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Blanking aperture array unit
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Patent number 11,837,429
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Issue date Dec 5, 2023
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NuFlare Technology, Inc.
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Shuji Yoshino
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam apparatus
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Patent number 11,791,124
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Issue date Oct 17, 2023
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Hitachi High-Technologies Corporation
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Yuta Kawamoto
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam apparatus
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Patent number 11,784,023
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Issue date Oct 10, 2023
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Hitachi High-Technologies Corporation
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Yuta Kawamoto
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,626,266
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Issue date Apr 11, 2023
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HITACHI HIGH-TECH CORPORATION
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Keiichiro Hitomi
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam system
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Patent number 11,562,881
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Issue date Jan 24, 2023
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Carl Zeiss MultiSEM GmbH
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Dirk Zeidler
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H01 - BASIC ELECTRIC ELEMENTS
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Charged particle beam device
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Patent number 11,380,515
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Issue date Jul 5, 2022
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HITACHI HIGH-TECH CORPORATION
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Keiichiro Hosobuchi
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H01 - BASIC ELECTRIC ELEMENTS
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