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H01J37/263
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/263
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for Schottky TFE inspection
Patent number
12,165,834
Issue date
Dec 10, 2024
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Observation method by means of scanning transmission electron micro...
Patent number
12,154,758
Issue date
Nov 26, 2024
The University of Tokyo
Naoya Shibata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
Patent number
12,119,204
Issue date
Oct 15, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a multiple particle beam system while altering...
Patent number
12,057,290
Issue date
Aug 6, 2024
Carl Zeiss MultiSEM GmbH
Hans Fritz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspection
Patent number
11,875,966
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Bernardo Kastrup
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Time-dependent defect inspection apparatus
Patent number
11,651,935
Issue date
May 16, 2023
ASML Netherlands B.V.
Chih-Yu Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for Schottky TFE inspection
Patent number
11,640,896
Issue date
May 2, 2023
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a particle beam microscope
Patent number
11,621,145
Issue date
Apr 4, 2023
Carl Zeiss Microscopy GmbH
Björn Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope and sample observation method using the same
Patent number
11,551,907
Issue date
Jan 10, 2023
Riken
Ken Harada
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam device
Patent number
11,501,950
Issue date
Nov 15, 2022
HITACHI HIGH-TECH CORPORATION
Yohei Minekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjusting mechanism for adjusting deformation of panel and electron...
Patent number
11,195,688
Issue date
Dec 7, 2021
Zhongke Jingyuan Electron Limited, Beijing (CN)
Lei Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser-based phase plate image contrast manipulation
Patent number
11,101,101
Issue date
Aug 24, 2021
FEI Company
Bart Buijsse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspection
Patent number
11,094,502
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Bernardo Kastrup
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Time-dependent defect inspection apparatus
Patent number
11,056,311
Issue date
Jul 6, 2021
ASML Netherlands B.V.
Chih-Yu Jen
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus, and method of adjusting charged pa...
Patent number
10,923,315
Issue date
Feb 16, 2021
HITACHI HIGH-TECH CORPORATION
Masaki Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
Patent number
10,910,194
Issue date
Feb 2, 2021
HITACHI HIGH-TECH CORPORATION
Shuhei Yabu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reference sample with inclined support base, method for evaluating...
Patent number
10,847,342
Issue date
Nov 24, 2020
KWANSEI GAKUIN EDUCATIONAL FOUNDATION
Tadaaki Kaneko
G01 - MEASURING TESTING
Information
Patent Grant
Reference sample with inclined support base, method for evaluating...
Patent number
10,699,873
Issue date
Jun 30, 2020
Kwansei Gakuin Educational Foundation
Tadaaki Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image generation method
Patent number
10,614,999
Issue date
Apr 7, 2020
TASMIT, INC.
Shinichi Nakazawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron spectroscopy system
Patent number
10,607,807
Issue date
Mar 31, 2020
Board of Trustees of Michigan State University
Chong-Yu Ruan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
Patent number
10,573,489
Issue date
Feb 25, 2020
Hitachi High-Technologies Corporation
Shuhei Yabu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
10,546,715
Issue date
Jan 28, 2020
Hitachi High-Technologies Corporation
Shahedul Hoque
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope and imaging method
Patent number
10,535,497
Issue date
Jan 14, 2020
Hitachi High-Technologies Corporation
Hirokazu Tamaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Secondary particle detection system of scanning electron microscope
Patent number
10,515,778
Issue date
Dec 24, 2019
NGR Inc.
Sumio Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and phase plate
Patent number
10,504,695
Issue date
Dec 10, 2019
Hitachi High-Technologies Corporation
Arthur Malcolm Blackburn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope and method of use thereof
Patent number
10,504,694
Issue date
Dec 10, 2019
TESCAN Brno, s.r.o.
Jaroslav Jiruse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for manipulating particle beam
Patent number
10,497,537
Issue date
Dec 3, 2019
Ramot At Tel-Aviv University Ltd.
Roy Shiloh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Post column filter with enhanced energy range
Patent number
10,431,420
Issue date
Oct 1, 2019
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of inspecting substrate and method of fabricating...
Patent number
10,393,672
Issue date
Aug 27, 2019
Samsung Electronics Co., Ltd.
Jeongho Ahn
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
Publication number
20240347316
Publication date
Oct 17, 2024
Carl Zeiss MultiSEM GmbH
Hans Fritz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION
Publication number
20240186107
Publication date
Jun 6, 2024
Bernardo KASTRUP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
Publication number
20240153732
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Datong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN SITU BIASING AND FREEZING OF CYROGENIC ELECTRON MICROSCOPY SAMPLES
Publication number
20240060864
Publication date
Feb 22, 2024
ALLIANCE FOR SUSTAINABLE ENERGY, LLC
Nikita Susan Dutta FITZCHARLES
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SYSTEMS AND METHODS FOR HYBRID ENHANCEMENT OF SCANNING ELECTRON MIC...
Publication number
20230260085
Publication date
Aug 17, 2023
FEI Company
Umesh ADIGA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMAGING METHOD AND APPARATUS FOR DIRECT ELECTRON DETECTION CAMERAS...
Publication number
20230260743
Publication date
Aug 17, 2023
INSTITUTE OF BIOPHYSICS,CHINESE ACADEMY OF SCIENCES
Xinzheng ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
Publication number
20230253178
Publication date
Aug 10, 2023
NUFLARE TECHNOLOGY, INC.
Victor KATSAP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE ANALYSIS SYSTEM
Publication number
20230223232
Publication date
Jul 13, 2023
Riken
Daisuke SHINDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Processing of Microscopy Images
Publication number
20230179885
Publication date
Jun 8, 2023
FEI Company
Jeroen KEIZER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope and Image Acquisition Method
Publication number
20230127255
Publication date
Apr 27, 2023
JEOL Ltd.
Kazunori Somehara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR OBSERVING PERMEATION AND DIFFUSION PATH OF OBSERVATION T...
Publication number
20230127466
Publication date
Apr 27, 2023
National Institute for Materials Science
Akiko Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...
Publication number
20230103943
Publication date
Apr 6, 2023
Xiamen Chip-Nova Technology Co., Ltd.
Honggang Liao
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT SYSTEM AND METHOD OF SETTING PARAMETER OF CHARGED PARTI...
Publication number
20230059414
Publication date
Feb 23, 2023
HITACHI HIGH-TECH CORPORATION
Hiroshi OINUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Analysis System
Publication number
20230055155
Publication date
Feb 23, 2023
Hitachi High-Tech Corporation
Tsunenori NOMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICRO...
Publication number
20230040811
Publication date
Feb 9, 2023
THE UNIVERSITY OF TOKYO
Naoya Shibata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTING A SAMPLE BY MEANS OF MULTIPLE C...
Publication number
20230020967
Publication date
Jan 19, 2023
DELMIC IP B.V.
Andries Pieter Johan EFFTING
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...
Publication number
20230012946
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Wei FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
Publication number
20230005704
Publication date
Jan 5, 2023
Zhongke Jingyuan Electron Limited, Beijing (CN)
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pattern Height Metrology Using an E-Beam System
Publication number
20220392742
Publication date
Dec 8, 2022
IMEC vzw
Gian Francesco Lorusso
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
Publication number
20220367145
Publication date
Nov 17, 2022
NUFLARE TECHNOLOGY, INC.
Victor KATSAP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY
Publication number
20220238299
Publication date
Jul 28, 2022
ELDICO SCIENTIFIC AG
Gunther STEINFELD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE USING ARTIFICIAL INTELLIGENCE TRAINING DATA
Publication number
20220199360
Publication date
Jun 23, 2022
COXEM CO., LTD.
Junhee LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PARTICLE BEAM SYSTEM AND THE USE THEREOF FOR FLEXIBLY SETTING THE C...
Publication number
20220139665
Publication date
May 5, 2022
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIME-DEPENDENT DEFECT INSPECTION APPARATUS
Publication number
20220005666
Publication date
Jan 6, 2022
ASML NETHERLANDS B.V.
Chih-Yu JEN
G01 - MEASURING TESTING
Information
Patent Application
Charged Particle Beam Device
Publication number
20210391140
Publication date
Dec 16, 2021
HITACHI HIGH-TECH CORPORATION
Yohei MINEKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR INSPECTION
Publication number
20210375581
Publication date
Dec 2, 2021
ASML NETHERLANDS B.V.
Bernardo KASTRUP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD USING THE SAME
Publication number
20210233741
Publication date
Jul 29, 2021
Riken
Ken Harada
G01 - MEASURING TESTING
Information
Patent Application
BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
Publication number
20210204969
Publication date
Jul 8, 2021
Covidien LP
Ryan C. Artale
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
ADJUSTING MECHANISM FOR ADJUSTING DEFORMATION OF PANEL AND ELECTRON...
Publication number
20210159045
Publication date
May 27, 2021
Zhongke Jingyuan Electron Limited, Beijing (CN)
Lei JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
Publication number
20210065335
Publication date
Mar 4, 2021
Covidien LP
RYAN C. ARTALE
G06 - COMPUTING CALCULATING COUNTING