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deposition from the gas or vapour phase
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02263
deposition from the gas or vapour phase
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last 30 patents
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Cleaning method, method of manufacturing semiconductor device, and...
Patent number
11,965,240
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Keigo Nishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching and apparatus for plasma processing
Patent number
11,955,342
Issue date
Apr 9, 2024
Tokyo Electron Limited
Masanori Hosoya
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method of manufacture
Patent number
11,942,549
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
11,824,105
Issue date
Nov 21, 2023
Semiconductor Energy Laboratory Co., Ltd.
Junichi Koezuka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Integrated capacitor with sidewall having reduced roughness
Patent number
11,798,979
Issue date
Oct 24, 2023
Texas Instruments Incorporated
Elizabeth Costner Stewart
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma purge method
Patent number
11,725,276
Issue date
Aug 15, 2023
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Integrated cluster tool for selective area deposition
Patent number
11,725,274
Issue date
Aug 15, 2023
Applied Materials, Inc.
Tobin Kaufman-Osborn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods and material deposition systems for forming semiconductor l...
Patent number
11,670,508
Issue date
Jun 6, 2023
SILANNA UV TECHNOLOGIES PTE LTD
Petar Atanackovic
H01 - BASIC ELECTRIC ELEMENTS
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Electronic apparatus
Patent number
11,587,785
Issue date
Feb 21, 2023
Japan Display Inc.
Yoshikatsu Imazeki
C30 - CRYSTAL GROWTH
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Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,555,246
Issue date
Jan 17, 2023
Kokusai Electric Corporation
Hironori Shimada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device, manufacturing method thereof, and display dev...
Patent number
11,557,612
Issue date
Jan 17, 2023
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method of manufacture
Patent number
11,527,653
Issue date
Dec 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Cryogenic atomic layer etch with noble gases
Patent number
11,515,166
Issue date
Nov 29, 2022
Applied Materials, Inc.
Alvaro Garcia De Gorordo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Nitride semiconductor device
Patent number
11,495,671
Issue date
Nov 8, 2022
Sumitomo Electric Device Innovations, Inc.
Takuma Nakano
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device with elongated pattern
Patent number
11,469,143
Issue date
Oct 11, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Po-Chin Chang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Display apparatus with array of light emitting diodes and method of...
Patent number
11,423,830
Issue date
Aug 23, 2022
Epistar Corporation
Min-Hsun Hsieh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for forming carbon rich silicon-containing films
Patent number
11,414,750
Issue date
Aug 16, 2022
Entegris, Inc.
Sungsil Cho
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of manufacturing semiconductor device, substrate processing...
Patent number
11,387,097
Issue date
Jul 12, 2022
Kokusai Electric Corporation
Takeo Hanashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film forming method and film forming apparatus
Patent number
11,373,876
Issue date
Jun 28, 2022
Tokyo Electron Limited
Satoshi Takagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device and method for manufacturing the same
Patent number
11,355,648
Issue date
Jun 7, 2022
Semiconductor Energy Laboratory Co., Ltd.
Junichi Koezuka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods and material deposition systems for forming semiconductor l...
Patent number
11,282,704
Issue date
Mar 22, 2022
SILANNA UV TECHNOLOGIES PTE LTD
Petar Atanackovic
H01 - BASIC ELECTRIC ELEMENTS
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Deposition method
Patent number
11,170,999
Issue date
Nov 9, 2021
Tokyo Electron Limited
Kazumi Kubo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Area selective deposition for cap layer formation in advanced contacts
Patent number
11,170,992
Issue date
Nov 9, 2021
Tokyo Electron Limited
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
11,152,494
Issue date
Oct 19, 2021
Semiconductor Energy Laboratory Co., Ltd.
Junichi Koezuka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Cryogenic atomic layer etch with noble gases
Patent number
11,087,989
Issue date
Aug 10, 2021
Applied Materials, Inc.
Alvaro Garcia De Gorordo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Critical dimension uniformity
Patent number
11,022,878
Issue date
Jun 1, 2021
Taiwan Semiconductor Manufacturing Co. LTD
Xi-Zong Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electronic apparatus and manufacturing method of the same
Patent number
11,018,000
Issue date
May 25, 2021
Japan Display Inc.
Yoshikatsu Imazeki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Display apparatus with array of light emitting diodes and method of...
Patent number
10,984,702
Issue date
Apr 20, 2021
Epistar Corporation
Min-Hsun Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process of forming nitride semiconductor device
Patent number
10,978,569
Issue date
Apr 13, 2021
Sumitomo Electric Device Innovations, Inc.
Takuma Nakano
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Integrated capacitor with sidewall having reduced roughness
Patent number
10,978,548
Issue date
Apr 13, 2021
Texas Instruments Incorporated
Elizabeth Costner Stewart
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240079479
Publication date
Mar 7, 2024
Semiconductor Energy Laboratory Co., Ltd.
Junichi Koezuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240076777
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240006306
Publication date
Jan 4, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC
Chengfeng LI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND FORMATION METHOD THEREOF
Publication number
20230395379
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Che CHUNG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
GAS CURTAIN DEVICE AND GAS PERMEABLE ASSEMBLY
Publication number
20230343584
Publication date
Oct 26, 2023
Brillian Network & Automation Integrated System Co., Ltd.
Sheng-Chi HSU
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...
Publication number
20230253222
Publication date
Aug 10, 2023
Kokusai Electric Corporation
Kenta Kasamatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE DEPOSITION AND CROSS-LINKING OF POLYMERIC DIELECTRIC MATE...
Publication number
20230238236
Publication date
Jul 27, 2023
International Business Machines Corporation
Cornelius Brown Peethala
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...
Publication number
20230187206
Publication date
Jun 15, 2023
Silanna UV Technologies Pte Ltd
Petar Atanackovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION FOR PATTERNING PROCESS
Publication number
20230178379
Publication date
Jun 8, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ssu-Yu Ho
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESS SYSTEM INCLUDING A COOLING STATION
Publication number
20230138317
Publication date
May 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Li-Chien Tseng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR MANUFACTURING THREE-...
Publication number
20230114522
Publication date
Apr 13, 2023
Yangtze Memory Technologies Co., Ltd.
Zhaohui Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
Publication number
20230112057
Publication date
Apr 13, 2023
Kokusai Electric Corporation
Hironori SHIMADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor Device and Method of Manufacture
Publication number
20230103640
Publication date
Apr 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wan-Yi Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR FORMING MATERIAL WITHIN A GAP
Publication number
20230099607
Publication date
Mar 30, 2023
ASM IP HOLDING B.V.
Timothee Blanquart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
Publication number
20230071505
Publication date
Mar 9, 2023
Applied Materials, Inc.
Alvaro GARCIA DE GORORDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH ELONGATED PATTERN
Publication number
20220384268
Publication date
Dec 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Po-Chin CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING CARBON RICH SILICON-CONTAINING FILMS
Publication number
20220364225
Publication date
Nov 17, 2022
Entegris, Inc.
Sungsil CHO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Publication number
20220319918
Publication date
Oct 6, 2022
MITSUI CHEMICALS TOHCELLO, INC.
Toru MIURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
Publication number
20220310437
Publication date
Sep 29, 2022
Mitsubishi Electric Corporation
Takafumi YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20220285562
Publication date
Sep 8, 2022
Semiconductor Energy Laboratory Co., Ltd.
Junichi Koezuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND MATERIAL DEPOSITION SYSTEMS FOR FORMING SEMICONDUCTOR L...
Publication number
20220270876
Publication date
Aug 25, 2022
Silanna UV Technologies Pte Ltd
Petar Atanackovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20220262630
Publication date
Aug 18, 2022
Kokusai Electric Corporation
Susumu NISHIURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF PROCESSING SUBSTRATE, RECORDING MEDIUM, AND SUBSTRATE PRO...
Publication number
20220165565
Publication date
May 26, 2022
Kokusai Electric Corporation
Atsuro SEINO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
PLASMA PURGE METHOD
Publication number
20220081764
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Hideomi HANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
Publication number
20220051938
Publication date
Feb 17, 2022
LAM RESEARCH CORPORATION
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SIC SEMICONDUCTOR SUBSTRATE, AND, PRODUCTION METHOD THEREFOR AND PR...
Publication number
20210399095
Publication date
Dec 23, 2021
KWANSEI GAKUIN EDUCATIONAL FOUNDATION
Tadaaki KANEKO
C30 - CRYSTAL GROWTH
Information
Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
Publication number
20210398815
Publication date
Dec 23, 2021
Applied Materials, Inc.
Alvaro GARCIA DE GORORDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NITRIDE SEMICONDUCTOR SUBSTRATE MANUFACTURING METHOD AND LAMINATED...
Publication number
20210391427
Publication date
Dec 16, 2021
SCIOCS COMPANY LIMITED
Takehiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF ETCHING AND APPARATUS FOR PLASMA PROCESSING
Publication number
20210296134
Publication date
Sep 23, 2021
TOKYO ELECTRON LIMITED
Masanori Hosoya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...
Publication number
20210277518
Publication date
Sep 9, 2021
Kokusai Electric Corporation
Keigo NISHIDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...