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CPC
H01J2237/30422
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/30422
Data compression
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Patents Grants
last 30 patents
Information
Patent Grant
Cross scan proximity correction with ebeam universal cutter
Patent number
10,747,115
Issue date
Aug 18, 2020
Intel Corporation
Yan A. Borodovsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ebeam universal cutter
Patent number
10,578,970
Issue date
Mar 3, 2020
Intel Corporation
Yan A. Borodovsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross scan proximity correction with ebeam universal cutter
Patent number
10,191,376
Issue date
Jan 29, 2019
Intel Corporation
Yan A. Borodovsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Ebeam three beam aperture array
Patent number
10,067,416
Issue date
Sep 4, 2018
Intel Corporation
Yan A. Borodovsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Unidirectional metal on layer with ebeam
Patent number
10,014,256
Issue date
Jul 3, 2018
Intel Corporation
Donald W. Nelson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ebeam three beam aperture array
Patent number
9,897,908
Issue date
Feb 20, 2018
Intel Corporation
Yan A. Borodovsky
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Shot data generation method and multi charged particle beam writing...
Patent number
9,514,914
Issue date
Dec 6, 2016
NuFlare Technology, Inc.
Hideo Inoue
G11 - INFORMATION STORAGE
Information
Patent Grant
Automatic generation of one dimensional data compaction commands fo...
Patent number
6,353,922
Issue date
Mar 5, 2002
International Business Machines Corporation
Gregory J. Dick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of generating electron-beam data for creating a mask
Patent number
6,189,135
Issue date
Feb 13, 2001
Mitsubishi Electric Semiconductor Software Co., Ltd.
Kenichiro Chisaka
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron-beam data generating apparatus
Patent number
6,056,785
Issue date
May 2, 2000
Mitsubishi Electric Semiconductor Software Co., Ltd.
Kenichiro Chisaka
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and apparatus for automatically recognizing repeated shapes...
Patent number
5,699,266
Issue date
Dec 16, 1997
International Business Machines Corporation
Virginia M. Chung
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for automatically recognizing repeated shapes...
Patent number
5,481,472
Issue date
Jan 2, 1996
International Business Machines Corporation
Virginia M. Chung
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
E-beam control data compaction system and method
Patent number
5,251,140
Issue date
Oct 5, 1993
International Business Machines Corporation
Virginia M. Chung
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam exposure system with increased efficiency of exposure...
Patent number
5,175,435
Issue date
Dec 29, 1992
Fujitsu Limited
Kiichi Sakamoto
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CROSS SCAN PROXIMITY CORRECTION WITH EBEAM UNIVERSAL CUTTER
Publication number
20190121236
Publication date
Apr 25, 2019
Intel Corporation
YAN A. BORODOVSKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EBEAM THREE BEAM APERTURE ARRAY
Publication number
20180143526
Publication date
May 24, 2018
Intel Corporation
Yan A. BORODOVSKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA COMPRESSION FOR EBEAM THROUGHPUT
Publication number
20170069509
Publication date
Mar 9, 2017
Intel Corporation
Donald W. NELSON
H01 - BASIC ELECTRIC ELEMENTS