Data handling, in all parts of the microlithographic apparatus

Industry

CPC
G03F7/70508

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70508Data handling, in all parts of the microlithographic apparatus

Industries

Patents Grantslast 30 patents

Information Patent Grant
Dynamic generation of layout adaptive packaging
- Patent number 12,360,467
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Uwe Hollerbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dose mapper method
- Patent number 12,326,664
- Issue date Jun 10, 2025
- Shanghai Huali Integrated Circuit Corporation
- Shuo Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Machine and deep learning methods for spectra-based metrology and p...
- Patent number 12,321,102
- Issue date Jun 3, 2025
- Nova Ltd.
- Barak Bringoltz
- G05 - CONTROLLING REGULATING
Information Patent Grant
State monitoring method, state monitoring apparatus and state monit...
- Patent number 12,321,157
- Issue date Jun 3, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xiaojun Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Data inspection for digital lithography for HVM using offline and i...
- Patent number 12,292,693
- Issue date May 6, 2025
- Applied Materials, Inc.
- Chung-Shin Kang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Full-chip cell critical dimension correction method and method of m...
- Patent number 12,282,249
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Kisung Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for calculating a spatial map associated with...
- Patent number 12,276,918
- Issue date Apr 15, 2025
- ASML Netherlands B.V.
- Mauritius Gerardus Elisabeth Schneiders
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for controlling a semiconductor manufacturing process
- Patent number 12,276,919
- Issue date Apr 15, 2025
- ASML Netherlands B.V.
- Marc Hauptmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Universal metrology file, protocol, and process for maskless lithog...
- Patent number 12,248,254
- Issue date Mar 11, 2025
- Applied Materials, Inc.
- Tamer Coskun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for submicron additive manufacturing
- Patent number 12,208,569
- Issue date Jan 28, 2025
- Lawrence Livermore National Security, LLC
- Sourabh Kumar Saha
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method for decision making in a semiconductor manufacturing process
- Patent number 12,204,252
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Arnaud Hubaux
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure system and method for manufacturing electronic devices
- Patent number 12,197,132
- Issue date Jan 14, 2025
- Gigaphoton Inc.
- Koichi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for diagnosing unobserved operational parameters
- Patent number 12,189,303
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- David Evert Song Kook Sigtermans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Computational metrology
- Patent number 12,189,302
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Use of adaptive replacement maps in digital lithography for local c...
- Patent number 12,141,517
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Aravind Inumpudi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining best focus and best dose in exposure process
- Patent number 12,135,504
- Issue date Nov 5, 2024
- Samsung Electronics Co., Ltd.
- Kihyun Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image stabilization for digital lithography
- Patent number 12,117,732
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Thomas L. Laidig
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for pattern generation
- Patent number 12,055,858
- Issue date Aug 6, 2024
- Mycronic AB
- Martin Glimtoft
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Burst statistics data aggregation filter
- Patent number 12,007,696
- Issue date Jun 11, 2024
- Cymer, LLC
- Matthew Minakais
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determining a correction to a process
- Patent number 11,994,845
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Sarathi Roy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for measuring a property of a substrate
- Patent number 11,977,034
- Issue date May 7, 2024
- ASML Netherlands B.V.
- Wouter Lodewijk Elings
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Data inspection for digital lithography for HVM using offline and i...
- Patent number 11,914,305
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Chung-Shin Kang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Preserving hierarchical structure information within a design file
- Patent number 11,906,905
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Chung-Shin Kang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamic generation of layout adaptive packaging
- Patent number 11,899,379
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Uwe Hollerbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controlling measurements of sample's parameters
- Patent number 11,874,606
- Issue date Jan 16, 2024
- Nova Ltd.
- Barak Bringoltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Training method for machine learning assisted optical proximity err...
- Patent number 11,815,820
- Issue date Nov 14, 2023
- ASML Netherlands B.V.
- Jaiin Moon
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Machine and deep learning methods for spectra-based metrology and p...
- Patent number 11,815,819
- Issue date Nov 14, 2023
- Nova Ltd.
- Barak Bringoltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,782,349
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and device for processing print data and for printing accord...
- Patent number 11,762,300
- Issue date Sep 19, 2023
- Mycronic AB
- Fredric Ihren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining corrections for lithographic apparatus
- Patent number 11,754,931
- Issue date Sep 12, 2023
- ASML Netherlands B.V.
- Roy Werkman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED...
- Publication number 20250237965
- Publication date Jul 24, 2025
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF USING LITHOGRAPHY APPARATUS
- Publication number 20250216795
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Ahyun Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON PROBE POSITIONING PATTERN, DISPLACEMENT MEASUREMENT METHOD...
- Publication number 20250208518
- Publication date Jun 26, 2025
- HUNAN UNIVERSITY
- Koichi MATSUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LEARNING CONTROL SYSTEM AND METHOD FOR ULTRA-PRECISION LITHOGRAPHIC...
- Publication number 20250199417
- Publication date Jun 19, 2025
- HARBIN INSTITUTE OF TECHNOLOGY
- Fazhi SONG
- G05 - CONTROLLING REGULATING
Information Patent Application
STATUS MONITORING AND REPORTING FOR ULTRAVIOLET LIGHT SOURCES
- Publication number 20250172886
- Publication date May 29, 2025
- CYMER, LLC
- Spencer Ryan Williams
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR PROVIDING SENSOR DATA OF AN OPTICAL SYSTEM...
- Publication number 20250164893
- Publication date May 22, 2025
- Carl Zeiss SMT GMBH
- Steffen VAAS
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
FLATNESS ERROR RESISTANT PHOTOMASK MEASUREMENT TECHNIQUES
- Publication number 20250164240
- Publication date May 22, 2025
- Corning Incorporated
- Thomas James Dunn
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL APPARATUS AND CONTROL METHOD OF OPTICAL APPARATUS
- Publication number 20250155823
- Publication date May 15, 2025
- Lasertec Corporation
- Ko GONDAIRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR SUBMICRON ADDITIVE MANUFACTURING
- Publication number 20250144873
- Publication date May 8, 2025
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Sourabh Kumar SAHA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METROLOGY METHOD OF CALIBRATING AND MONITORING RADIATION IN EUV LIT...
- Publication number 20250137844
- Publication date May 1, 2025
- KLA Corporation
- Earl Jensen
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR REPLICATING A MASTER HOLOGRAPHIC OPTICAL ELEMENT WITH VA...
- Publication number 20250130506
- Publication date Apr 24, 2025
- Carl Zeiss Jena GmbH
- Markus GIEHL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION CONTROL OF STRUCTURAL ELEMENTS OF EXPOSURE APPARATUS
- Publication number 20250130510
- Publication date Apr 24, 2025
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRUCTURE AND TECHNIQUE OF PHOTO-DEFINED SEMICONDUCTOR DEVICE WITH...
- Publication number 20250117561
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Benjamin D. Briggs
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF GENERATING DRAWING DATA, DRAWING DATA GENERATION DEVICE,...
- Publication number 20250093785
- Publication date Mar 20, 2025
- Nikon Corporation
- Yuho KANAYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR ASSESSING PHOTORESIST RINSE SOLUTION
- Publication number 20250093784
- Publication date Mar 20, 2025
- Samsung Electronics Co., Ltd.
- DAIKI MINAMI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EDGE PLACEMENT WITH SPATIAL LIGHT MODULATOR WRITING
- Publication number 20250093783
- Publication date Mar 20, 2025
- Mycronic AB
- Martin GLIMTOFT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING PATTERN SHIFT IN A LITHOGRAPHIC AP...
- Publication number 20250021018
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Joost Cyrillus Lambert HAGEMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGE STABILIZATION FOR DIGITAL LITHOGRAPHY
- Publication number 20250021016
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Thomas L. LAIDIG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOURCE SEPARATION FROM METROLOGY DATA
- Publication number 20250004385
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Marc Johannes NOOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Determination of Imaging Transfer Function of a Charged-Particle Ex...
- Publication number 20240427254
- Publication date Dec 26, 2024
- IMS Nanofabrication GmbH
- Christoph Spengler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN SHAPE MEASUREMENT METHOD, PATTERN SHAPE MEASUREMENT APPARAT...
- Publication number 20240426605
- Publication date Dec 26, 2024
- KIOXIA Corporation
- Taiki ITO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
- Publication number 20240429672
- Publication date Dec 26, 2024
- Gigaphoton Inc.
- Seiji NOGIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING S...
- Publication number 20240419085
- Publication date Dec 19, 2024
- KIOXIA Corporation
- Yoshio MIZUTA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR CALCULATING REPARATION DOSE FOR A DIE OF A...
- Publication number 20240411232
- Publication date Dec 12, 2024
- ASML NETHERLANDS B.V.
- Jingshi LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPT...
- Publication number 20240402613
- Publication date Dec 5, 2024
- Carl Zeiss SMT GMBH
- Alexander Winkler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION PROCESSING APPARATUS, EXPOSURE APPARATUS, AND ARTICLE M...
- Publication number 20240393700
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- JUN KITAGAWA
- G05 - CONTROLLING REGULATING
Information Patent Application
ETCHING SYSTEMS, MODELS, AND MANUFACTURING PROCESSES
- Publication number 20240385530
- Publication date Nov 21, 2024
- ASML NETHERLANDS B.V.
- Jiao HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASURING METHOD, LITHOGRAPHY METHOD, ARTICLE MANUFACTURING METHOD,...
- Publication number 20240385534
- Publication date Nov 21, 2024
- Canon Kabushiki Kaisha
- SHINGO HANYUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION COLLECTION SYSTEM, INSPECTION SUBSTRATE, AND INFORMATIO...
- Publication number 20240385538
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Junnosuke Maki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...
- Publication number 20240377763
- Publication date Nov 14, 2024
- Nikon Corporation
- Arata OCHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Data handling, in all parts of the microlithographic apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Dynamic generation of layout adaptive packaging

Dose mapper method

Machine and deep learning methods for spectra-based metrology and p...

State monitoring method, state monitoring apparatus and state monit...

Data inspection for digital lithography for HVM using offline and i...

Full-chip cell critical dimension correction method and method of m...

Method and apparatus for calculating a spatial map associated with...

Method for controlling a semiconductor manufacturing process

Universal metrology file, protocol, and process for maskless lithog...

System and method for submicron additive manufacturing

Method for decision making in a semiconductor manufacturing process

Exposure system and method for manufacturing electronic devices

Methods and apparatus for diagnosing unobserved operational parameters

Computational metrology

Use of adaptive replacement maps in digital lithography for local c...

Method for determining best focus and best dose in exposure process

Image stabilization for digital lithography

Method and device for pattern generation

Burst statistics data aggregation filter

Determining a correction to a process

Methods and apparatus for measuring a property of a substrate

Data inspection for digital lithography for HVM using offline and i...

Preserving hierarchical structure information within a design file

Dynamic generation of layout adaptive packaging

System and method for controlling measurements of sample's parameters

Training method for machine learning assisted optical proximity err...

Machine and deep learning methods for spectra-based metrology and p...

Methods of determining corrections for a patterning process, device...

Method and device for processing print data and for printing accord...

Method for determining corrections for lithographic apparatus

Patents Applicationslast 30 patents

SETUP AND CONTROL METHODS FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED...

METHOD OF USING LITHOGRAPHY APPARATUS

ELECTRON PROBE POSITIONING PATTERN, DISPLACEMENT MEASUREMENT METHOD...

LEARNING CONTROL SYSTEM AND METHOD FOR ULTRA-PRECISION LITHOGRAPHIC...

STATUS MONITORING AND REPORTING FOR ULTRAVIOLET LIGHT SOURCES

APPARATUS AND METHOD FOR PROVIDING SENSOR DATA OF AN OPTICAL SYSTEM...

FLATNESS ERROR RESISTANT PHOTOMASK MEASUREMENT TECHNIQUES

OPTICAL APPARATUS AND CONTROL METHOD OF OPTICAL APPARATUS

SYSTEM AND METHOD FOR SUBMICRON ADDITIVE MANUFACTURING

METROLOGY METHOD OF CALIBRATING AND MONITORING RADIATION IN EUV LIT...

DEVICE FOR REPLICATING A MASTER HOLOGRAPHIC OPTICAL ELEMENT WITH VA...

VIBRATION CONTROL OF STRUCTURAL ELEMENTS OF EXPOSURE APPARATUS

STRUCTURE AND TECHNIQUE OF PHOTO-DEFINED SEMICONDUCTOR DEVICE WITH...

METHOD OF GENERATING DRAWING DATA, DRAWING DATA GENERATION DEVICE,...

APPARATUS AND METHOD FOR ASSESSING PHOTORESIST RINSE SOLUTION

EDGE PLACEMENT WITH SPATIAL LIGHT MODULATOR WRITING

SYSTEMS AND METHODS FOR REDUCING PATTERN SHIFT IN A LITHOGRAPHIC AP...

IMAGE STABILIZATION FOR DIGITAL LITHOGRAPHY

SOURCE SEPARATION FROM METROLOGY DATA

Determination of Imaging Transfer Function of a Charged-Particle Ex...

PATTERN SHAPE MEASUREMENT METHOD, PATTERN SHAPE MEASUREMENT APPARAT...

LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING S...

METHOD AND APPARATUS FOR CALCULATING REPARATION DOSE FOR A DIE OF A...

METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPT...

INFORMATION PROCESSING APPARATUS, EXPOSURE APPARATUS, AND ARTICLE M...

ETCHING SYSTEMS, MODELS, AND MANUFACTURING PROCESSES

MEASURING METHOD, LITHOGRAPHY METHOD, ARTICLE MANUFACTURING METHOD,...

INFORMATION COLLECTION SYSTEM, INSPECTION SUBSTRATE, AND INFORMATIO...

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...