Controlling tubes by external information

Industry

CPC
H01J37/302

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/302Controlling tubes by external information

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and methods for automated processing of multiple samples in...
- Patent number 12,165,833
- Issue date Dec 10, 2024
- FEI Company
- Michal Hrouzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices and methods for examining and/or processing an element for...
- Patent number 12,135,540
- Issue date Nov 5, 2024
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and the use thereof for flexibly setting the c...
- Patent number 12,119,204
- Issue date Oct 15, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and ion implantation method
- Patent number 12,094,685
- Issue date Sep 17, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Taisei Futakuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
- Patent number 12,087,543
- Issue date Sep 10, 2024
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multiple particle beam system while altering...
- Patent number 12,057,290
- Issue date Aug 6, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern data processing for programmable direct-write apparatus
- Patent number 12,040,157
- Issue date Jul 16, 2024
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
- Patent number 12,033,831
- Issue date Jul 9, 2024
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion milling device
- Patent number 12,020,893
- Issue date Jun 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
- Patent number 11,996,267
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Ruben Cornelis Maas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
- Patent number 11,961,708
- Issue date Apr 16, 2024
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic adjustment method and automatic adjustment device of beam...
- Patent number 11,955,309
- Issue date Apr 9, 2024
- United Microelectronics Corp.
- Zheng-Yang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data generation method, charged particle beam irradiation device, a...
- Patent number 11,942,305
- Issue date Mar 26, 2024
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Waveform generating device, waveform generating method, and charged...
- Patent number 11,837,436
- Issue date Dec 5, 2023
- NuFlare Technology, Inc.
- Michihiko Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for directed irradiation synthesis with ion and thermal beams
- Patent number 11,814,720
- Issue date Nov 14, 2023
- Purdue Research Foundation
- Jean Paul Allain
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing method, charged particle beam writing...
- Patent number 11,804,361
- Issue date Oct 31, 2023
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generating method, multi charged particle beam writing...
- Patent number 11,774,860
- Issue date Oct 3, 2023
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for determining a charged particle beam exposure...
- Patent number 11,756,765
- Issue date Sep 12, 2023
- D2S, Inc.
- Akira Fujimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Proximity effect correcting method, master plate manufacturing meth...
- Patent number 11,742,179
- Issue date Aug 29, 2023
- Kioxia Corporation
- Yoshinori Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and method of adjusti...
- Patent number 11,740,546
- Issue date Aug 29, 2023
- NuFlare Technology, Inc.
- Tsubasa Nanao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FIB delayering endpoint detection by monitoring sputtered materials...
- Patent number 11,694,934
- Issue date Jul 4, 2023
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing device and method of controlling char...
- Patent number 11,694,875
- Issue date Jul 4, 2023
- Jeol Ltd.
- Masakazu Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Temperature control for insertable target holder for solid dopant m...
- Patent number 11,664,192
- Issue date May 30, 2023
- Applied Materials, Inc.
- Shreyansh P. Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Procedural electron beam lithography
- Patent number 11,664,194
- Issue date May 30, 2023
- Magic Leap, Inc.
- Victor Kai Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter irradiating ion mean onto wafer and ion implantation...
- Patent number 11,603,590
- Issue date Mar 14, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method of preparing integrated circuits for backside pro...
- Patent number 11,605,525
- Issue date Mar 14, 2023
- FEI Company
- James Vickers
- G01 - MEASURING TESTING
Information Patent Grant
Analyzing a buried layer of a sample
- Patent number 11,598,633
- Issue date Mar 7, 2023
- Applied Materials Israel Ltd.
- Alexander Mairov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for irradiating a target using restricted placement grids
- Patent number 11,569,064
- Issue date Jan 31, 2023
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
- Patent number 11,545,339
- Issue date Jan 3, 2023
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,545,334
- Issue date Jan 3, 2023
- HITACHI HIGH-TECH CORPORATION
- Ryo Komatsuzaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20240404785
- Publication date Dec 5, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Taisei Futakuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...
- Publication number 20240347316
- Publication date Oct 17, 2024
- Carl Zeiss MultiSEM GmbH
- Hans Fritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING DEVICE AND DRAWING METHOD
- Publication number 20240312761
- Publication date Sep 19, 2024
- KIOXIA Corporation
- Yoshinori KAGAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
- Publication number 20240310722
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimizing Image Distortion in a Multi Beam Charged Particle Proces...
- Publication number 20240304413
- Publication date Sep 12, 2024
- IMS Nanofabrication GmbH
- Christoph Spengler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING A PARTICLE BEAM APPARATUS
- Publication number 20240274397
- Publication date Aug 15, 2024
- CARL ZEISS MICROSCOPY GMBH
- Sebastian Schaedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH
- Publication number 20240222110
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Tommi Tynell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSI...
- Publication number 20240212979
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Ikko TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
- Publication number 20240087845
- Publication date Mar 14, 2024
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused Ion Beam Apparatus
- Publication number 20240071718
- Publication date Feb 29, 2024
- JEOL Ltd.
- Yusuke Kagaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND IMAGING METHOD
- Publication number 20230420215
- Publication date Dec 28, 2023
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE...
- Publication number 20230386784
- Publication date Nov 30, 2023
- D2S, INC.
- Akira Fujimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...
- Publication number 20230377833
- Publication date Nov 23, 2023
- FEI Company
- Michal HROUZEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD,...
- Publication number 20230369015
- Publication date Nov 16, 2023
- NuFlare Technology, Inc.
- Kenichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MILLING DEVICE
- Publication number 20230352263
- Publication date Nov 2, 2023
- Hitachi High-Tech Corporation
- Kengo ASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...
- Publication number 20230290608
- Publication date Sep 14, 2023
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control For Insertable Target Holder For Solid Dopant M...
- Publication number 20230260745
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Shreyansh P. Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE...
- Publication number 20230124768
- Publication date Apr 20, 2023
- D2S, INC.
- Akira Fujimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
- Publication number 20230107036
- Publication date Apr 6, 2023
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIB DELAYERING ENDPOINT DETECTION BY MONITORING SPUTTERED MATERIALS...
- Publication number 20230104390
- Publication date Apr 6, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION
- Publication number 20230093535
- Publication date Mar 23, 2023
- FEI Company
- Pavol KARLÍK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...
- Publication number 20230069666
- Publication date Mar 2, 2023
- KIOXIA Corporation
- Takayuki ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...
- Publication number 20230056463
- Publication date Feb 23, 2023
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANALYZING A SIDEWALL OF HOLE MILLED IN A SAMPLE TO DETERMINE THICKN...
- Publication number 20230057148
- Publication date Feb 23, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA GENERATION METHOD, CHARGED PARTICLE BEAM IRRADIATION DEVICE, A...
- Publication number 20230053272
- Publication date Feb 16, 2023
- NuFlare Technology, Inc.
- Kenichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
- Publication number 20230029715
- Publication date Feb 2, 2023
- NuFlare Technology, Inc.
- Haruyuki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...
- Publication number 20220384142
- Publication date Dec 1, 2022
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Data Processing For Programmable Direct-Write Apparatus
- Publication number 20220384143
- Publication date Dec 1, 2022
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF ADJUSTI...
- Publication number 20220299861
- Publication date Sep 22, 2022
- NuFlare Technology, Inc.
- Tsubasa NANAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS
- Publication number 20220260764
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Rutger MEYER TIMMERMAN THIJSSEN
- H01 - BASIC ELECTRIC ELEMENTS

Controlling tubes by external information

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and methods for automated processing of multiple samples in...

Devices and methods for examining and/or processing an element for...

Particle beam system and the use thereof for flexibly setting the c...

Ion implanter and ion implantation method

Multi-charged particle beam writing apparatus, and multi-charged pa...

Method for operating a multiple particle beam system while altering...

Pattern data processing for programmable direct-write apparatus

Analyzing a sidewall of hole milled in a sample to determine thickn...

Ion milling device

Particle beam apparatus, defect repair method, lithographic exposur...

Charged particle beam writing apparatus, charged particle beam writ...

Automatic adjustment method and automatic adjustment device of beam...

Data generation method, charged particle beam irradiation device, a...

Waveform generating device, waveform generating method, and charged...

Methods for directed irradiation synthesis with ion and thermal beams

Charged particle beam writing method, charged particle beam writing...

Writing data generating method, multi charged particle beam writing...

Method and system for determining a charged particle beam exposure...

Proximity effect correcting method, master plate manufacturing meth...

Multi charged particle beam writing apparatus and method of adjusti...

FIB delayering endpoint detection by monitoring sputtered materials...

Charged particle beam drawing device and method of controlling char...

Temperature control for insertable target holder for solid dopant m...

Procedural electron beam lithography

Ion implanter irradiating ion mean onto wafer and ion implantation...

System and method of preparing integrated circuits for backside pro...

Analyzing a buried layer of a sample

Method for irradiating a target using restricted placement grids

Multi-charged particle beam writing apparatus, and multi-charged pa...

Charged particle beam device

Patents Applicationslast 30 patents

ION IMPLANTER AND ION IMPLANTATION METHOD

METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WHILE ALTERING...

DRAWING DEVICE AND DRAWING METHOD

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

Optimizing Image Distortion in a Multi Beam Charged Particle Proces...

OPERATING A PARTICLE BEAM APPARATUS

PARTIAL BREAKDOWN OF PRECURSORS FOR ENHANCED ALD FILM GROWTH

METHOD FOR DETERMINING AMOUNT OF WEAR OF EDGE RING, PLASMA PROCESSI...

ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD

Focused Ion Beam Apparatus

CHARGED PARTICLE BEAM DEVICE AND IMAGING METHOD

METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE...

SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...

COVERAGE CALCULATING METHOD, CHARGED PARTICLE BEAM WRITING METHOD,...

ION MILLING DEVICE

CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...

Temperature Control For Insertable Target Holder For Solid Dopant M...

METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE...

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...

FIB DELAYERING ENDPOINT DETECTION BY MONITORING SPUTTERED MATERIALS...

APPARATUS AND METHOD FOR AUTOMATED GRID VALIDATION

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR DEVICE AND MAN...

MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI-CHARGED PA...

ANALYZING A SIDEWALL OF HOLE MILLED IN A SAMPLE TO DETERMINE THICKN...

DATA GENERATION METHOD, CHARGED PARTICLE BEAM IRRADIATION DEVICE, A...

CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...

CHARGED PARTICLE BEAM WRITING METHOD, CHARGED PARTICLE BEAM WRITING...

Pattern Data Processing For Programmable Direct-Write Apparatus

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF ADJUSTI...

CONTROLLING ETCH ANGLES BY SUBSTRATE ROTATION IN ANGLED ETCH TOOLS