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ELECTRICITY
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Electric techniques
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X-RAY TECHNIQUE
H05G2/00
Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes
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H05G2/006
details of the ejection system
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Patents Grants
last 30 patents
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Patent Grant
X-ray source with an electromagnetic pump
Patent number
11,979,972
Issue date
May 7, 2024
Excillum AB
Björn Hansson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray source and method for generating X-ray radiation
Patent number
11,963,286
Issue date
Apr 16, 2024
Excillum AB
Björn Hansson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target material control in an EUV light source
Patent number
11,963,285
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Abhiram Lakshmi Ganesh Govindaraju
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Guiding device
Patent number
11,947,264
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Patrick Willem Paul Limpens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Tin trap device, extreme ultraviolet light generation apparatus, an...
Patent number
11,940,736
Issue date
Mar 26, 2024
Gigaphoton Inc.
Gota Niimi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
Patent number
11,914,302
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray source with an electromagnetic pump
Patent number
11,910,515
Issue date
Feb 20, 2024
Excillum AB
Ulf Lundström
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle based X-ray source
Patent number
11,882,642
Issue date
Jan 23, 2024
Innovicum Technology AB
Rolf Behling
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
Patent number
11,860,544
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Ya Cheng
G02 - OPTICS
Information
Patent Grant
Target delivery system
Patent number
11,856,681
Issue date
Dec 26, 2023
ASML Netherlands B.V.
Georgiy Olegovich Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,789,374
Issue date
Oct 17, 2023
Gigaphoton Inc.
Yusuke Hoshino
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
Patent number
11,792,909
Issue date
Oct 17, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chih Lai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for high pressure connection
Patent number
11,774,012
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Jon David Tedrow
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Tunable source of intense, narrowband, fully coherent, soft X-rays
Patent number
11,770,890
Issue date
Sep 26, 2023
Technische Universiteit Eindhoven
Otger Jan Luiten
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Determining moving properties of a target in an extreme ultraviolet...
Patent number
11,758,639
Issue date
Sep 12, 2023
ASML Netherlands B.V.
Robert Jay Rafac
G01 - MEASURING TESTING
Information
Patent Grant
EUV vessel perimeter flow auto adjustment
Patent number
11,747,735
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Che-Chang Hsu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Soft X-ray light source
Patent number
11,751,318
Issue date
Sep 5, 2023
RAYCAN TECHNOLOGY CO., LTD. (SUZHOU)
Wei Liu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Droplet accelerating assembly and extreme ultra-violet lithography...
Patent number
11,711,883
Issue date
Jul 25, 2023
Samsung Electronics Co., Ltd.
Minseok Choi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for extending target material delivery system...
Patent number
11,690,159
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Bob Rollinger
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for mitigating contamination
Patent number
11,675,272
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Ping Yen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target supply device, extreme ultraviolet light generation apparatu...
Patent number
11,659,646
Issue date
May 23, 2023
Gigaphoton Inc.
Koji Yamasaki
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithography thermal control
Patent number
11,647,578
Issue date
May 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tai-Yu Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Droplet generator and method of servicing extreme ultraviolet imagi...
Patent number
11,617,255
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Chih Lai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Droplet catcher, droplet catcher system of EUV lithography apparatu...
Patent number
11,599,030
Issue date
Mar 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yu Tu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
Patent number
11,602,037
Issue date
Mar 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Huan Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,576,250
Issue date
Feb 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Hao Lai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Control of dynamic gas lock flow inlets of an intermediate focus cap
Patent number
11,573,495
Issue date
Feb 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Kai Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,553,583
Issue date
Jan 10, 2023
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Radiation source apparatus and method for using the same
Patent number
11,553,581
Issue date
Jan 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chiao-Hua Cheng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,537,053
Issue date
Dec 27, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chiao-Hua Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20240126185
Publication date
Apr 18, 2024
Gigaphoton Inc.
Yoshifumi UENO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS
Publication number
20240094646
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
Katsunobu NISHIHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...
Publication number
20240085797
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Ya CHENG
G02 - OPTICS
Information
Patent Application
TARGET DELIVERY SYSTEM
Publication number
20240090109
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Georgiy Olegovich Vaschenko
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20240049378
Publication date
Feb 8, 2024
Gigaphoton Inc.
Masaki NAKANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE MEMBRANE AND METHOD OF FORMING THE SAME
Publication number
20230408904
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Hao LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EUV LIGHT SOURCE DEVICE AND PLASMA GAS RECYCLING SYSTEM FOR HIGH-DE...
Publication number
20230371164
Publication date
Nov 16, 2023
ESOL Inc.
Dong Gun LEE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
Publication number
20230363074
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chih LAI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
Publication number
20230359125
Publication date
Nov 9, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY , LTD.
Che-Chang HSU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATIO...
Publication number
20230345610
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Kuang SUN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING X-RAYS BY LASER IRRADIATION OF...
Publication number
20230328868
Publication date
Oct 12, 2023
DEUTSCHES ELEKTRONEN-SYNCHROTRON DESY
Tim LAARMANN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20230300966
Publication date
Sep 21, 2023
Gigaphoton Inc.
Shogo KITASAKA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LITHOGRAPHY THERMAL CONTROL
Publication number
20230284366
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tai-Yu CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
Publication number
20230284364
Publication date
Sep 7, 2023
Gigaphoton Inc.
Nozomu OUE
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LIQUID TAMPED TARGETS FOR EXTREME ULTRAVIOLET LITHOGRAPHY
Publication number
20230280656
Publication date
Sep 7, 2023
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
Yechiel R. FRANK
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20230284365
Publication date
Sep 7, 2023
Gigaphoton Inc.
Yuichi NISHIMURA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
Publication number
20230273525
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ping YEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
Publication number
20230225039
Publication date
Jul 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PARTICLE BASED X-RAY SOURCE
Publication number
20230209693
Publication date
Jun 29, 2023
INNOVICUM TECHNOLOGY AB
Rolf BEHLING
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...
Publication number
20230189422
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Kuang SUN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP
Publication number
20230185200
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Kai CHANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN L...
Publication number
20230171869
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Benjamin Andrew Sams
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
Publication number
20230164899
Publication date
May 25, 2023
Ushio Denki Kabushiki Kaisha
Hideyuki URAKAMI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS FOR AND METHOD OF ACCELERATING DROPLETS IN A DROPLET GENE...
Publication number
20230164900
Publication date
May 25, 2023
ASML NETHERLANDS B.V.
Alexander Igorevich Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR USING RADIATION SOURCE APPARATUS
Publication number
20230164901
Publication date
May 25, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chiao-Hua CHENG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING MET...
Publication number
20230142875
Publication date
May 11, 2023
Gigaphoton Inc.
Fumio IWAMOTO
G01 - MEASURING TESTING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION METHOD, EXTREME ULTRAVIOLET LI...
Publication number
20230126340
Publication date
Apr 27, 2023
Gigaphoton Inc.
Yoshiyuki HONDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
REPLACEMENT AND REFILL METHOD FOR DROPLET GENERATOR
Publication number
20230107078
Publication date
Apr 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Yu TU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
Publication number
20230062653
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ping YEN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
Publication number
20230061242
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Che-Chang HSU
G06 - COMPUTING CALCULATING COUNTING