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Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided
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CPC
H01J37/265
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/265
Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided
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Patents Grants
last 30 patents
Information
Patent Grant
Self-differential confocal tilt sensor for measuring level variatio...
Patent number
12,142,456
Issue date
Nov 12, 2024
ASML Netherlands B.V.
Jinmei Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual speed acquisition for drift corrected, fast, low dose, adaptiv...
Patent number
12,136,532
Issue date
Nov 5, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for usable beam current and brightness in Scho...
Patent number
12,131,883
Issue date
Oct 29, 2024
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
Patent number
12,125,669
Issue date
Oct 22, 2024
ASML Netherlands B.V.
Ning Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive specimen image acquisition using an artificial neural network
Patent number
12,085,523
Issue date
Sep 10, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system
Patent number
12,068,128
Issue date
Aug 20, 2024
HITACHI HIGH-TECH CORPORATION
Yusuke Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automating cryo-electron microscopy data collection
Patent number
12,057,289
Issue date
Aug 6, 2024
New York Structural Biology Center
Paul T. Kim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for generating a diffraction image
Patent number
12,009,176
Issue date
Jun 11, 2024
FEI Company
Bart Buijsse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,984,295
Issue date
May 14, 2024
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive specimen image acquisition
Patent number
11,982,634
Issue date
May 14, 2024
FEI Company
Pavel Potocek
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam system
Patent number
11,961,704
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Naoki Akimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatuses for adjusting beam condition of charged par...
Patent number
11,948,772
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System comprising a multi-beam particle microscope and method for o...
Patent number
11,935,721
Issue date
Mar 19, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of aligning a charged particle beam apparatus
Patent number
11,901,155
Issue date
Feb 13, 2024
FEI Company
Mykola Kaplenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Auto-tuning stage settling time with feedback in charged particle m...
Patent number
11,887,809
Issue date
Jan 30, 2024
FEI Company
Yuchen Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and charged particle beam device calib...
Patent number
11,848,171
Issue date
Dec 19, 2023
HITACHI HIGH-TECH CORPORATION
Akio Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for measuring a sample and microscope implementing the method
Patent number
11,848,172
Issue date
Dec 19, 2023
Carl Zeiss SMT GmbH
Dmitry Klochkov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Estimation model generation method and electron microscope
Patent number
11,842,880
Issue date
Dec 12, 2023
Jeol Ltd.
Ryusuke Sagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Setting position of a particle beam device component
Patent number
11,837,434
Issue date
Dec 5, 2023
Carl Zeiss Microscopy GmbH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring relative rotational angle and scanning transmis...
Patent number
11,837,433
Issue date
Dec 5, 2023
Jeol Ltd.
Akiho Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for usable beam current and brightness in Scho...
Patent number
11,823,862
Issue date
Nov 21, 2023
NUFLARE TECHNOLOGY, INC.
Victor Katsap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system, method of operating a charged particl...
Patent number
11,810,749
Issue date
Nov 7, 2023
Carl Zeiss SMT GmbH
Eugen Foca
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle assessment tool, inspection method
Patent number
11,798,783
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Marco Jan-Jaco Wieland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated tomography field ion microscope
Patent number
11,791,129
Issue date
Oct 17, 2023
Centre National de la Recherche Scientifique
François Vurpillot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and method for controlling charged...
Patent number
11,791,131
Issue date
Oct 17, 2023
HITACHI HIGH-TECH CORPORATION
Takashi Dobashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,776,787
Issue date
Oct 3, 2023
Jeol Ltd.
Kazuki Yagi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR OPERATING AN ELECTRON BEAM SYSTEM
Publication number
20240379326
Publication date
Nov 14, 2024
CARL ZEISS MICROSCOPY GMBH
Bjoern Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
Publication number
20240379325
Publication date
Nov 14, 2024
ASML NETHERLANDS B.V.
Frank Nan ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System
Publication number
20240371601
Publication date
Nov 7, 2024
HITACHI HIGH-TECH CORPORATION
Yusuke NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE BEAM DEVICE FOR DIFFRACTION ANALYSIS
Publication number
20240355577
Publication date
Oct 24, 2024
Eldico Scientific AG
Gunther STEINFELD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
Publication number
20240347315
Publication date
Oct 17, 2024
Fuji Electric Co., Ltd.
Yusuke SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
Publication number
20240339295
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Tzu-Chao CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
Publication number
20240304411
Publication date
Sep 12, 2024
WINBOND ELECTRONICS CORP.
Yen-Chiao CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR IMAGING WITH A SCANNING ELECTRON MICROSCOPE AND SCANNING...
Publication number
20240290574
Publication date
Aug 29, 2024
Carl Zeiss SMT GMBH
Daniel Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope, Aberration Correction Method, And Imaging Method
Publication number
20240274402
Publication date
Aug 15, 2024
JEOL Ltd.
Motofumi Saitoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
Publication number
20240258067
Publication date
Aug 1, 2024
FEI Company
Peter Christiaan TIEMEIJER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
Publication number
20240249912
Publication date
Jul 25, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPIN-POLARIZED SCANNING ELECTRON MICROSCOPE
Publication number
20240249911
Publication date
Jul 25, 2024
HITACHI HIGH-TECH CORPORATION
Teruo KOHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERR...
Publication number
20240222063
Publication date
Jul 4, 2024
ICT Integrated Circuit Testing Gesellschaft für Halbleiterpüftechnik mbH
John Breuer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTING CHARGED PARTICLE EVENTS AT HIGH DOSE RATES
Publication number
20240212974
Publication date
Jun 27, 2024
FEI Company
Jaap Mulder
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Collision Judgment Apparatus, Recording Medium Recording Program, a...
Publication number
20240212975
Publication date
Jun 27, 2024
JEOL Ltd.
Kohei Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM COMPRISING A MULTI-BEAM PARTICLE MICROSCOPE AND METHOD FOR O...
Publication number
20240212977
Publication date
Jun 27, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS
Publication number
20240194442
Publication date
Jun 13, 2024
FEI Company
Branislav Straka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION MILLING DEVICE
Publication number
20240194443
Publication date
Jun 13, 2024
HITACHI HIGH-TECH CORPORATION
Kengo ASAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System
Publication number
20240186108
Publication date
Jun 6, 2024
Hitachi High-Tech Corporation
Hirokazu TAMAKI
G01 - MEASURING TESTING
Information
Patent Application
ELECTRON BEAM APPLICATION DEVICE
Publication number
20240161997
Publication date
May 16, 2024
HITACHI HIGH-TECH CORPORATION
Takashi OHSHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser Thermal Epitaxy in a Charged Particle Microscope
Publication number
20240161999
Publication date
May 16, 2024
FEI Company
Rudolf Geurink
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECTED ENERGY BEAM DEFLECTION FIELD MONITOR AND CORRECTOR
Publication number
20240157641
Publication date
May 16, 2024
Nikon Corporation
Jacek Kazimierz TYMINSKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
Publication number
20240153732
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Datong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION SYSTEM
Publication number
20240151665
Publication date
May 9, 2024
Hitachi High-Tech Corporation
Yohei NAKAMURA
G01 - MEASURING TESTING
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE
Publication number
20240128049
Publication date
Apr 18, 2024
HITACHI HIGH-TECH CORPORATION
Katsura TAKAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Microscope and Stage
Publication number
20240120169
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Kazuki ISHIZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
Publication number
20240120168
Publication date
Apr 11, 2024
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADAPTIVE SPECIMEN IMAGE ACQUISITION USING AN ARTIFICIAL NEURAL NETWORK
Publication number
20240094151
Publication date
Mar 21, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240096591
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS