Continuous loading and unloading into and out of a processing chamber

Industry

CPC
H01L21/6776

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6776Continuous loading and unloading into and out of a processing chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,961,744
- Issue date Apr 16, 2024
- SCREEN Holdings Co., Ltd.
- Eiji Fukatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated inspection tool
- Patent number 11,961,770
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Han Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-operation tool for photovoltaic cell processing
- Patent number 11,955,577
- Issue date Apr 9, 2024
- Maxeon Solar Pte. Ltd.
- Nathan Phillips Beckett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,948,823
- Issue date Apr 2, 2024
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resin applying machine
- Patent number 11,942,346
- Issue date Mar 26, 2024
- Disco Corporation
- Yoshikuni Migiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pad carrier for horizontal pre-clean module
- Patent number 11,942,319
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Edward Golubovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system
- Patent number 11,942,347
- Issue date Mar 26, 2024
- Murata Machinery, Ltd.
- Eiji Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning machine and cleaning method
- Patent number 11,935,737
- Issue date Mar 19, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Ning Xi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,770
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing arrangement and method for adjusting gas flow
- Patent number 11,923,225
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer robot for reduced footprint platform architecture
- Patent number 11,908,714
- Issue date Feb 20, 2024
- Lam Research Corporation
- Richard H. Gould
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tool auto-teach method and apparatus
- Patent number 11,908,721
- Issue date Feb 20, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storing container
- Patent number 11,887,875
- Issue date Jan 30, 2024
- Miraial Co., Ltd.
- Yuya Narita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system including shelf moving module
- Patent number 11,881,422
- Issue date Jan 23, 2024
- Samsung Electronics Co., Ltd.
- Hujong Lee
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,869,789
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,869,791
- Issue date Jan 9, 2024
- Ulvac, Inc.
- Dai Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport apparatus, semiconductor manufacturing apparatus, and tra...
- Patent number 11,850,743
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Interface tool
- Patent number 11,854,851
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating transport system
- Patent number 11,854,844
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Yuan Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,854,850
- Issue date Dec 26, 2023
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation method for bifacial perc solar cell
- Patent number 11,848,395
- Issue date Dec 19, 2023
- GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY CO., LTD.
- Jiebin Fang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of storing workpiece using workpiece storage system
- Patent number 11,848,221
- Issue date Dec 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Chi Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Seal mechanisms for load ports
- Patent number 11,842,913
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Douglas B. Baumgarten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, substrate processing system, transfer method and s...
- Patent number 11,837,487
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Takeshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling robot with radial gas curtain and/or interior volume...
- Patent number 11,833,662
- Issue date Dec 5, 2023
- Lam Research Corporation
- Charles N. Ditmore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage apparatus, transporting device and transporting method for...
- Patent number 11,830,750
- Issue date Nov 28, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Tianzhu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer stocker
- Patent number 11,823,934
- Issue date Nov 21, 2023
- Sinfonia Technology Co., Ltd.
- Yasushi Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber
- Patent number 11,823,923
- Issue date Nov 21, 2023
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
LIGHT-EMITTING ELEMENT TRANSFER SYSTEM
- Publication number 20240136208
- Publication date Apr 25, 2024
- SAMSUNG DISPLAY CO., LTD.
- Jeong Won HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method of Making a Substrate with Improved...
- Publication number 20240136217
- Publication date Apr 25, 2024
- UTAC Headquarters Pte. Ltd.
- Hua Hong Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HANDLING APPARATUS AND METHOD OF HANDLING SUBSTRATE
- Publication number 20240120227
- Publication date Apr 11, 2024
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Haruhiko TAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING DEVICE
- Publication number 20240112929
- Publication date Apr 4, 2024
- YAMAHA HATSUDOKI KABUSHIKI KAISHA
- Yoshikuni SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE TOOL
- Publication number 20240087935
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD
- Publication number 20240087936
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240079256
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE
- Publication number 20240063042
- Publication date Feb 22, 2024
- SEMES CO., LTD.
- Kiwon HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
- Publication number 20240047254
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER
- Publication number 20240038554
- Publication date Feb 1, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
OPTICALLY ACTIVATED OBJECT MASS TRANSFER USING MULTIPLE OPTICAL ENE...
- Publication number 20240038574
- Publication date Feb 1, 2024
- Palo Alto Research Center Incorporated
- Christopher L. Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PAYLOAD TRANSPORTATION SYSTEM
- Publication number 20240021456
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MONITORING TOOL
- Publication number 20240021453
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER INSPECTION SYSTEM
- Publication number 20240019487
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM
- Publication number 20240014061
- Publication date Jan 11, 2024
- KIOXIA Corporation
- Tatsuro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE SYSTEM
- Publication number 20240014062
- Publication date Jan 11, 2024
- KIOXIA Corporation
- Tatsuro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE AND TRANSPORT SYSTEM AND METHOD OF OPERATION OF WAFER...
- Publication number 20240006215
- Publication date Jan 4, 2024
- SAMSUNG ELECTRONICS CO., LTD.
- Sang Hyuk PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT CARRIER FOR SEMICONDUCTOR MANUFACTURING AND COMPONENT TRA...
- Publication number 20230411196
- Publication date Dec 21, 2023
- SEMES CO., LTD.
- Jae Won SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20230395405
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Methods and Systems for Improving Transfer Efficiency of an Automat...
- Publication number 20230369088
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HANDLING DEVICE AND PROCESSING CHAMBER
- Publication number 20230364802
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- You-Hua CHOU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Contactless Conveyor Device
- Publication number 20230360943
- Publication date Nov 9, 2023
- ROBERT BOSCH GmbH
- Stefan Teusch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SUBST...
- Publication number 20230352330
- Publication date Nov 2, 2023
- SAMSUNG DISPLAY CO., LTD.
- Heungyeol NA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTIPLE TRANSPORT CARRIER DOCKING DEVICE
- Publication number 20230335424
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE CARRYING DEVICE
- Publication number 20230317489
- Publication date Oct 5, 2023
- DLY TECHNOLOGIES INC.
- Shih Feng PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307277
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Takahiro YAMAGUCHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
BONDING APPARATUS AND A BONDING DEVICE THEREOF
- Publication number 20230298913
- Publication date Sep 21, 2023
- ALL RING TECH CO., LTD.
- Chun-Hung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20230282458
- Publication date Sep 7, 2023
- VIEW, INC.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER IRRADIATION APPARATUS
- Publication number 20230274964
- Publication date Aug 31, 2023
- JSW Aktina System Co., Ltd.
- Yuki SUZUKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE, WAFER CONVEYANCE SYSTEM, WAFER...
- Publication number 20230274963
- Publication date Aug 31, 2023
- KIOXIA Corporation
- Teppei KITA
- H01 - BASIC ELECTRIC ELEMENTS

Continuous loading and unloading into and out of a processing chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Automated inspection tool

Multi-operation tool for photovoltaic cell processing

Substrate treating apparatus

Resin applying machine

Pad carrier for horizontal pre-clean module

Storage system

Cleaning machine and cleaning method

Modular mainframe layout for supporting multiple semiconductor proc...

Processing arrangement and method for adjusting gas flow

Transfer robot for reduced footprint platform architecture

Tool auto-teach method and apparatus

Substrate storing container

Storage system including shelf moving module

Substrate processing apparatus and substrate processing method

Vacuum processing apparatus

Transport apparatus, semiconductor manufacturing apparatus, and tra...

Interface tool

Method of operating transport system

Substrate processing apparatus, method of manufacturing semiconduct...

Preparation method for bifacial perc solar cell

Method of storing workpiece using workpiece storage system

Seal mechanisms for load ports

Transfer device, substrate processing system, transfer method and s...

Wafer handling robot with radial gas curtain and/or interior volume...

Reticle transportation container

Storage apparatus, transporting device and transporting method for...

Wafer stocker

Indexable side storage pod apparatus, heated side storage pod appar...

Transfer chamber

Patents Applicationslast 30 patents

LIGHT-EMITTING ELEMENT TRANSFER SYSTEM

Semiconductor Device and Method of Making a Substrate with Improved...

SUBSTRATE HANDLING APPARATUS AND METHOD OF HANDLING SUBSTRATE

PROCESSING DEVICE

INTERFACE TOOL

SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER DEVICE

SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE

TRANSFER CHAMBER

OPTICALLY ACTIVATED OBJECT MASS TRANSFER USING MULTIPLE OPTICAL ENE...

PAYLOAD TRANSPORTATION SYSTEM

METHOD OF MONITORING TOOL

WAFER INSPECTION SYSTEM

CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM

STORAGE SYSTEM

WAFER STORAGE AND TRANSPORT SYSTEM AND METHOD OF OPERATION OF WAFER...

COMPONENT CARRIER FOR SEMICONDUCTOR MANUFACTURING AND COMPONENT TRA...

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

Methods and Systems for Improving Transfer Efficiency of an Automat...

SUBSTRATE HANDLING DEVICE AND PROCESSING CHAMBER

Contactless Conveyor Device

SYSTEM FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SUBST...

MULTIPLE TRANSPORT CARRIER DOCKING DEVICE

ADJUSTABLE CARRYING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

BONDING APPARATUS AND A BONDING DEVICE THEREOF

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

LASER IRRADIATION APPARATUS

SEMICONDUCTOR MANUFACTURING DEVICE, WAFER CONVEYANCE SYSTEM, WAFER...