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Controlling the film thickness or evaporation rate
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C23C14/542
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CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C14/00
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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C23C14/542
Controlling the film thickness or evaporation rate
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last 30 patents
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Method of forming nickel silicide materials
Patent number
11,965,236
Issue date
Apr 23, 2024
Applied Materials, Inc.
Minrui Yu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of fabricating thin films comprising lithium-containing mat...
Patent number
11,959,166
Issue date
Apr 16, 2024
Massachusetts Institute of Technology
Reto Max Pfenninger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
Patent number
11,913,109
Issue date
Feb 27, 2024
SPTS Technologies Limited
Tony Wilby
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method and device for homogeneously coating 3D substrates
Patent number
11,913,108
Issue date
Feb 27, 2024
FHR Anlagenbau GmbH
Sven Häberlein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Direct-deposition system including standoffs for controlling substr...
Patent number
11,905,590
Issue date
Feb 20, 2024
Emagin Corporation
Evan P. Donoghue
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Apparatus and methods for depositing variable interference filters
Patent number
11,891,686
Issue date
Feb 6, 2024
Shigeng Song
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Binary Ag—Cu amorphous thin-films for electronic applications
Patent number
11,840,756
Issue date
Dec 12, 2023
University of North Texas
Santanu Das
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Installation with distribution mask for vapor deposition of a coati...
Patent number
11,821,072
Issue date
Nov 21, 2023
BNL Eurolens
Vicente Estevez Rodriguez
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Continuous thin film of a metal chalcogenide
Patent number
11,804,253
Issue date
Oct 31, 2023
National University of Singapore
Kian Ping Loh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method for making an eyeglass lens coated by means of physical vapo...
Patent number
11,774,777
Issue date
Oct 3, 2023
THE'LIOS S.P.A.
Carlo Roni
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Grant
Surface treatment facility
Patent number
11,732,348
Issue date
Aug 22, 2023
JFE Steel Corporation
Takumi Umada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method, system and apparatus for cooling a substrate
Patent number
11,725,272
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Byung-Jin Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
MEMS process power
Patent number
11,716,906
Issue date
Aug 1, 2023
QUALCOMM Technologies, Inc.
Robert J. Littrell
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Sputtering method
Patent number
11,710,624
Issue date
Jul 25, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Bingliang Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Silicon film forming method and substrate processing apparatus
Patent number
11,600,490
Issue date
Mar 7, 2023
Tokyo Electron Limited
Mitsuhiro Okada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Surface acoustic wave device and method for manufacturing the same
Patent number
11,539,345
Issue date
Dec 27, 2022
NDK SAW Devices Co., Ltd.
Atsushi Kamijo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Apparatus and method of manufacturing display apparatus
Patent number
11,534,790
Issue date
Dec 27, 2022
Samsung Display Co., Ltd.
Sangjin Han
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Base conducting layer beneath graphite layer of ceramic cathode for...
Patent number
11,527,390
Issue date
Dec 13, 2022
Western Digital Technologies, Inc.
Cherngye Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Enhanced cathodic ARC source for ARC plasma deposition
Patent number
11,466,360
Issue date
Oct 11, 2022
Veeco Instruments Inc.
Boris L. Druz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Inorganic TFEL display element and manufacturing
Patent number
11,464,087
Issue date
Oct 4, 2022
Lumineq Oy
Heli Seppänen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Process for film deposition on a substrate with non-uniform overlap...
Patent number
11,447,854
Issue date
Sep 20, 2022
ASM IP Holding B.V.
Chiyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Controlled variable thickness film deposition on a non-flat substra...
Patent number
11,427,905
Issue date
Aug 30, 2022
INNOVEN ENERGY LLC
Tyler A. Lowrey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method based on multi-source deposition for fabricating perovskite...
Patent number
11,293,101
Issue date
Apr 5, 2022
Okinawa Institute of Science and Technology School Corporation
Yabing Qi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for galvanizing by plasma evaporation
Patent number
11,268,185
Issue date
Mar 8, 2022
NEOVAC GMBH
Pierre Vandenbrande
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Base conducting layer beneath graphite layer of ceramic cathode for...
Patent number
11,270,872
Issue date
Mar 8, 2022
Western Digital Technologies, Inc.
Cherngye Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preparing super-lubricative multi-layer composite fuller...
Patent number
11,225,710
Issue date
Jan 18, 2022
Kaixiong Gao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
MEMS process power
Patent number
11,217,741
Issue date
Jan 4, 2022
Vesper Technologies Inc.
Robert Littrell
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Piston ring and method of manufacture
Patent number
11,156,291
Issue date
Oct 26, 2021
Mahle International GmbH
Jose Valentim Lima Sarabanda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Moth-eye transfer mold, method of manufacturing moth-eye transfer m...
Patent number
11,091,830
Issue date
Aug 17, 2021
Tokyo University of Science Foundation
Jun Taniguchi
G02 - OPTICS
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Patent Grant
Fabrication of integrated computational elements using cylindrical...
Patent number
11,066,740
Issue date
Jul 20, 2021
Halliburton Energy Services, Inc.
David L. Perkins
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...
Publication number
20240102154
Publication date
Mar 28, 2024
Chun Cheng CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...
Publication number
20240055239
Publication date
Feb 15, 2024
Ulvac, Inc.
Yuta Ando
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING METHOD AND APPARATUS FOR ULTRAFAST LASER DEPOSITION OF M...
Publication number
20240026524
Publication date
Jan 25, 2024
Chongqing Huapu Scientific Instrument Co.,Ltd.
Heping ZENG
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
NANOTWINNED NICKEL FILMS WITH HIGH STRENGTH AND DUCTILITY
Publication number
20240018643
Publication date
Jan 18, 2024
Jagannathan Rajagopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
Publication number
20240014018
Publication date
Jan 11, 2024
SPTS TECHNOLOGIES LIMITED
Tony WILBY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS PROCESS POWER
Publication number
20230422623
Publication date
Dec 28, 2023
QUALCOMM TECHNOLOGIES INC.
Robert John LITTRELL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING
Publication number
20230399741
Publication date
Dec 14, 2023
LAM RESEARCH CORPORATION
Marvin Clayton BREES
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BLADE FOR A TURBOMACHINE INCLUDING BLADE TIP ARMOR AND AN EROSION P...
Publication number
20230340884
Publication date
Oct 26, 2023
MTU Aero Engines AG
Thomas UIHLEIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MANUFACTURING PATTERNED SURFACE COATING AND AUTOMOBILE H...
Publication number
20230227959
Publication date
Jul 20, 2023
Amulaire thermal technology, INC.
Yi-Hsin HUANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR APPLYING A COATING, AND COATED BODY
Publication number
20230220540
Publication date
Jul 13, 2023
CemeCon AG
Werner Kölker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD, SYSTEM AND APPARATUS FOR COOLING A SUBSTRATE
Publication number
20230137182
Publication date
May 4, 2023
Canon Kabushiki Kaisha
Byung-Jin Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OVERHANG REDUCTION USING PULSED BIAS
Publication number
20230113961
Publication date
Apr 13, 2023
Applied Materials, Inc.
Bencherki Mebarki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TIN...
Publication number
20230077782
Publication date
Mar 16, 2023
SAGE Electrochromics, Inc.
Wen Li
G02 - OPTICS
Information
Patent Application
FILM STACK COMPOSITION, RELATED METHOD, AND APPLICATIONS
Publication number
20230032284
Publication date
Feb 2, 2023
Vergason Technology, Inc.
Joshua B. Soper
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR FILM DEPOSITION
Publication number
20230002884
Publication date
Jan 5, 2023
Corning Incorporated
Chang-gyu Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20220403503
Publication date
Dec 22, 2022
TOKYO ELECTRON LIMITED
Hiroyuki Iwashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS
Publication number
20220403497
Publication date
Dec 22, 2022
ASM IP HOLDING B.V.
Chiyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ENGINEERED MULTI-DIMENSIONAL METALLURGICAL PROPERTIES IN PVD MATERIALS
Publication number
20220372610
Publication date
Nov 24, 2022
VACTRONIX SCIENTIFIC LLC
Scott P. Carpenter
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Packaging Material And Methods Of Manufacture
Publication number
20220363947
Publication date
Nov 17, 2022
Applied Materials, Inc.
Vibhas Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SU...
Publication number
20220213591
Publication date
Jul 7, 2022
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Michael VERGÖHL
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE AND METHOD FOR MANUFACTURING THIN FILM
Publication number
20220213586
Publication date
Jul 7, 2022
CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
Quanqin SUN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MEMS PROCESS POWER
Publication number
20220199893
Publication date
Jun 23, 2022
Vesper Technologies Inc.
Robert J. Littrell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHOD FOR DEPOSITING THIN SPUTTERED FILM
Publication number
20220186357
Publication date
Jun 16, 2022
Ark Power Tech. Corp.
Juhong Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR VACUUM COATING SURFACES OF OBJECTS
Publication number
20220154340
Publication date
May 19, 2022
KHS GmbH
Michael HERBORT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
BASE CONDUCTING LAYER BENEATH GRAPHITE LAYER OF CERAMIC CATHODE FOR...
Publication number
20220157571
Publication date
May 19, 2022
Western Digital Technologies, Inc.
Cherngye Hwang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WEAR AND/OR FRICTION REDUCTION BY USING MOLYBDENUM NITRIDE BASED CO...
Publication number
20220145442
Publication date
May 12, 2022
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
Johann Karner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
APPARATUS AND METHOD FOR CONTROLLING COATING LAYER IN PVD PLATING P...
Publication number
20220074042
Publication date
Mar 10, 2022
POSCO
Yong-Hwa JUNG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORR...
Publication number
20220074039
Publication date
Mar 10, 2022
POSCO
Seok-Jun HONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Method For Vacuum Deposition Of A Coating On The Front Face Of A Su...
Publication number
20220009269
Publication date
Jan 13, 2022
OBERTHUR FIDUCIAIRE SAS
Julien Lumeau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...
Publication number
20210381102
Publication date
Dec 9, 2021
Applied Materials, Inc.
Andreas LOPP
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...