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Controlling or regulating the coating process
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CPC
C23C16/52
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CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/52
Controlling or regulating the coating process
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Patents Grants
last 30 patents
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Patent Grant
Dynamic precursor dosing for atomic layer deposition
Patent number
11,970,772
Issue date
Apr 30, 2024
Lam Research Corporation
Purushottam Kumar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature measurement system, temperature measurement method, and...
Patent number
11,972,921
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Superlubricity coating containing carbon nanotubes
Patent number
11,970,764
Issue date
Apr 30, 2024
UT-Battelle, LLC
Chanaka Kapila Kumara Ihala Gamaralalage
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,768
Issue date
Apr 30, 2024
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition of metal films
Patent number
11,970,776
Issue date
Apr 30, 2024
Lam Research Corporation
Joshua Collins
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sequential infiltration synthesis apparatus
Patent number
11,970,766
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Ivo Johannes Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method and deposition apparatus
Patent number
11,965,246
Issue date
Apr 23, 2024
Tokyo Electron Limited
Naonori Fujiwara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,967,501
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Hiroaki Hiramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
Patent number
11,965,240
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Keigo Nishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
Patent number
11,967,490
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Akihiro Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
Patent number
11,967,499
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Yoshitomo Hashimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for making a vapor of precise concentration by...
Patent number
11,965,243
Issue date
Apr 23, 2024
CeeVee Tech, LLC
Egbert G. Woelk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,967,500
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Arito Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shunt door for magnets in plasma process chamber
Patent number
11,959,174
Issue date
Apr 16, 2024
Applied Materials, Inc.
Kallol Bera
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Capacitive sensor for monitoring gas concentration
Patent number
11,959,868
Issue date
Apr 16, 2024
Applied Materials, Inc.
Xiaopu Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming structures, semiconductor processing systems, an...
Patent number
11,959,173
Issue date
Apr 16, 2024
ASM IP Holding B.V.
Amir Kajbafvala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fill on demand ampoule refill
Patent number
11,959,175
Issue date
Apr 16, 2024
Lam Research Corporation
Tuan Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Asymmetric injection for better wafer uniformity
Patent number
11,959,169
Issue date
Apr 16, 2024
Applied Materials, Inc.
Eric Kihara Shono
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,961,733
Issue date
Apr 16, 2024
Kokusai Electric Corporation
Tomiyuki Shimizu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ceramic susceptor
Patent number
11,955,320
Issue date
Apr 9, 2024
MiCo Ceramics Ltd.
Ju Sung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing chambers and methods for cleaning the same
Patent number
11,952,660
Issue date
Apr 9, 2024
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,952,664
Issue date
Apr 9, 2024
Kokusai Electric Corporation
Hidenari Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Model-based failure mitigation for semiconductor processing systems
Patent number
11,955,358
Issue date
Apr 9, 2024
Applied Materials, Inc.
Anshul Ashok Vyas
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,955,333
Issue date
Apr 9, 2024
Applied Materials, Inc.
Jethro Tannos
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
Patent number
11,948,783
Issue date
Apr 2, 2024
Applied Materials, Inc.
Hari Ponnekanti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low temperature deposition of iridium containing films
Patent number
11,946,135
Issue date
Apr 2, 2024
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Runout and wobble measurement fixtures
Patent number
11,946,137
Issue date
Apr 2, 2024
ASM IP Holding B.V.
Aniket Nitin Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Vacuum valve and apparatus for fabricating semiconductor having the...
Patent number
11,946,138
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Jaeheung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating method for continuous preparation of diamond thin film with...
Patent number
11,939,669
Issue date
Mar 26, 2024
Lusheng Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Quantum printing nanostructures within carbon nanopores
Patent number
11,939,671
Issue date
Mar 26, 2024
Quantum Elements Development Inc.
Christopher J. Nagel
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
DICHROIC MIRROR AND SHORTPASS FILTER FOR IN-SITU REFLECTOMETRY
Publication number
20240141551
Publication date
May 2, 2024
Applied Materials, Inc.
Khokan C. PAUL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARBON-CONTAINING CAP LAYER FOR DOPED SEMICONDUCTOR EPITAXIAL LAYER
Publication number
20240145550
Publication date
May 2, 2024
Applied Materials, Inc.
Jason JEWELL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
Publication number
20240141485
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Theodorus G.M. Oosterlaken
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR PROVIDING A GAS MIXTURE TO A REACTION CHAMBER AND MET...
Publication number
20240141486
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Hannu Huotari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...
Publication number
20240141498
Publication date
May 2, 2024
Applied Materials, Inc.
Zuoming ZHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
Publication number
20240145233
Publication date
May 2, 2024
Kokusai Electric Corporation
Daigo YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESS SYSTEM AND METHOD OF CLEANING THE SAME
Publication number
20240141481
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
IREH SEO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING AN ATMOSPHERIC EPITAXIAL D...
Publication number
20240141483
Publication date
May 2, 2024
Applied Materials, Inc.
Thomas ACKERMANN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF APPLYING A DIELECTRIC COATING ON A COMPONENT OF AN ELECTR...
Publication number
20240145237
Publication date
May 2, 2024
Quantinuum LLC
Christopher Todd Ertsgaard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
Publication number
20240133031
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Jun YAMAWAKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
Publication number
20240136192
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
REACTANT DELIVERY SYSTEM AND REACTOR SYSTEM INCLUDING SAME
Publication number
20240133033
Publication date
Apr 25, 2024
ASM IP HOLDING B.V.
Jacqueline Wrench
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
Publication number
20240136161
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Karl Frederick LEESER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Publication number
20240136153
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Matthew Scott Weimer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
Publication number
20240136160
Publication date
Apr 25, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLYING METHOD USING T...
Publication number
20240124979
Publication date
Apr 18, 2024
Sansung Electronics Co., Ltd.
Chan Kyu LIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Particle Reduction in Physical Vapor Deposition of Amorphous Silicon
Publication number
20240128075
Publication date
Apr 18, 2024
Peijiao FANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...
Publication number
20240124972
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Kyungrim KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240120183
Publication date
Apr 11, 2024
Tokyo Electron Limited
Makoto WADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARC-BEAM POSITION MONITORING AND POSITION CONTROL IN PICVD COATING...
Publication number
20240117493
Publication date
Apr 11, 2024
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
Othmar ZÜGER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COLD THERMAL CHEMICAL VAPOR DEPOSITION
Publication number
20240117495
Publication date
Apr 11, 2024
SILCOTEK CORP.
Geoffrey K. WHITE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION
Publication number
20240120197
Publication date
Apr 11, 2024
Applied Materials, Inc.
Zhepeng CONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...
Publication number
20240120220
Publication date
Apr 11, 2024
Applied Materials, Inc.
Vishwas Kumar PANDEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALORIMETRY METHOD TO MEASURE CHEMICAL REACTION HEAT IN ALD/ALE PRO...
Publication number
20240110285
Publication date
Apr 4, 2024
UChicago Argonne, LLC
Anil U. Mane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING S...
Publication number
20240112930
Publication date
Apr 4, 2024
ASM IP HOLDING, B.V.
Fan Gao
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Publication number
20240105427
Publication date
Mar 28, 2024
Applied Materials, Inc.
Chien-Teh KAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE INSPECTION SYSTEM AND A METHOD OF USE THEREOF
Publication number
20240102169
Publication date
Mar 28, 2024
JNK TECH
Youngjin Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS SUPPLIER PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMI...
Publication number
20240102165
Publication date
Mar 28, 2024
Kojusai Electric Corporation
Shuhei Saido
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105463
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Koei KURIBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105465
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Takahiro MIYAKURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...