deposition by decomposition or reaction of gaseous or vapour phase compounds

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CPC
H01L21/02271

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02271deposition by decomposition or reaction of gaseous or vapour phase compounds

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, processing method, and non-transito...
- Patent number 12,368,043
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Akinori Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,365,987
- Issue date Jul 22, 2025
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming semiconductor structure with high aspect ratio
- Patent number 12,369,390
- Issue date Jul 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Han-Pin Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing composite layer circuit structure of elect...
- Patent number 12,362,252
- Issue date Jul 15, 2025
- INNOLUX CORPORATION
- Yu-Jen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate and locos dielectrics grown using locos processing
- Patent number 12,354,905
- Issue date Jul 8, 2025
- Texas Instruments Incorporated
- Mark Francis Arendt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor film
- Patent number 12,351,906
- Issue date Jul 8, 2025
- NGK Insulators, Ltd.
- Jun Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MOCVD method for growing INALGAN/GAN heterostructure
- Patent number 12,347,678
- Issue date Jul 1, 2025
- NATIONAL YANG MING CHIAO TUNG UNIVERSITY
- Edward Yi Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 12,341,004
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for annealing a gate insulation layer on a wide band gap sem...
- Patent number 12,341,012
- Issue date Jun 24, 2025
- Infineon Technologies AG
- Thomas Aichinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with fin structures
- Patent number 12,342,605
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kun-Yu Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming method of semiconductor structure and semiconductor structure
- Patent number 12,341,073
- Issue date Jun 24, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Huiwen Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for patterning a silicon oxide-silicon nitride-silicon oxid...
- Patent number 12,334,333
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Ren Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures and methods for fabricating staircase regions of a three...
- Patent number 12,334,399
- Issue date Jun 17, 2025
- Yangtze Memory Technologies Co., Ltd.
- Xiongyu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating Fin-type field-effect transistor device havin...
- Patent number 12,324,224
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stimulus responsive polymer films and formulations
- Patent number 12,322,588
- Issue date Jun 3, 2025
- Lam Research Corporation
- Gregory Blachut
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Step coverage using an inhibitor molecule for high aspect ratio str...
- Patent number 12,312,677
- Issue date May 27, 2025
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Wontae Noh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin field-effect transistor device having contact plugs with re-ent...
- Patent number 12,310,051
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D semiconductor device and array layout with isolated conductive p...
- Patent number 12,310,023
- Issue date May 20, 2025
- Macronix International Co., Ltd.
- Hang-Ting Lue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FinFET structure with a composite stress layer and reduced fin buck...
- Patent number 12,302,611
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Jen Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filling openings by combining non-flowable and flowable processes
- Patent number 12,300,533
- Issue date May 13, 2025
- Intel Corporation
- Ebony L. Mays
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and method of manufacturing the same
- Patent number 12,302,581
- Issue date May 13, 2025
- Kioxia Corporation
- Kyungmin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of semiconductor integration films
- Patent number 12,300,491
- Issue date May 13, 2025
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with self-aligned vias
- Patent number 12,293,944
- Issue date May 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chien-Han Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition method to form air gaps
- Patent number 12,283,520
- Issue date Apr 22, 2025
- ASM IP Holding B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with silicon nitride passivation film
- Patent number 12,278,102
- Issue date Apr 15, 2025
- Sumitomo Electric Industries, Ltd.
- Kazuhide Sumiyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with helmet structure between two semiconducto...
- Patent number 12,278,236
- Issue date Apr 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-Cheng Ching
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 12,272,693
- Issue date Apr 8, 2025
- United Microelectronics Corp.
- Chun-Ya Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and methods of manufacture
- Patent number 12,266,576
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide-nitride-oxide stack having multiple oxynitride layers
- Patent number 12,266,521
- Issue date Apr 1, 2025
- LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Sagy Charel Levy
- G11 - INFORMATION STORAGE
Information Patent Grant
Semiconductor device with source/drain contact formed using bottom-...
- Patent number 12,266,688
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sung-Li Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILLING OPENINGS BY COMBINING NON-FLOWABLE AND FLOWABLE PROCESSES
- Publication number 20250239482
- Publication date Jul 24, 2025
- Intel Corporation
- Ebony L. Mays
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH SELF-ALIGNED VIAS
- Publication number 20250239487
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Han Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE DEPOSITION OF DIELECTRIC FILMS
- Publication number 20250239445
- Publication date Jul 24, 2025
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING ATMOSPHERE, METHOD OF PROCESSING SUBSTRATE, M...
- Publication number 20250230548
- Publication date Jul 17, 2025
- Kokusai Electric Corporation
- Kaoru YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication and processing of graphene electronic devices on Silico...
- Publication number 20250226212
- Publication date Jul 10, 2025
- Archer Materials Limited
- Alexander James PORKOVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Heat Insulating Structure, Method o...
- Publication number 20250215561
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENCAPSULATED FLEXIBLE ELECTRONICS FOR LONG-TERM IMPLANTATION
- Publication number 20250213162
- Publication date Jul 3, 2025
- Northwestern University
- John A. ROGERS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF WAFER GROUNDING UTILIZING WAFER EDGE BACKSIDE COATING EXC...
- Publication number 20250218720
- Publication date Jul 3, 2025
- ASML NETHERLANDS B.V.
- Yinglong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250218770
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE WITH HELMET STRUCTURE BETWEEN TWO SEMICONDUCTO...
- Publication number 20250212505
- Publication date Jun 26, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Cheng CHING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAVITY FORMING COMPOSITION
- Publication number 20250206862
- Publication date Jun 26, 2025
- NISSAN CHEMICAL CORPORATION
- Kazuhiko KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH SOURCE/DRAIN CONTACT FORMED USING BOTTOM-...
- Publication number 20250203976
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sung-Li WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR MAKING EUV PATTERNABLE HARD MASKS
- Publication number 20250201553
- Publication date Jun 19, 2025
- LAM RESEARCH CORPORATION
- Chenghao Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20250204039
- Publication date Jun 19, 2025
- UNITED MICROELECTRONICS CORP.
- Chun-Ya Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20250201624
- Publication date Jun 19, 2025
- NANYA TECHNOLOGY CORPORATION
- Ming-Yang HSIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR
- Publication number 20250204051
- Publication date Jun 19, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Ming WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURE
- Publication number 20250194227
- Publication date Jun 12, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compositions and Methods Using Same for Deposition of Silicon-Conta...
- Publication number 20250188605
- Publication date Jun 12, 2025
- VERSUM MATERIALS US, LLC
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated Method For Low-Cost Wide Band Gap Semiconductor Device M...
- Publication number 20250183026
- Publication date Jun 5, 2025
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...
- Publication number 20250183029
- Publication date Jun 5, 2025
- VERSUM MATERIALS US, LLC
- Mark Leonard O'Neill
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
WORD LINE STRUCTURE OF THREE-DIMENSIONAL MEMORY DEVICE
- Publication number 20250176182
- Publication date May 29, 2025
- Yangtze Memory Technologies Co., Ltd.
- Qiang XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL CVD OF TITANIUM SILICIDE METHODS TO FORM SEMICONDUCTOR STRU...
- Publication number 20250174456
- Publication date May 29, 2025
- Applied Materials, Inc.
- Shumao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THEREOF
- Publication number 20250169100
- Publication date May 22, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tsung-Lin LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-FLOW CHAMBER KITS, PROCESSING CHAMBERS, AND RELATED APPARATUS...
- Publication number 20250149350
- Publication date May 8, 2025
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING SYSTEM
- Publication number 20250129479
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE POWER MOSFET AND METHOD FOR MANUFACTURING SAME
- Publication number 20250107194
- Publication date Mar 27, 2025
- MICROCHIP TECHNOLOGY INCORPORATED
- Shesh Mani Pandey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU SIDEWALL PASSIVATION TOWARD THE BOTTOM OF HIGH ASPECT RATIO...
- Publication number 20250095984
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Sonam Dorje Sherpa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCULAR-SHAPED RESISTOR
- Publication number 20250089347
- Publication date Mar 13, 2025
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL
- Publication number 20250079162
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20250081498
- Publication date Mar 6, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- Jun Wu
- H01 - BASIC ELECTRIC ELEMENTS

deposition by decomposition or reaction of gaseous or vapour phase compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus, processing method, and non-transito...

Method of processing substrate, method of manufacturing semiconduct...

Method for forming semiconductor structure with high aspect ratio

Method for manufacturing composite layer circuit structure of elect...

Gate and locos dielectrics grown using locos processing

Semiconductor film

MOCVD method for growing INALGAN/GAN heterostructure

Film formation method and film formation apparatus

Method for annealing a gate insulation layer on a wide band gap sem...

Semiconductor device with fin structures

Forming method of semiconductor structure and semiconductor structure

Methods for patterning a silicon oxide-silicon nitride-silicon oxid...

Structures and methods for fabricating staircase regions of a three...

Method of fabricating Fin-type field-effect transistor device havin...

Stimulus responsive polymer films and formulations

Step coverage using an inhibitor molecule for high aspect ratio str...

Fin field-effect transistor device having contact plugs with re-ent...

3D semiconductor device and array layout with isolated conductive p...

FinFET structure with a composite stress layer and reduced fin buck...

Filling openings by combining non-flowable and flowable processes

Semiconductor memory device and method of manufacturing the same

Deposition of semiconductor integration films

Semiconductor device with self-aligned vias

Selective deposition method to form air gaps

Semiconductor device with silicon nitride passivation film

Semiconductor device with helmet structure between two semiconducto...

Semiconductor device and method for fabricating the same

Semiconductor device and methods of manufacture

Oxide-nitride-oxide stack having multiple oxynitride layers

Semiconductor device with source/drain contact formed using bottom-...

Patents Applicationslast 30 patents

FILLING OPENINGS BY COMBINING NON-FLOWABLE AND FLOWABLE PROCESSES

SEMICONDUCTOR DEVICE WITH SELF-ALIGNED VIAS

METHOD AND APPARATUS FOR SELECTIVE DEPOSITION OF DIELECTRIC FILMS

METHOD OF CONTROLLING ATMOSPHERE, METHOD OF PROCESSING SUBSTRATE, M...

Fabrication and processing of graphene electronic devices on Silico...

Substrate Processing Apparatus, Heat Insulating Structure, Method o...

ENCAPSULATED FLEXIBLE ELECTRONICS FOR LONG-TERM IMPLANTATION

METHOD OF WAFER GROUNDING UTILIZING WAFER EDGE BACKSIDE COATING EXC...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR DEVICE WITH HELMET STRUCTURE BETWEEN TWO SEMICONDUCTO...

CAVITY FORMING COMPOSITION

SEMICONDUCTOR DEVICE WITH SOURCE/DRAIN CONTACT FORMED USING BOTTOM-...

METHODS FOR MAKING EUV PATTERNABLE HARD MASKS

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR

SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURE

Compositions and Methods Using Same for Deposition of Silicon-Conta...

Integrated Method For Low-Cost Wide Band Gap Semiconductor Device M...

ORGANOAMINOSILANE PRECURSORS AND METHODS FOR DEPOSITING FILMS COMPR...

WORD LINE STRUCTURE OF THREE-DIMENSIONAL MEMORY DEVICE

THERMAL CVD OF TITANIUM SILICIDE METHODS TO FORM SEMICONDUCTOR STRU...

SEMICONDUCTOR DEVICE AND METHOD OF FORMING THEREOF

MULTI-FLOW CHAMBER KITS, PROCESSING CHAMBERS, AND RELATED APPARATUS...

FILM-FORMING METHOD AND FILM-FORMING SYSTEM

SILICON CARBIDE POWER MOSFET AND METHOD FOR MANUFACTURING SAME

IN-SITU SIDEWALL PASSIVATION TOWARD THE BOTTOM OF HIGH ASPECT RATIO...

CIRCULAR-SHAPED RESISTOR

DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL

SEMICONDUCTOR STRUCTURE