Controlling or regulating the coating process

Industry

CPC
C23C14/54

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/54Controlling or regulating the coating process

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Deposition system and method
- Patent number 12,176,253
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded hydrogen-free carbon-based hard material layer coated onto a...
- Patent number 12,163,213
- Issue date Dec 10, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Jürgen Becker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Digital holography for alignment in layer deposition
- Patent number 12,163,783
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition process apparatus and method of optimizin...
- Patent number 12,165,935
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Hung Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool with coating comprising boride-containing diffusion bar...
- Patent number 12,157,939
- Issue date Dec 3, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Hamid Bolvardi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder conveying apparatus, gas supply apparatus, and method for re...
- Patent number 12,152,298
- Issue date Nov 26, 2024
- Tokyo Electron Limited
- Eiichi Komori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate rotating apparatus
- Patent number 12,152,297
- Issue date Nov 26, 2024
- Santec Holdings Corporation
- Noboru Uehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for regulating color of hard coating, hard coating, and meth...
- Patent number 12,146,213
- Issue date Nov 19, 2024
- Tsinghua University
- Na Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition-condition output device, method for outputting depositio...
- Patent number 12,148,600
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Toshiyuki Fukumoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sonar sensor in processing chamber
- Patent number 12,136,556
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device and method for manufacturing same
- Patent number 12,136,540
- Issue date Nov 5, 2024
- LG Display Co., Ltd.
- Young Gon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method for tuning magnetic field distribution of deposit...
- Patent number 12,129,541
- Issue date Oct 29, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Differential capacitive sensor for in-situ film thickness and diele...
- Patent number 12,123,090
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Patrick Tae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to improve wafer edge uniformity
- Patent number 12,125,683
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Mingle Tong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods, devices, and code for controlling a coating process
- Patent number 12,098,455
- Issue date Sep 24, 2024
- VON ARDENNE Asser GmbH &Co. KG
- Martin Langer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, film forming apparatus, and program
- Patent number 12,094,700
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,087,563
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Liang Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus
- Patent number 12,077,850
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kuo-Lung Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plated steel material having excellent adhesion to plating and corr...
- Patent number 12,077,845
- Issue date Sep 3, 2024
- POSCO Co., Ltd
- Seok-Jun Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser radiation system
- Patent number 12,072,507
- Issue date Aug 27, 2024
- Gigaphoton Inc.
- Osamu Wakabayashi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Model-based scheduling for substrate processing systems
- Patent number 12,072,689
- Issue date Aug 27, 2024
- Lam Research Corporation
- Raymond Chau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,065,725
- Issue date Aug 20, 2024
- Kioxia Corporation
- Yuta Konno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Plasma processing apparatus and control method
- Patent number 12,068,208
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for controlling stretching of mask, and stretchin...
- Patent number 12,060,633
- Issue date Aug 13, 2024
- Chengdu Boe Optoelectronics Technology Co., Ltd.
- Sen Du
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical filter and sensor system
- Patent number 12,055,739
- Issue date Aug 6, 2024
- Viavi Solutions Inc.
- Karen Denise Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240425971
- Publication date Dec 26, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
- Publication number 20240424514
- Publication date Dec 26, 2024
- Leybold GmbH
- Maik Burkhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) WITH TARGET EROSION PROFILE MONITORING
- Publication number 20240429036
- Publication date Dec 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM COATING APPARATUS, CONTROL DEVICE AND METHOD FOR INFLUENCING...
- Publication number 20240425970
- Publication date Dec 26, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Steffen MOSSHAMMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT PART AND METHOD FOR MAKING THE SAME
- Publication number 20240420951
- Publication date Dec 19, 2024
- FENG CHIA UNIVERSITY
- Chang-Ho YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...
- Publication number 20240417844
- Publication date Dec 19, 2024
- POSCO CO., LTD.
- Seok-Jun HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES
- Publication number 20240412954
- Publication date Dec 12, 2024
- Dinkesh HUDERI SOMANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...
- Publication number 20240410050
- Publication date Dec 12, 2024
- TOKYO ELECTRON LIMITED
- Naoki WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION
- Publication number 20240401185
- Publication date Dec 5, 2024
- Li-Metal Corp.
- Maciej JASTRZEBSKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240401186
- Publication date Dec 5, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL FILTER AND SENSOR SYSTEM
- Publication number 20240393516
- Publication date Nov 28, 2024
- VIAVI SOLUTIONS INC.
- Karen Denise HENDRIX
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
BIASED OR FLOATING PROCESS SHIELD TO REDUCE ION LOSS TO CONTROL FIL...
- Publication number 20240384396
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Xiangjin XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20240387156
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
- Publication number 20240376592
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVT-METHOD AND DEVICE FOR PRODUCING SINGLE CRYSTALS IN A SAFE MANNE...
- Publication number 20240376633
- Publication date Nov 14, 2024
- PVA TePla AG
- Michael SCHÖLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SOURCE
- Publication number 20240376589
- Publication date Nov 14, 2024
- SAMSUNG DISPLAY CO., LTD.
- SANGMIN JUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA POWER SUPPLY SYSTEM AND METHOD
- Publication number 20240371616
- Publication date Nov 7, 2024
- TRUMPF Huettinger GmbH + Co. KG
- Wojciech Gajewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION CONTROL DEVICE, FILM FORMATION DEVICE AND FILM FORMA...
- Publication number 20240368751
- Publication date Nov 7, 2024
- Shincron Co., LTD
- Yoshiyuki OHTAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SONAR SENSOR IN PROCESSING CHAMBER
- Publication number 20240371668
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...
- Publication number 20240360546
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Andreas LOPP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS
- Publication number 20240360545
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Lung Huo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS
- Publication number 20240360543
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240347327
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ION IMPLANTATION THAT ADJUSTS A TARGET'S TILT ANGLE BASE...
- Publication number 20240347341
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Jung HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WI...
- Publication number 20240337009
- Publication date Oct 10, 2024
- Virginia Commonwealth University
- Santiago Vargas GIRALDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...
- Publication number 20240318302
- Publication date Sep 26, 2024
- Institute of Optics and Electronics, Chinese Academy of Sciences
- Cunding LIU
- G01 - MEASURING TESTING
Information Patent Application
REAL-TIME DETECTION OF PARTICULATE MATTER DURING DEPOSITION CHAMBER...
- Publication number 20240304430
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling or regulating the coating process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Deposition system and method

Graded hydrogen-free carbon-based hard material layer coated onto a...

Film forming apparatus and film forming method

Digital holography for alignment in layer deposition

Physical vapor deposition process apparatus and method of optimizin...

Coated tool with coating comprising boride-containing diffusion bar...

Powder conveying apparatus, gas supply apparatus, and method for re...

Substrate rotating apparatus

Method for regulating color of hard coating, hard coating, and meth...

Deposition-condition output device, method for outputting depositio...

Sonar sensor in processing chamber

Substrate processing device and method for manufacturing same

Deposition method for tuning magnetic field distribution of deposit...

Differential capacitive sensor for in-situ film thickness and diele...

Method to improve wafer edge uniformity

Plasma processing apparatus and method of manufacturing semiconduct...

Methods, devices, and code for controlling a coating process

Film forming method, film forming apparatus, and program

Methods and apparatus for controlling ion fraction in physical vapo...

Semiconductor processing tool and methods of operation

Physical vapor deposition apparatus

In-situ film growth rate monitoring apparatus, systems, and methods...

Plated steel material having excellent adhesion to plating and corr...

Laser radiation system

Model-based scheduling for substrate processing systems

Film forming apparatus and film forming method

Plasma processing apparatus and control method

Roller for transporting a flexible substrate, vacuum processing app...

Method and device for controlling stretching of mask, and stretchin...

Optical filter and sensor system

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...

PHYSICAL VAPOR DEPOSITION (PVD) WITH TARGET EROSION PROFILE MONITORING

VACUUM COATING APPARATUS, CONTROL DEVICE AND METHOD FOR INFLUENCING...

SEMICONDUCTOR PROCESSING EQUIPMENT PART AND METHOD FOR MAKING THE SAME

PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CO...

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

OPTICAL FILTER AND SENSOR SYSTEM

BIASED OR FLOATING PROCESS SHIELD TO REDUCE ION LOSS TO CONTROL FIL...

DEPOSITION SYSTEM AND METHOD

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

PVT-METHOD AND DEVICE FOR PRODUCING SINGLE CRYSTALS IN A SAFE MANNE...

DEPOSITION SOURCE

PLASMA POWER SUPPLY SYSTEM AND METHOD

FILM FORMATION CONTROL DEVICE, FILM FORMATION DEVICE AND FILM FORMA...

SONAR SENSOR IN PROCESSING CHAMBER

TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...

PHYSICAL VAPOR DEPOSITION APPARATUS

FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

METHOD FOR ION IMPLANTATION THAT ADJUSTS A TARGET'S TILT ANGLE BASE...

SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WI...

OPTICAL MONITORING DEVICE AND METHOD FOR CONTROLLING COATING THICKN...

REAL-TIME DETECTION OF PARTICULATE MATTER DURING DEPOSITION CHAMBER...