Controlling or regulating the coating process

Industry

CPC
C23C16/52

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/52Controlling or regulating the coating process

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 12,241,156
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming structures including transition metal layers
- Patent number 12,241,158
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system including temperature controller
- Patent number 12,237,183
- Issue date Feb 25, 2025
- Samsung Electronics Co., Ltd.
- Kyoungsik Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon nanotube preparation system
- Patent number 12,234,551
- Issue date Feb 25, 2025
- SUZHOU JERNANO CARBON CO., LTD.
- Zhenzhong Yong
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for operating a coating installation for producing layer sys...
- Patent number 12,234,547
- Issue date Feb 25, 2025
- Rodenstock GmbH
- Rüdiger Scherschlicht
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and methods for monitoring and c...
- Patent number 12,234,552
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wireless communication system, wireless communication method, contr...
- Patent number 12,238,663
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Tomoya Bessho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 12,228,534
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,230,474
- Issue date Feb 18, 2025
- Kokusai Electric Corporation
- Takeshi Yasui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Level monitoring and active adjustment of a substrate support assembly
- Patent number 12,227,847
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- James V. Santiago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitoring thin film deposition
- Patent number 12,227,846
- Issue date Feb 18, 2025
- Inficon, Inc.
- Mohamed Buhary Rinzan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate type sensor and method of measuring the impact point and...
- Patent number 12,224,189
- Issue date Feb 11, 2025
- Semes Co., Ltd.
- Young Seop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for stabilizing vanadium compounds
- Patent number 12,221,357
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of forming a semiconductor layer
- Patent number 12,224,175
- Issue date Feb 11, 2025
- Infineon Technologies AG
- Olaf Fiedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and method for oriented deposition
- Patent number 12,215,418
- Issue date Feb 4, 2025
- Canatu Finland Oy
- Ilkka Varjos
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Pedestal thermal profile tuning using multiple heated zones and the...
- Patent number 12,215,420
- Issue date Feb 4, 2025
- Lam Research Corporation
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 12,215,417
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Satoshi Toda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,217,959
- Issue date Feb 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing gap filling fluid
- Patent number 12,211,742
- Issue date Jan 28, 2025
- ASM IP Holding B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device capable of controlling...
- Patent number 12,211,689
- Issue date Jan 28, 2025
- Kokusai Electric Corporation
- Keigo Nishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Impedance measurement jig and method of controlling a substrate-pro...
- Patent number 12,210,045
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control of a multi-zone pedestal
- Patent number 12,209,312
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,203,169
- Issue date Jan 21, 2025
- Kokusai Electric Corporation
- Akira Horii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pressure-induced temperature modification during atomic scale proce...
- Patent number 12,205,803
- Issue date Jan 21, 2025
- Kurt J. Lesker Company
- Gilbert Bruce Rayner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal deposition
- Patent number 12,203,168
- Issue date Jan 21, 2025
- Lam Research Corporation
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,203,167
- Issue date Jan 21, 2025
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for performing an in-situ etch of reaction ch...
- Patent number 12,203,166
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250066920
- Publication date Feb 27, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FAST SWITCHING GAS CIRCUITS AND PROCESSING CHAMBERS, AND RELATED ME...
- Publication number 20250066915
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Enle CHOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...
- Publication number 20250066921
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Ranjit Rohidas Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FILLING A GAP
- Publication number 20250066905
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- René Henricus Jozef Vervuurt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20250070741
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250067664
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INORGANIC SILYL AND POLYSILYL DERIVATIVES OF GROUP V ELEMENTS AND M...
- Publication number 20250066906
- Publication date Feb 27, 2025
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Feng LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20250066916
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Hiroki IRIUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METALS IN RECESSED FEATURES WITH THE USE OF HALOGEN-C...
- Publication number 20250069948
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- David Joseph MANDIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250069891
- Publication date Feb 27, 2025
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...
- Publication number 20250059645
- Publication date Feb 20, 2025
- Duck Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE
- Publication number 20250054767
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Qihao ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION SYSTEMS AND METHODS
- Publication number 20250051918
- Publication date Feb 13, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250051919
- Publication date Feb 13, 2025
- TES CO., LTD.
- Shin-Myoung KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250051920
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yudai FUKUSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER
- Publication number 20250051921
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Alon Ganany
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION SYSTEMS AND METHODS, AND NANOMATERIALS FORMED BY V...
- Publication number 20250051924
- Publication date Feb 13, 2025
- University of Maryland, College Park
- Liangbing HU
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHDOS AND SYSTEMS FOR FILLING A GAP
- Publication number 20250051925
- Publication date Feb 13, 2025
- ASM IP HOLDING B.V.
- Timothee Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...
- Publication number 20250051959
- Publication date Feb 13, 2025
- SUMCO CORPORATION
- Masayuki TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250051922
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Hisashi INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODEL-BASED SCHEDULING FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20250044775
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Raymond CHAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION OF NANOCRYSTALLINE DIAMO...
- Publication number 20250043413
- Publication date Feb 6, 2025
- Sze Chieh Yvonne Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
- Publication number 20250043415
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Yohei MATSUYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM
- Publication number 20250043419
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Jerome Innocent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFIGURABLE SOURCE
- Publication number 20250043417
- Publication date Feb 6, 2025
- ULTRA CLEAN HOLDINGS, INC
- Michael RAMACCIOTTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD Method and Apparatus
- Publication number 20250046604
- Publication date Feb 6, 2025
- SPTS TECHNOLOGIES LIMITED
- Giorgos ANTONIOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250043418
- Publication date Feb 6, 2025
- Kokusai Electric Corporation
- Kazuki NONOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION (ALD) WITH IMPROVED PARTICLE PREVENTION MEC...
- Publication number 20250043420
- Publication date Feb 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung Hsien Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250046658
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Hiroyuki KARASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling or regulating the coating process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Combination CVD/ALD method, source and pulse profile modification

Method for forming structures including transition metal layers

Substrate processing apparatus and ceiling heater

Semiconductor processing system including temperature controller

Carbon nanotube preparation system

Method for operating a coating installation for producing layer sys...

Semiconductor processing apparatus and methods for monitoring and c...

Wireless communication system, wireless communication method, contr...

Vapor accumulator for corrosive gases with purging

Capacitive sensor for monitoring gas concentration

Substrate processing apparatus, method of manufacturing semiconduct...

Level monitoring and active adjustment of a substrate support assembly

Monitoring thin film deposition

Substrate type sensor and method of measuring the impact point and...

Methods and apparatus for stabilizing vanadium compounds

Apparatus and method of forming a semiconductor layer

Apparatuses and method for oriented deposition

Pedestal thermal profile tuning using multiple heated zones and the...

Substrate processing method and substrate processing device

Method of manufacturing semiconductor device, substrate processing...

Methods for depositing gap filling fluid

Method of manufacturing semiconductor device capable of controlling...

Concentration control using a bubbler

Impedance measurement jig and method of controlling a substrate-pro...

Temperature control of a multi-zone pedestal

Substrate processing apparatus, method of processing substrate, met...

Pressure-induced temperature modification during atomic scale proce...

Metal deposition

Substrate processing apparatus and method of manufacturing semicond...

Apparatus and methods for performing an in-situ etch of reaction ch...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

FAST SWITCHING GAS CIRCUITS AND PROCESSING CHAMBERS, AND RELATED ME...

MULTI ZONE SPOT HEATING IN EPI

MULTIPLE-CHAMBER REACTOR FOR SELECTIVE DEPOSITION OF SILICON NITRID...

METHODS AND SYSTEMS FOR FILLING A GAP

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

DETERMINATION METHOD AND SUBSTRATE PROCESSING APPARATUS

INORGANIC SILYL AND POLYSILYL DERIVATIVES OF GROUP V ELEMENTS AND M...

PROCESSING APPARATUS AND PROCESSING METHOD

DEPOSITION OF METALS IN RECESSED FEATURES WITH THE USE OF HALOGEN-C...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING METAL OXI...

SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE

FILM DEPOSITION SYSTEMS AND METHODS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER

VAPOR DEPOSITION SYSTEMS AND METHODS, AND NANOMATERIALS FORMED BY V...

METHDOS AND SYSTEMS FOR FILLING A GAP

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...

TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS

MODEL-BASED SCHEDULING FOR SUBSTRATE PROCESSING SYSTEMS

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION OF NANOCRYSTALLINE DIAMO...

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM

CONFIGURABLE SOURCE

PECVD Method and Apparatus

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

ATOMIC LAYER DEPOSITION (ALD) WITH IMPROVED PARTICLE PREVENTION MEC...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS