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CPC
C23C16/4412
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/4412
Details relating to the exhausts
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus having exhaust gas decomposer, and e...
Patent number
11,970,770
Issue date
Apr 30, 2024
Jusung Engineering Co., Ltd.
Dong Won Seo
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Gas transport system
Patent number
11,971,057
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jheng-Syun Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas flow accelerator to prevent buildup of processing byproduct in...
Patent number
11,972,957
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Sheng-chun Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing apparatus
Patent number
11,970,778
Issue date
Apr 30, 2024
Tokyo Electron Limited
Reita Igarashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sequential infiltration synthesis apparatus
Patent number
11,970,766
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Ivo Johannes Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,767
Issue date
Apr 30, 2024
Tokyo Electron Limited
Taichi Monden
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,967,501
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Hiroaki Hiramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
Patent number
11,965,262
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Yong Min Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Precursor supply unit, substrate processing system, and method of f...
Patent number
11,959,170
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Soyoung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing chambers and methods for cleaning the same
Patent number
11,952,660
Issue date
Apr 9, 2024
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
Patent number
11,952,663
Issue date
Apr 9, 2024
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,952,664
Issue date
Apr 9, 2024
Kokusai Electric Corporation
Hidenari Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead device for semiconductor processing system
Patent number
11,948,813
Issue date
Apr 2, 2024
ASM IP Holding B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum valve and apparatus for fabricating semiconductor having the...
Patent number
11,946,138
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Jaeheung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,935,762
Issue date
Mar 19, 2024
Kokusai Electric Corporation
Daigi Kamimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
Patent number
11,932,939
Issue date
Mar 19, 2024
Applied Materials, Inc.
Muhammad M. Rasheed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Waste gas abatement technology for semiconductor processing
Patent number
11,931,682
Issue date
Mar 19, 2024
Edwards Vacuum LLC
Imad Mahawili
B08 - CLEANING
Information
Patent Grant
Unconsumed precursor monitoring
Patent number
11,929,270
Issue date
Mar 12, 2024
Mohamed Buhary Rinzan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate processing method and non...
Patent number
11,926,893
Issue date
Mar 12, 2024
Kokusai Electric Corporation
Naofumi Ohashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus for minimizing the effect of a filli...
Patent number
11,923,181
Issue date
Mar 5, 2024
ASM IP Holding B.V.
HyungChul Moon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,915,927
Issue date
Feb 27, 2024
Kokusai Electric Corporation
Kazuyuki Okuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for backside deposition of a substrate
Patent number
11,908,728
Issue date
Feb 20, 2024
Tokyo Electron Limited
Ronald Nasman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,898,247
Issue date
Feb 13, 2024
Kokusai Electric Corporation
Hidenari Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High throughput and metal contamination control oven for chamber co...
Patent number
11,898,245
Issue date
Feb 13, 2024
Applied Materials, Inc.
Chien-Min Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming device
Patent number
11,891,692
Issue date
Feb 6, 2024
Murata Manufacturing Co., Ltd.
Yasuhiro Chikaishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for trapping of reaction by-product with extended availab...
Patent number
11,872,516
Issue date
Jan 16, 2024
MILAEBO CO., LTD.
Che Hoo Cho
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Raw material supply apparatus and film forming apparatus
Patent number
11,873,556
Issue date
Jan 16, 2024
Tokyo Electron Limited
Tomohisa Kimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for trapping of reaction by-product capable of expanding...
Patent number
11,872,515
Issue date
Jan 16, 2024
MILAEBO CO., LTD.
Che Hoo Cho
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing apparatus, substrate processing method and non...
Patent number
11,869,764
Issue date
Jan 9, 2024
Kokusai Electric Corporation
Akinori Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,859,280
Issue date
Jan 2, 2024
Kokusai Electric Corporation
Hidetoshi Mimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240141490
Publication date
May 2, 2024
Kokusai Electric Corporation
Mika Urushihara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD...
Publication number
20240124971
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yuichi FURUYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING FACILITY AND METHOD OF OPERATING THE SAME
Publication number
20240128065
Publication date
Apr 18, 2024
LOT CES CO., LTD.
Jin Ho BAE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE P...
Publication number
20240120204
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Keisuke TSUGAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES
Publication number
20240117491
Publication date
Apr 11, 2024
Hanish Kumar PANAVALAPPIL KUMARANKUTTY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION
Publication number
20240120197
Publication date
Apr 11, 2024
Applied Materials, Inc.
Zhepeng CONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOG BONE EXHAUST SLIT TUNNEL FOR PROCESSING CHAMBERS
Publication number
20240110278
Publication date
Apr 4, 2024
Applied Materials, Inc.
Vishwas Kumar PANDEY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20240105446
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Takaaki NODA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20240093370
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Masahiro TAKAHASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Device for Producing a SiC Solid Material
Publication number
20240093408
Publication date
Mar 21, 2024
Zadient Technologies SAS
Ivo Crössmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING METHOD, AND NON-TRANSITO...
Publication number
20240096615
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Akinori TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
Publication number
20240093372
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Tadashi TAKASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
Publication number
20240096605
Publication date
Mar 21, 2024
Applied Materials, Inc.
Arun Kumar Kotrappa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240093362
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Yuichi FURUYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20240084448
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Hidetoshi Mimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM PROCESSING APPARATUS AND OXIDIZING GAS REMOVAL METHOD
Publication number
20240087916
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Hirokazu UEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND EXHAUST SYSTEM CAPABLE OF ADJUST...
Publication number
20240076780
Publication date
Mar 7, 2024
Kokusai Electric Corporation
Masamichi YACHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240068097
Publication date
Feb 29, 2024
ASM IP HOLDING B.V.
Subir Parui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR CONTROLLING FORELINE PRESSURE
Publication number
20240068093
Publication date
Feb 29, 2024
Applied Materials, Inc.
Ryan T. DOWNEY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PIPING, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUF...
Publication number
20240068094
Publication date
Feb 29, 2024
KIOXIA Corporation
Yuya MATSUBARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS STOP LOSS REDUCTION SYSTEM THROUGH RAPID REPLACEMENT OF APP...
Publication number
20240063031
Publication date
Feb 22, 2024
MILAEBO CO., LTD.
Che Hoo CHO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTERLOCK SYSTEM FOR PROCESSING CHAMBER EXHAUST ASSEMBLY
Publication number
20240043994
Publication date
Feb 8, 2024
Applied Materials, Inc.
Daemian Raj Benjamin Raj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR MANUFACTURING DE-POWDER DEVICE FOR PIPING, AND METHOD FO...
Publication number
20240043995
Publication date
Feb 8, 2024
M. I Co., Ltd
Gi Nam KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and Device for Producing a SiC Solid Material
Publication number
20240044045
Publication date
Feb 8, 2024
Zadient Technologies SAS
Ivo Crössmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITING COATINGS ON AND WITHIN HOUSINGS, APPARATUS, OR TOOLS UTI...
Publication number
20240035150
Publication date
Feb 1, 2024
Halliburton Energy Services, Inc.
Christopher Michael Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EXHAUST GAS FILTERING APPARATUS AND COATING EQUIPMENT
Publication number
20240035156
Publication date
Feb 1, 2024
Jiangsu Favored Nanotechnology Co., Ltd.
Jian ZONG
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method and Device for Producing a SiC Solid Material
Publication number
20240035201
Publication date
Feb 1, 2024
Zadient Technologies SAS
Ivo Crössmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
Publication number
20240021444
Publication date
Jan 18, 2024
Applied Materials, Inc.
Manjunath SUBBANNA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU EPI GROWTH RATE CONTROL OF CRYSTAL THICKNESS USING PARAMETR...
Publication number
20240018659
Publication date
Jan 18, 2024
Applied Materials, Inc.
Sathya Shrinivas CHARY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR WAFER MANUFACTURING APPARATUS
Publication number
20240021464
Publication date
Jan 18, 2024
DENSO CORPORATION
Hiroaki FUJIBAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...