Controlling or regulating the coating process

Industry

CPC
C23C14/54

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/54Controlling or regulating the coating process

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Diaphragm assembly for delimiting the coating region of a sputter s...
- Patent number 12,365,978
- Issue date Jul 22, 2025
- Solayer GmbH
- Dzmitry Hrunski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, method, and recording medium storing command for control...
- Patent number 12,365,980
- Issue date Jul 22, 2025
- IVWorks Co., Ltd.
- Young Kyun Noh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support body, manufacturing apparatus for support body, and manufac...
- Patent number 12,368,034
- Issue date Jul 22, 2025
- Keio University
- Atsushi Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition processing systems having active temperature control and...
- Patent number 12,359,306
- Issue date Jul 15, 2025
- Technetics Group LLC
- Angus McFadden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Kinetic model for molecular beam epitaxy growth of III-V bismide al...
- Patent number 12,359,340
- Issue date Jul 15, 2025
- Arizona Board of Regents on behalf of Arizona State University
- Stephen T. Schaefer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 12,359,302
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, temperature control method of subst...
- Patent number 12,362,155
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ and tunable deposition of a film
- Patent number 12,359,307
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Blade for a turbomachine including blade tip armor and an erosion p...
- Patent number 12,359,573
- Issue date Jul 15, 2025
- MTU Aero Engines AG
- Thomas Uihlein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 12,354,854
- Issue date Jul 8, 2025
- Shibaura Mechatronics Corporation
- Hisashi Nishigaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 12,354,856
- Issue date Jul 8, 2025
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of non-stoichiometric metal compound layer
- Patent number 12,351,901
- Issue date Jul 8, 2025
- SOLERAS ADVANCED COATINGS BV
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone heater tuning in substrate heater
- Patent number 12,351,917
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Jun Ma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Deposition apparatus
- Patent number 12,338,526
- Issue date Jun 24, 2025
- Canon Anelva Corporation
- Masahiro Atsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing target material in deposition chamber with ti...
- Patent number 12,341,042
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsuan-Chih Chu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
In-situ wafer thickness and gap monitoring using through beam laser...
- Patent number 12,332,042
- Issue date Jun 17, 2025
- Lam Research Corporation
- Goon Heng Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filter for a plasma plume
- Patent number 12,330,102
- Issue date Jun 17, 2025
- Lam Researh Corporation
- Jan Matthijn Dekkers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition (PVD) with target erosion profile monitoring
- Patent number 12,334,319
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microminiature patterned metal on medical grade balloons
- Patent number 12,324,887
- Issue date Jun 10, 2025
- Professional Plating Inc.
- Craig A. Ingalls
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Semiconductor tool for copper deposition
- Patent number 12,327,715
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for detecting contamination of thin-films
- Patent number 12,320,755
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Al-rich AlCrN coating layers produced by PVD from metallic targets
- Patent number 12,312,672
- Issue date May 27, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method and apparatus for ultrafast laser deposition of m...
- Patent number 12,312,676
- Issue date May 27, 2025
- Chongqing Huapu Scientific Instrument Co., Ltd.
- Heping Zeng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mounting table structure, substrate processing apparatus, and metho...
- Patent number 12,315,707
- Issue date May 27, 2025
- Tokyo Electron Limited
- Motoi Yamagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanotwinned nickel films with high strength and ductility
- Patent number 12,305,273
- Issue date May 20, 2025
- Arizona Board of Regents on behalf of Arizona State University
- Jagannathan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical film, sputtering target, and method of producing optical film
- Patent number 12,297,528
- Issue date May 13, 2025
- Sumitomo Metal Mining Co., Ltd.
- Hideharu Okami
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method and system for controlling the state of stress in deposited...
- Patent number 12,297,529
- Issue date May 13, 2025
- Corporation for National Research Initiatives
- Michael A. Huff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for heating a wide bandgap substrate
- Patent number 12,291,773
- Issue date May 6, 2025
- SILANNA UV TECHNOLOGIES PTE LTD
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hard optical film, method for preparing same and use thereof
- Patent number 12,287,456
- Issue date Apr 29, 2025
- City University of Hong Kong Shenzhen Futian Research Institute
- Jian Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Retuning for impedance matching network control
- Patent number 12,288,673
- Issue date Apr 29, 2025
- COMET Technologies USA, Inc.
- Anthony Oliveti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES IN MANU...
- Publication number 20250224228
- Publication date Jul 10, 2025
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE
- Publication number 20250215551
- Publication date Jul 3, 2025
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR GUIDE STAR ALIGNMENT OF AN ION IMPLANTER
- Publication number 20250201513
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Richard Allen SPRENKLE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM LAYER DEPOSITION APPARATUS AND METHOD OF DEPOSITING A LAYER...
- Publication number 20250188594
- Publication date Jun 12, 2025
- Evatec AG
- Jurgen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE
- Publication number 20250188595
- Publication date Jun 12, 2025
- Scienta Omicron GmbH
- Martin HEISS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for improving the uniformity of rare earth nickelate thin fi...
- Publication number 20250188596
- Publication date Jun 12, 2025
- XI'AN JIAOTONG UNIVERSITY
- Zhen Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL LAYER SYSTEM, AND AN OPTICAL LAYER...
- Publication number 20250171888
- Publication date May 29, 2025
- FHR Anlagenbau GmbH
- Beate BERGK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTIMIZATION METHOD FOR VACUUM PLATING PROCESS
- Publication number 20250164981
- Publication date May 22, 2025
- Industrial Technology Research Institute
- Shih-Chin Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
DEPOSITION MONITOR FOR SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20250167021
- Publication date May 22, 2025
- Axcelis Technologies, Inc.
- Phillip Geissbuhler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR OPERATING A COATING INSTALLATION FOR PRODUCING LAYER SYS...
- Publication number 20250163567
- Publication date May 22, 2025
- RODENSTOCK GMBH
- Rüdiger SCHERSCHLICHT
- G01 - MEASURING TESTING
Information Patent Application
SHUTTER DISK SYSTEM
- Publication number 20250163568
- Publication date May 22, 2025
- Applied Materials, Inc.
- Thomas BREZOCZKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RELEASE STRUCTURE AND MANUFACTURING METHOD OF SUBSTRATE
- Publication number 20250154642
- Publication date May 15, 2025
- AUO Corporation
- Shu-Hui Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS
- Publication number 20250155622
- Publication date May 15, 2025
- Huawei Technologies Co., Ltd
- Peiling Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250146127
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20250146125
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING OF HIGH-QUALITY SUPERCONDUCTING THIN FILMS
- Publication number 20250129468
- Publication date Apr 24, 2025
- Northrop Grumman Systems Corporation
- THOMAS SCOTT GESKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20250132148
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
- Publication number 20250129464
- Publication date Apr 24, 2025
- SHIBAURA MACHINE CO., LTD.
- Mitsunori KOKUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION DEVICE, EVAPORATION SYSTEM AND EVAPORATION METHOD
- Publication number 20250122607
- Publication date Apr 17, 2025
- KUNSHAN GO-VISIONOX OPTO-ELECTRONICS CO., LTD.
- Xuefeng ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20250125132
- Publication date Apr 17, 2025
- TOKYO ELECTRON LIMITED
- Naoki KUBOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO IMPROVE WAFER EDGE UNIFORMITY
- Publication number 20250118539
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Mingle Tong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Focused Ion Beam System
- Publication number 20250109481
- Publication date Apr 3, 2025
- JEOL Ltd.
- Noriaki Mizuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM
- Publication number 20250109482
- Publication date Apr 3, 2025
- Brainy Inc.
- Nobukiyo Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CALIBRATION ASSEMBLY FOR A LITHIUM DEPOSITION PROCESS, LITHIUM DEPO...
- Publication number 20250109486
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Sebastian FRANKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A S...
- Publication number 20250101573
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Tamara HEINTZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SURFACE COATING ACCORDING TO THE SPUTTERING PRINCIPLE
- Publication number 20250084526
- Publication date Mar 13, 2025
- ELTRO GmbH
- Marc STRÄMKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
- Publication number 20250084528
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Arvinder ManmohanSingh Chadha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS
- Publication number 20250084529
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Arvinder ManmohanSingh Chadha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20250087536
- Publication date Mar 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEPARATOR PROCESSING DEVICE FOR ELECTROCHEMICAL APPARATUS AND SPUTT...
- Publication number 20250075312
- Publication date Mar 6, 2025
- Hyundai Motor Company
- Yeon Soo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling or regulating the coating process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Diaphragm assembly for delimiting the coating region of a sputter s...

Apparatus, method, and recording medium storing command for control...

Support body, manufacturing apparatus for support body, and manufac...

Deposition processing systems having active temperature control and...

Kinetic model for molecular beam epitaxy growth of III-V bismide al...

Film deposition apparatus and film deposition method

Substrate processing apparatus, temperature control method of subst...

In situ and tunable deposition of a film

Blade for a turbomachine including blade tip armor and an erosion p...

Film formation apparatus

Film forming apparatus

Deposition of non-stoichiometric metal compound layer

Multi-zone heater tuning in substrate heater

Deposition apparatus

Method for depositing target material in deposition chamber with ti...

In-situ wafer thickness and gap monitoring using through beam laser...

Filter for a plasma plume

Physical vapor deposition (PVD) with target erosion profile monitoring

Microminiature patterned metal on medical grade balloons

Semiconductor tool for copper deposition

System and method for detecting contamination of thin-films

Al-rich AlCrN coating layers produced by PVD from metallic targets

Processing method and apparatus for ultrafast laser deposition of m...

Mounting table structure, substrate processing apparatus, and metho...

Nanotwinned nickel films with high strength and ductility

Optical film, sputtering target, and method of producing optical film

Method and system for controlling the state of stress in deposited...

Methods and systems for heating a wide bandgap substrate

Hard optical film, method for preparing same and use thereof

Retuning for impedance matching network control

Patents Applicationslast 30 patents

SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES IN MANU...

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

TECHNIQUES FOR GUIDE STAR ALIGNMENT OF AN ION IMPLANTER

VACUUM LAYER DEPOSITION APPARATUS AND METHOD OF DEPOSITING A LAYER...

ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE

Method for improving the uniformity of rare earth nickelate thin fi...

METHOD FOR PRODUCING AN OPTICAL LAYER SYSTEM, AND AN OPTICAL LAYER...

OPTIMIZATION METHOD FOR VACUUM PLATING PROCESS

DEPOSITION MONITOR FOR SEMICONDUCTOR MANUFACTURING SYSTEM

METHOD FOR OPERATING A COATING INSTALLATION FOR PRODUCING LAYER SYS...

SHUTTER DISK SYSTEM

RELEASE STRUCTURE AND MANUFACTURING METHOD OF SUBSTRATE

HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

FILM FORMATION APPARATUS

SPUTTERING OF HIGH-QUALITY SUPERCONDUCTING THIN FILMS

DEPOSITION SYSTEM AND METHOD

SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD

EVAPORATION DEVICE, EVAPORATION SYSTEM AND EVAPORATION METHOD

Substrate Processing Apparatus

METHOD TO IMPROVE WAFER EDGE UNIFORMITY

Focused Ion Beam System

FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM

CALIBRATION ASSEMBLY FOR A LITHIUM DEPOSITION PROCESS, LITHIUM DEPO...

MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A S...

METHOD FOR SURFACE COATING ACCORDING TO THE SPUTTERING PRINCIPLE

HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS

HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS

DEPOSITION SYSTEM AND METHOD

SEPARATOR PROCESSING DEVICE FOR ELECTROCHEMICAL APPARATUS AND SPUTT...