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CPC
H01J37/263

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/263Contrast, resolution or power of penetration

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 12,165,834
- Issue date Dec 10, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Observation method by means of scanning transmission electron micro...
- Patent number 12,154,758
- Issue date Nov 26, 2024
- The University of Tokyo
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multiple particle beam system while altering...
- Patent number 12,057,290
- Issue date Aug 6, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
- Patent number 11,908,657
- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspection
- Patent number 11,875,966
- Issue date Jan 16, 2024
- ASML Netherlands B.V.
- Bernardo Kastrup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-dependent defect inspection apparatus
- Patent number 11,651,935
- Issue date May 16, 2023
- ASML Netherlands B.V.
- Chih-Yu Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 11,640,896
- Issue date May 2, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a particle beam microscope
- Patent number 11,621,145
- Issue date Apr 4, 2023
- Carl Zeiss Microscopy GmbH
- Björn Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and sample observation method using the same
- Patent number 11,551,907
- Issue date Jan 10, 2023
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device
- Patent number 11,501,950
- Issue date Nov 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Yohei Minekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjusting mechanism for adjusting deformation of panel and electron...
- Patent number 11,195,688
- Issue date Dec 7, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-based phase plate image contrast manipulation
- Patent number 11,101,101
- Issue date Aug 24, 2021
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspection
- Patent number 11,094,502
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Bernardo Kastrup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-dependent defect inspection apparatus
- Patent number 11,056,311
- Issue date Jul 6, 2021
- ASML Netherlands B.V.
- Chih-Yu Jen
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus, and method of adjusting charged pa...
- Patent number 10,923,315
- Issue date Feb 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Masaki Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
- Patent number 10,910,194
- Issue date Feb 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reference sample with inclined support base, method for evaluating...
- Patent number 10,847,342
- Issue date Nov 24, 2020
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki Kaneko
- G01 - MEASURING TESTING
Information Patent Grant
Reference sample with inclined support base, method for evaluating...
- Patent number 10,699,873
- Issue date Jun 30, 2020
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image generation method
- Patent number 10,614,999
- Issue date Apr 7, 2020
- TASMIT, INC.
- Shinichi Nakazawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron spectroscopy system
- Patent number 10,607,807
- Issue date Mar 31, 2020
- Board of Trustees of Michigan State University
- Chong-Yu Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
- Patent number 10,573,489
- Issue date Feb 25, 2020
- Hitachi High-Technologies Corporation
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,546,715
- Issue date Jan 28, 2020
- Hitachi High-Technologies Corporation
- Shahedul Hoque
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and imaging method
- Patent number 10,535,497
- Issue date Jan 14, 2020
- Hitachi High-Technologies Corporation
- Hirokazu Tamaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Secondary particle detection system of scanning electron microscope
- Patent number 10,515,778
- Issue date Dec 24, 2019
- NGR Inc.
- Sumio Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and phase plate
- Patent number 10,504,695
- Issue date Dec 10, 2019
- Hitachi High-Technologies Corporation
- Arthur Malcolm Blackburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method of use thereof
- Patent number 10,504,694
- Issue date Dec 10, 2019
- TESCAN Brno, s.r.o.
- Jaroslav Jiruse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for manipulating particle beam
- Patent number 10,497,537
- Issue date Dec 3, 2019
- Ramot At Tel-Aviv University Ltd.
- Roy Shiloh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post column filter with enhanced energy range
- Patent number 10,431,420
- Issue date Oct 1, 2019
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of inspecting substrate and method of fabricating...
- Patent number 10,393,672
- Issue date Aug 27, 2019
- Samsung Electronics Co., Ltd.
- Jeongho Ahn
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20240347316
- Publication date Oct 17, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION
- Publication number 20240186107
- Publication date Jun 6, 2024
- Bernardo KASTRUP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
- Publication number 20240153732
- Publication date May 9, 2024
- ASML NETHERLANDS B.V.
- Datong ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU BIASING AND FREEZING OF CYROGENIC ELECTRON MICROSCOPY SAMPLES
- Publication number 20240060864
- Publication date Feb 22, 2024
- ALLIANCE FOR SUSTAINABLE ENERGY, LLC
- Nikita Susan Dutta FITZCHARLES
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEMS AND METHODS FOR HYBRID ENHANCEMENT OF SCANNING ELECTRON MIC...
- Publication number 20230260085
- Publication date Aug 17, 2023
- FEI Company
- Umesh ADIGA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING METHOD AND APPARATUS FOR DIRECT ELECTRON DETECTION CAMERAS...
- Publication number 20230260743
- Publication date Aug 17, 2023
- INSTITUTE OF BIOPHYSICS,CHINESE ACADEMY OF SCIENCES
- Xinzheng ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
- Publication number 20230253178
- Publication date Aug 10, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE ANALYSIS SYSTEM
- Publication number 20230223232
- Publication date Jul 13, 2023
- Riken
- Daisuke SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Processing of Microscopy Images
- Publication number 20230179885
- Publication date Jun 8, 2023
- FEI Company
- Jeroen KEIZER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Image Acquisition Method
- Publication number 20230127255
- Publication date Apr 27, 2023
- JEOL Ltd.
- Kazunori Somehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR OBSERVING PERMEATION AND DIFFUSION PATH OF OBSERVATION T...
- Publication number 20230127466
- Publication date Apr 27, 2023
- National Institute for Materials Science
- Akiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...
- Publication number 20230103943
- Publication date Apr 6, 2023
- Xiamen Chip-Nova Technology Co., Ltd.
- Honggang Liao
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT SYSTEM AND METHOD OF SETTING PARAMETER OF CHARGED PARTI...
- Publication number 20230059414
- Publication date Feb 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Hiroshi OINUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Analysis System
- Publication number 20230055155
- Publication date Feb 23, 2023
- Hitachi High-Tech Corporation
- Tsunenori NOMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICRO...
- Publication number 20230040811
- Publication date Feb 9, 2023
- THE UNIVERSITY OF TOKYO
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING A SAMPLE BY MEANS OF MULTIPLE C...
- Publication number 20230020967
- Publication date Jan 19, 2023
- DELMIC IP B.V.
- Andries Pieter Johan EFFTING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...
- Publication number 20230012946
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
- Publication number 20230005704
- Publication date Jan 5, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Height Metrology Using an E-Beam System
- Publication number 20220392742
- Publication date Dec 8, 2022
- IMEC vzw
- Gian Francesco Lorusso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
- Publication number 20220367145
- Publication date Nov 17, 2022
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY
- Publication number 20220238299
- Publication date Jul 28, 2022
- ELDICO SCIENTIFIC AG
- Gunther STEINFELD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE USING ARTIFICIAL INTELLIGENCE TRAINING DATA
- Publication number 20220199360
- Publication date Jun 23, 2022
- COXEM CO., LTD.
- Junhee LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
- Publication number 20220139665
- Publication date May 5, 2022
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIME-DEPENDENT DEFECT INSPECTION APPARATUS
- Publication number 20220005666
- Publication date Jan 6, 2022
- ASML NETHERLANDS B.V.
- Chih-Yu JEN
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20210391140
- Publication date Dec 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Yohei MINEKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION
- Publication number 20210375581
- Publication date Dec 2, 2021
- ASML NETHERLANDS B.V.
- Bernardo KASTRUP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD USING THE SAME
- Publication number 20210233741
- Publication date Jul 29, 2021
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Application
BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
- Publication number 20210204969
- Publication date Jul 8, 2021
- Covidien LP
- Ryan C. Artale
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ADJUSTING MECHANISM FOR ADJUSTING DEFORMATION OF PANEL AND ELECTRON...
- Publication number 20210159045
- Publication date May 27, 2021
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Lei JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
- Publication number 20210065335
- Publication date Mar 4, 2021
- Covidien LP
- RYAN C. ARTALE
- G06 - COMPUTING CALCULATING COUNTING

Contrast, resolution or power of penetration

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for Schottky TFE inspection

Observation method by means of scanning transmission electron micro...

Particle beam system and the use thereof for flexibly setting the c...

Method for operating a multiple particle beam system while altering...

Scanning electron microscope device and electron beam inspection ap...

Method and apparatus for inspection

Time-dependent defect inspection apparatus

Method and apparatus for Schottky TFE inspection

Method for operating a particle beam microscope

Electron microscope and sample observation method using the same

Charged particle beam device

Adjusting mechanism for adjusting deformation of panel and electron...

Laser-based phase plate image contrast manipulation

Method and apparatus for inspection

Time-dependent defect inspection apparatus

Charged particle beam apparatus, and method of adjusting charged pa...

Charged particle beam device and optical-axis adjusting method thereof

Reference sample with inclined support base, method for evaluating...

Reference sample with inclined support base, method for evaluating...

Image generation method

Electron spectroscopy system

Charged particle beam device and optical-axis adjusting method thereof

Charged particle beam device

Electron microscope and imaging method

Secondary particle detection system of scanning electron microscope

Charged particle beam device and phase plate

Scanning electron microscope and method of use thereof

Method and device for manipulating particle beam

Post column filter with enhanced energy range

System and method of inspecting substrate and method of fabricating...

Patents Applicationslast 30 patents

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

METHOD AND APPARATUS FOR INSPECTION

SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...

IN SITU BIASING AND FREEZING OF CYROGENIC ELECTRON MICROSCOPY SAMPLES

SYSTEMS AND METHODS FOR HYBRID ENHANCEMENT OF SCANNING ELECTRON MIC...

IMAGING METHOD AND APPARATUS FOR DIRECT ELECTRON DETECTION CAMERAS...

METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

ELECTRON MICROSCOPE ANALYSIS SYSTEM

Methods and Systems for Processing of Microscopy Images

Electron Microscope and Image Acquisition Method

DEVICE FOR OBSERVING PERMEATION AND DIFFUSION PATH OF OBSERVATION T...

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...

MEASUREMENT SYSTEM AND METHOD OF SETTING PARAMETER OF CHARGED PARTI...

Semiconductor Analysis System

OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICRO...

METHOD AND APPARATUS FOR INSPECTING A SAMPLE BY MEANS OF MULTIPLE C...

SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...

SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...

Pattern Height Metrology Using an E-Beam System

METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY

ELECTRON MICROSCOPE USING ARTIFICIAL INTELLIGENCE TRAINING DATA

PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...

TIME-DEPENDENT DEFECT INSPECTION APPARATUS

Charged Particle Beam Device

METHOD AND APPARATUS FOR INSPECTION

ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD USING THE SAME

BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS

ADJUSTING MECHANISM FOR ADJUSTING DEFORMATION OF PANEL AND ELECTRON...

BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS