Deposition of compounds, mixtures or solid solutions

Industry

CPC
C23C16/30

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/30Deposition of compounds, mixtures or solid solutions

Industries

Patents Grantslast 30 patents

Information Patent Grant
Coated tool and cutting tool
- Patent number 11,964,328
- Issue date Apr 23, 2024
- Kyocera Corporation
- Tadashi Katsuma
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for producing GaN layered substrate
- Patent number 11,967,530
- Issue date Apr 23, 2024
- Shin-Etsu Chemical Co., Ltd.
- Sumio Sekiyama
- B32 - LAYERED PRODUCTS
Information Patent Grant
Methods of forming structures, semiconductor processing systems, an...
- Patent number 11,959,173
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase epitaxy method
- Patent number 11,955,334
- Issue date Apr 9, 2024
- Azur Space Solar Power GmbH
- Gregor Keller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for coating a substrate with magnesium fluoride via atomic...
- Patent number 11,952,659
- Issue date Apr 9, 2024
- Corning Incorporated
- Ming-Huang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to reduce material surface roughness
- Patent number 11,939,674
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing nitride semiconductor device
- Patent number 11,935,744
- Issue date Mar 19, 2024
- Sumitomo Electric Industries, Ltd.
- Isao Makabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light shielding plate, camera unit, and electronic apparatus
- Patent number 11,936,972
- Issue date Mar 19, 2024
- TOPPAN INC.
- Kiyoaki Nishitsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum compounds and methods of forming aluminum- containing film...
- Patent number 11,912,728
- Issue date Feb 27, 2024
- UP Chemical Co., Ltd.
- Won Seok Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low dielectric constant film and preparation method thereof
- Patent number 11,904,352
- Issue date Feb 20, 2024
- JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 11,895,779
- Issue date Feb 6, 2024
- Sumitomo Precision Products Co., Ltd.
- Yasuyuki Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of stable lithium ion conductive interfacia...
- Patent number 11,894,546
- Issue date Feb 6, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Yi Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nucleation layer deposition method
- Patent number 11,887,848
- Issue date Jan 30, 2024
- Aixtron SE
- Christof Martin Mauder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 11,885,016
- Issue date Jan 30, 2024
- Kokusai Electric Corporation
- Kazuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a film on a substrate by chemical vapor deposition
- Patent number 11,885,022
- Issue date Jan 30, 2024
- Shin-Etsu Chemical Co., Ltd.
- Chikara Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure spatial chemical vapor deposition system and related...
- Patent number 11,885,018
- Issue date Jan 30, 2024
- Lehigh University
- Siddha Pimputkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation, pH protective or lubricity coating for pharmaceutical...
- Patent number 11,884,446
- Issue date Jan 30, 2024
- SIO2 Medical Products, Inc.
- John T. Felts
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus for a group-III nitride crystal comprising...
- Patent number 11,879,184
- Issue date Jan 23, 2024
- Panasonic Holdings Corporation
- Yusuke Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced cooling system using throttled internal cooling passage fl...
- Patent number 11,879,688
- Issue date Jan 23, 2024
- Mainstream Engineering Corporation
- Brian P Tucker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing nitride semiconductor substrate and nitrid...
- Patent number 11,873,578
- Issue date Jan 16, 2024
- Sumitomo Chemical Company, Limited
- Takehiro Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scandium precursor for SC2O3 or SC2S3 atomic layer deposition
- Patent number 11,866,453
- Issue date Jan 9, 2024
- Intel Corporation
- Patricio E. Romero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homoleptic lanthanide deposition precursors
- Patent number 11,866,824
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single crystal transition metal dichalcogenide thin film and method...
- Patent number 11,859,308
- Issue date Jan 2, 2024
- Research & Business Foundation Sungkyunkwan University
- Ki Kang Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal fluoride passivation coatings prepared by atomic layer deposi...
- Patent number 11,862,783
- Issue date Jan 2, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation method for bifacial perc solar cell
- Patent number 11,848,395
- Issue date Dec 19, 2023
- GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY CO., LTD.
- Jiebin Fang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing a coated glass substrate
- Patent number 11,845,690
- Issue date Dec 19, 2023
- Pilkington Group Limited
- Deborah Raisbeck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doped or undoped silicon carbide deposition and remote hydrogen pla...
- Patent number 11,848,199
- Issue date Dec 19, 2023
- Lam Research Corporation
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graphene printing
- Patent number 11,834,739
- Issue date Dec 5, 2023
- Hewlett-Packard Development Company, L.P.
- Robert Ionescu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of deposition and method of fabricating electronic device us...
- Patent number 11,834,742
- Issue date Dec 5, 2023
- SK Hynix Inc.
- Woo-Hee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display device having integrated metamaterial lens
- Patent number 11,829,072
- Issue date Nov 28, 2023
- Intel Corporation
- Khaled Ahmed
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Nanoporous GaN on p-type GaN: A Mg out-diffusion compensation layer...
- Publication number 20240133027
- Publication date Apr 25, 2024
- Srabanti Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A TRANSITION METAL DICHALCOGENIDE
- Publication number 20240124975
- Publication date Apr 18, 2024
- IMEC vzw
- Benjamin GROVEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-Crystallinity Barium Titanate Film Structure, Method of Prepar...
- Publication number 20240102170
- Publication date Mar 28, 2024
- LoMaRe Chip Technology Changzhou Co., Ltd.
- Fengzhi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHIUM PRECURSORS FOR DEPOSITION OF LITHIUM-CONTAINING LAYERS, ISL...
- Publication number 20240102161
- Publication date Mar 28, 2024
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...
- Publication number 20240105450
- Publication date Mar 28, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Yoganand Saripalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION
- Publication number 20240092804
- Publication date Mar 21, 2024
- Intel Corporation
- Patricio E. ROMERO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...
- Publication number 20240093360
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240087880
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Shruba Gangopadhyay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR WAFER PROCESSING TOOL WITH IMPROVED LEAK CHECK
- Publication number 20240084445
- Publication date Mar 14, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Chih-Wei Chou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING CHAMB...
- Publication number 20240068103
- Publication date Feb 29, 2024
- ASM IP HOLDING, B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20240063015
- Publication date Feb 22, 2024
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING SYSTEM FOR PLASTIC PROCESSING APPLICATIONS
- Publication number 20240052482
- Publication date Feb 15, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Anders OIof ERIKSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING AN INTERFACIAL LITHIUM FLUORIDE LAYER FOR...
- Publication number 20240047821
- Publication date Feb 8, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Biqiong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH MATERIAL IN M...
- Publication number 20240038528
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING MOLYBDENUM SULFIDE
- Publication number 20240035152
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Keith T. Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING SILICON BASED DIELECTRIC FILM
- Publication number 20240026527
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Geetika BAJAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC COMPOSITION, CAPACITIVE ELEMENT, VISIBLE-LIGHT PHOTOCATA...
- Publication number 20240011152
- Publication date Jan 11, 2024
- TDK Corporation
- Kumiko YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20240014032
- Publication date Jan 11, 2024
- Kokusai Electric Corporation
- Kazuhiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU ALUMINIUM CLEANING USING ATOMIC LAYER ETCHING FOLLOWED BY A...
- Publication number 20230417954
- Publication date Dec 28, 2023
- Corning Incorporated
- Donald Erwin Allen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOMENTUM-MATCHING AND BAND-ALIGNMENT VAN DER WAALS (vdW) INFRARED P...
- Publication number 20230420594
- Publication date Dec 28, 2023
- Shanghai Institute of Technical Physics of the Chinese Academy of Sciences
- Weida HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION OF NICKEL SULFIDE NANOWI...
- Publication number 20230407497
- Publication date Dec 21, 2023
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Muhammad Ali EHSAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230407472
- Publication date Dec 21, 2023
- Kokusai Electric Corporation
- Hiroki HATTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20230411203
- Publication date Dec 21, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Ryong HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230402256
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF VAPOR DEPOSITION COATED FLOW PATHS FOR IMPROVED CHROMATOGRAP...
- Publication number 20230393103
- Publication date Dec 7, 2023
- WATERS TECHNOLOGIES CORPORATION
- Matthew A. Lauber
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS OF VAPOR DEPOSITION OF METAL HALIDES
- Publication number 20230386759
- Publication date Nov 30, 2023
- President and Fellows of Harvard College
- Eliza Kate SPEAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS COATING
- Publication number 20230383126
- Publication date Nov 30, 2023
- SILCOTEK CORP.
- David A. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINED EPITAXIAL GROWTH SYSTEM HAVING MULTIPLE REACTION CHAMBERS,...
- Publication number 20230387349
- Publication date Nov 30, 2023
- Foshan University
- Bingfeng Fan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
- Publication number 20230377874
- Publication date Nov 23, 2023
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALTERNATING MULTI-SOURCE VAPOR TRANSPORT DEPOSITION
- Publication number 20230366086
- Publication date Nov 16, 2023
- Massachusetts Institute of Technology
- Vladimir Bulovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition of compounds, mixtures or solid solutions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Coated tool and cutting tool

Method for producing GaN layered substrate

Methods of forming structures, semiconductor processing systems, an...

Vapor phase epitaxy method

Methods for coating a substrate with magnesium fluoride via atomic...

Methods to reduce material surface roughness

Method for manufacturing nitride semiconductor device

Light shielding plate, camera unit, and electronic apparatus

Aluminum compounds and methods of forming aluminum- containing film...

Low dielectric constant film and preparation method thereof

Substrate processing method

Atomic layer deposition of stable lithium ion conductive interfacia...

Nucleation layer deposition method

Method of processing substrate, method of manufacturing semiconduct...

Method of forming a film on a substrate by chemical vapor deposition

High pressure spatial chemical vapor deposition system and related...

Passivation, pH protective or lubricity coating for pharmaceutical...

Manufacturing apparatus for a group-III nitride crystal comprising...

Advanced cooling system using throttled internal cooling passage fl...

Method for manufacturing nitride semiconductor substrate and nitrid...

Scandium precursor for SC2O3 or SC2S3 atomic layer deposition

Homoleptic lanthanide deposition precursors

Single crystal transition metal dichalcogenide thin film and method...

Metal fluoride passivation coatings prepared by atomic layer deposi...

Preparation method for bifacial perc solar cell

Process for preparing a coated glass substrate

Doped or undoped silicon carbide deposition and remote hydrogen pla...

Graphene printing

Method of deposition and method of fabricating electronic device us...

Display device having integrated metamaterial lens

Patents Applicationslast 30 patents

Nanoporous GaN on p-type GaN: A Mg out-diffusion compensation layer...

METHOD OF DEPOSITING A TRANSITION METAL DICHALCOGENIDE

High-Crystallinity Barium Titanate Film Structure, Method of Prepar...

LITHIUM PRECURSORS FOR DEPOSITION OF LITHIUM-CONTAINING LAYERS, ISL...

GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...

SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION

COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SEMICONDUCTOR WAFER PROCESSING TOOL WITH IMPROVED LEAK CHECK

CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING CHAMB...

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...

COATING SYSTEM FOR PLASTIC PROCESSING APPLICATIONS

METHOD FOR MANUFACTURING AN INTERFACIAL LITHIUM FLUORIDE LAYER FOR...

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH MATERIAL IN M...

METHODS FOR DEPOSITING MOLYBDENUM SULFIDE

METHOD OF DEPOSITING SILICON BASED DIELECTRIC FILM

DIELECTRIC COMPOSITION, CAPACITIVE ELEMENT, VISIBLE-LIGHT PHOTOCATA...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

IN-SITU ALUMINIUM CLEANING USING ATOMIC LAYER ETCHING FOLLOWED BY A...

MOMENTUM-MATCHING AND BAND-ALIGNMENT VAN DER WAALS (vdW) INFRARED P...

AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION OF NICKEL SULFIDE NANOWI...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

APPARATUS FOR PROCESSING SUBSTRATE

PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

USE OF VAPOR DEPOSITION COATED FLOW PATHS FOR IMPROVED CHROMATOGRAP...

METHODS OF VAPOR DEPOSITION OF METAL HALIDES

AMORPHOUS COATING

COMBINED EPITAXIAL GROWTH SYSTEM HAVING MULTIPLE REACTION CHAMBERS,...

COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...

ALTERNATING MULTI-SOURCE VAPOR TRANSPORT DEPOSITION