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Detection characterised by the variable being measured
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CPC
H01J2237/245
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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/245
Detection characterised by the variable being measured
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Patents Grants
last 30 patents
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Patent Grant
Plasma generating device and process executing apparatus including...
Patent number
12,243,721
Issue date
Mar 4, 2025
NP HOLDINGS CO., LTD.
Dai Kyu Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, apparatus, and program for determining condition related to...
Patent number
12,243,711
Issue date
Mar 4, 2025
HITACHI HIGH-TECH CORPORATION
Takahiro Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holding method and substrate processing apparatus
Patent number
12,243,728
Issue date
Mar 4, 2025
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Flow metrology calibration for improved processing chamber matching...
Patent number
12,241,772
Issue date
Mar 4, 2025
Lam Research Corporation
Evangelos T. Spyropoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for event modulated electron microscopy
Patent number
12,237,147
Issue date
Feb 25, 2025
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Bryan Walter Reed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
12,230,471
Issue date
Feb 18, 2025
HITACHI HIGH-TECH CORPORATION
Shota Aida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-precision timing clock method
Patent number
12,226,246
Issue date
Feb 18, 2025
Weng-Dah Ken
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Effective temperature calculation method for multi-charged particle...
Patent number
12,230,472
Issue date
Feb 18, 2025
NuFlare Technology, Inc.
Shingo Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring instrument and measuring method
Patent number
12,222,379
Issue date
Feb 11, 2025
Tokyo Electron Limited
Takayuki Hatanaka
G01 - MEASURING TESTING
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Patent Grant
Sorption chamber walls for semiconductor equipment
Patent number
12,217,945
Issue date
Feb 4, 2025
Lam Research Corporation
Hossein Sadeghi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron gun and electron microscope
Patent number
12,217,928
Issue date
Feb 4, 2025
HITACHI HIGH-TECH CORPORATION
Hideo Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Localized stress modulation by implant to back of wafer
Patent number
12,217,974
Issue date
Feb 4, 2025
Applied Materials, Inc.
Sony Varghese
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition system and method
Patent number
12,211,756
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Hao Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Measurement system, measurement method, and plasma processing device
Patent number
12,211,676
Issue date
Jan 28, 2025
Tokyo Electron Limited
Ayuta Suzuki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
High-frequency power supply apparatus
Patent number
12,205,798
Issue date
Jan 21, 2025
Daihen Corporation
Yuichi Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Rating substrate support assemblies based on impedance circuit elec...
Patent number
12,205,791
Issue date
Jan 21, 2025
Applied Materials, Inc.
Arvind Shankar Raman
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,205,801
Issue date
Jan 21, 2025
Tokyo Electron Limited
Toshiaki Saijo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for voltage contrast defect detection
Patent number
12,196,692
Issue date
Jan 14, 2025
ASML Netherlands B.V.
Weiming Ren
G01 - MEASURING TESTING
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Patent Grant
Electron gun, electron beam applicator, and method for controlling...
Patent number
12,198,889
Issue date
Jan 14, 2025
Photo electron Soul Inc.
Atsushi Koizumi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma process monitoring apparatus using terahertz waves and monit...
Patent number
12,198,893
Issue date
Jan 14, 2025
IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
Hak Sung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring device and optical fiber strain measuring jig thereof
Patent number
12,196,629
Issue date
Jan 14, 2025
Tokyo Electron Limited
Tong Wu
G01 - MEASURING TESTING
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Patent Grant
Substrate processing apparatus and gas switching method for substra...
Patent number
12,191,119
Issue date
Jan 7, 2025
Tokyo Electron Limited
Nobutaka Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,191,124
Issue date
Jan 7, 2025
Tokyo Electron Limited
Tatsuo Matsudo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method for inspecting electrostatic chuck
Patent number
12,181,504
Issue date
Dec 31, 2024
Semes Co., Ltd.
Su Hyung Lee
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Arc management algorithm of RF generator and match box for CCP plas...
Patent number
12,176,190
Issue date
Dec 24, 2024
Applied Materials, Inc.
Tiefeng Shi
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Ribbon beam angle adjustment in an ion implantation system
Patent number
12,170,182
Issue date
Dec 17, 2024
Advanced Ion Beam Technology, Inc.
Zhimin Wan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and interlock method thereof
Patent number
12,170,188
Issue date
Dec 17, 2024
Jusung Engineering Co., Ltd.
Sang Kyo Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature estimation apparatus, plasma processing system, tempera...
Patent number
12,170,193
Issue date
Dec 17, 2024
Tokyo Electron Limited
Yuki Kataoka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
Patent number
12,165,937
Issue date
Dec 10, 2024
Tokyo Electron Limited
Yan Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for scanning a sample using multi-beam inspection...
Patent number
12,165,837
Issue date
Dec 10, 2024
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Maassen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IGNITION CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250079139
Publication date
Mar 6, 2025
TOKYO ELECTRON LIMITED
Takeshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST AND ACCURATE STRAIN MAPPING USING ELECTRON DIFFRACTION
Publication number
20250076038
Publication date
Mar 6, 2025
FEI Company
Stefano Vespucci
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mass Airflow Sensor And Hydrocarbon Trap Combination
Publication number
20250067235
Publication date
Feb 27, 2025
K&N Engineering, Inc.
Kevin McClelland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU ION BEAM ANGLE MEASUREMENT
Publication number
20250069850
Publication date
Feb 27, 2025
Applied Materials, Inc.
Daniel Distaso
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20250069860
Publication date
Feb 27, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Lun KE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR APPARATUS, PLASMA PROCESSING APPARATUS INCLUDING THE SAME, A...
Publication number
20250069871
Publication date
Feb 27, 2025
Samsung Electronics Co., Ltd.
Jonghwa LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RIBBON BEAM ANGLE ADJUSTMENT IN AN ION IMPLANTATION SYSTEM
Publication number
20250062097
Publication date
Feb 20, 2025
ADVANCED ION BEAM TECHNOLOGY, INC.
Zhimin WAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING CHAMBERS
Publication number
20250062165
Publication date
Feb 20, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Hung LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR MONITORING RADICAL SPECIES FLUX OF PLASMA
Publication number
20250062107
Publication date
Feb 20, 2025
Applied Materials, Inc.
Martin Hilkene
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM POSITION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM WRITING...
Publication number
20250054727
Publication date
Feb 13, 2025
NuFlare Technology, Inc.
Tsubasa NANAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSTIC DEVICE, AND SEMICONDUCTOR PROCESSING EQUIPMENT US...
Publication number
20250046587
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
Taehyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC FOCUSING DEVICE LOW ENERGY ION BEAMS
Publication number
20250046563
Publication date
Feb 6, 2025
Axcelis Technologies, Inc.
Wilhelm Peter Platow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSIS DEVICE AND MANUFACTURING METHOD OF PLASMA DIAGNOSI...
Publication number
20250046588
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
Youn Sok Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DETERMINING A BEAM CONVERGENCE OF A CHARGED PARTICLE BEAM...
Publication number
20250037965
Publication date
Jan 30, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dominik Ehberger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BEAM POSITION DISPLACEMENT CORRECTION IN CHARGED PARTICLE INSPECTION
Publication number
20250037961
Publication date
Jan 30, 2025
ASML NETHERLANDS B.V.
Martin Frans, Pierre SMEETS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR HANDLING A PARTICLE BEAM SYSTEM, PARTICLE BEAM SYSTEM, C...
Publication number
20250037968
Publication date
Jan 30, 2025
CARL ZEISS MICROSCOPY GMBH
Lucas Harmsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, DISCHARGE DETECTION METHOD...
Publication number
20250037969
Publication date
Jan 30, 2025
NuFlare Technology, Inc.
Tatsuya MUROFUSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR SUBSTRATE, APPARATUS, AND METHOD
Publication number
20250029811
Publication date
Jan 23, 2025
ASML NETHERLANDS B.V.
Arthur Eduard OVERLACK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
Publication number
20250022680
Publication date
Jan 16, 2025
Carl Zeiss SMT GMBH
Dmitry Klochkov
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MONITORING NEUTRON RAY AND ION IMPLANTER
Publication number
20250014862
Publication date
Jan 9, 2025
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Tsuyoshi NAKAJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSTIC APPARATUS, AND APPARATUS FOR FABRICATING SEMICOND...
Publication number
20250006477
Publication date
Jan 2, 2025
Samsung Electronics Co., Ltd.
Haewook PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARG...
Publication number
20240429022
Publication date
Dec 26, 2024
NuFlare Technology, Inc.
Yasuo KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DIAGNOSTIC CIRCUIT INCLUDING VARIABLE AMPLIFICATION UNIT AND...
Publication number
20240429034
Publication date
Dec 26, 2024
Samsung Electronics Co., Ltd.
Juhyun KIM
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240420923
Publication date
Dec 19, 2024
TOKYO ELECTRON LIMITED
Manabu ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
Publication number
20240420935
Publication date
Dec 19, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Tsunahiko NAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRINTED MICROWAVE RESONATOR FOR MEASURING HIGH ELECTRON DENSITY PLA...
Publication number
20240412959
Publication date
Dec 12, 2024
Applied Materials, Inc.
David PETERSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND FLUID SUPPLY UNIT
Publication number
20240404793
Publication date
Dec 5, 2024
SEMES CO., LTD.
Wook Sang JANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PLASMA PROCESSING AND METHOD OF ETCHING
Publication number
20240395509
Publication date
Nov 28, 2024
TOKYO ELECTRON LIMITED
Chishio KOSHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA STATE VARIABLE SPECIFYING METHOD INCLUDING A DOUBLE PROBE HA...
Publication number
20240395516
Publication date
Nov 28, 2024
IUCF-HYU(Industry-University Cooperation Foundation Hanyang University)
Chin Wook CHUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROGRESSIVE HEATING OF COMPONENTS OF SUBSTRATE PROCESSING SYSTEMS U...
Publication number
20240395569
Publication date
Nov 28, 2024
LAM RESEARCH CORPORATION
Ramesh CHANDRASEKHARAN
H01 - BASIC ELECTRIC ELEMENTS