Deposition of only one other non-metal element

Industry

CPC
C23C16/28

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/28Deposition of only one other non-metal element

Industries

Patents Grantslast 30 patents

Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,975,357
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming tungsten structures
- Patent number 11,646,206
- Issue date May 9, 2023
- Micron Technology, Inc.
- David Ross Economy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming boron-based film, formation apparatus
- Patent number 11,615,957
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deuterium-containing films
- Patent number 11,508,584
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for continuous production of porous structures
- Patent number 11,486,030
- Issue date Nov 1, 2022
- Molecule Works Inc.
- Wei Liu
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method for marking and authenticating diamonds and precious stones
- Patent number 11,320,384
- Issue date May 3, 2022
- Soreq Nuclear Research Center
- Yair Grof
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods of forming high boron-content hard mask materials
- Patent number 11,276,573
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Bo Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 11,213,853
- Issue date Jan 4, 2022
- ASM IP Holding B.V.
- Suvi P. Haukka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of fabricating an electrode structure having a continuous po...
- Patent number 11,075,370
- Issue date Jul 27, 2021
- UNIVERSITY OF LIMERICK
- Kevin M. Ryan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Magnetic recording medium having magnetic layer with hydride of car...
- Patent number 10,984,829
- Issue date Apr 20, 2021
- Showa Denko K.K.
- Kota Hasegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming tungsten structures
- Patent number 10,847,367
- Issue date Nov 24, 2020
- Micron Technology, Inc.
- David R. Economy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition of germanium
- Patent number 10,741,388
- Issue date Aug 11, 2020
- ASM IP Holding B.V.
- Raija H. Matero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a silicon germanium tin layer and related semic...
- Patent number 10,685,834
- Issue date Jun 16, 2020
- ASM IP Holdings B.V.
- Nupur Bhargava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and film forming method
- Patent number 10,676,820
- Issue date Jun 9, 2020
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal oxy-flouride films based on oxidation of metal flourides
- Patent number 10,563,303
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of filling recess and processing apparatus
- Patent number 10,475,645
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Hiroki Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 10,456,808
- Issue date Oct 29, 2019
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature molybdenum film deposition utilizing boron nucleati...
- Patent number 10,453,744
- Issue date Oct 22, 2019
- Entegris, Inc.
- Shuang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flourination process to create sacrificial oxy-flouride layer
- Patent number 10,443,125
- Issue date Oct 15, 2019
- Applied Materials, Inc.
- Xiaowei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for photo-excitation processes
- Patent number 10,370,762
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Stephen Moffatt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt-containing compounds, their synthesis, and use in cobalt-con...
- Patent number 10,309,010
- Issue date Jun 4, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Satoko Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wear resistant vapor deposited coating, method of coating depositio...
- Patent number 10,287,670
- Issue date May 14, 2019
- G & H TECHNOLOGIES, LLC
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,199,219
- Issue date Feb 5, 2019
- Hitachi Kokusai Electric, Inc.
- Satoshi Shimamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film deposition methods with fluid-assisted thermal management...
- Patent number 10,174,417
- Issue date Jan 8, 2019
- Siva Power, Inc.
- Markus Eberhard Beck
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Wear resistant vapor deposited coating, method of coating depositio...
- Patent number 9,945,021
- Issue date Apr 17, 2018
- G&H TECHNOLOGIES, LLC
- Vladimir Gorokhovsky
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Fluid-assisted thermal management of evaporation sources
- Patent number 9,932,666
- Issue date Apr 3, 2018
- Siva Power, Inc.
- Markus Eberhard Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition of germanium
- Patent number 9,929,009
- Issue date Mar 27, 2018
- ASM IP Holding B.V.
- Raija H. Matero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
- Patent number 9,895,715
- Issue date Feb 20, 2018
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Germanium- and zirconium-containing composition for vapor depositio...
- Patent number 9,868,753
- Issue date Jan 16, 2018
- L'Air Liquide, Société Anonyme our l'Etude et l'Exploitation des Procédés Geo...
- Clément Lansalot-Matras
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film deposition methods with fluid-assisted thermal management...
- Patent number 9,816,175
- Issue date Nov 14, 2017
- Siva Power, Inc.
- Markus Eberhard Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION OF GROUP FIFTEEN MATERIALS
- Publication number 20240271277
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Thomas Joseph Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH COMPOSITE CONTACT...
- Publication number 20230399738
- Publication date Dec 14, 2023
- NANYA TECHNOLOGY CORPORATION
- YU-CHANG CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXCLUSION RING FOR SUBSTRATE PROCESSING
- Publication number 20230260814
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Vinayakaraddy Gulabal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCALED LINER LAYER FOR ISOLATION STRUCTURE
- Publication number 20230178419
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Benjamin COLOMBEAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process and Apparatus for Continuous Production of Porous Structures
- Publication number 20230051729
- Publication date Feb 16, 2023
- Molecule Works Inc.
- Wei LIU
- B22 - CASTING POWDER METALLURGY
Information Patent Application
DEUTERIUM-CONTAINING FILMS
- Publication number 20230037450
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS
- Publication number 20220193720
- Publication date Jun 23, 2022
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES
- Publication number 20210198783
- Publication date Jul 1, 2021
- First Solar, Inc.
- Markus Eberhard Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING TUNGSTEN STRUCTURES
- Publication number 20210183651
- Publication date Jun 17, 2021
- Micron Technology, Inc.
- David Ross Economy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH BORON-CONTENT HARD MASK MATERIALS
- Publication number 20210175078
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Bo Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC RECORDING MEDIUM AND MAGNETIC STORAGE APPARATUS
- Publication number 20210098017
- Publication date Apr 1, 2021
- SHOWA DENKO K.K.
- Kota HASEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS
- Publication number 20210090888
- Publication date Mar 25, 2021
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEUTERIUM-CONTAINING FILMS
- Publication number 20200395218
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Sean M. Seutter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING AND REPRODUCING DE...
- Publication number 20200286515
- Publication date Sep 10, 2020
- FUJIFILM CORPORATION
- Masahiko MORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING TUNGSTEN STRUCTURES
- Publication number 20200211843
- Publication date Jul 2, 2020
- Micron Technology, Inc.
- David Ross Economy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCALED LINER LAYER FOR ISOLATION STRUCTURE
- Publication number 20200161171
- Publication date May 21, 2020
- Applied Materials, Inc.
- Benjamin COLOMBEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL OXY-FLOURIDE FILMS BASED ON OXIDATION OF METAL FLOURIDES
- Publication number 20200140996
- Publication date May 7, 2020
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS
- Publication number 20200122191
- Publication date Apr 23, 2020
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC RECORDING MEDIUM AND MAGNETIC STORAGE APPARATUS
- Publication number 20190295583
- Publication date Sep 26, 2019
- SHOWA DENKO K.K.
- Kota HASEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING SILICON FILM, GERMANIUM FILM, OR S...
- Publication number 20190267236
- Publication date Aug 29, 2019
- TOKYO ELECTRON LIMITED
- Satoshi TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLICAL DEPOSITION OF GERMANIUM
- Publication number 20190027361
- Publication date Jan 24, 2019
- ASM IP HOLDING B.V.
- Raija H. Matero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON FILM REMOVING METHOD, AND PATTERN FORMING METHOD AND APPARATU...
- Publication number 20180350598
- Publication date Dec 6, 2018
- TOKYO ELECTRON LIMITED
- Yoshimasa WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOURINATION PROCESS TO CREATE SACRIFICIAL OXY-FLOURIDE LAYER
- Publication number 20180327898
- Publication date Nov 15, 2018
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR PHOTO-EXCITATION PROCESSES
- Publication number 20180274099
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- STEPHEN MOFFATT
- C30 - CRYSTAL GROWTH
Information Patent Application
FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES
- Publication number 20180245209
- Publication date Aug 30, 2018
- SIVA POWER, INC.
- Markus Eberhard Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WEAR RESISTANT VAPOR DEPOSITED COATING, METHOD OF COATING DEPOSITIO...
- Publication number 20180245202
- Publication date Aug 30, 2018
- G&H Technologies, LLC
- Vladimir GOROKHOVSKY
- C21 - METALLURGY OF IRON
Information Patent Application
SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS
- Publication number 20180243787
- Publication date Aug 30, 2018
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM DEPOSITION METHODS WITH FLUID-ASSISTED THERMAL MANAGEMENT...
- Publication number 20180073127
- Publication date Mar 15, 2018
- SIVA POWER, INC.
- Markus Eberhard Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLICAL DEPOSITION OF GERMANIUM
- Publication number 20180005823
- Publication date Jan 4, 2018
- ASM IP HOLDING B.V.
- Raija H. Matero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon or Germanium Network Structure for Use as an Anode in a Bat...
- Publication number 20180006295
- Publication date Jan 4, 2018
- University of Limerick
- Kevin M. Ryan
- B82 - NANO-TECHNOLOGY

Deposition of only one other non-metal element

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Selective deposition of metals, metal oxides, and dielectrics

Methods of forming tungsten structures

Method for forming boron-based film, formation apparatus

Deuterium-containing films

Process and apparatus for continuous production of porous structures

Method for marking and authenticating diamonds and precious stones

Methods of forming high boron-content hard mask materials

Selective deposition of metals, metal oxides, and dielectrics

Method of fabricating an electrode structure having a continuous po...

Magnetic recording medium having magnetic layer with hydride of car...

Methods of forming tungsten structures

Cyclical deposition of germanium

Methods for forming a silicon germanium tin layer and related semic...

Cleaning method and film forming method

Metal oxy-flouride films based on oxidation of metal flourides

Method of filling recess and processing apparatus

Selective deposition of metals, metal oxides, and dielectrics

Low temperature molybdenum film deposition utilizing boron nucleati...

Flourination process to create sacrificial oxy-flouride layer

Apparatus and methods for photo-excitation processes

Cobalt-containing compounds, their synthesis, and use in cobalt-con...

Wear resistant vapor deposited coating, method of coating depositio...

Method of manufacturing semiconductor device, substrate processing...

Thin-film deposition methods with fluid-assisted thermal management...

Wear resistant vapor deposited coating, method of coating depositio...

Fluid-assisted thermal management of evaporation sources

Cyclical deposition of germanium

Selective deposition of metals, metal oxides, and dielectrics

Germanium- and zirconium-containing composition for vapor depositio...

Thin-film deposition methods with fluid-assisted thermal management...

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION OF GROUP FIFTEEN MATERIALS

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH COMPOSITE CONTACT...

EXCLUSION RING FOR SUBSTRATE PROCESSING

SCALED LINER LAYER FOR ISOLATION STRUCTURE

Process and Apparatus for Continuous Production of Porous Structures

DEUTERIUM-CONTAINING FILMS

SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS

FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES

METHODS OF FORMING TUNGSTEN STRUCTURES

HIGH BORON-CONTENT HARD MASK MATERIALS

MAGNETIC RECORDING MEDIUM AND MAGNETIC STORAGE APPARATUS

METHOD FOR FORMING BORON-BASED FILM, FORMATION APPARATUS

DEUTERIUM-CONTAINING FILMS

MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING AND REPRODUCING DE...

METHODS OF FORMING TUNGSTEN STRUCTURES

SCALED LINER LAYER FOR ISOLATION STRUCTURE

METAL OXY-FLOURIDE FILMS BASED ON OXIDATION OF METAL FLOURIDES

SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS

MAGNETIC RECORDING MEDIUM AND MAGNETIC STORAGE APPARATUS

METHOD AND APPARATUS FOR FORMING SILICON FILM, GERMANIUM FILM, OR S...

CYCLICAL DEPOSITION OF GERMANIUM

BORON FILM REMOVING METHOD, AND PATTERN FORMING METHOD AND APPARATU...

FLOURINATION PROCESS TO CREATE SACRIFICIAL OXY-FLOURIDE LAYER

APPARATUS AND METHODS FOR PHOTO-EXCITATION PROCESSES

FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES

WEAR RESISTANT VAPOR DEPOSITED COATING, METHOD OF COATING DEPOSITIO...

SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS

THIN-FILM DEPOSITION METHODS WITH FLUID-ASSISTED THERMAL MANAGEMENT...

CYCLICAL DEPOSITION OF GERMANIUM

Silicon or Germanium Network Structure for Use as an Anode in a Bat...