Cooling of the substrate

Industry

CPC
C23C16/463

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/463Cooling of the substrate

Industries

Patents Grantslast 30 patents

Information Patent Grant
Temperature control method and plasma processing apparatus
- Patent number 11,920,242
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Yuya Minoura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Providing multifunctional shutter disk above the workpiece in the m...
- Patent number 11,920,237
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, state determination method and comp...
- Patent number 11,920,240
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 11,905,595
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene synthesis
- Patent number 11,885,012
- Issue date Jan 30, 2024
- Commonwealth Scientific and Industrial Research Organization
- Dong Han Seo
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Systems and methods for cobalt metalization
- Patent number 11,854,876
- Issue date Dec 26, 2023
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Growth monitor system and methods for film deposition
- Patent number 11,848,202
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus methods for sequential workpiece coating
- Patent number 11,802,339
- Issue date Oct 31, 2023
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hard mask deposition using direct current superimposed radio freque...
- Patent number 11,773,484
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for processing a workpiece using a multi-cycle thermal treat...
- Patent number 11,764,072
- Issue date Sep 19, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Michael X. Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for preparing self-assembled monolayers
- Patent number 11,749,523
- Issue date Sep 5, 2023
- ASM IP Holding B.V.
- Elina Färm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method
- Patent number 11,742,214
- Issue date Aug 29, 2023
- HITACHI HIGH-TECH CORPORATION
- Junya Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, recording medium, and fluid circula...
- Patent number 11,694,907
- Issue date Jul 4, 2023
- Kokusai Electric Corporation
- Toshiki Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Immersion cooling with water-based fluid using nano-structured coating
- Patent number 11,692,271
- Issue date Jul 4, 2023
- The Board of Trustees of the University of Illinois
- Nenad Miljkovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing device
- Patent number 11,682,542
- Issue date Jun 20, 2023
- HITACHI HIGH-TECH CORPORATION
- Tooru Aramaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating device for conducting high efficient low temperature coating
- Patent number 11,637,000
- Issue date Apr 25, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for producing graphene on a copper substrate by m...
- Patent number 11,624,114
- Issue date Apr 11, 2023
- Universidad Tecnica Federico Santa Maria
- Patricio Häberle Tapia
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods and apparatus for reducing as-deposited and metastable defe...
- Patent number 11,502,217
- Issue date Nov 15, 2022
- Gautam Ganguly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disk having lamp, power, and/or gas modules arranged at the...
- Patent number 11,492,700
- Issue date Nov 8, 2022
- Taiwan Semiconductor Manufacturing Co.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for forming self-assembled monolayers
- Patent number 11,495,455
- Issue date Nov 8, 2022
- ASM IP Holding B.V.
- Elina Färm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage and electrode member
- Patent number 11,421,323
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Daisuke Hayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,367,633
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,365,482
- Issue date Jun 21, 2022
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Index-gradient structures with nanovoided materials and correspondi...
- Patent number 11,340,386
- Issue date May 24, 2022
- Facebook Technologies, LLC
- Andrew John Ouderkirk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus for high-quality graphene synthesis
- Patent number 11,214,869
- Issue date Jan 4, 2022
- CHARMTRON CO., LTD.
- Yong Ki Kim
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Component temperature control using a combination of proportional c...
- Patent number 11,158,528
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryogenically cooled rotatable electrostatic chuck
- Patent number 11,149,345
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Shardul Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,142,823
- Issue date Oct 12, 2021
- Tokyo Electron Limited
- Shinichiro Misaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling station with integrated isolation valves
- Patent number 11,127,606
- Issue date Sep 21, 2021
- Seagate Technology LLC
- Samuel Lewis Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene synthesis
- Patent number 11,060,185
- Issue date Jul 13, 2021
- Commonwealth Scientific and Industrial Research Organisation
- Dong Han Seo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION
- Publication number 20240120197
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...
- Publication number 20240120220
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition Apparatus and Methods for Sequential Coating
- Publication number 20240068102
- Publication date Feb 29, 2024
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...
- Publication number 20240052481
- Publication date Feb 15, 2024
- City University of Hong Kong
- Thuc Hue LY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240035201
- Publication date Feb 1, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20230399742
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUE...
- Publication number 20230399739
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230392262
- Publication date Dec 7, 2023
- TES CO., LTD.
- Tae-Kwang KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
- Publication number 20230392255
- Publication date Dec 7, 2023
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT T...
- Publication number 20230335423
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMMERSION COOLING WITH WATER-BASED FLUID USING NANO-STRUCTURED COATING
- Publication number 20230332293
- Publication date Oct 19, 2023
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Nenad Miljkovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING THE SAME
- Publication number 20230323558
- Publication date Oct 12, 2023
- ASM IP Holding B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL-DOSE SUBSTRATE DEPOSITION MONITORING
- Publication number 20230317531
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Albert Barrett Hicks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS PRODUCTION OF NANOFORESTS
- Publication number 20230264960
- Publication date Aug 24, 2023
- University of Hawai'i
- Mohammad Naghi Ghasemi-Nejhad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXCLUSION RING FOR SUBSTRATE PROCESSING
- Publication number 20230260814
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Vinayakaraddy Gulabal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR COOLING SYSTEM
- Publication number 20230250532
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Rohan Vijay Rane
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
HOLDING DEVICE, AND USE OF THE HOLDING DEVICE
- Publication number 20230245868
- Publication date Aug 3, 2023
- HANWHA Q CELLS GMBH
- Martin SCHAPER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD
- Publication number 20230212746
- Publication date Jul 6, 2023
- 3M Innovative Properties Company
- Cedric Bedoya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Growth Monitor System and Methods for Film Deposition
- Publication number 20230170211
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR REDUCING SUBSTRATE COOL DOWN TIME
- Publication number 20230160101
- Publication date May 25, 2023
- Applied Materials, Inc.
- Thomas ACKERMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH DETACHABLE SHAFT
- Publication number 20230162955
- Publication date May 25, 2023
- Applied Materials, Inc.
- Vijay D. PARKHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for the Temperature Control of a Substrate and Correspond...
- Publication number 20230148124
- Publication date May 11, 2023
- ERS electronic GmbH
- Klaus Reitinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESS SYSTEM INCLUDING A COOLING STATION
- Publication number 20230138317
- Publication date May 4, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chien Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING HEXAGONAL BORON NITRIDE COATINGS AND COMPOSITIONS...
- Publication number 20230125793
- Publication date Apr 27, 2023
- William Marsh Rice University
- Jun Lou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PREPARING SELF-ASSEMBLED MONOLAYERS
- Publication number 20230042093
- Publication date Feb 9, 2023
- ASM IP HOLDING B.V.
- Elina Färm
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
STAGE FOR HEATING AND COOLING OBJECT
- Publication number 20230002904
- Publication date Jan 5, 2023
- ADVANTEC CO., LTD.
- Yuji Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...
- Publication number 20220380894
- Publication date Dec 1, 2022
- Keith GAFF
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR REDUCING AS-DEPOSITEDAND METASTABLE DEFEC...
- Publication number 20220376130
- Publication date Nov 24, 2022
- Gautam Ganguly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APP...
- Publication number 20220364223
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Stefan BANGERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER
- Publication number 20220356562
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Cooling of the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Temperature control method and plasma processing apparatus

Providing multifunctional shutter disk above the workpiece in the m...

Substrate processing apparatus, state determination method and comp...

Film deposition apparatus and film deposition method

Graphene synthesis

Systems and methods for cobalt metalization

Growth monitor system and methods for film deposition

Deposition apparatus methods for sequential workpiece coating

Hard mask deposition using direct current superimposed radio freque...

Method for processing a workpiece using a multi-cycle thermal treat...

Methods for preparing self-assembled monolayers

Plasma processing method

Substrate processing apparatus, recording medium, and fluid circula...

Immersion cooling with water-based fluid using nano-structured coating

Plasma processing device

Coating device for conducting high efficient low temperature coating

Method and system for producing graphene on a copper substrate by m...

Methods and apparatus for reducing as-deposited and metastable defe...

Shutter disk having lamp, power, and/or gas modules arranged at the...

Apparatus for forming self-assembled monolayers

Stage and electrode member

Heat treatment apparatus and heat treatment method

Substrate processing apparatus and method of manufacturing semicond...

Index-gradient structures with nanovoided materials and correspondi...

Heat treatment apparatus for high-quality graphene synthesis

Component temperature control using a combination of proportional c...

Cryogenically cooled rotatable electrostatic chuck

Substrate processing apparatus, substrate processing method, and st...

Cooling station with integrated isolation valves

Graphene synthesis

Patents Applicationslast 30 patents

GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION

LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...

Deposition Apparatus and Methods for Sequential Coating

METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...

Method and Device for Producing a SiC Solid Material

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

HARD MASK DEPOSITION USING DIRECT CURRENT SUPERIMPOSED RADIO FREQUE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...

MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT T...

IMMERSION COOLING WITH WATER-BASED FLUID USING NANO-STRUCTURED COATING

SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING THE SAME

CHEMICAL-DOSE SUBSTRATE DEPOSITION MONITORING

CONTINUOUS PRODUCTION OF NANOFORESTS

EXCLUSION RING FOR SUBSTRATE PROCESSING

REACTOR COOLING SYSTEM

HOLDING DEVICE, AND USE OF THE HOLDING DEVICE

ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD

Growth Monitor System and Methods for Film Deposition

APPARATUS AND METHODS FOR REDUCING SUBSTRATE COOL DOWN TIME

ELECTROSTATIC CHUCK WITH DETACHABLE SHAFT

Apparatus for the Temperature Control of a Substrate and Correspond...

SUBSTRATE PROCESS SYSTEM INCLUDING A COOLING STATION

METHOD OF MAKING HEXAGONAL BORON NITRIDE COATINGS AND COMPOSITIONS...

METHODS FOR PREPARING SELF-ASSEMBLED MONOLAYERS

STAGE FOR HEATING AND COOLING OBJECT

SUBSTRATE SUPPORT WITH VARYING DEPTHS OF AREAS BETWEEN MESAS AND CO...

METHODS AND APPARATUS FOR REDUCING AS-DEPOSITEDAND METASTABLE DEFEC...

ROLLER FOR TRANSPORTING A FLEXIBLE SUBSTRATE, VACUUM PROCESSING APP...

MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER