Controlling or regulating the coating process

Industry

CPC
C23C16/52

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/52Controlling or regulating the coating process

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Station-to-station control of backside bow compensation deposition
- Patent number 12,272,608
- Issue date Apr 8, 2025
- Lam Research Corporation
- Yanhui Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for monitoring semiconductor processes
- Patent number 12,266,552
- Issue date Apr 1, 2025
- Inficon, Inc.
- Matan Lapidot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for adjusting the gap between a wafer and a top p...
- Patent number 12,266,579
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Chan Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and mechanisms for adjusting film deposition parameters dur...
- Patent number 12,265,379
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,266,522
- Issue date Apr 1, 2025
- Kokusai Electric Corporation
- Kazuyuki Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon precursor compounds and method for forming silicon-containi...
- Patent number 12,264,392
- Issue date Apr 1, 2025
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate inspection system and a method of use thereof
- Patent number 12,258,665
- Issue date Mar 25, 2025
- JNK TECH
- Youngjin Choi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for revitalizing plasma processing tools
- Patent number 12,261,026
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Hsing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition for uniform tungsten growth
- Patent number 12,252,783
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pin-Wen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical devices
- Patent number 12,252,789
- Issue date Mar 18, 2025
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing semiconductor device
- Patent number 12,252,791
- Issue date Mar 18, 2025
- Denso Corporation
- Hiroaki Fujibayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ PECVD cap layer
- Patent number 12,252,782
- Issue date Mar 18, 2025
- Lam Research Corporation
- Jeremy David Fields
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for heating substrate and method thereof
- Patent number 12,256,471
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Takahisa Mase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming thin film using surface protection material
- Patent number 12,247,289
- Issue date Mar 11, 2025
- EGTM CO., LTD.
- Geun Su Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow control method using plasma system
- Patent number 12,247,290
- Issue date Mar 11, 2025
- Samsung Electronics Co., Ltd.
- Suncheul Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater assembly including cooling apparatus and method of using same
- Patent number 12,247,286
- Issue date Mar 11, 2025
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 12,241,156
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming structures including transition metal layers
- Patent number 12,241,158
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system including temperature controller
- Patent number 12,237,183
- Issue date Feb 25, 2025
- Samsung Electronics Co., Ltd.
- Kyoungsik Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon nanotube preparation system
- Patent number 12,234,551
- Issue date Feb 25, 2025
- SUZHOU JERNANO CARBON CO., LTD.
- Zhenzhong Yong
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for operating a coating installation for producing layer sys...
- Patent number 12,234,547
- Issue date Feb 25, 2025
- Rodenstock GmbH
- Rüdiger Scherschlicht
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and methods for monitoring and c...
- Patent number 12,234,552
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wireless communication system, wireless communication method, contr...
- Patent number 12,238,663
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Tomoya Bessho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for monitoring gas concentration
- Patent number 12,228,534
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Xiaopu Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Level monitoring and active adjustment of a substrate support assembly
- Patent number 12,227,847
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- James V. Santiago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,230,474
- Issue date Feb 18, 2025
- Kokusai Electric Corporation
- Takeshi Yasui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...
- Publication number 20250118549
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20250118550
- Publication date Apr 10, 2025
- TOKYO ELECTRON LIMITED
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO IMPROVE WAFER EDGE UNIFORMITY
- Publication number 20250118539
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, METHOD OF MANUFACT...
- Publication number 20250115993
- Publication date Apr 10, 2025
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL DEPOSITION
- Publication number 20250115998
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC EPITAXIAL WAFER AND METHOD OF MANUFACTURING SiC EPITAXIAL WAFER
- Publication number 20250109526
- Publication date Apr 3, 2025
- Resonac Corporation
- Kensho TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM GROWTH MODULATION USING WAFER BOW
- Publication number 20250112040
- Publication date Apr 3, 2025
- LAM RESEARCH CORPORATION
- Xin Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE PREPARATION OF SILICON-CONTAINING COMPOSITE PARTICLES
- Publication number 20250109027
- Publication date Apr 3, 2025
- Nexeon Limited
- Jose MEDRANO CATALAN
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHODS AND SYSTEMS FOR PREVENTIVE MAINTENANCE OF SEMICONDUCTOR PRO...
- Publication number 20250109494
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Kenneth Honniball
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20250104998
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Shoma MIYATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR SYNTHESIS OF MONOLAYER TRANSITION METAL DICHALOCOGENIDE
- Publication number 20250105006
- Publication date Mar 27, 2025
- INDIAN INSTITUTE OF SCIENCE EDUCATION AND RESEARCH, PUNE (IISER PUNE)
- Gokul M. A
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...
- Publication number 20250106944
- Publication date Mar 27, 2025
- VERSUM MATERIALS US, LLC
- THOMAS W. PILTZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20250105007
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Yugo ORIHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...
- Publication number 20250101580
- Publication date Mar 27, 2025
- LAM RESEARCH CORPORATION
- Tu HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250105008
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Gen SHIKIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...
- Publication number 20250101581
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250101583
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hidetoshi Mimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250101593
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20250101585
- Publication date Mar 27, 2025
- TOKYO ELECTRON LIMITED
- Ryohei TAKAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD FOR PROCESS TOOL
- Publication number 20250092521
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Anthony Dip
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20250092522
- Publication date Mar 20, 2025
- Samsung Electronics Co., Ltd.
- Jinbum Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250095985
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Tomohiro NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS
- Publication number 20250092520
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Davide Proserpio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL SYSTEM, AND CONTROL METHOD
- Publication number 20250092524
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masatoshi SATO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GAS-PHASE REACTOR SYSTEM INCLUDING A GAS DETECTOR
- Publication number 20250092525
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- SungBae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...
- Publication number 20250098248
- Publication date Mar 20, 2025
- Kioxia Corporation
- Masaya NAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING EPITAXIAL MATERIAL, STRUCTURE FORMED USING THE...
- Publication number 20250084534
- Publication date Mar 13, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID DEPOSITING APPARATUS FOR GALLIUM OXIDE AND METHOD FOR HYBRID...
- Publication number 20250084532
- Publication date Mar 13, 2025
- NEXUSBE CO., LTD
- Sung Hwan JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM
- Publication number 20250087441
- Publication date Mar 13, 2025
- INTEVAC, INC.
- Thomas P. Nolan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INCREASING DEPOSITION RATES OF OXIDE FILMS
- Publication number 20250087481
- Publication date Mar 13, 2025
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling or regulating the coating process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Station-to-station control of backside bow compensation deposition

Advanced temperature control for wafer carrier in plasma processing...

System and method for monitoring semiconductor processes

Method and system for adjusting the gap between a wafer and a top p...

Methods and mechanisms for adjusting film deposition parameters dur...

Substrate processing apparatus, method of manufacturing semiconduct...

Silicon precursor compounds and method for forming silicon-containi...

Substrate inspection system and a method of use thereof

Method and apparatus for revitalizing plasma processing tools

Chemical vapor deposition for uniform tungsten growth

Nano-coating protection method for electrical devices

Apparatus for manufacturing semiconductor device

Methods and systems for depositing a layer

In-situ PECVD cap layer

Apparatus for heating substrate and method thereof

Method for forming thin film using surface protection material

Flow control method using plasma system

Heater assembly including cooling apparatus and method of using same

Combination CVD/ALD method, source and pulse profile modification

Method for forming structures including transition metal layers

Substrate processing apparatus and ceiling heater

Semiconductor processing system including temperature controller

Carbon nanotube preparation system

Method for operating a coating installation for producing layer sys...

Semiconductor processing apparatus and methods for monitoring and c...

Wireless communication system, wireless communication method, contr...

Vapor accumulator for corrosive gases with purging

Capacitive sensor for monitoring gas concentration

Level monitoring and active adjustment of a substrate support assembly

Substrate processing apparatus, method of manufacturing semiconduct...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE CAPABLE OF CONTROLLING...

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

METHOD TO IMPROVE WAFER EDGE UNIFORMITY

SUBSTRATE PROCESSING APPARATUS, CLEANING METHOD, METHOD OF MANUFACT...

METAL DEPOSITION

SiC EPITAXIAL WAFER AND METHOD OF MANUFACTURING SiC EPITAXIAL WAFER

THIN FILM GROWTH MODULATION USING WAFER BOW

PROCESS FOR THE PREPARATION OF SILICON-CONTAINING COMPOSITE PARTICLES

METHODS AND SYSTEMS FOR PREVENTIVE MAINTENANCE OF SEMICONDUCTOR PRO...

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

PROCESS FOR SYNTHESIS OF MONOLAYER TRANSITION METAL DICHALOCOGENIDE

MULTIPLE ZONE HEATED ENCLOSURE FOR OPTIMIZED SUBLIMATION OF SOLID-P...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

FILM FORMING APPARATUS

SHOWERHEAD FOR PROCESS TOOL

SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...

FILM FORMING METHOD AND FILM FORMING APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS AND PROCESS

SUBSTRATE PROCESSING APPARATUS, CONTROL SYSTEM, AND CONTROL METHOD

GAS-PHASE REACTOR SYSTEM INCLUDING A GAS DETECTOR

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFAC...

METHOD OF DEPOSITING EPITAXIAL MATERIAL, STRUCTURE FORMED USING THE...

HYBRID DEPOSITING APPARATUS FOR GALLIUM OXIDE AND METHOD FOR HYBRID...

ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM

INCREASING DEPOSITION RATES OF OXIDE FILMS