details of the ejection system

Industry

CPC
H05G2/006

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Parent Industries

HELECTRICITY H05Electric techniques H05GX-RAY TECHNIQUE H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

Current Industry

H05G2/006details of the ejection system

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 12,193,136
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV vessel perimeter flow auto adjustment
- Patent number 12,189,298
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Che-Chang Hsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV light generation apparatus, electronic device manufacturing met...
- Patent number 12,185,449
- Issue date Dec 31, 2024
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system for generating droplets for EUV photolithography...
- Patent number 12,167,526
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target substance replenishment device, extreme ultraviolet light ge...
- Patent number 12,150,233
- Issue date Nov 19, 2024
- Gigaphoton Inc.
- Yutaka Shiraishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Droplet generator nozzle
- Patent number 12,139,436
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Dietmar Uwe Herbert Trees
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for mitigating contamination
- Patent number 12,130,555
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 12,114,411
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for using radiation source apparatus
- Patent number 12,096,543
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithography thermal control
- Patent number 12,096,544
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control of dynamic gas lock flow inlets of an intermediate focus cap
- Patent number 12,085,861
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator assembly and method of replacing components
- Patent number 12,063,734
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Droplet generator and method of servicing a photolithographic tool
- Patent number 12,055,864
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source and apparatus for EUV lithography
- Patent number 12,028,959
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Shin Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Replacement and refill method for droplet generator
- Patent number 11,997,778
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Yu Tu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
X-ray source with an electromagnetic pump
- Patent number 11,979,972
- Issue date May 7, 2024
- Excillum AB
- Björn Hansson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray source and method for generating X-ray radiation
- Patent number 11,963,286
- Issue date Apr 16, 2024
- Excillum AB
- Björn Hansson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target material control in an EUV light source
- Patent number 11,963,285
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Abhiram Lakshmi Ganesh Govindaraju
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Guiding device
- Patent number 11,947,264
- Issue date Apr 2, 2024
- ASML Netherlands B.V.
- Patrick Willem Paul Limpens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tin trap device, extreme ultraviolet light generation apparatus, an...
- Patent number 11,940,736
- Issue date Mar 26, 2024
- Gigaphoton Inc.
- Gota Niimi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for controlling droplet in extreme ultraviolet...
- Patent number 11,914,302
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray source with an electromagnetic pump
- Patent number 11,910,515
- Issue date Feb 20, 2024
- Excillum AB
- Ulf Lundström
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle based X-ray source
- Patent number 11,882,642
- Issue date Jan 23, 2024
- Innovicum Technology AB
- Rolf Behling
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
- Patent number 11,860,544
- Issue date Jan 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ya Cheng
- G02 - OPTICS
Information Patent Grant
Target delivery system
- Patent number 11,856,681
- Issue date Dec 26, 2023
- ASML Netherlands B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,789,374
- Issue date Oct 17, 2023
- Gigaphoton Inc.
- Yusuke Hoshino
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 11,792,909
- Issue date Oct 17, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for high pressure connection
- Patent number 11,774,012
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Jon David Tedrow
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Tunable source of intense, narrowband, fully coherent, soft X-rays
- Patent number 11,770,890
- Issue date Sep 26, 2023
- Technische Universiteit Eindhoven
- Otger Jan Luiten
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Determining moving properties of a target in an extreme ultraviolet...
- Patent number 11,758,639
- Issue date Sep 12, 2023
- ASML Netherlands B.V.
- Robert Jay Rafac
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365460
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365461
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS OF GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20240324090
- Publication date Sep 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Shin CHENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR PRODUCING DROPLETS OF TARGET MATERIAL IN A...
- Publication number 20240292510
- Publication date Aug 29, 2024
- ASML NETHERLANDS B.V.
- Alexander Igorevich Ershov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240260164
- Publication date Aug 1, 2024
- Gigaphoton Inc.
- Masaki NAKANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONNECTION ASSEMBLY
- Publication number 20240196504
- Publication date Jun 13, 2024
- ASML NETHERLANDS B.V.
- Ivo VANDERHALLEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...
- Publication number 20240160106
- Publication date May 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET MATERIAL TRANSFER SYSTEM COMPONENTS AND METHODS OF MAKING TH...
- Publication number 20240164004
- Publication date May 16, 2024
- ASML NETHERLANDS B.V.
- Dietmar Uwe Herbert Trees
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20240126185
- Publication date Apr 18, 2024
- Gigaphoton Inc.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS
- Publication number 20240094646
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- Katsunobu NISHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET DELIVERY SYSTEM
- Publication number 20240090109
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...
- Publication number 20240085797
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Ya CHENG
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20240049378
- Publication date Feb 8, 2024
- Gigaphoton Inc.
- Masaki NAKANO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE MEMBRANE AND METHOD OF FORMING THE SAME
- Publication number 20230408904
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Hao LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EUV LIGHT SOURCE DEVICE AND PLASMA GAS RECYCLING SYSTEM FOR HIGH-DE...
- Publication number 20230371164
- Publication date Nov 16, 2023
- ESOL Inc.
- Dong Gun LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20230363074
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
- Publication number 20230359125
- Publication date Nov 9, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY , LTD.
- Che-Chang HSU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATIO...
- Publication number 20230345610
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Kuang SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR GENERATING X-RAYS BY LASER IRRADIATION OF...
- Publication number 20230328868
- Publication date Oct 12, 2023
- DEUTSCHES ELEKTRONEN-SYNCHROTRON DESY
- Tim LAARMANN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20230300966
- Publication date Sep 21, 2023
- Gigaphoton Inc.
- Shogo KITASAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY THERMAL CONTROL
- Publication number 20230284366
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
- Publication number 20230284364
- Publication date Sep 7, 2023
- Gigaphoton Inc.
- Nozomu OUE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LIQUID TAMPED TARGETS FOR EXTREME ULTRAVIOLET LITHOGRAPHY
- Publication number 20230280656
- Publication date Sep 7, 2023
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Yechiel R. FRANK
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
- Publication number 20230284365
- Publication date Sep 7, 2023
- Gigaphoton Inc.
- Yuichi NISHIMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
- Publication number 20230273525
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20230225039
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PARTICLE BASED X-RAY SOURCE
- Publication number 20230209693
- Publication date Jun 29, 2023
- INNOVICUM TECHNOLOGY AB
- Rolf BEHLING
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...
- Publication number 20230189422
- Publication date Jun 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP
- Publication number 20230185200
- Publication date Jun 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Kai CHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN L...
- Publication number 20230171869
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Benjamin Andrew Sams
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

details of the ejection system

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for generating extreme ultraviolet radiation

EUV vessel perimeter flow auto adjustment

EUV light generation apparatus, electronic device manufacturing met...

Method and system for generating droplets for EUV photolithography...

Target substance replenishment device, extreme ultraviolet light ge...

Droplet generator nozzle

Method and apparatus for mitigating contamination

Apparatus and method for generating extreme ultraviolet radiation

Method for using radiation source apparatus

Lithography thermal control

Control of dynamic gas lock flow inlets of an intermediate focus cap

Droplet generator assembly and method of replacing components

Droplet generator and method of servicing a photolithographic tool

EUV light source and apparatus for EUV lithography

Replacement and refill method for droplet generator

X-ray source with an electromagnetic pump

X-ray source and method for generating X-ray radiation

Target material control in an EUV light source

Guiding device

Tin trap device, extreme ultraviolet light generation apparatus, an...

Method and apparatus for controlling droplet in extreme ultraviolet...

X-ray source with an electromagnetic pump

Particle based X-ray source

Target control in extreme ultraviolet lithography systems using abe...

Target delivery system

Extreme ultraviolet light generation apparatus and electronic devic...

Apparatus and method for generating extreme ultraviolet radiation

Apparatus for high pressure connection

Tunable source of intense, narrowband, fully coherent, soft X-rays

Determining moving properties of a target in an extreme ultraviolet...

Patents Applicationslast 30 patents

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

METHODS OF GENERATING EXTREME ULTRAVIOLET RADIATION

APPARATUS AND METHOD FOR PRODUCING DROPLETS OF TARGET MATERIAL IN A...

TARGET SUPPLY DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

CONNECTION ASSEMBLY

METHOD AND APPARATUS FOR CONTROLLING DROPLET IN EXTREME ULTRAVIOLET...

TARGET MATERIAL TRANSFER SYSTEM COMPONENTS AND METHODS OF MAKING TH...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS

TARGET DELIVERY SYSTEM

TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

PELLICLE MEMBRANE AND METHOD OF FORMING THE SAME

EUV LIGHT SOURCE DEVICE AND PLASMA GAS RECYCLING SYSTEM FOR HIGH-DE...

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT

METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATIO...

APPARATUS AND METHOD FOR GENERATING X-RAYS BY LASER IRRADIATION OF...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

LITHOGRAPHY THERMAL CONTROL

TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...

LIQUID TAMPED TARGETS FOR EXTREME ULTRAVIOLET LITHOGRAPHY

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...

METHOD AND APPARATUS FOR MITIGATING CONTAMINATION

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

PARTICLE BASED X-RAY SOURCE

METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...

CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP

HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN L...