Details of electrostatic chucks

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CPC
H01L21/6833

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6833Details of electrostatic chucks

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage and plasma processing apparatus
- Patent number 12,272,528
- Issue date Apr 8, 2025
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,266,557
- Issue date Apr 1, 2025
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,266,515
- Issue date Apr 1, 2025
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, system, and method for non-contact temperature monitorin...
- Patent number 12,266,551
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Bhaskar Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate test apparatus and method for measuring dechucking force...
- Patent number 12,261,072
- Issue date Mar 25, 2025
- Semes Co., Ltd.
- Jong Ho Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 12,261,028
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Shuichi Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly for plasma processing apparatus
- Patent number 12,261,073
- Issue date Mar 25, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Maolin Long
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Joined body, holding device, and electrostatic chuck
- Patent number 12,251,923
- Issue date Mar 18, 2025
- NITERRA CO., LTD.
- Osamu Yoshimoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck device
- Patent number 12,249,492
- Issue date Mar 11, 2025
- Sumitomo Osaka Cement Co., Ltd.
- Masaki Hirayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 12,243,764
- Issue date Mar 4, 2025
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate fixing device and electrostatic chuck
- Patent number 12,243,763
- Issue date Mar 4, 2025
- Shinko Electric Industries Co., Ltd.
- Masakuni Miyazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus including electrostatic chuck, subst...
- Patent number 12,243,727
- Issue date Mar 4, 2025
- Semes Co., Ltd.
- Dong Chan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Member for semiconductor manufacturing apparatus and method for man...
- Patent number 12,243,729
- Issue date Mar 4, 2025
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor and method of manufacturing same
- Patent number 12,237,204
- Issue date Feb 25, 2025
- MiCo Ceramics Ltd.
- So Young Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,235,287
- Issue date Feb 25, 2025
- Samsung Electronics Co., Ltd.
- Daesung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin interface in a substrate support
- Patent number 12,237,200
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Alexander Sulyman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,237,156
- Issue date Feb 25, 2025
- NGK Insulators, Ltd.
- Tatsuya Kuno
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Semiconductor-manufacturing apparatus member and method of manufact...
- Patent number 12,238,826
- Issue date Feb 25, 2025
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucks with coolant gas zones and corresponding groov...
- Patent number 12,237,201
- Issue date Feb 25, 2025
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate fixing device
- Patent number 12,230,527
- Issue date Feb 18, 2025
- Shinko Electric Industries Co., Ltd.
- Yusuke Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer probe device
- Patent number 12,228,590
- Issue date Feb 18, 2025
- Winbond Electronics Corp.
- Ting-Ming Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanosecond pulser ADC system
- Patent number 12,230,477
- Issue date Feb 18, 2025
- Eagle Harbor Technologies, Inc.
- Kenneth Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching apparatus
- Patent number 12,230,505
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Akihiro Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck heater
- Patent number 12,230,526
- Issue date Feb 18, 2025
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Centering wafer for processing chamber
- Patent number 12,224,195
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Muhannad Mustafa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode pattern structure of concentric-circular-structured elect...
- Patent number 12,224,197
- Issue date Feb 11, 2025
- RAYCER ADVANCED MATERIALS TECHNOLOGY CO., LTD
- Juxian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with mesas
- Patent number 12,224,198
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature manifold assembly for substrate processing systems
- Patent number 12,224,161
- Issue date Feb 11, 2025
- Lam Research Corporation
- Gabriel De Jesus Soto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and electrostatic chuck
- Patent number 12,217,943
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Kohei Otsuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...
- Publication number 20250118535
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- David French
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY WITH DIELETRIC COOLING PLATE
- Publication number 20250119076
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250118586
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM
- Publication number 20250118578
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Ajith Karonnan Ramapurath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMULTANEOUS BONDING APPROACH FOR HIGH QUALITY WAFER STACKING APPLI...
- Publication number 20250118587
- Publication date Apr 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Xin-Hua Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...
- Publication number 20250112076
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOG...
- Publication number 20250112075
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Alexander SULYMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250105043
- Publication date Mar 27, 2025
- NGK Insulators, Ltd.
- Seiya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, PLASMA PROCESSING METHOD, AND PLASMA PROCESSIN...
- Publication number 20250105044
- Publication date Mar 27, 2025
- SEMES CO., LTD.
- Yong Jun BAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...
- Publication number 20250101580
- Publication date Mar 27, 2025
- LAM RESEARCH CORPORATION
- Tu HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20250105045
- Publication date Mar 27, 2025
- TOTO LTD.
- Tetsuro ITOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250105051
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALLOY COMPOSITION FOR CORROSION RESISTANCE
- Publication number 20250092491
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Chien-Min Liao
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
- Publication number 20250098036
- Publication date Mar 20, 2025
- BOBOO HI-TECH CO., LTD.
- Yun Hwi Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE FIXING DEVICE
- Publication number 20250096026
- Publication date Mar 20, 2025
- Shinko Electric Industries Co., Ltd.
- Keita Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT ALIGNMENT METHOD FOR IMPROVING SEMICONDUCTOR YIELD
- Publication number 20250083308
- Publication date Mar 13, 2025
- Applied Materials, INC.
- Damon K. Cox
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20250087517
- Publication date Mar 13, 2025
- NGK Insulators, Ltd.
- Keita MINE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND ELECTROSTATIC CHUCK
- Publication number 20250087469
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Kohei OTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20250087466
- Publication date Mar 13, 2025
- United Semiconductor (Xiamen) Co., Ltd.
- Ching-Shu Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LONG-LIFE EXTENDED TEMPERATURE RANGE EMBEDDED DIODE DESIGN FOR ELEC...
- Publication number 20250087518
- Publication date Mar 13, 2025
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME
- Publication number 20250079230
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Ikuhisa MORIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20250079229
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Seiya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR A SUSCEPTOR ASSEMBLY
- Publication number 20250079223
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Shubham Garg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250079134
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Tatsuya KUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20250069933
- Publication date Feb 27, 2025
- TOTO LTD.
- Masafumi IKEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20250069936
- Publication date Feb 27, 2025
- Tomoegawa Corporation
- Tomoya HAGIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069862
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Nobutaka SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC PLATE
- Publication number 20250069930
- Publication date Feb 27, 2025
- NGK Insulators, Ltd.
- Takahiro ANDO
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND PRODUCT...
- Publication number 20250069931
- Publication date Feb 27, 2025
- Sumitomo Osaka Cement Co., Ltd.
- Satoyoshi INUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME
- Publication number 20250069941
- Publication date Feb 27, 2025
- MICO CERAMICS LTD.
- So Young Park
- H01 - BASIC ELECTRIC ELEMENTS

Details of electrostatic chucks

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer chuck structure with holes in upper surface to improve temper...

Stage and plasma processing apparatus

Wafer placement table

Wafer placement table

Apparatus, system, and method for non-contact temperature monitorin...

Substrate test apparatus and method for measuring dechucking force...

Plasma processing apparatus

Electrostatic chuck assembly for plasma processing apparatus

Joined body, holding device, and electrostatic chuck

Electrostatic chuck device

Electrostatic chuck

Substrate fixing device and electrostatic chuck

Substrate processing apparatus including electrostatic chuck, subst...

Member for semiconductor manufacturing apparatus and method for man...

Ceramic susceptor and method of manufacturing same

Substrate processing apparatus

Lift pin interface in a substrate support

Wafer placement table

Semiconductor-manufacturing apparatus member and method of manufact...

Electrostatic chucks with coolant gas zones and corresponding groov...

Electrostatic chuck and substrate fixing device

Wafer probe device

Nanosecond pulser ADC system

Etching apparatus

Electrostatic chuck heater

Centering wafer for processing chamber

Electrode pattern structure of concentric-circular-structured elect...

Electrostatic chuck with mesas

Low temperature manifold assembly for substrate processing systems

Substrate processing apparatus and electrostatic chuck

Patents Applicationslast 30 patents

RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...

SUBSTRATE SUPPORT ASSEMBLY WITH DIELETRIC COOLING PLATE

ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY

PEDESTAL HEATER WITH SUBSTRATE TEMPERATURE MEASUREMENT SYSTEM

SIMULTANEOUS BONDING APPROACH FOR HIGH QUALITY WAFER STACKING APPLI...

GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...

METAL BONDED ESC WITH OUTER CERAMIC VACUUM ISOLATION RING FOR CRYOG...

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

ELECTROSTATIC CHUCK, PLASMA PROCESSING METHOD, AND PLASMA PROCESSIN...

UNDERCOATING COVERAGE AND RESISTANCE CONTROL FOR ESCS OF SUBSTRATE...

ELECTROSTATIC CHUCK

MODULAR SUBSTRATE SUPPORT ASSEMBLY

ALLOY COMPOSITION FOR CORROSION RESISTANCE

METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK

SUBSTRATE FIXING DEVICE

PROCESS KIT ALIGNMENT METHOD FOR IMPROVING SEMICONDUCTOR YIELD

WAFER PLACEMENT TABLE

SUBSTRATE PROCESSING APPARATUS AND ELECTROSTATIC CHUCK

PROCESSING APPARATUS AND PROCESSING METHOD

LONG-LIFE EXTENDED TEMPERATURE RANGE EMBEDDED DIODE DESIGN FOR ELEC...

WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME

WAFER PLACEMENT TABLE

METHODS AND APPARATUS FOR A SUSCEPTOR ASSEMBLY

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK DEVICE

SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS

CERAMIC PLATE

ELECTROSTATIC CHUCK MEMBER, ELECTROSTATIC CHUCK DEVICE, AND PRODUCT...

CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME