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X-RAY IMAGING APPARATUS
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Publication number 20240402096
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Publication date Dec 5, 2024
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Shimadzu Corporation
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Ryo FUJITA
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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VACUUM TUBE SUPPORT STRUCTURE
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Publication number 20240397602
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Publication date Nov 28, 2024
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YOKOGAWA ELECTRIC CORPORATION
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Tomoya Taguchi
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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LITHOGRAPHY THERMAL CONTROL
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Publication number 20240389215
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Publication date Nov 21, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Tai-Yu CHEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SYSTEM AND METHOD FOR CLEANING AN EUV MASK
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Publication number 20240377766
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Publication date Nov 14, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Yen-Hui LI
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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EUV LITHOGRAPHY APPARATUS
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Publication number 20240379259
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Publication date Nov 14, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Cheng Hung TSAI
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G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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LITHOGRAPHY CONTAMINATION CONTROL
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Publication number 20240361708
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Publication date Oct 31, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chieh HSIEH
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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