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deposition by decomposition or reaction of gaseous or vapour phase compounds
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02271
deposition by decomposition or reaction of gaseous or vapour phase compounds
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last 30 patents
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Patent Grant
Apparatus for rotating substrates
Patent number
12,165,907
Issue date
Dec 10, 2024
Applied Materials, Inc.
Giridhar Kamesh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Fin field-effect transistor device and method
Patent number
12,154,973
Issue date
Nov 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Jung Ho
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method
Patent number
12,142,668
Issue date
Nov 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Chih Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Staircase etch control in forming three-dimensional memory device
Patent number
12,142,575
Issue date
Nov 12, 2024
Yangtza Memory Technologies Co., Ltd.
Zhenyu Lu
H01 - BASIC ELECTRIC ELEMENTS
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Vapor phase deposition of organic films
Patent number
12,138,654
Issue date
Nov 12, 2024
ASM IP Holding B.V.
Viljami J. Pore
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Apparatus and method for cleaning reaction vessel for processing su...
Patent number
12,139,787
Issue date
Nov 12, 2024
Kokusai Electric Corporation
Shinya Ebata
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Methods of manufacturing three-dimensional integrated circuit struc...
Patent number
12,136,619
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsien-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
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Integrated method for low-cost wide band gap semiconductor device m...
Patent number
12,125,697
Issue date
Oct 22, 2024
ThinSiC Inc.
Tirunelveli Subramaniam Ravi
H01 - BASIC ELECTRIC ELEMENTS
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Method of manufacturing semiconductor device
Patent number
12,125,901
Issue date
Oct 22, 2024
Fuji Electric Co., Ltd.
Makoto Shimosawa
H01 - BASIC ELECTRIC ELEMENTS
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Mechanism for finFET well doping
Patent number
12,112,975
Issue date
Oct 8, 2024
Taiwan Semiconductor Manufacturing Company
Chun Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
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Contact features of semiconductor devices
Patent number
12,112,984
Issue date
Oct 8, 2024
Taiwan Semiconductor Manufacturing Company Limited
Tsui-Ling Yen
H01 - BASIC ELECTRIC ELEMENTS
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NMOS and PMOS transistor gates with hafnium oxide layers and lantha...
Patent number
12,107,015
Issue date
Oct 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shahaji B. More
H01 - BASIC ELECTRIC ELEMENTS
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Plasma treatment process to densify oxide layers
Patent number
12,094,709
Issue date
Sep 17, 2024
Applied Materials, Inc.
Jung Chan Lee
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor processing tool and methods of operation
Patent number
12,084,762
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ker-hsun Liao
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In-situ film growth rate monitoring apparatus, systems, and methods...
Patent number
12,077,880
Issue date
Sep 3, 2024
Applied Materials, Inc.
Zhepeng Cong
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Substrate processing apparatus and method of manufacturing semicond...
Patent number
12,065,741
Issue date
Aug 20, 2024
Kokusai Electric Corporation
Mikio Ohno
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Methods of reducing capacitance in field-effect transistors
Patent number
12,057,488
Issue date
Aug 6, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Han Chen
H01 - BASIC ELECTRIC ELEMENTS
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Compositions and methods using same for deposition of silicon-conta...
Patent number
12,049,695
Issue date
Jul 30, 2024
VERSUM MATERIALS US, LLC
Raymond Nicholas Vrtis
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Isolation regions including two layers and method forming same
Patent number
12,051,614
Issue date
Jul 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tsung Han Hsu
H01 - BASIC ELECTRIC ELEMENTS
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Vapor phase transport systems for depositing perovskite semiconductors
Patent number
12,046,467
Issue date
Jul 23, 2024
Swift Solar Inc.
Kevin Alexander Bush
H01 - BASIC ELECTRIC ELEMENTS
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Processes for depositing sib films
Patent number
12,033,848
Issue date
Jul 9, 2024
Applied Materials, Inc.
Aykut Aydin
H01 - BASIC ELECTRIC ELEMENTS
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Chip package, method of forming a chip package and method of formin...
Patent number
12,033,972
Issue date
Jul 9, 2024
Infineon Technologies AG
Joachim Mahler
H01 - BASIC ELECTRIC ELEMENTS
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Process and related device for removing by-product on semiconductor...
Patent number
12,027,350
Issue date
Jul 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jing-Cheng Liao
H01 - BASIC ELECTRIC ELEMENTS
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Processes to deposit amorphous-silicon etch protection liner
Patent number
12,027,374
Issue date
Jul 2, 2024
Applied Materials, Inc.
Zeqing Shen
H01 - BASIC ELECTRIC ELEMENTS
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Methods for preparing AlN based template having Si substrate and Ga...
Patent number
12,020,925
Issue date
Jun 25, 2024
Xidian University
Zhihong Liu
H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
Patent number
12,018,373
Issue date
Jun 25, 2024
Kokusai Electric Corporation
Seiyo Nakashima
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Method for fabricating field-effect transistor
Patent number
12,020,931
Issue date
Jun 25, 2024
Nippon Telegraph and Telephone Corporation
Yuki Yoshiya
H01 - BASIC ELECTRIC ELEMENTS
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Single process volume to perform high-pressure and low-pressure pro...
Patent number
12,012,652
Issue date
Jun 18, 2024
Applied Materials, Inc.
Kelvin Chan
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device with reduced critical dimensions
Patent number
12,009,212
Issue date
Jun 11, 2024
NANYA TECHNOLOGY CORPORATION
Kuo-Hui Su
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor power device and method for producing same
Patent number
12,009,213
Issue date
Jun 11, 2024
Rohm Co., Ltd.
Yuki Nakano
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
Publication number
20240410078
Publication date
Dec 12, 2024
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
PLASMA TREATMENT PROCESS TO DENSIFY OXIDE LAYERS
Publication number
20240404823
Publication date
Dec 5, 2024
Applied Materials, Inc.
Jung Chan LEE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD
Publication number
20240395902
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Chih Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
FIN FIELD-EFFECT TRANSISTOR DEVICE AND METHOD
Publication number
20240387701
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Jung Ho
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF GAP FILLING FOR SEMICONDUCTOR DEVICE
Publication number
20240387704
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Yang Lai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240384403
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ker-hsun LIAO
B08 - CLEANING
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METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240371852
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsien-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240371630
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
I-Hsuan Lo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
NMOS and PMOS Transistor Gates with Hafnium Oxide Layers and Lantha...
Publication number
20240363442
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shahaji B. More
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240360552
Publication date
Oct 31, 2024
Kokusai Electric Corporation
Hideharu ITATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
PROCESSES FOR DEPOSITING SIB FILMS
Publication number
20240339316
Publication date
Oct 10, 2024
Applied Materials, Inc.
Aykut AYDIN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
COMPRESSIVE FILMS FOR LARGE AREA GAPFILL
Publication number
20240332028
Publication date
Oct 3, 2024
Applied Materials, Inc.
Supriya Ghosh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PROCESS AND RELATED DEVICE FOR REMOVING BY-PRODUCT ON SEMICONDUCTOR...
Publication number
20240331988
Publication date
Oct 3, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jing-Cheng Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE SUPPORTER
Publication number
20240321619
Publication date
Sep 26, 2024
Samsung Electronics Co., Ltd.
Yunjae Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE HAVING A PASSIVATION LAYER
Publication number
20240321787
Publication date
Sep 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Lung SHIH
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PROCESSES TO DEPOSIT AMORPHOUS-SILICON ETCH PROTECTION LINER
Publication number
20240321589
Publication date
Sep 26, 2024
Applied Materials, Inc.
Zeqing SHEN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR POWER DEVICE AND METHOD FOR PRODUCING SAME
Publication number
20240304447
Publication date
Sep 12, 2024
Rohm Co., Ltd.
Yuki Nakano
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS OF REDUCING CAPACITANCE IN FIELD-EFFECT TRANSISTORS
Publication number
20240297236
Publication date
Sep 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Han Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CONFORMAL AND SELECTIVE SIN DEPOSITION
Publication number
20240290612
Publication date
Aug 29, 2024
Applied Materials, Inc.
Zeqing SHEN
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CONNECTION BETWEEN SOURCE/DRAIN AND GATE
Publication number
20240292592
Publication date
Aug 29, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Chuan Yang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240290881
Publication date
Aug 29, 2024
RENESAS ELECTRONICS CORPORATION
Yasuhiro OKAMOTO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240266164
Publication date
Aug 8, 2024
Kokusai Electric Corporation
Nagisa SUYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20240266184
Publication date
Aug 8, 2024
NANYA TECHNOLOGY CORPORATION
HSUAN-WU LAI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
Publication number
20240254630
Publication date
Aug 1, 2024
Kokusai Electric Corporation
Hideo TATENO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
FILLING OPENINGS BY COMBINING NON-FLOWABLE AND FLOWABLE PROCESSES
Publication number
20240249972
Publication date
Jul 25, 2024
Intel Corporation
Ebony L. Mays
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
VIA FOR SEMICONDUCTOR DEVICE CONNECTION
Publication number
20240250020
Publication date
Jul 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Hua Yu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
LAMINATED STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF FORMING CR...
Publication number
20240250185
Publication date
Jul 25, 2024
Shin-Etsu Chemical Co., Ltd.
Takenori WATABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240249933
Publication date
Jul 25, 2024
Kokusai Electric Corporation
Katsuyoshi HARADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Gate Structures in Transistor Devices and Methods of Forming Same
Publication number
20240249938
Publication date
Jul 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsin-Yi Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
EPITAXIAL NITRIDE FERROELECTRONICS
Publication number
20240242963
Publication date
Jul 18, 2024
The Regents of the University of Michigan
Zetian Mi
C30 - CRYSTAL GROWTH