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Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided
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CPC
H01J37/265
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/265
Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive specimen image acquisition
Patent number
11,982,634
Issue date
May 14, 2024
FEI Company
Pavel Potocek
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam system
Patent number
11,961,704
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Naoki Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
Patent number
11,948,772
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System comprising a multi-beam particle microscope and method for o...
Patent number
11,935,721
Issue date
Mar 19, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of aligning a charged particle beam apparatus
Patent number
11,901,155
Issue date
Feb 13, 2024
FEI Company
Mykola Kaplenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Auto-tuning stage settling time with feedback in charged particle m...
Patent number
11,887,809
Issue date
Jan 30, 2024
FEI Company
Yuchen Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and charged particle beam device calib...
Patent number
11,848,171
Issue date
Dec 19, 2023
HITACHI HIGH-TECH CORPORATION
Akio Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for measuring a sample and microscope implementing the method
Patent number
11,848,172
Issue date
Dec 19, 2023
Carl Zeiss SMT GmbH
Dmitry Klochkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Estimation model generation method and electron microscope
Patent number
11,842,880
Issue date
Dec 12, 2023
Jeol Ltd.
Ryusuke Sagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Setting position of a particle beam device component
Patent number
11,837,434
Issue date
Dec 5, 2023
Carl Zeiss Microscopy GmbH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring relative rotational angle and scanning transmis...
Patent number
11,837,433
Issue date
Dec 5, 2023
Jeol Ltd.
Akiho Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for usable beam current and brightness in Scho...
Patent number
11,823,862
Issue date
Nov 21, 2023
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system, method of operating a charged particl...
Patent number
11,810,749
Issue date
Nov 7, 2023
Carl Zeiss SMT GmbH
Eugen Foca
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,798,783
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated tomography field ion microscope
Patent number
11,791,129
Issue date
Oct 17, 2023
Centre National de la Recherche Scientifique
François Vurpillot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and method for controlling charged...
Patent number
11,791,131
Issue date
Oct 17, 2023
HITACHI HIGH-TECH CORPORATION
Takashi Dobashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,776,787
Issue date
Oct 3, 2023
Jeol Ltd.
Kazuki Yagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and method of controlling charged p...
Patent number
11,756,764
Issue date
Sep 12, 2023
HITACHI HIGH-TECH CORPORATION
Takashi Dobashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective shutter for charged particle microscope
Patent number
11,749,496
Issue date
Sep 5, 2023
FEI Company
Philip Brundage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Defective pixel management in charged particle microscopy
Patent number
11,742,175
Issue date
Aug 29, 2023
FEI Company
Erik Michiel Franken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission electron microscope and method of adjusting optical sy...
Patent number
11,742,176
Issue date
Aug 29, 2023
Jeol Ltd.
Kazuki Yagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
Patent number
11,728,131
Issue date
Aug 15, 2023
ASML Netherlands B.V.
Ning Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection tool and method of determining a distortion of an inspec...
Patent number
11,728,129
Issue date
Aug 15, 2023
ASML Netherlands B.V.
Peter Christianus Johannes Maria De Loijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
Patent number
11,728,126
Issue date
Aug 15, 2023
Applied Materials Israel Ltd.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sparse sampling using a programmatically randomized signal modulati...
Patent number
11,721,519
Issue date
Aug 8, 2023
SYNCHROTRON RESEARCH, INC.
Edward Principe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
Publication number
20240153732
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Datong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION SYSTEM
Publication number
20240151665
Publication date
May 9, 2024
Hitachi High-Tech Corporation
Yohei NAKAMURA
G01 - MEASURING TESTING
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE
Publication number
20240128049
Publication date
Apr 18, 2024
HITACHI HIGH-TECH CORPORATION
Katsura TAKAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Microscope and Stage
Publication number
20240120169
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Kazuki ISHIZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
Publication number
20240120168
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADAPTIVE SPECIMEN IMAGE ACQUISITION USING AN ARTIFICIAL NEURAL NETWORK
Publication number
20240094151
Publication date
Mar 21, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240096591
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASSESSMENT SYSTEM, METHOD OF ASSESSING
Publication number
20240079205
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Application Management For Charged Particle Microscope Devices
Publication number
20240071717
Publication date
Feb 29, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20240055223
Publication date
Feb 15, 2024
KIOXIA Corporation
Chihiro IDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR SENSOR PROTECTION IN ELECTRON IMAGING APPLICATIONS
Publication number
20240055222
Publication date
Feb 15, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND RELATED SYSTEM AND C...
Publication number
20240047175
Publication date
Feb 8, 2024
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...
Publication number
20240038482
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Eugen Foca
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL...
Publication number
20240029995
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR USABLE BEAM CURRENT AND BRIGHTNESS IN SCHO...
Publication number
20230411114
Publication date
Dec 21, 2023
NUFLARE TECHNOLOGY, INC.
Victor KATSAP
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR INDEXING ELECTRON DIFFRACTION PATTERNS
Publication number
20230395350
Publication date
Dec 7, 2023
Oxford Instruments Nanotechnology Tools Limited
Patrick Trimby
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PART...
Publication number
20230395351
Publication date
Dec 7, 2023
FEI Company
Pavel Potocek
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...
Publication number
20230395352
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Ning YE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20230377837
Publication date
Nov 23, 2023
HITACHI HIGH-TECH CORPORATION
Yohei NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device and Ion Milling Method
Publication number
20230369010
Publication date
Nov 16, 2023
HITACHI HIGH-TECH CORPORATION
Toru Iwaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System and Control Method Therefor
Publication number
20230343550
Publication date
Oct 26, 2023
JEOL Ltd.
Takamitsu Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...
Publication number
20230335370
Publication date
Oct 19, 2023
APPLIED MATERIALS ISRAEL LTD.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND PROCESSOR SYSTEM
Publication number
20230335373
Publication date
Oct 19, 2023
HITACHI HIGH-TECH CORPORATION
Akio YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...
Publication number
20230335374
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Benoit Herve GAURY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and system for analyzing three-dimensional features
Publication number
20230317410
Publication date
Oct 5, 2023
FEI Company
Bingxing Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING
Publication number
20230317408
Publication date
Oct 5, 2023
Intel Corporation
Xianghong Tong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR GENERATING A DIFFRACTION IMAGE
Publication number
20230298853
Publication date
Sep 21, 2023
FEI Company
Bart BUIJSSE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DELAY TIME MEASUREMENT METHOD AND SYSTEM
Publication number
20230298852
Publication date
Sep 21, 2023
ASML NETHERLANDS B.V.
Benoit Herve GAURY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus and Control Method for Charged Part...
Publication number
20230290607
Publication date
Sep 14, 2023
JEOL Ltd.
Takeo Sasaki
H01 - BASIC ELECTRIC ELEMENTS