Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided

Industry

CPC
H01J37/265

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/265Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device
- Patent number 12,205,790
- Issue date Jan 21, 2025
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for defect inspection using voltage contrast in a...
- Patent number 12,191,112
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and overlay misalignment measurement m...
- Patent number 12,183,541
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated operational control of micro-tooling devices
- Patent number 12,176,182
- Issue date Dec 24, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission electron microscope and inspection method using transm...
- Patent number 12,170,184
- Issue date Dec 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 12,165,837
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stroboscopic illumination synchronized electron detection and imaging
- Patent number 12,165,835
- Issue date Dec 10, 2024
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of profiling charged-particle beams
- Patent number 12,165,836
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Maikel Robert Goosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and electron beam application apparatus
- Patent number 12,165,828
- Issue date Dec 10, 2024
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated ion-beam alignment for dual-beam instrument
- Patent number 12,154,757
- Issue date Nov 26, 2024
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Observation method by means of scanning transmission electron micro...
- Patent number 12,154,758
- Issue date Nov 26, 2024
- The University of Tokyo
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-differential confocal tilt sensor for measuring level variatio...
- Patent number 12,142,456
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Jinmei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual speed acquisition for drift corrected, fast, low dose, adaptiv...
- Patent number 12,136,532
- Issue date Nov 5, 2024
- FEI Company
- Pavel Potocek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for usable beam current and brightness in Scho...
- Patent number 12,131,883
- Issue date Oct 29, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
- Patent number 12,125,669
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Ning Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive specimen image acquisition using an artificial neural network
- Patent number 12,085,523
- Issue date Sep 10, 2024
- FEI Company
- Pavel Potocek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 12,068,128
- Issue date Aug 20, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automating cryo-electron microscopy data collection
- Patent number 12,057,289
- Issue date Aug 6, 2024
- New York Structural Biology Center
- Paul T. Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for generating a diffraction image
- Patent number 12,009,176
- Issue date Jun 11, 2024
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle assessment tool, inspection method
- Patent number 11,984,295
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Marco Jan-Jaco Wieland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive specimen image acquisition
- Patent number 11,982,634
- Issue date May 14, 2024
- FEI Company
- Pavel Potocek
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam system
- Patent number 11,961,704
- Issue date Apr 16, 2024
- HITACHI HIGH-TECH CORPORATION
- Naoki Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 11,955,310
- Issue date Apr 9, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
- Patent number 11,948,772
- Issue date Apr 2, 2024
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed charged-particle beam system
- Patent number 11,942,302
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Arno Jan Bleeker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System comprising a multi-beam particle microscope and method for o...
- Patent number 11,935,721
- Issue date Mar 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 11,929,232
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of aligning a charged particle beam apparatus
- Patent number 11,901,155
- Issue date Feb 13, 2024
- FEI Company
- Mykola Kaplenko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-tuning stage settling time with feedback in charged particle m...
- Patent number 11,887,809
- Issue date Jan 30, 2024
- FEI Company
- Yuchen Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,869,745
- Issue date Jan 9, 2024
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS
- Publication number 20250022681
- Publication date Jan 16, 2025
- INFINEON TECHNOLOGIES AG
- Maximilian Alexander MOSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Correction Method and Correction Device
- Publication number 20250014858
- Publication date Jan 9, 2025
- Hitachi High-Tech Corporation
- Tomoaki YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20250006454
- Publication date Jan 2, 2025
- HITACHI HIGH-TECH CORPORATION
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPE ABERRATION CORRECTION
- Publication number 20250006457
- Publication date Jan 2, 2025
- FEI Company
- Maurits Diephuis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240420915
- Publication date Dec 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Mihiro TAKASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGING A REGION OF A SAMPLE
- Publication number 20240420917
- Publication date Dec 19, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Roey Levy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240412943
- Publication date Dec 12, 2024
- Samsung Electronics Co., LTD
- Jinwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automating cryo-electron microscopy data collection
- Publication number 20240395497
- Publication date Nov 28, 2024
- New York Structural Biology Center
- Paul T. Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
- Publication number 20240395499
- Publication date Nov 28, 2024
- RINKEN
- Takahiro SHIMOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING AN ELECTRON BEAM SYSTEM
- Publication number 20240379326
- Publication date Nov 14, 2024
- CARL ZEISS MICROSCOPY GMBH
- Bjoern Gamm
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20240379325
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20240371601
- Publication date Nov 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Yusuke NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS
- Publication number 20240355577
- Publication date Oct 24, 2024
- Eldico Scientific AG
- Gunther STEINFELD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
- Publication number 20240347315
- Publication date Oct 17, 2024
- Fuji Electric Co., Ltd.
- Yusuke SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
- Publication number 20240339295
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Tzu-Chao CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
- Publication number 20240304411
- Publication date Sep 12, 2024
- WINBOND ELECTRONICS CORP.
- Yen-Chiao CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING...
- Publication number 20240290574
- Publication date Aug 29, 2024
- Carl Zeiss SMT GMBH
- Daniel Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope, Aberration Correction Method, And Imaging Method
- Publication number 20240274402
- Publication date Aug 15, 2024
- JEOL Ltd.
- Motofumi Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
- Publication number 20240258067
- Publication date Aug 1, 2024
- FEI Company
- Peter Christiaan TIEMEIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
- Publication number 20240249912
- Publication date Jul 25, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
- Publication number 20240249911
- Publication date Jul 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Teruo KOHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERR...
- Publication number 20240222063
- Publication date Jul 4, 2024
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterpüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTING CHARGED PARTICLE EVENTS AT HIGH DOSE RATES
- Publication number 20240212974
- Publication date Jun 27, 2024
- FEI Company
- Jaap Mulder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Collision Judgment Apparatus, Recording Medium Recording Program, a...
- Publication number 20240212975
- Publication date Jun 27, 2024
- JEOL Ltd.
- Kohei Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...
- Publication number 20240212977
- Publication date Jun 27, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS
- Publication number 20240194442
- Publication date Jun 13, 2024
- FEI Company
- Branislav Straka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MILLING DEVICE
- Publication number 20240194443
- Publication date Jun 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo ASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System
- Publication number 20240186108
- Publication date Jun 6, 2024
- Hitachi High-Tech Corporation
- Hirokazu TAMAKI
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPLICATION DEVICE
- Publication number 20240161997
- Publication date May 16, 2024
- HITACHI HIGH-TECH CORPORATION
- Takashi OHSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTED ENERGY BEAM DEFLECTION FIELD MONITOR AND CORRECTOR
- Publication number 20240157641
- Publication date May 16, 2024
- Nikon Corporation
- Jacek Kazimierz TYMINSKI
- H01 - BASIC ELECTRIC ELEMENTS

Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle beam device

System and method for defect inspection using voltage contrast in a...

Charged particle beam system and overlay misalignment measurement m...

Automated operational control of micro-tooling devices

Transmission electron microscope and inspection method using transm...

System and method for scanning a sample using multi-beam inspection...

Stroboscopic illumination synchronized electron detection and imaging

Systems and methods of profiling charged-particle beams

Electron gun and electron beam application apparatus

Automated ion-beam alignment for dual-beam instrument

Observation method by means of scanning transmission electron micro...

Self-differential confocal tilt sensor for measuring level variatio...

Dual speed acquisition for drift corrected, fast, low dose, adaptiv...

Method and apparatus for usable beam current and brightness in Scho...

Thermal-aided inspection by advanced charge controller module in a...

Adaptive specimen image acquisition using an artificial neural network

Charged particle beam system

Automating cryo-electron microscopy data collection

Method and system for generating a diffraction image

Charged particle assessment tool, inspection method

Adaptive specimen image acquisition

Charged particle beam system

Transmission charged particle microscope with an electron energy lo...

Methods and apparatuses for adjusting beam condition of charged par...

Pulsed charged-particle beam system

System comprising a multi-beam particle microscope and method for o...

Systems and methods for charged particle flooding to enhance voltag...

Method of aligning a charged particle beam apparatus

Auto-tuning stage settling time with feedback in charged particle m...

Charged particle beam device

Patents Applicationslast 30 patents

SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS

Correction Method and Correction Device

CHARGED PARTICLE BEAM DEVICE

MICROSCOPE ABERRATION CORRECTION

CHARGED PARTICLE BEAM DEVICE

DISCHARGING A REGION OF A SAMPLE

SUBSTRATE INSPECTION METHOD

Automating cryo-electron microscopy data collection

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

METHOD FOR OPERATING AN ELECTRON BEAM SYSTEM

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

Charged Particle Beam System

CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS

ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...

METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...

SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM

METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING...

Electron Microscope, Aberration Correction Method, And Imaging Method

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERR...

DETECTING CHARGED PARTICLE EVENTS AT HIGH DOSE RATES

Collision Judgment Apparatus, Recording Medium Recording Program, a...

SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...

CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS

ION MILLING DEVICE

Charged Particle Beam System

ELECTRON BEAM APPLICATION DEVICE

DIRECTED ENERGY BEAM DEFLECTION FIELD MONITOR AND CORRECTOR