Deposition of boron or phosphorus doped silicon oxide

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H01L21/31625

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/31625Deposition of boron or phosphorus doped silicon oxide

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Patents Grantslast 30 patents

Information Patent Grant
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- Issue date May 24, 2011
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Metal-free catalysts for pulsed deposition layer process for confor...
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Method of depositing a silicon dioxide comprising layer doped with...
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Semiconductor having structure with openings
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- Publication date Aug 4, 2011
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BPSG FILM DEPOSITION WITH UNDOPED CAPPING
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OXYGEN PLASMA REDUCTION TO ELIMINATE PRECURSOR OVERFLOW IN BPTEOS F...
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PIXEL OF IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME
- Publication number 20100276737
- Publication date Nov 4, 2010
- Woon-Il Choi
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METHOD FOR REDUCING AMINE BASED CONTAMINANTS
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FABRICATION OF SEMICONDUCTOR DEVICES USING ANTI-REFLECTIVE COATINGS
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SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...
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Semiconductor device having a tapered plug
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Deposition of boron or phosphorus doped silicon oxide

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Pixel of image sensor and method for fabricating the same

Chemical mechanical polishing method

Pixel of image sensor and method for fabricating the same

Method for reducing amine based contaminants

Glass material for radio-frequency applications

Semiconductor structure having reduced amine-based contaminants

Oxygen plasma reduction to eliminate precursor overflow in BPTEOS f...

Chemical-mechanical polishing method

Process of vapor depositing glass layers for wafer-level hermetic e...

Pixel of image sensor and method for fabricating the same

Method of fabricating insulation layer and method of fabricating se...

Method for the production of structured layers on substrates

Method for reducing amine based contaminants

Methods of forming a phosphorus doped silicon dioxide-comprising layer

Method for producing a component comprising a conductor structure t...

Adjusting a spacing between a gas distribution member and a substra...

Methods of forming capacitors

Semiconductor device and method for manufacturing semiconductor device

Reduction of punch-thru defects in damascene processing

Semiconductor device having a tapered plug

Methods of forming capacitors

Method and apparatus for controlling dopant concentration during BP...

Reactive ion etching for semiconductor device feature topography mo...

Fabrication of semiconductor devices using anti-reflective coatings

System and method for reducing etch sequencing induced downstream d...

Semiconductor device and method for manufacturing semiconductor device

Process for producing copy protection for an electronic circuit

Metal-free catalysts for pulsed deposition layer process for confor...

Method of depositing a silicon dioxide comprising layer doped with...

Semiconductor having structure with openings

Patents Applicationslast 30 patents

PIXEL OF IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME

CHEMICAL MECHANICAL POLISHING METHOD

BPSG FILM DEPOSITION WITH UNDOPED CAPPING

OXYGEN PLASMA REDUCTION TO ELIMINATE PRECURSOR OVERFLOW IN BPTEOS F...

PIXEL OF IMAGE SENSOR AND METHOD FOR FABRICATING THE SAME

METHOD FOR REDUCING AMINE BASED CONTAMINANTS

METHOD OF FABRICATING INSULATION LAYER AND METHOD OF FABRICATING SE...

BPSG FILM DEPOSITION WITH UNDOPED CAPPING

FABRICATION OF SEMICONDUCTOR DEVICES USING ANTI-REFLECTIVE COATINGS

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...

In Situ Substrate Holder Leveling Method and Apparatus

Methods of Forming Capacitors

Semiconductor device having a tapered plug

GAP-FILL DEPOSITIONS INTRODUCING HYDROXYL-CONTAINING PRECURSORS IN...

CHEMICAL-MECHANICAL POLISHING METHOD

Methods of Forming Capacitors

Reduction of punch-thru defects in damascene processing

Method for fabricating a semiconductor device having an insulation...

METHODS AND APPARATUS FOR E-BEAM TREATMENT USED TO FABRICATE INTEGR...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Systems and methods for removing/containing wafer edge defects post...

Method for forming silicon-containing film and method for decreasin...

Plasma Enhanced Deposited, Fully Oxidized PSG Film

Semiconductor fabrication that includes surface tension control

Glass material for use at high frequencies

Method of manufacturing charge storage device

Methods of forming a phosphorus doped silicon dioxide-comprising layer

Semiconductor device and method for manufacturing the same

Method of forming insulating film, method of manufacturing semicond...

Method for fabricating a semiconductor device