Controlling or regulating the coating process

Industry

CPC
C23C14/54

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/54Controlling or regulating the coating process

Industries

Patents Grantslast 30 patents

Information Patent Grant
Al-rich AlTin-based films
- Patent number 11,965,234
- Issue date Apr 23, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for detecting abnormality of thin-film deposition...
- Patent number 11,965,237
- Issue date Apr 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Hao Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming nickel silicide materials
- Patent number 11,965,236
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Minrui Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shielding device and thin-film-deposition equipment with the same
- Patent number 11,961,724
- Issue date Apr 16, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of fabricating thin films comprising lithium-containing mat...
- Patent number 11,959,166
- Issue date Apr 16, 2024
- Massachusetts Institute of Technology
- Reto Max Pfenninger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,961,710
- Issue date Apr 16, 2024
- Canon Anelva Corporation
- Tadashi Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid sputter target
- Patent number 11,952,654
- Issue date Apr 9, 2024
- EVATEC AG
- Dominik Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering reaction chamber and process assembly of sputtering reac...
- Patent number 11,952,653
- Issue date Apr 9, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Liren Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tilted PVD source with rotating pedestal
- Patent number 11,948,784
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Harish Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film thickness measuring apparatus and film thickness measuring met...
- Patent number 11,939,665
- Issue date Mar 26, 2024
- Tokyo Electron Limted
- Masato Shinada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer temperature measurement in an ion implantation system
- Patent number 11,942,343
- Issue date Mar 26, 2024
- Advanced Ion Beam Technology, Inc.
- Chien-Li Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for particle removal from wafers through plasma modification...
- Patent number 11,932,934
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shielding mechanism and thin-film-deposition equipment using the same
- Patent number 11,929,242
- Issue date Mar 12, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
- Patent number 11,913,109
- Issue date Feb 27, 2024
- SPTS Technologies Limited
- Tony Wilby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for generating magnetic fields during semiconductor proce...
- Patent number 11,915,915
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Suhas Bangalore Umesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for homogeneously coating 3D substrates
- Patent number 11,913,108
- Issue date Feb 27, 2024
- FHR Anlagenbau GmbH
- Sven Häberlein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and control device
- Patent number 11,905,592
- Issue date Feb 20, 2024
- Ralf Biedermann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material deposition apparatus having at least one heating assembly...
- Patent number 11,905,589
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Andreas Lopp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct-deposition system including standoffs for controlling substr...
- Patent number 11,905,590
- Issue date Feb 20, 2024
- Emagin Corporation
- Evan P. Donoghue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for forming nano-laminate optical coating
- Patent number 11,897,811
- Issue date Feb 13, 2024
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making metal nanostructures using low temperature deposition
- Patent number 11,898,235
- Issue date Feb 13, 2024
- KING FAISAL UNIVERSITY
- Nagih Mohammed Shaalan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device and method for removing coating material from openings in a...
- Patent number 11,898,237
- Issue date Feb 13, 2024
- Siemens Energy Global GmbH & Co. KG
- Thomas Beck
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and methods for depositing variable interference filters
- Patent number 11,891,686
- Issue date Feb 6, 2024
- Shigeng Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkali semi-metal films and method and apparatus for fabricating them
- Patent number 11,881,391
- Issue date Jan 23, 2024
- Radiation Monitoring Devices, Inc.
- Harish B. Bhandari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating device for curved substrate and coating method containing t...
- Patent number 11,881,386
- Issue date Jan 23, 2024
- Innolux Corporation
- Ching-Feng Kuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line monitoring of OLED layer thickness and dopant concentration
- Patent number 11,856,833
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition system, factory system, and method of depositing fi...
- Patent number 11,840,757
- Issue date Dec 12, 2023
- TDK Corporation
- Tsuyoshi Suzuki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Binary Ag—Cu amorphous thin-films for electronic applications
- Patent number 11,840,756
- Issue date Dec 12, 2023
- University of North Texas
- Santanu Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus and method of fabricating magnetic memory devi...
- Patent number 11,834,738
- Issue date Dec 5, 2023
- Samsung Electronics Co., Ltd.
- Joonmyoung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240136162
- Publication date Apr 25, 2024
- LG Display Co., Ltd.
- Young Gon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
- Publication number 20240133025
- Publication date Apr 25, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATER CONDITIONING MODE
- Publication number 20240124970
- Publication date Apr 18, 2024
- BÜHLER ALZENAU GMBH
- Simon LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION
- Publication number 20240130210
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING APPARATUS AND METHOD
- Publication number 20240112897
- Publication date Apr 4, 2024
- SEMES CO., LTD.
- Sun Il KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE
- Publication number 20240102147
- Publication date Mar 28, 2024
- nexTC Corporation
- Cory K. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...
- Publication number 20240102154
- Publication date Mar 28, 2024
- Chun Cheng CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240096609
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ROTATING APPARATUS
- Publication number 20240093358
- Publication date Mar 21, 2024
- SANTEC CORPORATION
- Noboru UEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRUCIBLE, EVAPORATION SOURCE, EVAPORATION METHOD, EVAPORATION SYSTE...
- Publication number 20240084439
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Takashi ANJIKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CALIBRATING OPTICAL COATING APPARATUSES
- Publication number 20240076774
- Publication date Mar 7, 2024
- CARL ZEISS VISION INTERNATIONAL GMBH
- Daragh Murphy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL MATERIAL AND METHOD FOR PRODUCING THE SAME
- Publication number 20240076773
- Publication date Mar 7, 2024
- City University of Hong Kong Shenzhen Futian Research Institute
- Sida Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALTIN-CRN-BASED COATING FOR FORMING TOOLS
- Publication number 20240068083
- Publication date Feb 29, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Anders Olof ERIKSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
- Publication number 20240060171
- Publication date Feb 22, 2024
- SHIBAURA MACHINE CO., LTD.
- Kazuhiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOLLOW CATHODE SYSTEM FOR GENERATING A PLASMA AND METHOD FOR OPERAT...
- Publication number 20240062995
- Publication date Feb 22, 2024
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Henrik Flaske
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20240060170
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- MANABU HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240052477
- Publication date Feb 15, 2024
- Canon ANELVA Corporation
- Masahiro ATSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL
- Publication number 20240052479
- Publication date Feb 15, 2024
- Chongqing JIMAT New Material Technology Co., Ltd.
- Shiwei ZANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...
- Publication number 20240055239
- Publication date Feb 15, 2024
- Ulvac, Inc.
- Yuta Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Al-RICH AlTiN-BASED FILMS
- Publication number 20240043985
- Publication date Feb 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis KURAPOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD OPTICAL FILM, METHOD FOR PREPARING SAME AND USE THEREOF
- Publication number 20240045110
- Publication date Feb 8, 2024
- City University of Hong Kong Shenzhen Futian Research Institute
- Jian LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAPHRAGM ASSEMBLY FOR DELIMITING THE COATING REGION OF A SPUTTER S...
- Publication number 20240035142
- Publication date Feb 1, 2024
- Solayer GmbH
- Dzmitry HRUNSKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING FILM BY PULSED LASER DEPOSITION WITH PLASMA GRATING
- Publication number 20240026523
- Publication date Jan 25, 2024
- Chongqing Huapu Scientific Instrument Co.,Ltd.
- Heping ZENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM SYSTEM CLUSTER TOOL
- Publication number 20240026534
- Publication date Jan 25, 2024
- EMPA EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT
- Carlos GUERRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD AND APPARATUS FOR ULTRAFAST LASER DEPOSITION OF M...
- Publication number 20240026524
- Publication date Jan 25, 2024
- Chongqing Huapu Scientific Instrument Co.,Ltd.
- Heping ZENG
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
NANOTWINNED NICKEL FILMS WITH HIGH STRENGTH AND DUCTILITY
- Publication number 20240018643
- Publication date Jan 18, 2024
- Jagannathan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
- Publication number 20240014018
- Publication date Jan 11, 2024
- SPTS TECHNOLOGIES LIMITED
- Tony WILBY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RHYTHMIC DEPOSITION PRODUCTION METHOD AND EQUIPMENT FOR PEROVSKITE...
- Publication number 20240016045
- Publication date Jan 11, 2024
- Hangzhou Microquanta Semiconductor Co., Ltd.
- Buyi Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING POSITION MISALIGNMENT CORRECTION METHOD AND FILM FORMI...
- Publication number 20240011148
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Atsushi TAKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE REMOVAL DURING FABRICATION OF ELECTROCHROMIC DEVICES
- Publication number 20240012306
- Publication date Jan 11, 2024
- VIEW, INC.
- Robert T. Rozbicki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling or regulating the coating process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Al-rich AlTin-based films

System and method for detecting abnormality of thin-film deposition...

Method of forming nickel silicide materials

Shielding device and thin-film-deposition equipment with the same

Methods of fabricating thin films comprising lithium-containing mat...

Plasma processing apparatus

Liquid sputter target

Sputtering reaction chamber and process assembly of sputtering reac...

Tilted PVD source with rotating pedestal

Film thickness measuring apparatus and film thickness measuring met...

Wafer temperature measurement in an ion implantation system

Method for particle removal from wafers through plasma modification...

Shielding mechanism and thin-film-deposition equipment using the same

Apparatus and a method of controlling thickness variation in a mate...

Apparatus for generating magnetic fields during semiconductor proce...

Method and device for homogeneously coating 3D substrates

Cleaning of sin with CCP plasma or RPS clean

Method and control device

Material deposition apparatus having at least one heating assembly...

Direct-deposition system including standoffs for controlling substr...

System for forming nano-laminate optical coating

Method of making metal nanostructures using low temperature deposition

Device and method for removing coating material from openings in a...

Apparatus and methods for depositing variable interference filters

Alkali semi-metal films and method and apparatus for fabricating them

Coating device for curved substrate and coating method containing t...

In-line monitoring of OLED layer thickness and dopant concentration

Film deposition system, factory system, and method of depositing fi...

Binary Ag—Cu amorphous thin-films for electronic applications

Sputtering apparatus and method of fabricating magnetic memory devi...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

COATER CONDITIONING MODE

IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION

THIN FILM FORMING APPARATUS AND METHOD

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

SUBSTRATE ROTATING APPARATUS

CRUCIBLE, EVAPORATION SOURCE, EVAPORATION METHOD, EVAPORATION SYSTE...

METHOD FOR CALIBRATING OPTICAL COATING APPARATUSES

METAL MATERIAL AND METHOD FOR PRODUCING THE SAME

ALTIN-CRN-BASED COATING FOR FORMING TOOLS

SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD

HOLLOW CATHODE SYSTEM FOR GENERATING A PLASMA AND METHOD FOR OPERAT...

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

DEPOSITION APPARATUS

METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL

METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...

Al-RICH AlTiN-BASED FILMS

HARD OPTICAL FILM, METHOD FOR PREPARING SAME AND USE THEREOF

DIAPHRAGM ASSEMBLY FOR DELIMITING THE COATING REGION OF A SPUTTER S...

METHOD FOR COATING FILM BY PULSED LASER DEPOSITION WITH PLASMA GRATING

VACUUM SYSTEM CLUSTER TOOL

PROCESSING METHOD AND APPARATUS FOR ULTRAFAST LASER DEPOSITION OF M...

NANOTWINNED NICKEL FILMS WITH HIGH STRENGTH AND DUCTILITY

Apparatus and a Method of Controlling Thickness Variation in a Mate...

RHYTHMIC DEPOSITION PRODUCTION METHOD AND EQUIPMENT FOR PEROVSKITE...

FILM FORMING POSITION MISALIGNMENT CORRECTION METHOD AND FILM FORMI...

PARTICLE REMOVAL DURING FABRICATION OF ELECTROCHROMIC DEVICES