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EUV microscope
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Patent number 12,203,874
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Issue date Jan 21, 2025
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EUV TECH, INC.
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Chami N Perera
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G01 - MEASURING TESTING
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Lithographic apparatus and method
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Patent number 12,204,255
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Issue date Jan 21, 2025
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ASML Netherlands B.V.
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Nicolaas Ten Kate
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Clamp assembly
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Patent number 12,189,309
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Issue date Jan 7, 2025
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ASML Netherlands B.V.
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Ronald Van Der Wilk
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Scanning interference lithographic system
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Patent number 12,189,300
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Issue date Jan 7, 2025
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Tsinghua University; Beijing U-Precision Tech Co., Ltd.
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Leijie Wang
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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System for monitoring a plasma
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Patent number 12,171,053
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Issue date Dec 17, 2024
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ASML Netherlands B.V.
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Michael Anthony Purvis
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Imprint lithography
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Patent number 12,147,162
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Issue date Nov 19, 2024
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ASML Netherlands B.V.
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Catharinus De Schiffart
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithography thermal control
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Patent number 12,096,544
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Issue date Sep 17, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd
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Tai-Yu Chen
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Method of bubble removal from viscous fluid
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Patent number 12,083,450
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Issue date Sep 10, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd
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Chian-Niang Lin
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Overlay measurement device
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Patent number 12,085,383
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Issue date Sep 10, 2024
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AUROS TECHNOLOGY, INC.
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Gyu Nam Park
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H01 - BASIC ELECTRIC ELEMENTS
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Pellicle and pellicle assembly
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Patent number 12,066,758
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Issue date Aug 20, 2024
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ASML Netherlands B.V.
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David Ferdinand Vles
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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