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Controlling or regulating the coating process
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C23C16/52
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CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
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C23C16/52
Controlling or regulating the coating process
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Patents Grants
last 30 patents
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Patent Grant
Method of manufacturing semiconductor device capable of controlling...
Patent number
12,211,689
Issue date
Jan 28, 2025
Kokusai Electric Corporation
Keigo Nishida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing gap filling fluid
Patent number
12,211,742
Issue date
Jan 28, 2025
ASM IP Holding B.V.
Timothee Blanquart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Concentration control using a bubbler
Patent number
12,209,310
Issue date
Jan 28, 2025
Lam Research Corporation
Ramesh Chandrasekharan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Impedance measurement jig and method of controlling a substrate-pro...
Patent number
12,210,045
Issue date
Jan 28, 2025
Samsung Electronics Co., Ltd.
Byeongsang Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature control of a multi-zone pedestal
Patent number
12,209,312
Issue date
Jan 28, 2025
Lam Research Corporation
Ramesh Chandrasekharan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Substrate processing apparatus, method of processing substrate, met...
Patent number
12,203,169
Issue date
Jan 21, 2025
Kokusai Electric Corporation
Akira Horii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
12,203,167
Issue date
Jan 21, 2025
Kokusai Electric Corporation
Hidetoshi Mimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Metal deposition
Patent number
12,203,168
Issue date
Jan 21, 2025
Lam Research Corporation
Ravi Vellanki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Pressure-induced temperature modification during atomic scale proce...
Patent number
12,205,803
Issue date
Jan 21, 2025
Kurt J. Lesker Company
Gilbert Bruce Rayner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for performing an in-situ etch of reaction ch...
Patent number
12,203,166
Issue date
Jan 21, 2025
ASM IP Holding B.V.
Amit Mishra
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of cleaning, method of manufacturing semiconductor device, s...
Patent number
12,195,848
Issue date
Jan 14, 2025
Kokusai Electric Corporation
Kazuhiro Harada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas-phase reactor system including a gas detector
Patent number
12,195,855
Issue date
Jan 14, 2025
ASM IP Holding B.V.
SungBae Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, method of processing substrate, met...
Patent number
12,195,854
Issue date
Jan 14, 2025
Kokusai Electric Corporation
Teruo Yoshino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
12,195,853
Issue date
Jan 14, 2025
Kokusai Electric Corporation
Motonari Takebayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Thin-film-deposition equipment
Patent number
12,198,904
Issue date
Jan 14, 2025
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Thin layer deposition with plasma pulsing
Patent number
12,195,851
Issue date
Jan 14, 2025
Applied Materials, Inc.
Cong Trinh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
High pressure wafer processing systems and related methods
Patent number
12,198,951
Issue date
Jan 14, 2025
Applied Materials, Inc.
Qiwei Liang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Process and device for providing vapor
Patent number
12,188,122
Issue date
Jan 7, 2025
Singulus Technologies AG
Oliver Hohn
G05 - CONTROLLING REGULATING
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Patent Grant
Substrate processing apparatus, gas nozzle and method of manufactur...
Patent number
12,188,124
Issue date
Jan 7, 2025
Kokusai Electric Corporation
Yuji Takebayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of manufacturing semiconductor device
Patent number
12,188,149
Issue date
Jan 7, 2025
Sumitomo Electric Device Innovations, Inc.
Kohei Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer...
Patent number
12,188,152
Issue date
Jan 7, 2025
Resonac Corporation
Kensho Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,191,124
Issue date
Jan 7, 2025
Tokyo Electron Limited
Tatsuo Matsudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for ensuring planarity of a semiconductor wafer d...
Patent number
12,180,592
Issue date
Dec 31, 2024
EPILUVAC AB
Roger Nilsson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead for process tool
Patent number
12,180,589
Issue date
Dec 31, 2024
Tokyo Electron Limited
Anthony Dip
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ceramic matrix composite surface roughness
Patent number
12,180,591
Issue date
Dec 31, 2024
RTX Corporation
Ashley A. Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Coating method and film layer thereof, and coating fixture and appl...
Patent number
12,180,582
Issue date
Dec 31, 2024
Jiangsu Favored Nanotechnology Co., LTD
Jian Zong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming low resistivity titanium nitride thin film in ho...
Patent number
12,180,583
Issue date
Dec 31, 2024
The Regents of the University of California
Andrew Kummel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of depositing epitaxial material, structure formed using the...
Patent number
12,173,404
Issue date
Dec 24, 2024
ASM IP Holding B.V.
Amir Kajbafvala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus and processing method
Patent number
12,173,405
Issue date
Dec 24, 2024
Tokyo Electron Limited
Hiroki Iriuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
12,176,216
Issue date
Dec 24, 2024
Kokusai Electric Corporation
Motomu Degai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
Publication number
20250034709
Publication date
Jan 30, 2025
Semsysco GmbH
Andreas Gleissner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
Publication number
20250038024
Publication date
Jan 30, 2025
Applied Materials, Inc.
Douglas Brian Baumgarten
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...
Publication number
20250038003
Publication date
Jan 30, 2025
LAM RESEARCH CORPORATION
David Joseph Mandia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS
Publication number
20250033990
Publication date
Jan 30, 2025
ASM IP HOLDING B.V.
Charles Dezelah
C01 - INORGANIC CHEMISTRY
Information
Patent Application
SURFACE MODIFIED SUBSTRATES AND RELATED METHODS
Publication number
20250034700
Publication date
Jan 30, 2025
Entegris, Inc.
Carlo Waldfried
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
Publication number
20250034699
Publication date
Jan 30, 2025
TOKYO ELECTRON LIMITED
Takashi CHIBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Quantum Printing Nanostructures Within Carbon Nanopores
Publication number
20250034702
Publication date
Jan 30, 2025
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Information
Patent Application
Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...
Publication number
20250034706
Publication date
Jan 30, 2025
The Regents of the University of Michigan
Neil P. Dasgupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
Publication number
20250037991
Publication date
Jan 30, 2025
TOKYO ELECTRON LIMITED
Takashi CHIBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DETECTING METAL MASK
Publication number
20250034698
Publication date
Jan 30, 2025
Darwin Precisions Corporation
SEN LI CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE
Publication number
20250034711
Publication date
Jan 30, 2025
TOKYO ELECTRON LIMITED
Gaku WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROWTH CHAMBER SMART SEASONING
Publication number
20250038053
Publication date
Jan 30, 2025
Applied Materials, Inc.
Zhepeng Cong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARALLEL ATOMIC LAYER DEPOSITION OF TARGET ELEMENT INTERIORS
Publication number
20250027195
Publication date
Jan 23, 2025
Applied Materials, Inc.
Yogesh Tomar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION EQUIPMENT AND METHOD THEREFOR
Publication number
20250027203
Publication date
Jan 23, 2025
Advanced Micro-Fabrication Equipment Inc. China
Gerald Zheyao YIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20250022702
Publication date
Jan 16, 2025
Kokusai Electric Corporation
Masayuki ASAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS
Publication number
20250019832
Publication date
Jan 16, 2025
CVD Equipment Corporation
William S. Linss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR DEPOSITING A LAYER CONTAINING A GROUP FIVE EL...
Publication number
20250019823
Publication date
Jan 16, 2025
AIXTRON SE
Ilio MICCOLI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250022706
Publication date
Jan 16, 2025
TOKYO ELECTRON LIMITED
Tomohiko NIIZEKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUSES FOR FLOWABLE GAP-FILL
Publication number
20250011927
Publication date
Jan 9, 2025
ASM IP HOLDING B.V.
Shinya Yoshimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
Publication number
20250011930
Publication date
Jan 9, 2025
Kokusai Electric Corporation
Kentaro GOSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20250014891
Publication date
Jan 9, 2025
Kokusai Electric Corporation
Hiroyuki KOIDE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Method, Method of Manufacturing Semiconductor...
Publication number
20250014894
Publication date
Jan 9, 2025
Kokusai Electric Corporation
Hiroki HATTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS
Publication number
20250014904
Publication date
Jan 9, 2025
LAM RESEARCH CORPORATION
Kashish Sharma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
Publication number
20250011918
Publication date
Jan 9, 2025
Seoul National University R&DB Foundation
Gyu Chul Yi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...
Publication number
20250011933
Publication date
Jan 9, 2025
TORAY ENGINEERING CO., LTD.
Naoto SUGANUMA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
ALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
Publication number
20250010331
Publication date
Jan 9, 2025
VERSUM MATERIALS US, LLC
MATTHEW R. MACDONALD
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
Publication number
20250011929
Publication date
Jan 9, 2025
Kokusai Electric Corporation
Arito OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20250011926
Publication date
Jan 9, 2025
Kokusai Electric Corporation
Arito OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20250006493
Publication date
Jan 2, 2025
Kokusai Electric Corporation
Arito OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MATERIAL LAYER DEPOSITION METHODS, SEMICONDUCTOR PROCESSING SYSTEMS...
Publication number
20250003062
Publication date
Jan 2, 2025
ASM IP HOLDING B.V.
Shujin Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...