Cooling of the substrate

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CPC
C23C16/463

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/463Cooling of the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,203,169
- Issue date Jan 21, 2025
- Kokusai Electric Corporation
- Akira Horii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with spatially tunable RF coupling to a wafer
- Patent number 12,191,122
- Issue date Jan 7, 2025
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated carrier cleaning modules
- Patent number 12,104,242
- Issue date Oct 1, 2024
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition part coating chamber
- Patent number 12,074,010
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Michael R. Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,065,741
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for suppressing material warpage by increasing gas density
- Patent number 12,040,239
- Issue date Jul 16, 2024
- ABLEPRINT TECHNOLOGY CO., LTD.
- Chih-Horng Horng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor having cooling device
- Patent number 12,002,661
- Issue date Jun 4, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control method and plasma processing apparatus
- Patent number 11,920,242
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Yuya Minoura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Providing multifunctional shutter disk above the workpiece in the m...
- Patent number 11,920,237
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, state determination method and comp...
- Patent number 11,920,240
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 11,905,595
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene synthesis
- Patent number 11,885,012
- Issue date Jan 30, 2024
- Commonwealth Scientific and Industrial Research Organization
- Dong Han Seo
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Systems and methods for cobalt metalization
- Patent number 11,854,876
- Issue date Dec 26, 2023
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Growth monitor system and methods for film deposition
- Patent number 11,848,202
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus methods for sequential workpiece coating
- Patent number 11,802,339
- Issue date Oct 31, 2023
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hard mask deposition using direct current superimposed radio freque...
- Patent number 11,773,484
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a workpiece using a multi-cycle thermal treat...
- Patent number 11,764,072
- Issue date Sep 19, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Michael X. Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for preparing self-assembled monolayers
- Patent number 11,749,523
- Issue date Sep 5, 2023
- ASM IP Holding B.V.
- Elina Färm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method
- Patent number 11,742,214
- Issue date Aug 29, 2023
- HITACHI HIGH-TECH CORPORATION
- Junya Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Immersion cooling with water-based fluid using nano-structured coating
- Patent number 11,692,271
- Issue date Jul 4, 2023
- The Board of Trustees of the University of Illinois
- Nenad Miljkovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, recording medium, and fluid circula...
- Patent number 11,694,907
- Issue date Jul 4, 2023
- Kokusai Electric Corporation
- Toshiki Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device
- Patent number 11,682,542
- Issue date Jun 20, 2023
- HITACHI HIGH-TECH CORPORATION
- Tooru Aramaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating device for conducting high efficient low temperature coating
- Patent number 11,637,000
- Issue date Apr 25, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for producing graphene on a copper substrate by m...
- Patent number 11,624,114
- Issue date Apr 11, 2023
- Universidad Tecnica Federico Santa Maria
- Patricio Häberle Tapia
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods and apparatus for reducing as-deposited and metastable defe...
- Patent number 11,502,217
- Issue date Nov 15, 2022
- Gautam Ganguly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disk having lamp, power, and/or gas modules arranged at the...
- Patent number 11,492,700
- Issue date Nov 8, 2022
- Taiwan Semiconductor Manufacturing Co.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS
- Publication number 20250019832
- Publication date Jan 16, 2025
- CVD Equipment Corporation
- William S. Linss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...
- Publication number 20250022745
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES
- Publication number 20240425973
- Publication date Dec 26, 2024
- VEECO INSTRUMENTS INC.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...
- Publication number 20240424514
- Publication date Dec 26, 2024
- Leybold GmbH
- Maik Burkhardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20240384406
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER
- Publication number 20240352579
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...
- Publication number 20240337011
- Publication date Oct 10, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Yongjun FENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for synthesis of graphene and other carbon nanomaterials on...
- Publication number 20240327974
- Publication date Oct 3, 2024
- Viesturs Kalnins
- C01 - INORGANIC CHEMISTRY
Information Patent Application
APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...
- Publication number 20240312770
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Jian LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240290610
- Publication date Aug 29, 2024
- Tokyo Electron Limited
- Takashi FUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240282612
- Publication date Aug 22, 2024
- TOTO LTD.
- Shunya MIYAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND PROCESSING METHOD
- Publication number 20240209508
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- MANABU HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smooth Surface Diamond Composite Films
- Publication number 20240208858
- Publication date Jun 27, 2024
- AKHAN Semiconductor, Inc,
- Ernest Schirmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240209509
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Naoya FUKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20240175135
- Publication date May 30, 2024
- TES CO., LTD
- Sung-Chul CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIG...
- Publication number 20240175134
- Publication date May 30, 2024
- LAM RESEARCH CORPORATION
- Gary B. LIND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM
- Publication number 20240175131
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER
- Publication number 20240167149
- Publication date May 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION
- Publication number 20240120197
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...
- Publication number 20240120220
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition Apparatus and Methods for Sequential Coating
- Publication number 20240068102
- Publication date Feb 29, 2024
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...
- Publication number 20240052481
- Publication date Feb 15, 2024
- City University of Hong Kong
- Thuc Hue LY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240035201
- Publication date Feb 1, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20230399742
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUE...
- Publication number 20230399739
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230392262
- Publication date Dec 7, 2023
- TES CO., LTD.
- Tae-Kwang KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
- Publication number 20230392255
- Publication date Dec 7, 2023
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT T...
- Publication number 20230335423
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMMERSION COOLING WITH WATER-BASED FLUID USING NANO-STRUCTURED COATING
- Publication number 20230332293
- Publication date Oct 19, 2023
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Nenad Miljkovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Cooling of the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus, method of processing substrate, met...

Electrostatic chuck with spatially tunable RF coupling to a wafer

Substrate processing system and temperature control method

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Plasma processing apparatus and method of manufacturing semiconduct...

Deposition system with integrated carrier cleaning modules

Atomic layer deposition part coating chamber

Substrate processing apparatus and method of manufacturing semicond...

Roller for transporting a flexible substrate, vacuum processing app...

Method for suppressing material warpage by increasing gas density

Susceptor having cooling device

Temperature control method and plasma processing apparatus

Providing multifunctional shutter disk above the workpiece in the m...

Substrate processing apparatus, state determination method and comp...

Film deposition apparatus and film deposition method

Graphene synthesis

Systems and methods for cobalt metalization

Growth monitor system and methods for film deposition

Deposition apparatus methods for sequential workpiece coating

Hard mask deposition using direct current superimposed radio freque...

Method for processing a workpiece using a multi-cycle thermal treat...

Methods for preparing self-assembled monolayers

Plasma processing method

Immersion cooling with water-based fluid using nano-structured coating

Substrate processing apparatus, recording medium, and fluid circula...

Plasma processing device

Coating device for conducting high efficient low temperature coating

Method and system for producing graphene on a copper substrate by m...

Methods and apparatus for reducing as-deposited and metastable defe...

Shutter disk having lamp, power, and/or gas modules arranged at the...

Patents Applicationslast 30 patents

IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS

Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...

DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPO...

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

PROCESS CHAMBER

MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...

Method for synthesis of graphene and other carbon nanomaterials on...

APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...

FILM FORMING METHOD AND FILM FORMING APPARATUS

ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME

DEPOSITION APPARATUS AND PROCESSING METHOD

Smooth Surface Diamond Composite Films

SUBSTRATE PROCESSING APPARATUS

METAL ORGANIC CHEMICAL VAPOR DEPOSITION APPARATUS

CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIG...

STATE DETERMINATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM

MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER

GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION

LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...

Deposition Apparatus and Methods for Sequential Coating

METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...

Method and Device for Producing a SiC Solid Material

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...

MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT T...

IMMERSION COOLING WITH WATER-BASED FLUID USING NANO-STRUCTURED COATING