Crystallisation or recrystallisation of non-monocrystalline semiconductor materials

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H01L21/02667

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02667Crystallisation or recrystallisation of non-monocrystalline semiconductor materials

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Devices having a semiconductor material that is semimetal in bulk a...
- Patent number 12,148,816
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jean-Pierre Colinge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming source/drain contacts
- Patent number 12,142,663
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Biaxially oriented SiC composite substrate and semiconductor device...
- Patent number 12,125,883
- Issue date Oct 22, 2024
- NGK Insulators, Ltd.
- Morimichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate structure and method with enhanced gate contact and threshold...
- Patent number 12,119,403
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Max Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 12,113,124
- Issue date Oct 8, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of crystallizing amorphous silicon film and deposition appar...
- Patent number 12,112,947
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device with semiconductor ca...
- Patent number 12,094,757
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Kai Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 12,080,774
- Issue date Sep 3, 2024
- Samsung Electronics Co., Ltd.
- Ho Kyun An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing silicon film and film deposition apparatus
- Patent number 12,080,552
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Tatsuya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor substrate
- Patent number 12,068,166
- Issue date Aug 20, 2024
- FILNEX INC.
- Mitsuhiko Ogihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices comprising crystalline materials
- Patent number 12,057,472
- Issue date Aug 6, 2024
- Micron Technology, Inc.
- Michael Mutch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ladder annealing process for increasing polysilicon grain size in s...
- Patent number 12,052,868
- Issue date Jul 30, 2024
- Yangtze Memory Technologies Co., Ltd.
- Tuo Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of manufacture
- Patent number 12,033,853
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Yen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor, integrated circuit, and manufacturing method
- Patent number 11,949,020
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Marcus Johannes Henricus Van Dal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing an electronic device
- Patent number 11,923,477
- Issue date Mar 5, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Hubert Bono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and method for fabricating the semicond...
- Patent number 11,903,200
- Issue date Feb 13, 2024
- SK hynix Inc.
- Yu Jeong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming transition metal dichalcogenidethin film and meth...
- Patent number 11,887,849
- Issue date Jan 30, 2024
- Samsung Electronics Co., Ltd.
- Changhyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF substrate structure and method of production
- Patent number 11,848,191
- Issue date Dec 19, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Emmanuel Augendre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system with in-situ electrical bias and me...
- Patent number 11,837,652
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- David Hurley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of manufacture
- Patent number 11,823,894
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Yen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for radical and thermal processing of substrates
- Patent number 11,823,901
- Issue date Nov 21, 2023
- Applied Materials Inc.
- Xinming Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 11,824,098
- Issue date Nov 21, 2023
- Samsung Electronics Co., Ltd.
- Ho Kyun An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film crystallization process
- Patent number 11,810,785
- Issue date Nov 7, 2023
- LUX SEMICONDUCTORS
- Shane Thomas McMahon
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gate structure and method with enhanced gate contact and threshold...
- Patent number 11,804,547
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Max Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating thin, crystalline silicon film and thin film...
- Patent number 11,791,159
- Issue date Oct 17, 2023
- Ramesh kumar Harjivan Kakkad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical memory devices
- Patent number 11,778,826
- Issue date Oct 3, 2023
- Samsung Electronics Co., Ltd.
- Kohji Kanamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming source/drain contacts
- Patent number 11,769,817
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field-effect transistors with a body pedestal
- Patent number 11,764,060
- Issue date Sep 19, 2023
- GLOBALFOUNDRIES U.S. INC.
- Michel J. Abou-Khalil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic devices comprising crystalline materials and related mem...
- Patent number 11,735,416
- Issue date Aug 22, 2023
- Micron Technology, Inc.
- Ashonita A. Chavan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 11,715,666
- Issue date Aug 1, 2023
- Samsung Electronics Co., Ltd.
- Dong-Hyun Im
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER TEMPERATURE MEASUREMENT METHOD
- Publication number 20240421008
- Publication date Dec 19, 2024
- KIOXIA Corporation
- Shunsuke OKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR...
- Publication number 20240395547
- Publication date Nov 28, 2024
- UNIVERSITY OF TSUKUBA
- Kaoru TOKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
- Publication number 20240387711
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jean-Pierre Colinge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE OF HIGH-RESISTIVITY SILICON-ON-INSULATOR EMBEDDED WITH CH...
- Publication number 20240387171
- Publication date Nov 21, 2024
- ZING SEMICONDUCTOR CORPORATION
- Xing WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SOURCE/DRAIN CONTACTS
- Publication number 20240379814
- Publication date Nov 14, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES COMPRISING CRYSTALLINE MATERIALS
- Publication number 20240379739
- Publication date Nov 14, 2024
- Micron Technology, Inc.
- Michael Mutch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
- Publication number 20240332010
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...
- Publication number 20240222114
- Publication date Jul 4, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Claudia Fafard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING THE SEMICONDUCTOR MEMORY DEVICE
- Publication number 20240188298
- Publication date Jun 6, 2024
- SK HYNIX INC.
- Yu Jeong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240105819
- Publication date Mar 28, 2024
- Japan Display Inc.
- Hajime WATAKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FILLING A TRENCH FORMED IN A SEMICONDUCTOR SUBSTRATE
- Publication number 20240096620
- Publication date Mar 21, 2024
- STMicroelectronics (Crolles 2) SAS
- Bilel Saidi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH MOBILITY TRANSISTOR ELEMENT RESULTING FROM IGTO OXIDE SEMICOND...
- Publication number 20240088270
- Publication date Mar 14, 2024
- IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
- Jae Kyeong JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES
- Publication number 20240087889
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Xinming ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE
- Publication number 20240079244
- Publication date Mar 7, 2024
- FILNEX INC.
- Mitsuhiko OGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20240038863
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Ho Kyun An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240038876
- Publication date Feb 1, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gate Structure and Method with Enhanced Gate Contact and Threshold...
- Publication number 20240021727
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Max Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL MEMORY DEVICES
- Publication number 20240015968
- Publication date Jan 11, 2024
- Samsung Electronics Co., Ltd.
- Kohji KANAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...
- Publication number 20230420253
- Publication date Dec 28, 2023
- Ramesh Kumar Harjivan Kakkad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...
- Publication number 20230420254
- Publication date Dec 28, 2023
- Ramesh Kumar Harjivan Kakkad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
- Publication number 20230386827
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yen Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD
- Publication number 20230369502
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shao-Yang Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Source/Drain Contacts
- Publication number 20230369451
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING TELLURIUM-BASED SEMICONDUCTOR DEVICE, TELL...
- Publication number 20230352596
- Publication date Nov 2, 2023
- IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
- Jae Kyeong JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL MODULATOR WITH REGION EPITAXIALLY RE-GROWN OVER POLYCRYSTAL...
- Publication number 20230251510
- Publication date Aug 10, 2023
- Cisco Technology, Inc.
- Alexey V. VERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230189407
- Publication date Jun 15, 2023
- Kokusai Electric Corporation
- Katsuhiko YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230170215
- Publication date Jun 1, 2023
- KOKUSAI ELECTRIC CORPOTATION
- Hideki HORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR GROWTH-ANNEAL CYCLING
- Publication number 20230141370
- Publication date May 11, 2023
- The Regents of the University of Michigan
- Zetian Mi
- C30 - CRYSTAL GROWTH
Information Patent Application
TRANSISTOR, INTEGRATED CIRCUIT, AND MANUFACTURING METHOD
- Publication number 20230111572
- Publication date Apr 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Marcus Johannes Henricus Van Dal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230098703
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Masahiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS

Crystallisation or recrystallisation of non-monocrystalline semiconductor materials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Devices having a semiconductor material that is semimetal in bulk a...

Method for forming source/drain contacts

Biaxially oriented SiC composite substrate and semiconductor device...

Gate structure and method with enhanced gate contact and threshold...

Semiconductor device and method for manufacturing the same

Method of crystallizing amorphous silicon film and deposition appar...

Method for manufacturing semiconductor device with semiconductor ca...

Semiconductor device and method of fabricating the same

Method of depositing silicon film and film deposition apparatus

Semiconductor substrate

Devices comprising crystalline materials

Ladder annealing process for increasing polysilicon grain size in s...

Semiconductor devices and methods of manufacture

Transistor, integrated circuit, and manufacturing method

Method for manufacturing an electronic device

Semiconductor memory device and method for fabricating the semicond...

Method of forming transition metal dichalcogenidethin film and meth...

RF substrate structure and method of production

Semiconductor processing system with in-situ electrical bias and me...

Semiconductor devices and methods of manufacture

System and method for radical and thermal processing of substrates

Semiconductor device and method of fabricating the same

Thin film crystallization process

Gate structure and method with enhanced gate contact and threshold...

Method of fabricating thin, crystalline silicon film and thin film...

Vertical memory devices

Method for forming source/drain contacts

Field-effect transistors with a body pedestal

Electronic devices comprising crystalline materials and related mem...

Method of fabricating semiconductor device

Patents Applicationslast 30 patents

SEMICONDUCTOR WAFER TEMPERATURE MEASUREMENT METHOD

SEMICONDUCTOR APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR...

Devices Having a Semiconductor Material That Is Semimetal in Bulk a...

STRUCTURE OF HIGH-RESISTIVITY SILICON-ON-INSULATOR EMBEDDED WITH CH...

METHOD FOR FORMING SOURCE/DRAIN CONTACTS

DEVICES COMPRISING CRYSTALLINE MATERIALS

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE

METHOD OF FORMING A CONFORMAL AND CONTINUOUS CRYSTALLINE SILICON NA...

METHOD FOR FABRICATING THE SEMICONDUCTOR MEMORY DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF FILLING A TRENCH FORMED IN A SEMICONDUCTOR SUBSTRATE

HIGH MOBILITY TRANSISTOR ELEMENT RESULTING FROM IGTO OXIDE SEMICOND...

SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES

SEMICONDUCTOR SUBSTRATE

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Gate Structure and Method with Enhanced Gate Contact and Threshold...

VERTICAL MEMORY DEVICES

Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...

Method of Fabricating Thin, Crystalline Silicon Film and Thin Film...

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE

SEMICONDUCTOR DEVICE AND METHOD

Method for Forming Source/Drain Contacts

METHOD FOR MANUFACTURING TELLURIUM-BASED SEMICONDUCTOR DEVICE, TELL...

OPTICAL MODULATOR WITH REGION EPITAXIALLY RE-GROWN OVER POLYCRYSTAL...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR GROWTH-ANNEAL CYCLING

TRANSISTOR, INTEGRATED CIRCUIT, AND MANUFACTURING METHOD

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...