Deposition from a gas or vapour

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H01L21/31604

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/31604Deposition from a gas or vapour

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Enhanced thin film deposition
- Patent number 10,964,534
- Issue date Mar 30, 2021
- ASM International
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 10,297,444
- Issue date May 21, 2019
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 9,972,583
- Issue date May 15, 2018
- SPTS Technologies Limited
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Enhanced thin film deposition
- Patent number 9,831,094
- Issue date Nov 28, 2017
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium lanthanide oxide films
- Patent number 9,583,334
- Issue date Feb 28, 2017
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removing oxide on semiconductor surface by layer of sulfur
- Patent number 9,412,605
- Issue date Aug 9, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd
- Andrew Joseph Kelly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for mitigating oxide growth in a gate dielectric
- Patent number 9,396,951
- Issue date Jul 19, 2016
- Texas Instruments Incorporated
- Malcolm J. Bevan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch-type remote plasma processing apparatus
- Patent number 9,373,499
- Issue date Jun 21, 2016
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for mitigating oxide growth in a gate dielectric
- Patent number 9,368,355
- Issue date Jun 14, 2016
- Texas Instruments Incorporated
- Malcolm J. Bevan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for mitigating oxide growth in a gate dielectric
- Patent number 9,337,044
- Issue date May 10, 2016
- Texas Instruments Incorporated
- Malcolm J. Bevan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursors for silicon dioxide gap fill
- Patent number 9,337,054
- Issue date May 10, 2016
- Entegris, Inc.
- William Hunks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active regions with compatible dielectric layers
- Patent number 9,287,364
- Issue date Mar 15, 2016
- Intel Corporation
- Pushkar Ranade
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD flowable gap fill
- Patent number 9,257,302
- Issue date Feb 9, 2016
- Novellus Systems, Inc.
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for mitigating oxide growth in a gate dielectric
- Patent number 9,177,806
- Issue date Nov 3, 2015
- Texas Instruments Incorporated
- Malcolm J. Bevan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced thin film deposition
- Patent number 9,127,351
- Issue date Sep 8, 2015
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium lathanide oxide films
- Patent number 9,129,961
- Issue date Sep 8, 2015
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch-type remote plasma processing apparatus
- Patent number 9,039,912
- Issue date May 26, 2015
- Hitachi Kokusai Electric Inc.
- Kazuyuki Toyoda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced thin film deposition
- Patent number 8,993,055
- Issue date Mar 31, 2015
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous multicomponent dielectric based on the mixture of high ba...
- Patent number 8,987,097
- Issue date Mar 24, 2015
- Faculdad de Ciencias e Tecnologia da Universidad Nova de Lisboa
- Rodrigo Ferrão De Paiva Martins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices with dielectric layers
- Patent number 8,970,014
- Issue date Mar 3, 2015
- Samsung Electronics Co., Ltd.
- Ha-Jin Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device including layer conta...
- Patent number 8,951,849
- Issue date Feb 10, 2015
- Semiconductor Energy Laboratory Co., Ltd.
- Toru Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus having a dielectric containing scandium and gadolinium
- Patent number 8,933,449
- Issue date Jan 13, 2015
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Yttrium and titanium high-k dielectric films
- Patent number 8,900,418
- Issue date Dec 2, 2014
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Yttrium and titanium high-k dielectric films
- Patent number 8,901,708
- Issue date Dec 2, 2014
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Yttrium and titanium high-K dielectric film
- Patent number 8,900,422
- Issue date Dec 2, 2014
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt titanium oxide dielectric films
- Patent number 8,895,442
- Issue date Nov 25, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron induced chemical etching and deposition for local circuit...
- Patent number 8,821,682
- Issue date Sep 2, 2014
- Micron Technology, Inc.
- Mark J. Williamson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a metal-insulator-metal (MIM) capacitor havi...
- Patent number 8,815,678
- Issue date Aug 26, 2014
- Renesas Electronics Corporation
- Toshihiro Iizuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating a semiconductor device
- Patent number 8,796,087
- Issue date Aug 5, 2014
- Samsung Electronics Co., Ltd.
- Weon-Hong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for Sr—Ti—O-based film formation
- Patent number 8,679,913
- Issue date Mar 25, 2014
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20180130666
- Publication date May 10, 2018
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...
- Publication number 20140327064
- Publication date Nov 6, 2014
- Toshihiro IIZUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM
- Publication number 20140084355
- Publication date Mar 27, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20140001606
- Publication date Jan 2, 2014
- Samsung Electronics Co., LTD
- Ha-Jin Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOISTURE BARRIER COATINGS
- Publication number 20130320509
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES
- Publication number 20130320510
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Removal of Carbon from an Organosilicate Material
- Publication number 20130295334
- Publication date Nov 7, 2013
- Aiping Wu
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20130280881
- Publication date Oct 24, 2013
- Weon-Hong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COBALT TITANIUM OXIDE DIELECTRIC FILMS
- Publication number 20130264625
- Publication date Oct 10, 2013
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20130183445
- Publication date Jul 18, 2013
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch-Type Remote Plasma Processing Apparatus
- Publication number 20130104804
- Publication date May 2, 2013
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Yttrium and Titanium High-K Dielectric Films
- Publication number 20130069201
- Publication date Mar 21, 2013
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch-Type Remote Plasma Processing Apparatus
- Publication number 20130072002
- Publication date Mar 21, 2013
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Yttrium and Titanium High-K Dielectric Films
- Publication number 20130071990
- Publication date Mar 21, 2013
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Depositing High-K Dielectrics
- Publication number 20130056852
- Publication date Mar 7, 2013
- Intermolecular, Inc.
- Imran Hashim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Forming Substrate Structure by Filling Recesses with Deposition Mat...
- Publication number 20120302071
- Publication date Nov 29, 2012
- Synos Technology, Inc.
- Sang In LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE HAVING A THIN FILM CAPACITOR AND METHOD FOR FA...
- Publication number 20120261735
- Publication date Oct 18, 2012
- RENESAS ELECTRONICS CORPORATION
- Toshihiro IIZUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS MULTICOMPONENT DIELECTRIC BASED ON THE MIXTURE OF HIGH BA...
- Publication number 20120248445
- Publication date Oct 4, 2012
- Faculdad de Ciencias e Technologia da Universidade Nova de Lisboa
- Rodrigo Ferrão De Paiva Martins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mixed Composition Interface Layer and Method of Forming
- Publication number 20120120549
- Publication date May 17, 2012
- MOSAID TECHNOLOGIES INCORPORATED
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20120122289
- Publication date May 17, 2012
- TOKYO ELECTRON LIMITED
- Kenji Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20120108078
- Publication date May 3, 2012
- Kabushiki Kalsha Toshiba
- Tsunehiro INO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR THE DEPOSITION OF TERNARY OXIDE GATE DIELECTRICS AND ST...
- Publication number 20120091542
- Publication date Apr 19, 2012
- Mark R. Brazier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING TITANIUM SILICON OXIDE
- Publication number 20120088373
- Publication date Apr 12, 2012
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS CONTAINING COBALT TITANIUM OXIDE
- Publication number 20120074487
- Publication date Mar 29, 2012
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20120077336
- Publication date Mar 29, 2012
- Kabushiki Kaisha Toshiba
- Akio KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF TA- OR NB-DOPED HIGH-K FILMS
- Publication number 20120065420
- Publication date Mar 15, 2012
- L'Air Liquide Societe Anonyme pour I'Etude et I'Exploitation des Procedes Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20120058645
- Publication date Mar 8, 2012
- Kabushiki Kaisha Toshiba
- Kouichi Muraoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20120025326
- Publication date Feb 2, 2012
- PANASONIC CORPORATION
- Hiroshi Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-K GATE DIELECTRIC OXIDE
- Publication number 20120015488
- Publication date Jan 19, 2012
- KIE Y. AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS
- Publication number 20110318915
- Publication date Dec 29, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Liang-Gi Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition from a gas or vapour

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Enhanced thin film deposition

Enhanced thin film deposition

Durable, heat-resistant multi-layer coatings and coated articles

Enhanced thin film deposition

Gallium lanthanide oxide films

Method of removing oxide on semiconductor surface by layer of sulfur

System and method for mitigating oxide growth in a gate dielectric

Batch-type remote plasma processing apparatus

System and method for mitigating oxide growth in a gate dielectric

System and method for mitigating oxide growth in a gate dielectric

Precursors for silicon dioxide gap fill

Active regions with compatible dielectric layers

CVD flowable gap fill

System and method for mitigating oxide growth in a gate dielectric

Enhanced thin film deposition

Gallium lathanide oxide films

Batch-type remote plasma processing apparatus

Enhanced thin film deposition

Amorphous multicomponent dielectric based on the mixture of high ba...

Semiconductor devices with dielectric layers

Method for manufacturing semiconductor device including layer conta...

Apparatus having a dielectric containing scandium and gadolinium

Yttrium and titanium high-k dielectric films

Yttrium and titanium high-k dielectric films

Yttrium and titanium high-K dielectric film

Cobalt titanium oxide dielectric films

Electron induced chemical etching and deposition for local circuit...

Method for fabricating a metal-insulator-metal (MIM) capacitor havi...

Method of fabricating a semiconductor device

Method for Sr—Ti—O-based film formation

Patents Applicationslast 30 patents

ENHANCED THIN FILM DEPOSITION

METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...

APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM

SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME

MOISTURE BARRIER COATINGS

DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES

Method for Removal of Carbon from an Organosilicate Material

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE

COBALT TITANIUM OXIDE DIELECTRIC FILMS

ENHANCED THIN FILM DEPOSITION

Batch-Type Remote Plasma Processing Apparatus

Yttrium and Titanium High-K Dielectric Films

Batch-Type Remote Plasma Processing Apparatus

Yttrium and Titanium High-K Dielectric Films

Methods For Depositing High-K Dielectrics

Forming Substrate Structure by Filling Recesses with Deposition Mat...

SEMICONDUCTOR DEVICE HAVING A THIN FILM CAPACITOR AND METHOD FOR FA...

AMORPHOUS MULTICOMPONENT DIELECTRIC BASED ON THE MIXTURE OF HIGH BA...

Mixed Composition Interface Layer and Method of Forming

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHODS FOR THE DEPOSITION OF TERNARY OXIDE GATE DIELECTRICS AND ST...

METHODS OF FORMING TITANIUM SILICON OXIDE

APPARATUS CONTAINING COBALT TITANIUM OXIDE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

DEPOSITION OF TA- OR NB-DOPED HIGH-K FILMS

METHOD OF FORMING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

HIGH-K GATE DIELECTRIC OXIDE

PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS