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Deposition of only one other metal element
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CPC
C23C16/14
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
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C23C16/14
Deposition of only one other metal element
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last 30 patents
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Patent Grant
Methods of forming a transition metal containing film on a substrat...
Patent number
11,959,171
Issue date
Apr 16, 2024
ASM IP Holding B.V.
Timo Hatanpää
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low temperature deposition of iridium containing films
Patent number
11,946,135
Issue date
Apr 2, 2024
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultra-high purity tungsten chlorides
Patent number
11,932,553
Issue date
Mar 19, 2024
VERSUM MATERIALS US, LLC
Xiaoxi Wu
C01 - INORGANIC CHEMISTRY
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Patent Grant
Pressurization type method for manufacturing metal monoatomic layer...
Patent number
11,926,898
Issue date
Mar 12, 2024
IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
Myung Mo Sung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
Patent number
11,908,736
Issue date
Feb 20, 2024
ASM IP Holding B.V.
Bhushan Zope
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Manufacturing method for gate electrode and thin film transistor an...
Patent number
11,901,420
Issue date
Feb 13, 2024
BEIHAI HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
En-Tsung Cho
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
Patent number
11,887,856
Issue date
Jan 30, 2024
Applied Materials, Inc.
Kelvin Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
Patent number
11,887,855
Issue date
Jan 30, 2024
Applied Materials, Inc.
Xinyu Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Catalyst enhanced molybdenum deposition and gap fill
Patent number
11,859,277
Issue date
Jan 2, 2024
Applied Materials, Inc.
Xi Cen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low temperature deposition of pure molybenum films
Patent number
11,854,813
Issue date
Dec 26, 2023
Applied Materials, Inc.
Kunal Bhatnagar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming tungsten film and system therefor
Patent number
11,840,759
Issue date
Dec 12, 2023
Tokyo Electron Limited
Masafumi Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Stabilized metal monolayer structure
Patent number
11,814,723
Issue date
Nov 14, 2023
IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
Myung Mo Sung
B82 - NANO-TECHNOLOGY
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Patent Grant
Tungsten film-forming method, film-forming system and storage medium
Patent number
11,802,334
Issue date
Oct 31, 2023
Tokyo Electron Limited
Takashi Sameshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for reflector film growth
Patent number
11,776,980
Issue date
Oct 3, 2023
Applied Materials, Inc.
Luping Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tungsten defluorination by high pressure treatment
Patent number
11,705,337
Issue date
Jul 18, 2023
Applied Materials, Inc.
Keith Tatseun Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low temperature deposition of iridium containing films
Patent number
11,643,721
Issue date
May 9, 2023
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
Patent number
11,621,169
Issue date
Apr 4, 2023
Kokusai Electric Corporation
Koei Kuribayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
Patent number
11,581,220
Issue date
Feb 14, 2023
ASM IP Holding B.V.
Bhushan Zope
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of depositing tungsten and other metals in 3D NAND structures
Patent number
11,549,175
Issue date
Jan 10, 2023
Lam Research Corporation
Gorun Butail
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming a transition metal containing film on a substrat...
Patent number
11,390,946
Issue date
Jul 19, 2022
ASM IP Holding B.V.
Timo Hatanpää
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Metal fill process for three-dimensional vertical NAND wordline
Patent number
11,348,795
Issue date
May 31, 2022
Lam Research Corporation
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
Patent number
11,295,980
Issue date
Apr 5, 2022
ASM IP Holding B.V.
Bhushan Zope
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition of tungsten for enhanced fill and reduced s...
Patent number
11,225,712
Issue date
Jan 18, 2022
Lam Research Corporation
Joshua Collins
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
Patent number
11,213,853
Issue date
Jan 4, 2022
ASM IP Holding B.V.
Suvi P. Haukka
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
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Patent Grant
Microwave plasma and ultraviolet assisted deposition apparatus and...
Patent number
11,186,911
Issue date
Nov 30, 2021
International Business Machines Corporation
Alfred Grill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
Patent number
11,189,489
Issue date
Nov 30, 2021
TOSHIBA MEMORY CORPORATION
Masayuki Kitamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Titanium-containing film forming compositions for vapor deposition...
Patent number
11,168,099
Issue date
Nov 9, 2021
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Antonio Sanchez
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply device, gas supply method and film forming method
Patent number
11,155,923
Issue date
Oct 26, 2021
Tokyo Electron Limited
Katsumasa Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of producing thin layer of large area transition metal dicha...
Patent number
11,142,824
Issue date
Oct 12, 2021
UChicago Argonne, LLC
Anil U. Mane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and gas injection member used therefor
Patent number
11,069,512
Issue date
Jul 20, 2021
Tokyo Electron Limited
Shinya Okabe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
Publication number
20240136192
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrolyte and Method for Cobalt Electrodeposition
Publication number
20240133028
Publication date
Apr 25, 2024
Hermine Marie Berthon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105463
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Koei KURIBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods for Selective Molybdenum Deposition
Publication number
20240052480
Publication date
Feb 15, 2024
Avgerinos V. GELATOS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
Publication number
20240047215
Publication date
Feb 8, 2024
Applied Materials, Inc.
Kunal Bhatnagar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW RESISTANCE PULSED CVD TUNGSTEN
Publication number
20240006180
Publication date
Jan 4, 2024
LAM RESEARCH CORPORATION
Yu PAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
Publication number
20240003002
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Takashi SAMESHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONDUCTIVE STRUCTURES AND METHODS OF FORMING THE SAME
Publication number
20230395429
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kan-Ju LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, NON-TRANSITORY COMPUTER-READABLE RECOR...
Publication number
20230335404
Publication date
Oct 19, 2023
Kokusai Electric Corporation
Arito OGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER
Publication number
20230326791
Publication date
Oct 12, 2023
Applied Materials, Inc.
Zhimin QI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THE FORMATION OF CATALYST PT NANODOTS BY PULSED/SEQUENTIAL CVD OR A...
Publication number
20230311098
Publication date
Oct 5, 2023
L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
Takashi ONO
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
TUNGSTEN DEFLUORINATION BY HIGH PRESSURE TREATMENT
Publication number
20230298893
Publication date
Sep 21, 2023
Applied Materials, Inc.
Keith Tatseun Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER
Publication number
20230287562
Publication date
Sep 14, 2023
VERSUM MATERIALS US, LLC
MATTHEW R. MACDONALD
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW RESISTANCE GATE OXIDE METALLIZATION LINER
Publication number
20230290639
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Lawrence Schloss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN MOLYBDENUM STRUCTURES
Publication number
20230290679
Publication date
Sep 14, 2023
Applied Materials, Inc.
Xi CEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING THIN FILM
Publication number
20230260794
Publication date
Aug 17, 2023
Jusung Engineering Co., Ltd.
Il Hyong CHO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS FOR SELECTIVELY DEPOSITING HIGHLY-CONDUCTIVE METAL FILMS
Publication number
20230245894
Publication date
Aug 3, 2023
Entegris, Inc.
Philip S.H. Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230238244
Publication date
Jul 27, 2023
Kokusai Electric Corporation
Koei KURIBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
Publication number
20230227968
Publication date
Jul 20, 2023
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20230223265
Publication date
Jul 13, 2023
Kokusai Electric Corporation
Koei KURIBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUSES FOR FORMING SEMICONDUCTOR DEVICES CONTAININ...
Publication number
20230223266
Publication date
Jul 13, 2023
SANDISK TECHNOLOGIES LLC
Fei ZHOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUSES FOR FORMING SEMICONDUCTOR DEVICES CONTAININ...
Publication number
20230223267
Publication date
Jul 13, 2023
SANDISK TECHNOLOGIES LLC
Rahul SHARANGPANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...
Publication number
20230160057
Publication date
May 25, 2023
ASM IP HOLDING B.V.
Jiyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION FOR UNIFORM TUNGSTEN GROWTH
Publication number
20230038744
Publication date
Feb 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Pin-Wen CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING A TRANSITIONAL M...
Publication number
20230015690
Publication date
Jan 19, 2023
ASM IP HOLDING, B.V.
Maart van Druenen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METHODS OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRAT...
Publication number
20220411931
Publication date
Dec 29, 2022
ASM IP HOLDING B.V.
Timo Hatanpää
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20220389569
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Katsumasa YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Catalyst Enhanced Molybdenum Deposition And Gap Fill
Publication number
20220372617
Publication date
Nov 24, 2022
Applied Materials, Inc.
Xi Cen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING TUNGSTEN FILM AND SYSTEM THEREFOR
Publication number
20220290294
Publication date
Sep 15, 2022
TOKYO ELECTRON LIMITED
Masafumi TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
Publication number
20220270883
Publication date
Aug 25, 2022
Applied Materials, Inc.
Kunal Bhatnagar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...