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Detection characterised by the variable being measured
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H01J2237/245
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ELECTRICITY
H01
Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/245
Detection characterised by the variable being measured
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last 30 patents
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Patent Grant
Substrate pedestal for improved substrate processing
Patent number
11,984,305
Issue date
May 14, 2024
Applied Materials, Inc.
Viren Kalsekar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement system, temperature measurement method, and...
Patent number
11,972,921
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Frequency tuning for modulated plasma systems
Patent number
11,972,927
Issue date
Apr 30, 2024
Advanced Energy Industries, Inc.
Gideon van Zyl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Flow metrology calibration for improved processing chamber matching...
Patent number
11,959,793
Issue date
Apr 16, 2024
Lam Research Corporation
Evangelos T. Spyropoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radio frequency match network and generator
Patent number
11,961,711
Issue date
Apr 16, 2024
COMET Technologies USA, Inc.
Alexandre De Chambrier
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of determining an energy width of a charged particle beam
Patent number
11,948,771
Issue date
Apr 2, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
Patent number
11,939,673
Issue date
Mar 26, 2024
ASM IP Holding B.V.
John Kevin Shugrue
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus, plasma state detection method, and pla...
Patent number
11,935,731
Issue date
Mar 19, 2024
Tokyo Electron Limited
Daisuke Hayashi
G08 - SIGNALLING
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Patent Grant
Analysis method and analysis system of voltage contrast defect
Patent number
11,927,625
Issue date
Mar 12, 2024
Powerchip Semiconductor Manufacturing Corporation
Yue-Ying Yen
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Conduction inspection method for multipole aberration corrector, an...
Patent number
11,915,902
Issue date
Feb 27, 2024
NuFlare Technology, Inc.
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detector for process kit ring wear
Patent number
11,913,777
Issue date
Feb 27, 2024
Applied Materials, Inc.
Yogananda Sarode Vishwanath
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Non-contact angle measuring apparatus
Patent number
11,903,755
Issue date
Feb 20, 2024
Weng-Dah Ken
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Ion beam implantation method and semiconductor device
Patent number
11,908,694
Issue date
Feb 20, 2024
Infineon Technologies AG
Moriz Jelinek
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Measurement method and measurement system
Patent number
11,906,466
Issue date
Feb 20, 2024
Tokyo Electron Limited
Takayuki Hatanaka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus and measurement method
Patent number
11,908,665
Issue date
Feb 20, 2024
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus suitable for a particle beam apparatus
Patent number
11,908,656
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Han Willem Hendrik Severt
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Device and method for tuning plasma distribution using phase control
Patent number
11,908,662
Issue date
Feb 20, 2024
Applied Materials, Inc.
Xiaopu Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Real-time dosimetry
Patent number
11,906,675
Issue date
Feb 20, 2024
Reveam, Inc.
Chip Starns
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Processing chamber with optical fiber with bragg grating sensors
Patent number
11,901,165
Issue date
Feb 13, 2024
William J. O'Banion
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Film forming apparatus and film forming method
Patent number
11,894,222
Issue date
Feb 6, 2024
Tokyo Electron Limited
Atsushi Takeuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method for processing substrate
Patent number
11,894,219
Issue date
Feb 6, 2024
Semes Co., Ltd.
Je Ho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for recognizing and addressing plasma discharge d...
Patent number
11,894,250
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Yu Wang
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Common substrate and shadow ring lift apparatus
Patent number
11,881,375
Issue date
Jan 23, 2024
Applied Materials, Inc.
Abhishek Chowdhury
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,875,977
Issue date
Jan 16, 2024
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma process monitoring device and plasma processing apparatus in...
Patent number
11,862,442
Issue date
Jan 2, 2024
Industry-Academic Cooperation Foundation, Yonsei University
Il Gu Yun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for detecting rare stochastic defects
Patent number
11,860,551
Issue date
Jan 2, 2024
Applied Materials Israel Ltd.
Guy Cohen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Measuring method and plasma processing apparatus
Patent number
11,854,767
Issue date
Dec 26, 2023
Tokyo Electron Limited
Masanori Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ closed-loop management of radio frequency power generator
Patent number
11,854,768
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei Ting Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SYSTEM AND METHOD FOR INSPECTION BY DEFLECTOR CONTROL IN A CHARGED...
Publication number
20240153732
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Datong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20240153135
Publication date
May 9, 2024
SEMES CO., LTD.
Ho Hun LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATI...
Publication number
20240153736
Publication date
May 9, 2024
Japan Science and Technology Agency
Takumi SANNOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION SYSTEM
Publication number
20240151665
Publication date
May 9, 2024
Hitachi High-Tech Corporation
Yohei NAKAMURA
G01 - MEASURING TESTING
Information
Patent Application
INDUCTIVE BROAD-BAND SENSORS FOR ELECTROMAGNETIC WAVES
Publication number
20240145221
Publication date
May 2, 2024
COMET TECHNOLOGIES USA, INC.
STEPHEN E. SAVAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE
Publication number
20240145247
Publication date
May 2, 2024
INFINEON TECHNOLOGIES AG
Moriz JELINEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
Publication number
20240133025
Publication date
Apr 25, 2024
SOLERAS ADVANCED COATINGS BV
Wilmert DE BOSSCHER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
Publication number
20240136148
Publication date
Apr 25, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
Publication number
20240136160
Publication date
Apr 25, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE WITH FAST CLO...
Publication number
20240128048
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Ingo Mueller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITANCE SENSING SYSTEMS AND METHODS
Publication number
20240125832
Publication date
Apr 18, 2024
Advanced Energy Industries, Inc.
Donald Enzinna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONTROL APPARATUS AND METHOD USING THE SAME
Publication number
20240128054
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Changho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE BEAM SYSTEM WITH ANISOTROPIC FILTERING...
Publication number
20240128051
Publication date
Apr 18, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENT REPLACEMENT METHOD, COMPONENT REPLACEMENT DEVICE, AND COM...
Publication number
20240128064
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Hiroki ENDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA-PRECISION TIMING CLOCK METHOD AND APPARATUS
Publication number
20240115222
Publication date
Apr 11, 2024
Weng-Dah Ken
G04 - HOROLOGY
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240112895
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM SEALING INTEGRITY OF CRYOGENIC ELECTROSTATIC CHUCKS USING NO...
Publication number
20240110836
Publication date
Apr 4, 2024
Applied Materials, Inc.
Sankaranarayanan RAVI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE ANALYSIS SYSTEM
Publication number
20240112881
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Jonghyeok PARK
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105423
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Takeshi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETERMINING AN OPTIMAL ION ENERGY FOR PLASMA PROCESSING OF A DIELEC...
Publication number
20240105430
Publication date
Mar 28, 2024
PRODRIVE TECHNOLOGIES INNOVATION SERVICES B.V.
Qihao YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE TWISTING CONTROL IN DIELECTRIC ETCH
Publication number
20240105432
Publication date
Mar 28, 2024
LAM RESEARCH CORPORATION
Neil Macaraeg Mackie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD
Publication number
20240096601
Publication date
Mar 21, 2024
KIOXIA Corporation
Takeharu MOTOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240096609
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Liang LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIDEBAND VARIABLE IMPEDANCE LOAD FOR HIGH VOLUME MANUFACTURING QUAL...
Publication number
20240094273
Publication date
Mar 21, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...
Publication number
20240096590
Publication date
Mar 21, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240096591
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...
Publication number
20240096608
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Satoru TERUUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
Publication number
20240094056
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Sergey Voronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS