Controlling the film thickness or evaporation rate

Industry

CPC
C23C14/542

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/542Controlling the film thickness or evaporation rate

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Method for regulating color of hard coating, hard coating, and meth...
- Patent number 12,146,213
- Issue date Nov 19, 2024
- Tsinghua University
- Na Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition-condition output device, method for outputting depositio...
- Patent number 12,148,600
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Toshiyuki Fukumoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Deposition method for tuning magnetic field distribution of deposit...
- Patent number 12,129,541
- Issue date Oct 29, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plated steel material having excellent adhesion to plating and corr...
- Patent number 12,077,845
- Issue date Sep 3, 2024
- POSCO Co., Ltd
- Seok-Jun Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature-controlled shield, material deposition apparatus and me...
- Patent number 12,049,691
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Andreas Lopp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for vacuum deposition of a coating on the front face of a su...
- Patent number 12,030,333
- Issue date Jul 9, 2024
- OBERTHUR FIDUCIAIRE SAS
- Julien Lumeau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming nickel silicide materials
- Patent number 11,965,236
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Minrui Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of fabricating thin films comprising lithium-containing mat...
- Patent number 11,959,166
- Issue date Apr 16, 2024
- Massachusetts Institute of Technology
- Reto Max Pfenninger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
- Patent number 11,913,109
- Issue date Feb 27, 2024
- SPTS Technologies Limited
- Tony Wilby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for homogeneously coating 3D substrates
- Patent number 11,913,108
- Issue date Feb 27, 2024
- FHR Anlagenbau GmbH
- Sven Häberlein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct-deposition system including standoffs for controlling substr...
- Patent number 11,905,590
- Issue date Feb 20, 2024
- Emagin Corporation
- Evan P. Donoghue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for depositing variable interference filters
- Patent number 11,891,686
- Issue date Feb 6, 2024
- Shigeng Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Binary Ag—Cu amorphous thin-films for electronic applications
- Patent number 11,840,756
- Issue date Dec 12, 2023
- University of North Texas
- Santanu Das
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Installation with distribution mask for vapor deposition of a coati...
- Patent number 11,821,072
- Issue date Nov 21, 2023
- BNL Eurolens
- Vicente Estevez Rodriguez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous thin film of a metal chalcogenide
- Patent number 11,804,253
- Issue date Oct 31, 2023
- National University of Singapore
- Kian Ping Loh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making an eyeglass lens coated by means of physical vapo...
- Patent number 11,774,777
- Issue date Oct 3, 2023
- THE'LIOS S.P.A.
- Carlo Roni
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Surface treatment facility
- Patent number 11,732,348
- Issue date Aug 22, 2023
- JFE Steel Corporation
- Takumi Umada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method, system and apparatus for cooling a substrate
- Patent number 11,725,272
- Issue date Aug 15, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MEMS process power
- Patent number 11,716,906
- Issue date Aug 1, 2023
- QUALCOMM Technologies, Inc.
- Robert J. Littrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sputtering method
- Patent number 11,710,624
- Issue date Jul 25, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Bingliang Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon film forming method and substrate processing apparatus
- Patent number 11,600,490
- Issue date Mar 7, 2023
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface acoustic wave device and method for manufacturing the same
- Patent number 11,539,345
- Issue date Dec 27, 2022
- NDK SAW Devices Co., Ltd.
- Atsushi Kamijo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing display apparatus
- Patent number 11,534,790
- Issue date Dec 27, 2022
- Samsung Display Co., Ltd.
- Sangjin Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Base conducting layer beneath graphite layer of ceramic cathode for...
- Patent number 11,527,390
- Issue date Dec 13, 2022
- Western Digital Technologies, Inc.
- Cherngye Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced cathodic ARC source for ARC plasma deposition
- Patent number 11,466,360
- Issue date Oct 11, 2022
- Veeco Instruments Inc.
- Boris L. Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inorganic TFEL display element and manufacturing
- Patent number 11,464,087
- Issue date Oct 4, 2022
- Lumineq Oy
- Heli Seppänen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for film deposition on a substrate with non-uniform overlap...
- Patent number 11,447,854
- Issue date Sep 20, 2022
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlled variable thickness film deposition on a non-flat substra...
- Patent number 11,427,905
- Issue date Aug 30, 2022
- INNOVEN ENERGY LLC
- Tyler A. Lowrey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method based on multi-source deposition for fabricating perovskite...
- Patent number 11,293,101
- Issue date Apr 5, 2022
- Okinawa Institute of Science and Technology School Corporation
- Yabing Qi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for galvanizing by plasma evaporation
- Patent number 11,268,185
- Issue date Mar 8, 2022
- NEOVAC GMBH
- Pierre Vandenbrande
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
INDIUM TIN OXIDE FILM COATED UPSTANDING SILICON NANOWIRES (ITO/USNW...
- Publication number 20250012791
- Publication date Jan 9, 2025
- National Chung Hsing University
- Shu-Ping Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLAR HEATING FOR THIN FILM EVAPORATION AND DIRECTIONAL SOLIDIFICATION
- Publication number 20250003054
- Publication date Jan 2, 2025
- Blue Origin, LLC
- Alexander lmbault
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240425971
- Publication date Dec 26, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...
- Publication number 20240417844
- Publication date Dec 19, 2024
- POSCO CO., LTD.
- Seok-Jun HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...
- Publication number 20240401186
- Publication date Dec 5, 2024
- ANGSTROM ENGINEERING INC.
- Jonathan Boulanger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...
- Publication number 20240360546
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Andreas LOPP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLADDING TUBES COATING APPARATUS
- Publication number 20240254615
- Publication date Aug 1, 2024
- Korea Atomic Energy Research Institute
- Hyun Gil KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLAT STEEL PRODUCT HAVING AN IMPROVED ZINC COATING
- Publication number 20240200184
- Publication date Jun 20, 2024
- ThyssenKrupp Steel Europe AG
- Stefan BIENHOLZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED LASER DEPOSITION METHOD
- Publication number 20240175118
- Publication date May 30, 2024
- Chongqing Huapu Information Technology Co.,Ltd.
- Heping ZENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A LAYER OPTICAL ELEMENT, AND OPTICAL ASSEMBLY...
- Publication number 20240167145
- Publication date May 23, 2024
- Carl Zeiss SMT GMBH
- Stephan SIX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...
- Publication number 20240102154
- Publication date Mar 28, 2024
- Chun Cheng CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...
- Publication number 20240055239
- Publication date Feb 15, 2024
- Ulvac, Inc.
- Yuta Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD AND APPARATUS FOR ULTRAFAST LASER DEPOSITION OF M...
- Publication number 20240026524
- Publication date Jan 25, 2024
- Chongqing Huapu Scientific Instrument Co.,Ltd.
- Heping ZENG
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
NANOTWINNED NICKEL FILMS WITH HIGH STRENGTH AND DUCTILITY
- Publication number 20240018643
- Publication date Jan 18, 2024
- Jagannathan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
- Publication number 20240014018
- Publication date Jan 11, 2024
- SPTS TECHNOLOGIES LIMITED
- Tony WILBY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS PROCESS POWER
- Publication number 20230422623
- Publication date Dec 28, 2023
- QUALCOMM TECHNOLOGIES INC.
- Robert John LITTRELL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING
- Publication number 20230399741
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Marvin Clayton BREES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BLADE FOR A TURBOMACHINE INCLUDING BLADE TIP ARMOR AND AN EROSION P...
- Publication number 20230340884
- Publication date Oct 26, 2023
- MTU Aero Engines AG
- Thomas UIHLEIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING PATTERNED SURFACE COATING AND AUTOMOBILE H...
- Publication number 20230227959
- Publication date Jul 20, 2023
- Amulaire thermal technology, INC.
- Yi-Hsin HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR APPLYING A COATING, AND COATED BODY
- Publication number 20230220540
- Publication date Jul 13, 2023
- CemeCon AG
- Werner Kölker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR COOLING A SUBSTRATE
- Publication number 20230137182
- Publication date May 4, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OVERHANG REDUCTION USING PULSED BIAS
- Publication number 20230113961
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Bencherki Mebarki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TIN...
- Publication number 20230077782
- Publication date Mar 16, 2023
- SAGE Electrochromics, Inc.
- Wen Li
- G02 - OPTICS
Information Patent Application
FILM STACK COMPOSITION, RELATED METHOD, AND APPLICATIONS
- Publication number 20230032284
- Publication date Feb 2, 2023
- Vergason Technology, Inc.
- Joshua B. Soper
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FILM DEPOSITION
- Publication number 20230002884
- Publication date Jan 5, 2023
- Corning Incorporated
- Chang-gyu Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20220403503
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Hiroyuki Iwashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS
- Publication number 20220403497
- Publication date Dec 22, 2022
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENGINEERED MULTI-DIMENSIONAL METALLURGICAL PROPERTIES IN PVD MATERIALS
- Publication number 20220372610
- Publication date Nov 24, 2022
- VACTRONIX SCIENTIFIC LLC
- Scott P. Carpenter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Packaging Material And Methods Of Manufacture
- Publication number 20220363947
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Vibhas Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SU...
- Publication number 20220213591
- Publication date Jul 7, 2022
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Michael VERGÖHL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling the film thickness or evaporation rate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for regulating color of hard coating, hard coating, and meth...

Deposition-condition output device, method for outputting depositio...

Deposition method for tuning magnetic field distribution of deposit...

Plated steel material having excellent adhesion to plating and corr...

Temperature-controlled shield, material deposition apparatus and me...

Method for vacuum deposition of a coating on the front face of a su...

Method of forming nickel silicide materials

Methods of fabricating thin films comprising lithium-containing mat...

Apparatus and a method of controlling thickness variation in a mate...

Method and device for homogeneously coating 3D substrates

Direct-deposition system including standoffs for controlling substr...

Apparatus and methods for depositing variable interference filters

Binary Ag—Cu amorphous thin-films for electronic applications

Installation with distribution mask for vapor deposition of a coati...

Continuous thin film of a metal chalcogenide

Method for making an eyeglass lens coated by means of physical vapo...

Surface treatment facility

Method, system and apparatus for cooling a substrate

MEMS process power

Sputtering method

Silicon film forming method and substrate processing apparatus

Surface acoustic wave device and method for manufacturing the same

Apparatus and method of manufacturing display apparatus

Base conducting layer beneath graphite layer of ceramic cathode for...

Enhanced cathodic ARC source for ARC plasma deposition

Inorganic TFEL display element and manufacturing

Process for film deposition on a substrate with non-uniform overlap...

Controlled variable thickness film deposition on a non-flat substra...

Method based on multi-source deposition for fabricating perovskite...

Method and system for galvanizing by plasma evaporation

Patents Applicationslast 30 patents

INDIUM TIN OXIDE FILM COATED UPSTANDING SILICON NANOWIRES (ITO/USNW...

SOLAR HEATING FOR THIN FILM EVAPORATION AND DIRECTIONAL SOLIDIFICATION

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITI...

TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...

CLADDING TUBES COATING APPARATUS

FLAT STEEL PRODUCT HAVING AN IMPROVED ZINC COATING

PULSED LASER DEPOSITION METHOD

METHOD FOR DEPOSITING A LAYER OPTICAL ELEMENT, AND OPTICAL ASSEMBLY...

VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...

METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...

PROCESSING METHOD AND APPARATUS FOR ULTRAFAST LASER DEPOSITION OF M...

NANOTWINNED NICKEL FILMS WITH HIGH STRENGTH AND DUCTILITY

Apparatus and a Method of Controlling Thickness Variation in a Mate...

MEMS PROCESS POWER

SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING

BLADE FOR A TURBOMACHINE INCLUDING BLADE TIP ARMOR AND AN EROSION P...

METHOD FOR MANUFACTURING PATTERNED SURFACE COATING AND AUTOMOBILE H...

METHOD AND DEVICE FOR APPLYING A COATING, AND COATED BODY

METHOD, SYSTEM AND APPARATUS FOR COOLING A SUBSTRATE

OVERHANG REDUCTION USING PULSED BIAS

APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TIN...

FILM STACK COMPOSITION, RELATED METHOD, AND APPLICATIONS

SYSTEMS AND METHODS FOR FILM DEPOSITION

FILM FORMING APPARATUS AND FILM FORMING METHOD

NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS

ENGINEERED MULTI-DIMENSIONAL METALLURGICAL PROPERTIES IN PVD MATERIALS

Packaging Material And Methods Of Manufacture

DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SU...