Deposition of only one other metal element

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CPC
C23C16/14

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/14Deposition of only one other metal element

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Tungsten molybdenum structures
- Patent number 12,159,804
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Xi Cen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,148,621
- Issue date Nov 19, 2024
- Kokusai Electric Corporation
- Koei Kuribayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of pure molybdenum films
- Patent number 12,080,558
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine-free tungsten ALD for dielectric selectivity improvement
- Patent number 12,062,545
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Ilanit Fisher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for forming a layer comprising a transitional m...
- Patent number 12,031,206
- Issue date Jul 9, 2024
- ASM IP Holding, B.V.
- Maart van Druenen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
- Patent number 12,027,367
- Issue date Jul 2, 2024
- Kioxia Corporation
- Masayuki Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-layer feature fill
- Patent number 12,014,928
- Issue date Jun 18, 2024
- Lam Research Corporation
- Xiaolan Ba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,975,357
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a transition metal containing film on a substrat...
- Patent number 11,959,171
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra-high purity tungsten chlorides
- Patent number 11,932,553
- Issue date Mar 19, 2024
- VERSUM MATERIALS US, LLC
- Xiaoxi Wu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Pressurization type method for manufacturing metal monoatomic layer...
- Patent number 11,926,898
- Issue date Mar 12, 2024
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,908,736
- Issue date Feb 20, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method for gate electrode and thin film transistor an...
- Patent number 11,901,420
- Issue date Feb 13, 2024
- BEIHAI HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- En-Tsung Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,887,856
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Catalyst enhanced molybdenum deposition and gap fill
- Patent number 11,859,277
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Xi Cen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of pure molybenum films
- Patent number 11,854,813
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming tungsten film and system therefor
- Patent number 11,840,759
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Masafumi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stabilized metal monolayer structure
- Patent number 11,814,723
- Issue date Nov 14, 2023
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Tungsten film-forming method, film-forming system and storage medium
- Patent number 11,802,334
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Takashi Sameshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for reflector film growth
- Patent number 11,776,980
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Luping Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten defluorination by high pressure treatment
- Patent number 11,705,337
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Keith Tatseun Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,643,721
- Issue date May 9, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
- Patent number 11,621,169
- Issue date Apr 4, 2023
- Kokusai Electric Corporation
- Koei Kuribayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,581,220
- Issue date Feb 14, 2023
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing tungsten and other metals in 3D NAND structures
- Patent number 11,549,175
- Issue date Jan 10, 2023
- Lam Research Corporation
- Gorun Butail
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a transition metal containing film on a substrat...
- Patent number 11,390,946
- Issue date Jul 19, 2022
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal fill process for three-dimensional vertical NAND wordline
- Patent number 11,348,795
- Issue date May 31, 2022
- Lam Research Corporation
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,295,980
- Issue date Apr 5, 2022
- ASM IP Holding B.V.
- Bhushan Zope
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Conductive Features of Semiconductor Devices and Methods of Forming...
- Publication number 20240395554
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Shan Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE-BASED WAFER CHEMICAL VAPOR DEPOSITION DEVICE AND DEPOSITION...
- Publication number 20240384415
- Publication date Nov 21, 2024
- INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD.
- Tinglin YOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING MOLYBDENUM MONOFLUORIDE TO MOLYBDENUM PENTAFLUO...
- Publication number 20240368755
- Publication date Nov 7, 2024
- Central Glass Co., Ltd.
- Akiou KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF PULSING ASSISTED TUNGSTEN-CONTAINING FILM DEPOSITION
- Publication number 20240332003
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Qinghua Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN PLASMA TREATMENT FOR FORMING LOGIC DEVICES
- Publication number 20240304495
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Tsung-Han Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...
- Publication number 20240295020
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Katsumasa YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER FEATURE FILL
- Publication number 20240282580
- Publication date Aug 22, 2024
- LAM RESEARCH CORPORATION
- Xiaolan BA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER
- Publication number 20240258109
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Xi CEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
- Publication number 20240234152
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrolyte and Method for Cobalt Electrodeposition
- Publication number 20240229235
- Publication date Jul 11, 2024
- Hermine Marie Berthon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED MOLYBDENUM DEPOSITION
- Publication number 20240218502
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- TUERXUN AILIHUMAER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSITION METAL DEPOSITION PROCESSES AND DEPOSITION ASSEMBLY
- Publication number 20240209504
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Janne-Petteri Niemelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20240200188
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-HIGH PURITY TUNGSTEN CHLORIDES
- Publication number 20240190719
- Publication date Jun 13, 2024
- VERSUM MATERIALS US, LLC
- Xiaoxi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20240153817
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
- Publication number 20240136192
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrolyte and Method for Cobalt Electrodeposition
- Publication number 20240133028
- Publication date Apr 25, 2024
- Hermine Marie Berthon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240105463
- Publication date Mar 28, 2024
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Selective Molybdenum Deposition
- Publication number 20240052480
- Publication date Feb 15, 2024
- Avgerinos V. GELATOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
- Publication number 20240047215
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTANCE PULSED CVD TUNGSTEN
- Publication number 20240006180
- Publication date Jan 4, 2024
- LAM RESEARCH CORPORATION
- Yu PAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20240003002
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE STRUCTURES AND METHODS OF FORMING THE SAME
- Publication number 20230395429
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kan-Ju LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, NON-TRANSITORY COMPUTER-READABLE RECOR...
- Publication number 20230335404
- Publication date Oct 19, 2023
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER
- Publication number 20230326791
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Zhimin QI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THE FORMATION OF CATALYST PT NANODOTS BY PULSED/SEQUENTIAL CVD OR A...
- Publication number 20230311098
- Publication date Oct 5, 2023
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Takashi ONO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TUNGSTEN DEFLUORINATION BY HIGH PRESSURE TREATMENT
- Publication number 20230298893
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Keith Tatseun Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER
- Publication number 20230287562
- Publication date Sep 14, 2023
- VERSUM MATERIALS US, LLC
- MATTHEW R. MACDONALD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTANCE GATE OXIDE METALLIZATION LINER
- Publication number 20230290639
- Publication date Sep 14, 2023
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Deposition of only one other metal element

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Tungsten molybdenum structures

Method of processing substrate, method of manufacturing semiconduct...

Low temperature deposition of pure molybdenum films

Fluorine-free tungsten ALD for dielectric selectivity improvement

Methods and systems for forming a layer comprising a transitional m...

Substrate treatment apparatus and manufacturing method of semicondu...

Multi-layer feature fill

Selective deposition of metals, metal oxides, and dielectrics

Methods of forming a transition metal containing film on a substrat...

Low temperature deposition of iridium containing films

Ultra-high purity tungsten chlorides

Pressurization type method for manufacturing metal monoatomic layer...

Methods for depositing a molybdenum metal film over a dielectric su...

Manufacturing method for gate electrode and thin film transistor an...

Enhanced spatial ALD of metals through controlled precursor mixing

Methods for depositing fluorine/carbon-free conformal tungsten

Catalyst enhanced molybdenum deposition and gap fill

Low temperature deposition of pure molybenum films

Method of forming tungsten film and system therefor

Stabilized metal monolayer structure

Tungsten film-forming method, film-forming system and storage medium

Methods for reflector film growth

Tungsten defluorination by high pressure treatment

Low temperature deposition of iridium containing films

Method of manufacturing semiconductor device, recording medium, and...

Methods for depositing a molybdenum metal film over a dielectric su...

Method of depositing tungsten and other metals in 3D NAND structures

Methods of forming a transition metal containing film on a substrat...

Metal fill process for three-dimensional vertical NAND wordline

Methods for depositing a molybdenum metal film over a dielectric su...

Patents Applicationslast 30 patents

Conductive Features of Semiconductor Devices and Methods of Forming...

NITRIDE-BASED WAFER CHEMICAL VAPOR DEPOSITION DEVICE AND DEPOSITION...

METHOD FOR REMOVING MOLYBDENUM MONOFLUORIDE TO MOLYBDENUM PENTAFLUO...

FILM FORMING APPARATUS AND FILM FORMING METHOD

RF PULSING ASSISTED TUNGSTEN-CONTAINING FILM DEPOSITION

HYDROGEN PLASMA TREATMENT FOR FORMING LOGIC DEVICES

METHOD AND APPARATUS FOR EMBEDDING TUNGSTEN INTO RECESS FORMED ON S...

MULTI-LAYER FEATURE FILL

METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER

NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES

Electrolyte and Method for Cobalt Electrodeposition

PLASMA-ENHANCED MOLYBDENUM DEPOSITION

TRANSITION METAL DEPOSITION PROCESSES AND DEPOSITION ASSEMBLY

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

ULTRA-HIGH PURITY TUNGSTEN CHLORIDES

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES

Electrolyte and Method for Cobalt Electrodeposition

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

Methods for Selective Molybdenum Deposition

LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS

LOW RESISTANCE PULSED CVD TUNGSTEN

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

CONDUCTIVE STRUCTURES AND METHODS OF FORMING THE SAME

SUBSTRATE PROCESSING METHOD, NON-TRANSITORY COMPUTER-READABLE RECOR...

SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER

THE FORMATION OF CATALYST PT NANODOTS BY PULSED/SEQUENTIAL CVD OR A...

TUNGSTEN DEFLUORINATION BY HIGH PRESSURE TREATMENT

COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER

LOW RESISTANCE GATE OXIDE METALLIZATION LINER