Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

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Patents Grantslast 30 patents

Information Patent Grant
Laser system for source material conditioning in an EUV light source
- Patent number 12,369,244
- Issue date Jul 22, 2025
- ASML Netherlands B.V.
- Igor Vladimirovich Fomenkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation collector
- Patent number 12,360,458
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Cheng Hung Tsai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV radiation system including maximizing droplet velocity change t...
- Patent number 12,363,818
- Issue date Jul 15, 2025
- ASML Netherlands B.V.
- Gijs Dingemans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fluid control device and method for fluid control in an extreme ult...
- Patent number 12,352,371
- Issue date Jul 8, 2025
- ASML Netherlands B.V.
- Benjamin Andrew Sams
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 12,347,997
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of monitoring droplets in a droplet stream
- Patent number 12,339,214
- Issue date Jun 24, 2025
- ASML Netherlands B.V.
- Joshua Mark Lukens
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
- Patent number 12,332,571
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ya Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply system, extreme ultraviolet light generation apparatu...
- Patent number 12,332,575
- Issue date Jun 17, 2025
- Gigaphoton Inc.
- Fumio Iwamoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source system and method of operation
- Patent number 12,328,806
- Issue date Jun 10, 2025
- xLight Inc.
- David Douglas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of controlling droplet generator performance
- Patent number 12,324,084
- Issue date Jun 3, 2025
- ASML Netherlands B.V.
- Pooriya Beyhaghi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source device and protection method for r...
- Patent number 12,321,107
- Issue date Jun 3, 2025
- USHIO DENKI KABUSHIKI KAISHA
- Hironobu Yabuta
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Scanning linear accelerator system for producing X-rays of variable...
- Patent number 12,317,400
- Issue date May 27, 2025
- Teledyne ETM, Inc.
- William L. Nighan
- G01 - MEASURING TESTING
Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 12,309,908
- Issue date May 20, 2025
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Droplet generator and method of servicing extreme ultraviolet imagi...
- Patent number 12,302,484
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hybrid droplet generator for extreme ultraviolet light sources in l...
- Patent number 12,295,088
- Issue date May 6, 2025
- ASML Netherlands B.V.
- Benjamin Andrew Sams
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for controlling extreme ultraviolet light
- Patent number 12,282,262
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation method, extreme ultraviolet li...
- Patent number 12,284,745
- Issue date Apr 22, 2025
- Gigaphoton Inc.
- Yoshiyuki Honda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target delivery system
- Patent number 12,273,986
- Issue date Apr 8, 2025
- ASML Netherlands B.V.
- Georgiy Olegovich Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source device and plasma gas recycling system for high-de...
- Patent number 12,250,763
- Issue date Mar 11, 2025
- ESOL Inc.
- Dong Gun Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light source apparatus
- Patent number 12,250,762
- Issue date Mar 11, 2025
- Ushio Denki Kabushiki Kaisha
- Yusuke Teramoto
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical isolation module
- Patent number 12,245,350
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Yezheng Tao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for performing lithography process, light source, and EUV li...
- Patent number 12,235,594
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source target metrology
- Patent number 12,238,848
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Robert Jay Rafac
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation conduit
- Patent number 12,235,585
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Remco Johannes Elisa Heijmans
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser amplification device and extreme ultraviolet light generation...
- Patent number 12,230,936
- Issue date Feb 18, 2025
- Mitsubishi Electric Corporation
- Yuzuru Tadokoro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target supply control apparatus and method in an extreme ultraviole...
- Patent number 12,232,244
- Issue date Feb 18, 2025
- ASML Netherlands B.V.
- Theodorus Wilhelmus Driessen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Robust fluid coupling apparatus
- Patent number 12,222,050
- Issue date Feb 11, 2025
- ASML Netherlands B.V.
- Benjamin Andrew Sams
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device and method to remove debris from an extreme ultraviolet (EUV...
- Patent number 12,216,413
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Han Lin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet lithography system with heated tin vane bucket...
- Patent number 12,207,381
- Issue date Jan 21, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply system, extreme ultraviolet light generation apparatu...
- Patent number 12,207,382
- Issue date Jan 21, 2025
- Gigaphoton Inc.
- Nozomu Oue
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
- Publication number 20250234444
- Publication date Jul 17, 2025
- Gigaphoton Inc.
- Shogo KITASAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ROTATIONAL DISK STRUCTURE FOR EUV LIGHT SOURCE DEVICE
- Publication number 20250234446
- Publication date Jul 17, 2025
- ESOL, Inc.
- Dong Gun LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHIELD-INTEGRATED ROTATIONAL DISK EUV LIGHT SOURCE DEVICE INCLUDING...
- Publication number 20250234447
- Publication date Jul 17, 2025
- ESOL, Inc.
- Dong Gun LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20250234445
- Publication date Jul 17, 2025
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ON-AXIS TYPE EUV LIGHT SOURCE DEVICE WITH TARGET MATERIAL SUPPLY CH...
- Publication number 20250234448
- Publication date Jul 17, 2025
- ESOL, Inc.
- Dong Gun LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH PRESSURE COUPLING ASSEMBLY
- Publication number 20250227834
- Publication date Jul 10, 2025
- ASML NETHERLANDS B.V.
- Rahul Sunil Kapadia
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TRANSFORMER AND X-RAY SYSTEM
- Publication number 20250218646
- Publication date Jul 3, 2025
- Shanghai United Imaging Healthcare Co., Ltd.
- Biao Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR ACCELERATOR SYSTEM FOR STABLE PULSING AT MULTIPLE DOSE LEVELS
- Publication number 20250203745
- Publication date Jun 19, 2025
- Teledyne ETM, Inc.
- William L. NIGHAN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
BEAM DIAPHRAGM, EUV LIGHT SOURCE, AND METHOD FOR OPERATING AN EUV L...
- Publication number 20250203746
- Publication date Jun 19, 2025
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20250193992
- Publication date Jun 12, 2025
- Gigaphoton Inc.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY CONTROL APPARATUS AND METHOD IN AN EXTREME ULTRAVIOLE...
- Publication number 20250193991
- Publication date Jun 12, 2025
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus Driessen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV Light Source Target Metrology
- Publication number 20250185147
- Publication date Jun 5, 2025
- ASML NETHERLANDS B.V.
- Yezheng Tao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PERFORMANCE RECOVERY METHOD FOR EUV LIGHT GENERATION SYSTEM, EUV LI...
- Publication number 20250176090
- Publication date May 29, 2025
- Gigaphoton Inc.
- Yuichi NISHIMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE APPARATUS AND OPTICAL APPARATUS
- Publication number 20250176089
- Publication date May 29, 2025
- Lasertec Corporation
- Masaki Inoue
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIATION CONDUIT
- Publication number 20250155820
- Publication date May 15, 2025
- ASML NETHERLANDS B.V.
- Remco Johannes Elisa HEIJMANS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLEANING APPARATUS, EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM, AND MET...
- Publication number 20250147439
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Han LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHAMBER, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONI...
- Publication number 20250126699
- Publication date Apr 17, 2025
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20250126697
- Publication date Apr 17, 2025
- Gigaphoton Inc.
- Yoshiyuki HONDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV COLLECTOR FOR AN EUV PROJECTION EXPOSURE APPARATUS
- Publication number 20250126698
- Publication date Apr 17, 2025
- Carl Zeiss SMT GMBH
- Silvi HAENDEL
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV RADIATION GENERATION FOLLOWING LASER BEAM ROTATION
- Publication number 20250113427
- Publication date Apr 3, 2025
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SAPPHIRE LAMP FOR LASER SUSTAINED PLASMA BROADBAND LIGHT SOURCE
- Publication number 20250106973
- Publication date Mar 27, 2025
- KLA Corporation
- Sergei Gluchko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20250106974
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE SYSTEM AND METHOD OF OPERATION
- Publication number 20250098056
- Publication date Mar 20, 2025
- xLight Inc.
- David Douglas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION-MONITORED LASER OPTICAL UNIT
- Publication number 20250093197
- Publication date Mar 20, 2025
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Stefan Piehler
- G01 - MEASURING TESTING
Information Patent Application
CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20250085641
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Daniel Jason Riggs
- G01 - MEASURING TESTING
Information Patent Application
EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250089150
- Publication date Mar 13, 2025
- Gigaphoton Inc.
- Yuichi NISHIMURA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET (EUV) SOURCE AND A SUBSTRATE PROCESSING APPARAT...
- Publication number 20250076776
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- SEUNGPYO HONG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Light Source Using Pre-Ionization
- Publication number 20250081319
- Publication date Mar 6, 2025
- Hamamatsu Photonics K. K.
- Frederick Marvin Niell
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
- Publication number 20250081320
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- Injae LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
- Publication number 20250076770
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Chang HSU
- G06 - COMPUTING CALCULATING COUNTING

Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

Laser system for source material conditioning in an EUV light source

Radiation collector

EUV radiation system including maximizing droplet velocity change t...

Fluid control device and method for fluid control in an extreme ult...

Methods and systems for aligning master oscillator power amplifier...

Apparatus for and method of monitoring droplets in a droplet stream

Target control in extreme ultraviolet lithography systems using abe...

Target supply system, extreme ultraviolet light generation apparatu...

Light source system and method of operation

Apparatus for and method of controlling droplet generator performance

Extreme ultraviolet light source device and protection method for r...

Scanning linear accelerator system for producing X-rays of variable...

Extreme ultraviolet light generation apparatus and electronic devic...

Droplet generator and method of servicing extreme ultraviolet imagi...

Hybrid droplet generator for extreme ultraviolet light sources in l...

Method for controlling extreme ultraviolet light

Extreme ultraviolet light generation method, extreme ultraviolet li...

Target delivery system

EUV light source device and plasma gas recycling system for high-de...

Light source apparatus

Optical isolation module

Method for performing lithography process, light source, and EUV li...

EUV light source target metrology

Radiation conduit

Laser amplification device and extreme ultraviolet light generation...

Target supply control apparatus and method in an extreme ultraviole...

Robust fluid coupling apparatus

Device and method to remove debris from an extreme ultraviolet (EUV...

Extreme ultraviolet lithography system with heated tin vane bucket...

Target supply system, extreme ultraviolet light generation apparatu...

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...

ROTATIONAL DISK STRUCTURE FOR EUV LIGHT SOURCE DEVICE

SHIELD-INTEGRATED ROTATIONAL DISK EUV LIGHT SOURCE DEVICE INCLUDING...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

ON-AXIS TYPE EUV LIGHT SOURCE DEVICE WITH TARGET MATERIAL SUPPLY CH...

HIGH PRESSURE COUPLING ASSEMBLY

TRANSFORMER AND X-RAY SYSTEM

LINEAR ACCELERATOR SYSTEM FOR STABLE PULSING AT MULTIPLE DOSE LEVELS

BEAM DIAPHRAGM, EUV LIGHT SOURCE, AND METHOD FOR OPERATING AN EUV L...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

TARGET SUPPLY CONTROL APPARATUS AND METHOD IN AN EXTREME ULTRAVIOLE...

EUV Light Source Target Metrology

PERFORMANCE RECOVERY METHOD FOR EUV LIGHT GENERATION SYSTEM, EUV LI...

LIGHT SOURCE APPARATUS AND OPTICAL APPARATUS

RADIATION CONDUIT

CLEANING APPARATUS, EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM, AND MET...

CHAMBER, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND ELECTRONI...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

EUV COLLECTOR FOR AN EUV PROJECTION EXPOSURE APPARATUS

EUV RADIATION GENERATION FOLLOWING LASER BEAM ROTATION

SAPPHIRE LAMP FOR LASER SUSTAINED PLASMA BROADBAND LIGHT SOURCE

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

LIGHT SOURCE SYSTEM AND METHOD OF OPERATION

VIBRATION-MONITORED LASER OPTICAL UNIT

CALIBRATION SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

EUV LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD

EXTREME ULTRAVIOLET (EUV) SOURCE AND A SUBSTRATE PROCESSING APPARAT...

Light Source Using Pre-Ionization

EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE

NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT