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Data handling, in all parts of the microlithographic apparatus
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Data handling, in all parts of the microlithographic apparatus
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last 30 patents
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Methods and apparatus for measuring a property of a substrate
Patent number
11,977,034
Issue date
May 7, 2024
ASML Netherlands B.V.
Wouter Lodewijk Elings
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
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Patent Grant
Data inspection for digital lithography for HVM using offline and i...
Patent number
11,914,305
Issue date
Feb 27, 2024
Applied Materials, Inc.
Chung-Shin Kang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Preserving hierarchical structure information within a design file
Patent number
11,906,905
Issue date
Feb 20, 2024
Applied Materials, Inc.
Chung-Shin Kang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Dynamic generation of layout adaptive packaging
Patent number
11,899,379
Issue date
Feb 13, 2024
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
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System and method for controlling measurements of sample's parameters
Patent number
11,874,606
Issue date
Jan 16, 2024
Nova Ltd.
Barak Bringoltz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Training method for machine learning assisted optical proximity err...
Patent number
11,815,820
Issue date
Nov 14, 2023
ASML Netherlands B.V.
Jaiin Moon
G06 - COMPUTING CALCULATING COUNTING
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Machine and deep learning methods for spectra-based metrology and p...
Patent number
11,815,819
Issue date
Nov 14, 2023
Nova Ltd.
Barak Bringoltz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Methods of determining corrections for a patterning process, device...
Patent number
11,782,349
Issue date
Oct 10, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method and device for processing print data and for printing accord...
Patent number
11,762,300
Issue date
Sep 19, 2023
Mycronic AB
Fredric Ihren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method for determining corrections for lithographic apparatus
Patent number
11,754,931
Issue date
Sep 12, 2023
ASML Netherlands B.V.
Roy Werkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Determining the combination of patterns to be applied to a substrat...
Patent number
11,747,738
Issue date
Sep 5, 2023
ASML Netherlands B.V.
Coen Adrianus Verschuren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Self-supervised representation learning for interpretation of OCD data
Patent number
11,747,740
Issue date
Sep 5, 2023
Nova Ltd.
Ran Yacoby
G06 - COMPUTING CALCULATING COUNTING
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Method to characterize post-processing data in terms of individual...
Patent number
11,709,432
Issue date
Jul 25, 2023
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Pattern centric process control
Patent number
11,694,009
Issue date
Jul 4, 2023
Anchor Semiconductor, Inc.
Chenmin Hu
G06 - COMPUTING CALCULATING COUNTING
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Method for decision making in a semiconductor manufacturing process
Patent number
11,687,007
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Arnaud Hubaux
G06 - COMPUTING CALCULATING COUNTING
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Method and apparatus for pattern fidelity control
Patent number
11,669,020
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Tanbir Hasan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Metrology apparatus and method for determining a characteristic of...
Patent number
11,650,047
Issue date
May 16, 2023
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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3D structure inspection or metrology using deep learning
Patent number
11,644,756
Issue date
May 9, 2023
KLA Corp.
Scott A. Young
G06 - COMPUTING CALCULATING COUNTING
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Semiconductor device manufacturing system
Patent number
11,635,697
Issue date
Apr 25, 2023
Samsung Electronics Co., Ltd.
Soon Hwan Cha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist and etch modeling
Patent number
11,624,981
Issue date
Apr 11, 2023
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
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Method of determining information about a patterning process, metho...
Patent number
11,604,419
Issue date
Mar 14, 2023
ASML Netherlands B.V.
Joannes Jitse Venselaar
G06 - COMPUTING CALCULATING COUNTING
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Dynamic generation of layout adaptive packaging
Patent number
11,599,032
Issue date
Mar 7, 2023
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
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Methods of determining corrections for a patterning process, device...
Patent number
11,592,753
Issue date
Feb 28, 2023
ASML Netherlands B.V.
Weitian Kou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Devices, systems, and methods for the hybrid generation of drop pat...
Patent number
11,567,414
Issue date
Jan 31, 2023
Canon Kabushiki Kaisha
Ahmed M. Hussein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithographic apparatus and method
Patent number
11,543,756
Issue date
Jan 3, 2023
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Methods of modelling systems or performing predictive maintenance o...
Patent number
11,543,814
Issue date
Jan 3, 2023
ASML Netherlands B.V.
David Evert Song Kook Sigtermans
G06 - COMPUTING CALCULATING COUNTING
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Determining significant relationships between parameters describing...
Patent number
11,526,084
Issue date
Dec 13, 2022
ASML Netherlands B.V.
David Evert Song Kook Sigtermans
G05 - CONTROLLING REGULATING
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Separation of contributions to metrology data
Patent number
11,520,239
Issue date
Dec 6, 2022
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method for operating a machine for microlithography
Patent number
11,480,883
Issue date
Oct 25, 2022
Carl Zeiss SMT GmbH
Michael Kamp-Froese
G06 - COMPUTING CALCULATING COUNTING
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Method for optimization of a lithographic process
Patent number
11,480,884
Issue date
Oct 25, 2022
ASML Netherlands B.V.
Everhardus Cornelis Mos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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ELECTRON BEAM LITHOGRAPHY APPARATUS, ELECTRON BEAM LITHOGRAPHY METH...
Publication number
20240145212
Publication date
May 2, 2024
NIPPON CONTROL SYSTEM CORPORATION
Masakazu HAMAJI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR DECOUPLING SOURCES OF VARIATION RELATED TO SEMICONDUCTOR...
Publication number
20240142959
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Jill Elizabeth FREEMAN
G05 - CONTROLLING REGULATING
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Patent Application
OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS T...
Publication number
20240134289
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Bram Paul Theodoor VAN GOCH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SCALING FOR DIE-LAST ADVANCED IC PACKAGING
Publication number
20240126180
Publication date
Apr 18, 2024
Applied Materials, Inc.
Jang Fung CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20240094648
Publication date
Mar 21, 2024
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, ST...
Publication number
20240069444
Publication date
Feb 29, 2024
Canon Kabushiki Kaisha
YOSHIHIRO OMAMEUDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SELF-SUPERVISED REPRESENTATION LEARNING FOR INTERPRETATION OF OCD DATA
Publication number
20240069445
Publication date
Feb 29, 2024
NOVA LTD
RAN YACOBY
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
PHOTOMASK AND METHOD OF MANUFACTURING DISPLAY PANEL USING THE SAME
Publication number
20240045339
Publication date
Feb 8, 2024
SAMSUNG DISPLAY CO., LTD.
Soon-Hwan So
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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EXPOSURE APPARATUS AND WIRING PATTERN FORMING METHOD
Publication number
20230400773
Publication date
Dec 14, 2023
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD OF SETTING UP A PROJECTION EXPOSURE SYSTEM, A PROJECTION EXP...
Publication number
20230367231
Publication date
Nov 16, 2023
Carl Zeiss SMT GMBH
Eva SCHNEIDER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR IDENTIFYING CONTAMINATION IN A SEMICONDUCT...
Publication number
20230341784
Publication date
Oct 26, 2023
ASML NETHERLANDS B.V.
Tijmen Pieter COLLIGNON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20230333482
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOG...
Publication number
20230314953
Publication date
Oct 5, 2023
Applied Materials, Inc.
Chi-Ming TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Efficient Semiconductor Metrology Using Machine Learning
Publication number
20230317528
Publication date
Oct 5, 2023
MELLANOX TECHNOLOGIES, LTD.
Juan Jose Vegas Olmos
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
TOOL DRIFT COMPENSATION WITH MACHINE LEARNING
Publication number
20230296987
Publication date
Sep 21, 2023
Applied Materials, Inc.
YenShuo LIN
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
CONTROL APPARATUS, SYSTEM, LITHOGRAPHY APPARATUS, ARTICLE MANUFACTU...
Publication number
20230296988
Publication date
Sep 21, 2023
Canon Kabushiki Kaisha
YASUHIRO WATANABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOG...
Publication number
20230288812
Publication date
Sep 14, 2023
Applied Materials, Inc.
Chi-Ming TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD FOR OPTIMIZING LIGHT SOURCE IN INTEGRATED CIRCUIT MANUFACTUR...
Publication number
20230288816
Publication date
Sep 14, 2023
SHENZHEN JINGYUAN INFORMATION TECHNOLOGY CO., LTD
Ge YAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
A METHOD AND APPARATUS FOR CALCULATING A SPATIAL MAP ASSOCIATED WIT...
Publication number
20230273527
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Mauritius Gerardus Elisabeth SCHNEIDERS
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
PREDICTIVE CALIBRATION SCHEDULING APPARATUS AND METHOD
Publication number
20230266168
Publication date
Aug 24, 2023
CYMER, LLC
Mohammad Taghi Mohebbi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
DRAWING METHOD, DRAWING DEVICE, AND PROGRAM
Publication number
20230266674
Publication date
Aug 24, 2023
Inspec Inc.
Masashi SUGAWARA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Application
PROCESS, SYSTEM, AND SOFTWARE FOR MASKLESS LITHOGRAPHY SYSTEMS
Publication number
20230259038
Publication date
Aug 17, 2023
Applied Materials, Inc.
Zheng GU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
MACHINE MEASUREMENT METROLOGY FRAME FOR A LITHOGRAPHY SYSTEM
Publication number
20230221658
Publication date
Jul 13, 2023
Applied Materials, Inc.
Ulrich MUELLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Three-Dimensional Micro-Nano Morphological Structure Manufactured b...
Publication number
20230213869
Publication date
Jul 6, 2023
SVG TECH GROUP CO., LTD
Linsen CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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RESIST AND ETCH MODELING
Publication number
20230205076
Publication date
Jun 29, 2023
LAM RESEARCH CORPORATION
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
System and method for controlling measurements of sample's parameters
Publication number
20230185203
Publication date
Jun 15, 2023
NOVA LTD
Barak BRINGOLTZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHODS AND APPARATUS FOR DIAGNOSING UNOBSERVED OPERATIONAL PARAMETERS
Publication number
20230185202
Publication date
Jun 15, 2023
David Evert Song Kook SIGTERMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
Publication number
20230168591
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Weitian KOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20230161274
Publication date
May 25, 2023
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND DEVICE FOR PATTERN GENERATION
Publication number
20230152711
Publication date
May 18, 2023
Mycronic AB
Martin GLIMTOFT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY