Deposition of aluminium only

Industry

CPC
C23C16/20

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/20Deposition of aluminium only

Industries

Patents Grantslast 30 patents

Information Patent Grant
Methods for reflector film growth
- Patent number 11,776,980
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Luping Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the generation of metal-containing films
- Patent number 11,655,262
- Issue date May 23, 2023
- David Dominique Schweinfurth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Area selective nanoscale-thin layer deposition via precise function...
- Patent number 11,613,807
- Issue date Mar 28, 2023
- The Curators of the University of Missouri
- Matthew R. Maschmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Simultaneous selective deposition of two different materials on two...
- Patent number 11,608,557
- Issue date Mar 21, 2023
- ASM IP Holding B.V.
- Michael Eugene Givens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the generation of metal-containing films
- Patent number 11,505,562
- Issue date Nov 22, 2022
- BASF SE
- Lukas Mayr
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
- Patent number 11,499,230
- Issue date Nov 15, 2022
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Selective aluminum oxide film deposition
- Patent number 11,450,525
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Liqi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum compound and method for manufacturing semiconductor device...
- Patent number 11,332,486
- Issue date May 17, 2022
- Samsung Electronics Co., Ltd.
- Gyu-Hee Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the generation of metal-containing films
- Patent number 11,319,332
- Issue date May 3, 2022
- BASF SE
- David Dominique Schweinfurth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern forming material, composition for pattern formation, patter...
- Patent number 11,192,971
- Issue date Dec 7, 2021
- TOSHIBA MEMORY CORPORATION
- Norikatsu Sasao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method for forming a protective coating film for halide plasma resi...
- Patent number 11,118,263
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- Yogita Pareek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
- Patent number 10,947,622
- Issue date Mar 16, 2021
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Encapsulation structure, electronic device and encapsulation method
- Patent number 10,879,488
- Issue date Dec 29, 2020
- BOE Technology Group Co., Ltd.
- Yingying Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 10,847,362
- Issue date Nov 24, 2020
- Samsung Electronics Co., Ltd.
- Gyu-Hee Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Production method for group III nitride semiconductor
- Patent number 10,700,235
- Issue date Jun 30, 2020
- Toyoda Gosei Co., Ltd.
- Koji Okuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing oxide crystal thin film
- Patent number 10,202,685
- Issue date Feb 12, 2019
- FLOSFIA INC.
- Masaya Oda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
- Patent number 10,167,555
- Issue date Jan 1, 2019
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Grant
Method and apparatus for fabricating fibers and microstructures fro...
- Patent number 10,106,894
- Issue date Oct 23, 2018
- Dynetics, Inc.
- James L. Maxwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum precursor composition
- Patent number 9,255,324
- Issue date Feb 9, 2016
- UP CHEMICAL CO., LTD.
- Wonyong Koh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tris(dialkylamide)aluminum compound, and method for producing alumi...
- Patent number 9,194,041
- Issue date Nov 24, 2015
- Ube Industries, Ltd.
- Masashi Shirai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanomatrix powder metal composite
- Patent number 9,090,955
- Issue date Jul 28, 2015
- Baker Hughes Incorporated
- Zhiyue Xu
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Enhancing catalytic activity of nanoporous materials
- Patent number 8,673,804
- Issue date Mar 18, 2014
- Katholieke Universiteit Leuven
- Johan Martens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structural member to be used in apparatus for manufacturing semicon...
- Patent number 8,642,187
- Issue date Feb 4, 2014
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface passivation techniques for chamber-split processing
- Patent number 8,318,522
- Issue date Nov 27, 2012
- Applied Materials, Inc.
- Jie Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organometallic precursor, thin film having the same, metal wiring i...
- Patent number 8,268,397
- Issue date Sep 18, 2012
- Samsung Electronics Co., Ltd.
- Youn-Joung Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal nanowires with an oxide sheath and production method for same
- Patent number 8,197,889
- Issue date Jun 12, 2012
- Leibniz-Institut fuer neue Materialien Gemeinnuetzige GmbH
- Christian Petersen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for thin film vapor deposition of a dialkyl amido dihydroalu...
- Patent number 7,985,450
- Issue date Jul 26, 2011
- UP Chemical Co., Ltd.
- Hyun Koock Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating gas turbine components
- Patent number 7,838,070
- Issue date Nov 23, 2010
- General Electric Company
- Bhupendra K. Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, manufacturing method thereof, liquid crystal...
- Patent number 7,723,205
- Issue date May 25, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Tetsuya Kakehata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic aluminum precursor and method of manufacturing a metal wiri...
- Patent number 7,452,569
- Issue date Nov 18, 2008
- Samsung Electronics Co., Ltd.
- Jung-Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SIMULTANEOUS SELECTIVE DEPOSITION OF TWO DIFFERENT MATERIALS ON TWO...
- Publication number 20230203644
- Publication date Jun 29, 2023
- ASM IP HOLDING B.V.
- Michael Eugene Givens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AREA SELECTIVE NANOSCALE-THIN LAYER DEPOSITION VIA PRECISE FUNCTION...
- Publication number 20230132011
- Publication date Apr 27, 2023
- THE CURATORS OF THE UNIVERSITY OF MISSOURI
- MATTHEW R. MASCHMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE GENERATION OF METAL-CONTAINING FILMS
- Publication number 20220220131
- Publication date Jul 14, 2022
- BASF SE
- David Dominique Schweinfurth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
- Publication number 20220197142
- Publication date Jun 23, 2022
- Rohm and Haas Electronic Materials L.L.C.
- Joshua Kaitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS
- Publication number 20220197141
- Publication date Jun 23, 2022
- Rohm and Haas Electronic Materials L.L.C.
- Joshua Kaitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
- Publication number 20220074051
- Publication date Mar 10, 2022
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Application
METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM
- Publication number 20220049348
- Publication date Feb 17, 2022
- FLOSFIA INC.
- Masaya Oda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AREA SELECTIVE NANOSCALE-THIN LAYER DEPOSITION VIA PRECISE FUNCTION...
- Publication number 20220033963
- Publication date Feb 3, 2022
- THE CURATORS OF THE UNIVERSITY OF MISSOURI
- MATTHEW R. MASCHMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIMULTANEOUS SELECTIVE DEPOSITION OF TWO DIFFERENT MATERIALS ON TWO...
- Publication number 20210301391
- Publication date Sep 30, 2021
- ASM IP HOLDING B.V.
- Michael Eugene Givens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR REFLECTOR FILM GROWTH
- Publication number 20210288086
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Luping Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE GENERATION OF METAL-CONTAINING FILMS
- Publication number 20210079520
- Publication date Mar 18, 2021
- Wayne State University
- David Dominique Schweinfurth
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PROCESS FOR THE GENERATION OF METAL-CONTAINING FILMS
- Publication number 20210079025
- Publication date Mar 18, 2021
- BASF SE
- Lukas Mayr
- C07 - ORGANIC CHEMISTRY
Information Patent Application
COATING FOR HALIDE PLASMA RESISTANCE
- Publication number 20200354833
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Yogita PAREEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
- Publication number 20200332417
- Publication date Oct 22, 2020
- Dynetics, Inc.
- James L. Maxwell
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PATTERN FORMING MATERIAL, COMPOSITION FOR PATTERN FORMATION, PATTER...
- Publication number 20200291155
- Publication date Sep 17, 2020
- Toshiba Memory Corporation
- Norikatsu SASAO
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
ALUMINUM COMPOUND AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE...
- Publication number 20200207790
- Publication date Jul 2, 2020
- Samsung Electronics Co., Ltd.
- Gyu-Hee Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ALUMINUM OXIDE FILM DEPOSITION
- Publication number 20200090924
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- Liqi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20190304770
- Publication date Oct 3, 2019
- Samsung Electronics Co., Ltd.
- Gyu-Hee PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM
- Publication number 20190112703
- Publication date Apr 18, 2019
- FLOSFIA INC.
- Masaya Oda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM PRECURSORS FOR THIN-FILM DEPOSITION, PREPARATION METHOD AN...
- Publication number 20170327944
- Publication date Nov 16, 2017
- JIANGNAN UNIVERSITY
- Yuqiang DING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Fabricating Fibers and Microstructures fro...
- Publication number 20160369400
- Publication date Dec 22, 2016
- Dynetics, Inc.
- James L. Maxwell
- D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Information Patent Application
GLITTER AND METHOD FOR PRODUCING SAME
- Publication number 20150257990
- Publication date Sep 17, 2015
- Sigmund Lindner GmbH
- Erwin Pschierer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM
- Publication number 20150225843
- Publication date Aug 13, 2015
- FLOSFIA INC.
- Masaya Oda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIS(DIALKYLAMIDE)ALUMINUM COMPOUND, AND METHOD FOR PRODUCING ALUMI...
- Publication number 20140295084
- Publication date Oct 2, 2014
- Masashi Shirai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM PRECURSOR COMPOSITION
- Publication number 20140050848
- Publication date Feb 20, 2014
- Wonyong Koh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for the preparation of a coated substrate, coated substrate...
- Publication number 20120189868
- Publication date Jul 26, 2012
- Akzo Nobel Chemicals International B.V.
- Alexander Sergeevich Borovik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOMATRIX POWDER METAL COMPOSITE
- Publication number 20120103135
- Publication date May 3, 2012
- Zhiyue Xu
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SURFACE PASSIVATION TECHNIQUES FOR CHAMBER-SPLIT PROCESSING
- Publication number 20110143471
- Publication date Jun 16, 2011
- Jie Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCING CATALYTIC ACTIVITY OF NANOPOROUS MATERIALS
- Publication number 20110137093
- Publication date Jun 9, 2011
- Johan Martens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURAL MEMBER TO BE USED IN APPARATUS FOR MANUFACTURING SEMICON...
- Publication number 20100330390
- Publication date Dec 30, 2010
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Deposition of aluminium only

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods for reflector film growth

Process for the generation of metal-containing films

Area selective nanoscale-thin layer deposition via precise function...

Simultaneous selective deposition of two different materials on two...

Process for the generation of metal-containing films

Method and apparatus for fabricating fibers and microstructures fro...

Selective aluminum oxide film deposition

Aluminum compound and method for manufacturing semiconductor device...

Process for the generation of metal-containing films

Pattern forming material, composition for pattern formation, patter...

Method for forming a protective coating film for halide plasma resi...

Method and apparatus for fabricating fibers and microstructures fro...

Encapsulation structure, electronic device and encapsulation method

Method of fabricating semiconductor device

Production method for group III nitride semiconductor

Method of manufacturing oxide crystal thin film

Method and apparatus for fabricating fibers and microstructures fro...

Method and apparatus for fabricating fibers and microstructures fro...

Aluminum precursor composition

Tris(dialkylamide)aluminum compound, and method for producing alumi...

Nanomatrix powder metal composite

Enhancing catalytic activity of nanoporous materials

Structural member to be used in apparatus for manufacturing semicon...

Surface passivation techniques for chamber-split processing

Organometallic precursor, thin film having the same, metal wiring i...

Metal nanowires with an oxide sheath and production method for same

Method for thin film vapor deposition of a dialkyl amido dihydroalu...

Method of coating gas turbine components

Semiconductor device, manufacturing method thereof, liquid crystal...

Organic aluminum precursor and method of manufacturing a metal wiri...

Patents Applicationslast 30 patents

SIMULTANEOUS SELECTIVE DEPOSITION OF TWO DIFFERENT MATERIALS ON TWO...

AREA SELECTIVE NANOSCALE-THIN LAYER DEPOSITION VIA PRECISE FUNCTION...

PROCESS FOR THE GENERATION OF METAL-CONTAINING FILMS

PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS

PHOTORESIST UNDERLAYER COMPOSITIONS AND PATTERNING METHODS

Method and Apparatus for Fabricating Fibers and Microstructures fro...

METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM

AREA SELECTIVE NANOSCALE-THIN LAYER DEPOSITION VIA PRECISE FUNCTION...

SIMULTANEOUS SELECTIVE DEPOSITION OF TWO DIFFERENT MATERIALS ON TWO...

METHODS FOR REFLECTOR FILM GROWTH

PROCESS FOR THE GENERATION OF METAL-CONTAINING FILMS

PROCESS FOR THE GENERATION OF METAL-CONTAINING FILMS

COATING FOR HALIDE PLASMA RESISTANCE

Method and Apparatus for Fabricating Fibers and Microstructures fro...

PATTERN FORMING MATERIAL, COMPOSITION FOR PATTERN FORMATION, PATTER...

ALUMINUM COMPOUND AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE...

SELECTIVE ALUMINUM OXIDE FILM DEPOSITION

METHOD OF FABRICATING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM

ALUMINUM PRECURSORS FOR THIN-FILM DEPOSITION, PREPARATION METHOD AN...

Method and Apparatus for Fabricating Fibers and Microstructures fro...

GLITTER AND METHOD FOR PRODUCING SAME

METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM

TRIS(DIALKYLAMIDE)ALUMINUM COMPOUND, AND METHOD FOR PRODUCING ALUMI...

ALUMINUM PRECURSOR COMPOSITION

Process for the preparation of a coated substrate, coated substrate...

NANOMATRIX POWDER METAL COMPOSITE

SURFACE PASSIVATION TECHNIQUES FOR CHAMBER-SPLIT PROCESSING

ENHANCING CATALYTIC ACTIVITY OF NANOPOROUS MATERIALS

STRUCTURAL MEMBER TO BE USED IN APPARATUS FOR MANUFACTURING SEMICON...