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H01J37/261
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/261
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Patents Grants
last 30 patents
Information
Patent Grant
Electron microscopy grid
Patent number
12,125,668
Issue date
Oct 22, 2024
Universiteit Antwerpen
Wouter Van Putte
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Vibration-free cryogenic cooling
Patent number
12,123,816
Issue date
Oct 22, 2024
FEI Company
Ronald Lamers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron detector
Patent number
12,106,932
Issue date
Oct 1, 2024
DECTRIS AG
Radosav Pantelic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image contrast enhancement in sample inspection
Patent number
12,087,542
Issue date
Sep 10, 2024
ASML Netherlands B.V.
Yixiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for tilting characterization by microscopy
Patent number
12,078,791
Issue date
Sep 3, 2024
Yangtze Memory Technologies Co., Ltd.
Jun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tilt-column multi-beam electron microscopy system and method
Patent number
12,068,129
Issue date
Aug 20, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ventilated semiconductor processing apparatus
Patent number
12,014,897
Issue date
Jun 18, 2024
HITACHI HIGH-TECH CORPORATION
Akira Nishioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image generation for examination of a semiconductor specimen
Patent number
11,995,848
Issue date
May 28, 2024
Applied Materials Israel Ltd.
David Uliel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Fabrication of in situ HR-LCTEM nanofluidic cell for nanobubble int...
Patent number
11,961,702
Issue date
Apr 16, 2024
Saudi Arabian Oil Company
Hassan Alqahtani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Machine learning on wafer defect review
Patent number
11,935,722
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Pin Chou
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Stage apparatus suitable for a particle beam apparatus
Patent number
11,908,656
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Han Willem Hendrik Severt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas delivery system for environmental transmission electron microscope
Patent number
11,837,432
Issue date
Dec 5, 2023
National Technology & Engineering Solutions of Sandia, LLC
John Joseph Nogan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensing data related to charged particles to predict an anomaly in...
Patent number
11,688,599
Issue date
Jun 27, 2023
Government of the United States of America as represented by the Secretary of...
Chadwick Lindstrom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Super-resolution microscopy
Patent number
11,676,794
Issue date
Jun 13, 2023
United Kingdom Research and Innovation
Lin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern matching device and computer program for pattern matching
Patent number
11,669,953
Issue date
Jun 6, 2023
HITACHI HIGH-TECH CORPORATION
Wataru Nagatomo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam system
Patent number
11,631,569
Issue date
Apr 18, 2023
Jeol Ltd.
Shuichi Yuasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of charged-particle beam such as electron microscope comp...
Patent number
11,569,059
Issue date
Jan 31, 2023
BORRIES PTE. LTD.
Zhongwei Chen
B08 - CLEANING
Information
Patent Grant
Loosely-coupled inspection and metrology system for high-volume pro...
Patent number
11,562,289
Issue date
Jan 24, 2023
KLA Corporation
Song Wu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Vacuum connection mechanism and electron optical device
Patent number
11,545,335
Issue date
Jan 3, 2023
Ebara Corporation
Takashi Ohara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, device and system for remote deep learning for microscopic...
Patent number
11,482,400
Issue date
Oct 25, 2022
Remco Schoenmakers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Stress measurement method, stress measurement device, and stress me...
Patent number
11,467,046
Issue date
Oct 11, 2022
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Yousuke Irie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for acquiring 3D diffraction data
Patent number
11,456,149
Issue date
Sep 27, 2022
FEI Company
Bart Buijsse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image generation method, non-transitory computer-readable medium, a...
Patent number
11,443,917
Issue date
Sep 13, 2022
HITACHI HIGH-TECH CORPORATION
Chikako Abe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for preparing a sample for transmission electron microscopy
Patent number
11,437,217
Issue date
Sep 6, 2022
Imec VZW
Eric Vancoille
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lossless cryo-grid preparation stage for high-resolution electron m...
Patent number
11,422,074
Issue date
Aug 23, 2022
Universitat Basel
Stefan Alexander Arnold
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Machine learning on wafer defect review
Patent number
11,424,101
Issue date
Aug 23, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Pin Chou
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Imaging device capturing images of a sample including a plurality o...
Patent number
11,417,499
Issue date
Aug 16, 2022
HITACHI HIGH-TECH CORPORATION
Maasa Yano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam position monitor for charged particles passing through a chamber
Patent number
11,410,831
Issue date
Aug 9, 2022
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Rémi Nicolas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D mapping of samples in charged particle microscopy
Patent number
11,355,307
Issue date
Jun 7, 2022
FEI Company
Jaroslav Kamenec
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grid sample production apparatus for electron microscope
Patent number
11,322,334
Issue date
May 3, 2022
XTEM BIOLAB CO., LTD.
Nam Chul Ha
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VIBRATION-FREE CRYOGENIC COOLING
Publication number
20250003845
Publication date
Jan 2, 2025
FEI Company
Ronald Lamers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SAMPLE HOLDER, ELECTRON MICROSCOPE SYSTEM AND SAMPLE OBSERVATION ME...
Publication number
20240429020
Publication date
Dec 26, 2024
Hitachi, Ltd
Akira SUGAWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR NARROWING ZERO LOSS PEAKS IN MONOCHROMATED CHARGED P...
Publication number
20240249905
Publication date
Jul 25, 2024
FEI Company
Alexander HENSTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDENSATE PRECURSORS AND CONTAMINANT PURGE APPARATUS AND METHODS
Publication number
20240222068
Publication date
Jul 4, 2024
FEI Company
Jing Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POLE PIECE INCORPORATING OPTICAL CAVITY FOR IMPROVED PHASE-CONTRAST...
Publication number
20240203685
Publication date
Jun 20, 2024
FEI Company
Bart Buijsse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Sample Analysis Method
Publication number
20240170250
Publication date
May 23, 2024
Hitachi High-Tech Corporation
Masayoshi YOSHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TILT-COLUMN MULTI-BEAM ELECTRON MICROSCOPY SYSTEM AND METHOD
Publication number
20240153737
Publication date
May 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE WITH FAST CLO...
Publication number
20240128048
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Ingo Mueller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...
Publication number
20240128050
Publication date
Apr 18, 2024
FEI Company
Yuchen DENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SAMPLE HOLDER OF TRANSMISSION ELECTRON MICROSCOPE AND SEMICONDUCTOR...
Publication number
20240105417
Publication date
Mar 28, 2024
Samsung Electronics Co., Ltd.
Yeoseon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID CELL FOR ELECTRON MICROSCOPE AND MANUFACTURING METHOD THEREOF
Publication number
20240038487
Publication date
Feb 1, 2024
DAEGU GYEONGBUK INSTITUTE OF SCIENCE & TECHNOLOGY
Jiwoong YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CRYOGENIC ELECTRON MICROSCOPY FULLY AUTOMATED ACQUISITION FOR SINGL...
Publication number
20240038488
Publication date
Feb 1, 2024
Health Technology Innovations, Inc.
Narasimha KUMAR
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
GAS INJECTION SUBSYSTEM FOR USE IN AN INSPECTION SYSTEM TO INSPECT...
Publication number
20230402251
Publication date
Dec 14, 2023
Carl Zeiss SMT GmbH
Louise Barris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE...
Publication number
20230238213
Publication date
Jul 27, 2023
Carl Zeiss SMT GMBH
Ottmar Hoinkis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods And Systems For Tomographic Microscopy Imaging
Publication number
20230215687
Publication date
Jul 6, 2023
FEI Company
Andreas Voigt
G01 - MEASURING TESTING
Information
Patent Application
FABRICATION OF IN SITU HR-LCTEM NANOFLUIDIC CELL FOR NANOBUBBLE INT...
Publication number
20230187170
Publication date
Jun 15, 2023
Saudi Arabian Oil Company
Hassan Alqahtani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Phase Analyzer, Sample Analyzer, and Analysis Method
Publication number
20230135601
Publication date
May 4, 2023
JEOL Ltd.
Yuka Otake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC FIELD GENERATION DEVICE, AND TRANSMISSION ELECTRON MICROSC...
Publication number
20230089136
Publication date
Mar 23, 2023
Ningbo Institute of Materials Technology and Engineering, Chinese Academy of...
Weixing XIA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR TILTING CHARACTERIZATION BY MICROSCOPY
Publication number
20230073472
Publication date
Mar 9, 2023
Yangtze Memory Technologies Co., Ltd.
Jun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...
Publication number
20230072075
Publication date
Mar 9, 2023
Xiamen Chip-Nova Technology Co., Ltd.
Honggang Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...
Publication number
20230076908
Publication date
Mar 9, 2023
Xiamen Chip-Nova Technology Co., Ltd.
Honggang Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DETECTING MEASUREMENT ERROR OF SEM EQUIPMENT AND METHOD O...
Publication number
20230043003
Publication date
Feb 9, 2023
Samsung Electronics Co., Ltd.
Nohong KWAK
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Charged Particle Beam Device and Vibration-Suppressing Mechanism
Publication number
20230035686
Publication date
Feb 2, 2023
Hitachi High-Tech Corporation
Hiroki TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON MICROSCOPE
Publication number
20230028903
Publication date
Jan 26, 2023
Focus-eBeam Technology (Beijing) Co., Ltd.
Shuai LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope
Publication number
20220415609
Publication date
Dec 29, 2022
Hitachi High-Tech Corporation
Takumi UEZONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VIBRATION-FREE CRYOGENIC COOLING
Publication number
20220404247
Publication date
Dec 22, 2022
FEI Company
Ronald Lamers
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information
Patent Application
MACHINE LEARNING ON WAFER DEFECT REVIEW
Publication number
20220359154
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Pin CHOU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMAGE GENERATION FOR EXAMINATION OF A SEMICONDUCTOR SPECIMEN
Publication number
20220301196
Publication date
Sep 22, 2022
APPLIED MATERIALS ISRAEL LTD.
David ULIEL
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRON GUN AND ELECTRON BEAM IRRADIATION DEVICE
Publication number
20220254596
Publication date
Aug 11, 2022
NuFlare Technology, Inc.
Atsushi ANDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON DETECTOR
Publication number
20220238301
Publication date
Jul 28, 2022
DECTRIS AG
Radosav PANTELIC
H01 - BASIC ELECTRIC ELEMENTS