deposition by physical ablation of a target

Industry

CPC
H01L21/02266

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02266deposition by physical ablation of a target

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single crystal semiconductor structure and method of manufacturing...
- Patent number 11,923,195
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Junhee Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and method of manufacturing the same
- Patent number 11,903,212
- Issue date Feb 13, 2024
- Kioxia Corporation
- Kyungmin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method and machine of manufacture
- Patent number 11,851,749
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of material deposition
- Patent number 11,798,804
- Issue date Oct 24, 2023
- FEI Company
- Brian Roberts Routh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern forming method
- Patent number 11,776,817
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Shota Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,764,305
- Issue date Sep 19, 2023
- Japan Display Inc.
- Yohei Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitor including perovskite material, semiconductor device inclu...
- Patent number 11,749,713
- Issue date Sep 5, 2023
- Samsung Electronics Co., Ltd.
- Jeongil Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitor including perovskite material, semiconductor device inclu...
- Patent number 11,749,714
- Issue date Sep 5, 2023
- Samsung Electronics Co., Ltd.
- Jeongil Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrical device having conductive lines with air gaps therebetwee...
- Patent number 11,735,524
- Issue date Aug 22, 2023
- International Business Machines Corporation
- Benjamin D. Briggs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer treatment for achieving defect-free self-assembled monolayers
- Patent number 11,735,420
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitor, semiconductor device, and manufacturing method of semico...
- Patent number 11,729,965
- Issue date Aug 15, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Yuichi Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing metal oxynitride film
- Patent number 11,728,163
- Issue date Aug 15, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Kazuki Tanemura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform horizontal spacer
- Patent number 11,715,783
- Issue date Aug 1, 2023
- International Business Machines Corporation
- Michael P. Belyansky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actively clamped carrier assembly for processing tools
- Patent number 11,715,662
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Benjamin B. Riordon
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Sputtering method
- Patent number 11,710,624
- Issue date Jul 25, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Bingliang Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated circuit medical devices and method
- Patent number 11,701,059
- Issue date Jul 18, 2023
- Vactronix Scientific, LLC.
- Scott P. Carpenter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming an interconnect structure having an air gap and s...
- Patent number 11,682,624
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Szu-Ping Tung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide semiconductor thin-film and thin-film transistor consisted th...
- Patent number 11,677,031
- Issue date Jun 13, 2023
- South China University of Technology
- Miao Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,676,801
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Tiefeng Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor and manufacturing method thereof, array substr...
- Patent number 11,670,702
- Issue date Jun 6, 2023
- Beijing Boe Display Technology Co., Ltd.
- Bingqiang Gui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition system and processes
- Patent number 11,639,544
- Issue date May 2, 2023
- Applied Materials, Inc.
- Sanjay Bhat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removing re-sputtered material from patterned sidewalls
- Patent number 11,615,960
- Issue date Mar 28, 2023
- Cornell University
- David G. Lishan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target object processing method and plasma processing apparatus
- Patent number 11,610,766
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Seiji Yokoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crystallization of amorphous multicomponent ionic compounds
- Patent number 11,591,710
- Issue date Feb 28, 2023
- Wisconsin Alumni Research Foundation
- Paul Gregory Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming amorphous carbon hard mask layers and hard mask...
- Patent number 11,581,183
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Bhargav S. Citla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 11,572,618
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method to control PVD deposition uniformity
- Patent number 11,557,473
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Wen Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, manufacturing method thereof, and display dev...
- Patent number 11,557,612
- Issue date Jan 17, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical vapor deposition system and processes
- Patent number 11,542,595
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Wen Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240130135
- Publication date Apr 18, 2024
- KIOXIA Corporation
- Kyungmin JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING SYSTEM
- Publication number 20240120194
- Publication date Apr 11, 2024
- Samsung Electronics Co., Ltd.
- Sang Min LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device, Method and Machine of Manufacture
- Publication number 20240093357
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPACITOR, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD OF SEMICO...
- Publication number 20240090194
- Publication date Mar 14, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Yuichi SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLID OXYGEN IONIC CONDUCTOR BASED FIELD-EFFECT TRANSISTOR AND METH...
- Publication number 20240088240
- Publication date Mar 14, 2024
- UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
- Xianhui Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING A CONDUCTI...
- Publication number 20240079456
- Publication date Mar 7, 2024
- SK HYNIX INC.
- Jae Man YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing Method Of Semiconductor Device
- Publication number 20240063028
- Publication date Feb 22, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...
- Publication number 20240055239
- Publication date Feb 15, 2024
- Ulvac, Inc.
- Yuta Ando
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED CIRCUIT MEDICAL DEVICES AND METHOD
- Publication number 20240008818
- Publication date Jan 11, 2024
- Vactronix Scientific, Inc.
- Scott P. Carpenter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD FOR MAXIMIZING AIR GAP IN BACK END OF THE LINE...
- Publication number 20240014133
- Publication date Jan 11, 2024
- International Business Machines Corporation
- Benjamin D. Briggs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPARENT AND HIGH-K THIN FILM PREPARED BY PULSED LASER DEPOSITION
- Publication number 20230420247
- Publication date Dec 28, 2023
- The University of Hong Kong
- Dong HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FORMING THE SAME
- Publication number 20230420328
- Publication date Dec 28, 2023
- Vanguard International Semiconductor Corporation
- Hsiu-Mei YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTER TARGETS AND SOURCES FOR SELF-DOPED SOURCE AND DRAIN CONTACTS
- Publication number 20230420246
- Publication date Dec 28, 2023
- Intel Corporation
- Ilya V. Karpov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR S...
- Publication number 20230411166
- Publication date Dec 21, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Yizhi ZENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE FILM PREPARATION METHOD
- Publication number 20230399734
- Publication date Dec 14, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jianheng LUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING METAL OXYNITRIDE FILM
- Publication number 20230402280
- Publication date Dec 14, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Kazuki TANEMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20230387319
- Publication date Nov 30, 2023
- Japan Display Inc.
- Yohei YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF MANUFACTURING ELECTRONIC STRUCTURES
- Publication number 20230387145
- Publication date Nov 30, 2023
- PRAGMATIC PRINTING LTD.
- Richard PRICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVELY CLAMPED CARRIER ASSEMBLY FOR PROCESSING TOOLS
- Publication number 20230352336
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- Benjamin B. RIORDON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device And Method For Manufacturing Semiconductor Device
- Publication number 20230343856
- Publication date Oct 26, 2023
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Tetsuya KAKEHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20230335393
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIELD SUPPRESSED METAL GAPFILL
- Publication number 20230326744
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Annamalai Lakshmanan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming an Interconnect Structure Having an Air Gap and S...
- Publication number 20230275025
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ping Tung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20230268355
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jih-Chao CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doped Diamond SemiConductor and Method of Manufacture Using Laser A...
- Publication number 20230187502
- Publication date Jun 15, 2023
- Adamantite Technologies LLC
- Eric David Bauswell
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI PROCESS AIR GAP FORMATION
- Publication number 20230087442
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230066870
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
- Publication number 20220415649
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Chunming ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220384149
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Tiefeng SHI
- H01 - BASIC ELECTRIC ELEMENTS

deposition by physical ablation of a target

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for controlling stress variation in a material...

Single crystal semiconductor structure and method of manufacturing...

Semiconductor memory device and method of manufacturing the same

Semiconductor device, method and machine of manufacture

Method of material deposition

Pattern forming method

Semiconductor device

Capacitor including perovskite material, semiconductor device inclu...

Capacitor including perovskite material, semiconductor device inclu...

Electrical device having conductive lines with air gaps therebetwee...

Wafer treatment for achieving defect-free self-assembled monolayers

Capacitor, semiconductor device, and manufacturing method of semico...

Method for manufacturing metal oxynitride film

Uniform horizontal spacer

Actively clamped carrier assembly for processing tools

Sputtering method

Integrated circuit medical devices and method

Method of forming an interconnect structure having an air gap and s...

Oxide semiconductor thin-film and thin-film transistor consisted th...

Methods and apparatus for processing a substrate

Thin film transistor and manufacturing method thereof, array substr...

Physical vapor deposition system and processes

Method for removing re-sputtered material from patterned sidewalls

Target object processing method and plasma processing apparatus

Crystallization of amorphous multicomponent ionic compounds

Methods of forming amorphous carbon hard mask layers and hard mask...

Method and chamber for backside physical vapor deposition

System and method to control PVD deposition uniformity

Semiconductor device, manufacturing method thereof, and display dev...

Physical vapor deposition system and processes

Patents Applicationslast 30 patents

SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME

WAFER PROCESSING SYSTEM

Semiconductor Device, Method and Machine of Manufacture

CAPACITOR, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD OF SEMICO...

SOLID OXYGEN IONIC CONDUCTOR BASED FIELD-EFFECT TRANSISTOR AND METH...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING A CONDUCTI...

Manufacturing Method Of Semiconductor Device

METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING...

INTEGRATED CIRCUIT MEDICAL DEVICES AND METHOD

STRUCTURE AND METHOD FOR MAXIMIZING AIR GAP IN BACK END OF THE LINE...

TRANSPARENT AND HIGH-K THIN FILM PREPARED BY PULSED LASER DEPOSITION

SEMICONDUCTOR DEVICE AND METHOD FORMING THE SAME

SPUTTER TARGETS AND SOURCES FOR SELF-DOPED SOURCE AND DRAIN CONTACTS

METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR S...

OXIDE FILM PREPARATION METHOD

METHOD FOR MANUFACTURING METAL OXYNITRIDE FILM

SEMICONDUCTOR DEVICE

METHODS OF MANUFACTURING ELECTRONIC STRUCTURES

ACTIVELY CLAMPED CARRIER ASSEMBLY FOR PROCESSING TOOLS

Semiconductor Device And Method For Manufacturing Semiconductor Device

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

FIELD SUPPRESSED METAL GAPFILL

Method of Forming an Interconnect Structure Having an Air Gap and S...

INTEGRATED CIRCUIT DEVICE AND METHOD FOR FABRICATING THE SAME

Doped Diamond SemiConductor and Method of Manufacture Using Laser A...

Method and Apparatus for Controlling Stress Variation in a Material...

MULTI PROCESS AIR GAP FORMATION

DEPOSITION SYSTEM AND METHOD

METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE