisionin...

Substrate transport apparatus and substrate transport method

Apparatus for transporting container and system for storing contain...

Substrate transporter and substrate processing apparatus including...

Docking device with moveable frame and sealing component

Substrate processing system and substrate processing method

Control system for wafer transport vehicle and method for operating...

High-speed layout method and layout device for photovoltaic modules

Control method and substrate transfer system

Methods and systems for improving transfer efficiency of an automat...

Semiconductor storage apparatus with integrated sorter

Patents Applicationslast 30 patents

BATCH-TYPE SUBSTRATE PROCESSING APPARATUS

HUMIDITY CONTROL DEVICE FOR EQUIPMENT FRONT END MODULE OF SEMICONDU...

WAFER POLISHING SYSTEM, LOADING METHOD AND USING METHOD THEREOF

STOCKER DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

FAN FILTER UNIT, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME,...

ARTICLE TRANSPORT FACILITY

CARRIAGE DRIVING SYSTEM AND METHOD

APPARATUS AND METHOD FOR HANDLING CARRIER RINGS MOUNTED WITH ELECTR...

AUTOMATED MATERIAL HANDLING SYSTEM

WAFER CONTAINER

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND VIS...

MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS

AUTOMATION SYSTEM FOR A REMOVABLE REACTION UNIT OF AN EPITAXIAL REA...

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

SOLAR CELL FABRICATION

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR STORAGE APPARATUS WITH INTEGRATED SORTER

DIE BONDING APPARATUS AND DIE BONDING METHOD USING THE SAME

Methods and Systems for Improving Transfer Efficiency of an Automat...

PROCESS KIT ENCLOSURE SYSTEM

SEMICONDUCTOR PACKAGE CUTTING SYSTEM AND METHOD

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CARRIER DETECTION USING CONTACTLESS COMMUNICATION

DEVICE FOR PACKAGING WAFER CASSETTES

AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS