Details relating to the exhausts

Industry

CPC
C23C16/4412

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4412Details relating to the exhausts

Industries

Patents Grantslast 30 patents

Information Patent Grant
System and method for treating exhaust fluid from semiconductor man...
- Patent number 12,179,147
- Issue date Dec 31, 2024
- PLAN CO., LTD
- In Cheol Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device
- Patent number 12,173,400
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- JaeMin Roh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas transport system
- Patent number 12,173,736
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jheng-Syun Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous liner for use in a processing chamber
- Patent number 12,163,218
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, reaction container, method of manuf...
- Patent number 12,163,226
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Kazuki Nonomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and oxygen removal method thereof
- Patent number 12,165,883
- Issue date Dec 10, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Min Zuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within housings, apparatus, or tools uti...
- Patent number 12,163,216
- Issue date Dec 10, 2024
- Halliburton Energy Services, Inc.
- Christopher Michael Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process apparatus and process method
- Patent number 12,157,029
- Issue date Dec 3, 2024
- Kabushiki Kaisha Toshiba
- Kenya Uchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Intersecting module
- Patent number 12,152,303
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Syuan Lan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,148,637
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treatment apparatus having exhaust structure
- Patent number 12,146,216
- Issue date Nov 19, 2024
- DEVICEENG CO., LTD
- Taek Youb Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process stop loss reduction system through rapid replacement of app...
- Patent number 12,139,789
- Issue date Nov 12, 2024
- MILAEBO CO., LTD.
- Yeon Ju Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,136,545
- Issue date Nov 5, 2024
- Kokusai Electric Corporation
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling a processing system
- Patent number 12,134,823
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Andreas Neuber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,123,091
- Issue date Oct 22, 2024
- Kokusai Electric Corporation
- Takayuki Nakada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Catalytic abatement system for semiconductor manufacturing process
- Patent number 12,121,855
- Issue date Oct 22, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Justin M. Weinstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,125,717
- Issue date Oct 22, 2024
- Semes Co., Ltd.
- Ki Sang Eum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treatment gaseous pollutants
- Patent number 12,115,496
- Issue date Oct 15, 2024
- BHT SERVICES PTE. LTD.
- Chee Wei Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and exhaust liner system therefor
- Patent number 12,110,585
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Naman Apurva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mass flow controller and flow control method therefor
- Patent number 12,111,671
- Issue date Oct 8, 2024
- BEIJING SEVENSTAR FLOW CO., LTD
- Bowen Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for trapping multiple reaction by-products for semiconduc...
- Patent number 12,104,247
- Issue date Oct 1, 2024
- MILAEBO CO., LTD.
- Che Hoo Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated carrier cleaning modules
- Patent number 12,104,242
- Issue date Oct 1, 2024
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal oxide preclean chamber with improved selectivity and flow con...
- Patent number 12,100,576
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for stabilizing reaction chamber pressure
- Patent number 12,098,460
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Eiichiro Shiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetrical sealing and gas flow control device
- Patent number 12,094,730
- Issue date Sep 17, 2024
- Samsung Electronics Co., Ltd.
- June Hee Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve module and substrate processing device comprising the same
- Patent number 12,092,235
- Issue date Sep 17, 2024
- PRESYS. CO., LTD.
- Sang Min Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Switchable delivery for semiconductor processing system
- Patent number 12,094,689
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Sai Susmita Addepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, recording medium, substrate process...
- Patent number 12,084,760
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings for enhancement of properties and performance of substrate...
- Patent number 12,084,778
- Issue date Sep 10, 2024
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control assembly for substrate processing apparatus and...
- Patent number 12,077,857
- Issue date Sep 3, 2024
- ASM IP Holding B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MATERIAL LAYER DEPOSITION METHODS, SEMICONDUCTOR PROCESSING SYSTEMS...
- Publication number 20250003062
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Shujin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003064
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR HEATING JACKET WITH REMOLDABLE INSULATOR
- Publication number 20250003076
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Particle Coating Apparatus And Method Of Coating Particle
- Publication number 20250003063
- Publication date Jan 2, 2025
- SEIKO EPSON CORPORATION
- Teruaki NANBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES
- Publication number 20240425973
- Publication date Dec 26, 2024
- VEECO INSTRUMENTS INC.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR COLLECTING REACTION BY-PRODUCTS FOR SEMICONDUCTOR PRO...
- Publication number 20240425980
- Publication date Dec 26, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240417851
- Publication date Dec 19, 2024
- LPE S.p.A.
- Francesco Corea
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GENERATION OF AN ACTIVE OXYGEN SPECIES
- Publication number 20240417858
- Publication date Dec 19, 2024
- Silanna UV Technologies Pte Ltd
- Petar Atanackovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240401199
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS AND MANUFACTURING METHOD
- Publication number 20240401195
- Publication date Dec 5, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PRECURSOR RECOVERY MODULE
- Publication number 20240401193
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Shashank Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20240392437
- Publication date Nov 28, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Can XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME
- Publication number 20240392439
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240376603
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Masato KADOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER WITH GAS RECYCLING
- Publication number 20240368764
- Publication date Nov 7, 2024
- APPLIED MATERIALS,INC.
- Michael Robert Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240360552
- Publication date Oct 31, 2024
- Kokusai Electric Corporation
- Hideharu ITATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHODS USING STAGGERED PUMPING LOCATIONS
- Publication number 20240360553
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING MODULE AND PROGRAM CONTROL METHOD FOR PUMPING LINE OF SEMIC...
- Publication number 20240360551
- Publication date Oct 31, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Sheng-chun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...
- Publication number 20240360590
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT SOLUTION AND TREATMENT METHOD
- Publication number 20240352578
- Publication date Oct 24, 2024
- Kabushiki Kaisha Toshiba
- Kenya UCHIDA
- A62 - LIFE-SAVING FIRE-FIGHTING
Information Patent Application
REACTIVE BY-PRODUCTS COLLECTION SYSTEM
- Publication number 20240352926
- Publication date Oct 24, 2024
- MILAEBO CO., LTD.
- Che Hoo CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20240352580
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240344194
- Publication date Oct 17, 2024
- Kokusai Electric Corporation
- Atsuhiko ASHITANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ORGANIC EFFLUENT ABATEMENT
- Publication number 20240347324
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Ryan T. DOWNEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR FOR EPITAXY AND CVD CHAMBER
- Publication number 20240337020
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-DEPOSITION OBJECT FOR USE IN VACUUM ENVIRONMENT
- Publication number 20240337015
- Publication date Oct 10, 2024
- HIGHLIGHT TECH CORP.
- CHIEN-HSUN CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20240332039
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240318306
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Details relating to the exhausts

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for treating exhaust fluid from semiconductor man...

Substrate processing device

Gas transport system

Continuous liner for use in a processing chamber

Substrate processing apparatus, reaction container, method of manuf...

Semiconductor device and oxygen removal method thereof

Depositing coatings on and within housings, apparatus, or tools uti...

Process apparatus and process method

Intersecting module

Substrate processing apparatus

Substrate treatment apparatus having exhaust structure

Process stop loss reduction system through rapid replacement of app...

Method of manufacturing semiconductor device, substrate processing...

Method for controlling a processing system

Substrate processing apparatus and method of manufacturing semicond...

Catalytic abatement system for semiconductor manufacturing process

Apparatus for treating substrate

Apparatus for treatment gaseous pollutants

Process chamber and exhaust liner system therefor

Mass flow controller and flow control method therefor

Apparatus for trapping multiple reaction by-products for semiconduc...

Deposition system with integrated carrier cleaning modules

Metal oxide preclean chamber with improved selectivity and flow con...

Systems and methods for stabilizing reaction chamber pressure

Asymmetrical sealing and gas flow control device

Valve module and substrate processing device comprising the same

Switchable delivery for semiconductor processing system

Method of processing substrate, recording medium, substrate process...

Coatings for enhancement of properties and performance of substrate...

Temperature control assembly for substrate processing apparatus and...

Patents Applicationslast 30 patents

MATERIAL LAYER DEPOSITION METHODS, SEMICONDUCTOR PROCESSING SYSTEMS...

Particle Coating Apparatus And Method Of Coating Particle

MODULAR HEATING JACKET WITH REMOLDABLE INSULATOR

Particle Coating Apparatus And Method Of Coating Particle

DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES

APPARATUS FOR COLLECTING REACTION BY-PRODUCTS FOR SEMICONDUCTOR PRO...

APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICES

GENERATION OF AN ACTIVE OXYGEN SPECIES

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM-FORMING APPARATUS AND MANUFACTURING METHOD

LIQUID PRECURSOR RECOVERY MODULE

VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD

REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME

SUBSTRATE PROCESSING APPARATUS

PROCESSING CHAMBER WITH GAS RECYCLING

Batch Mode Silicon Carbide Epitaxial Reactor

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

DEPOSITION APPARATUS AND METHODS USING STAGGERED PUMPING LOCATIONS

HEATING MODULE AND PROGRAM CONTROL METHOD FOR PUMPING LINE OF SEMIC...

GAS EXHAUST FRAMES INCLUDING PATHWAYS HAVING SIZE VARIATIONS, AND R...

TREATMENT SOLUTION AND TREATMENT METHOD

REACTIVE BY-PRODUCTS COLLECTION SYSTEM

SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD FOR ORGANIC EFFLUENT ABATEMENT

GAS INJECTOR FOR EPITAXY AND CVD CHAMBER

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

ANTI-DEPOSITION OBJECT FOR USE IN VACUUM ENVIRONMENT

SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...