Diffusion of reactive gas to substrate

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CPC
C23C16/45559

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45559Diffusion of reactive gas to substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 12,191,118
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- James Carducci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transition metal chalcogenide thin-layer material, preparation meth...
- Patent number 12,116,665
- Issue date Oct 15, 2024
- TSINGHUA-BERKELEY SHENZHEN INSTITUTE IN PREPARATION
- Huiming Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thread profiles for semiconductor process chamber components
- Patent number 12,068,137
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Reyn Tetsuro Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma polymerization coating with uniformity control
- Patent number 12,065,740
- Issue date Aug 20, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Load assemblies for loading parts in a furnace
- Patent number 12,000,046
- Issue date Jun 4, 2024
- Rolls-Royce High Temperature Composites, Inc.
- Jeffrey Crutchfield
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead device for semiconductor processing system
- Patent number 11,948,813
- Issue date Apr 2, 2024
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load assemblies for loading parts in a furnace
- Patent number 11,932,941
- Issue date Mar 19, 2024
- Rolls-Royce High Temperature Composites, Inc.
- Jeffrey Crutchfield
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transition metal deposition method
- Patent number 11,885,020
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic modular microwave source with integrated process gas dis...
- Patent number 11,881,384
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- James Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatial atomic layer deposition
- Patent number 11,834,745
- Issue date Dec 5, 2023
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffusion shower head design for large area plasma enhanced che...
- Patent number 11,692,268
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Soo Young Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,643,725
- Issue date May 9, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making a semiconductor device including etching of a meta...
- Patent number 11,515,169
- Issue date Nov 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Yoshihide Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt deposition selectivity on copper and dielectrics
- Patent number 11,476,158
- Issue date Oct 18, 2022
- Entegris, Inc.
- Philip S. H. Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead device for semiconductor processing system
- Patent number 11,437,249
- Issue date Sep 6, 2022
- ASM IP Holding B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method and atomic layer deposition device
- Patent number 11,414,755
- Issue date Aug 16, 2022
- Meidensha Corporation
- Naoto Kameda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing display substrate
- Patent number 11,417,847
- Issue date Aug 16, 2022
- BOE Technology Group Co., Ltd.
- Youngyik Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing chalcogenide thin films
- Patent number 11,377,735
- Issue date Jul 5, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Remy Gassilloud
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homogeneous and transparent protective coatings for precious metals...
- Patent number 11,365,481
- Issue date Jun 21, 2022
- City University of Hong Kong
- Kwok Yan Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma polymerization coating with uniformity control
- Patent number 11,332,829
- Issue date May 17, 2022
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface-coated cutting tool and method for manufacturing same
- Patent number 11,326,252
- Issue date May 10, 2022
- Sumitomo Electric Hardmetal Corp.
- Yasuki Kido
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma treatment device and structure of reaction vessel for plasma...
- Patent number 11,225,718
- Issue date Jan 18, 2022
- CORE TECHNOLOGY, INC.
- Toshiaki Yoshimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical epitaxial deposition system and gas distribution module th...
- Patent number 11,214,872
- Issue date Jan 4, 2022
- GOLD CARBON CO., LTD.
- Chien-Te Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diffuser and semiconductor processing system using same
- Patent number 11,183,404
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sheng-chun Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of removal of sharp corners from diffuser plate
- Patent number 11,123,837
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Ilyoung Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reliable deposition of thin parylene
- Patent number 11,077,462
- Issue date Aug 3, 2021
- California Institute of Technology
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for depositing a silicon nitride film and film deposition ap...
- Patent number 11,075,074
- Issue date Jul 27, 2021
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming film
- Patent number 10,927,458
- Issue date Feb 23, 2021
- FLOSFIA INC.
- Shingo Yagyu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas spraying apparatus for substrate processing apparatus and subst...
- Patent number 10,923,326
- Issue date Feb 16, 2021
- JUSUNG ENGINEERING CO., LTD.
- Sung Bae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION
- Publication number 20240360559
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-AXISYMMETRIC GAS DIFFUSER FOR PLASMA ENHANCED CHEMICAL VAPOR DE...
- Publication number 20240352584
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Yu-Hsuan WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKING PLATE AND DIFFUSER PLATE ASSEMBLY
- Publication number 20240344198
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Guangwei Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20240332039
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION METHOD
- Publication number 20240263307
- Publication date Aug 8, 2024
- Jusung Engineering Co., Ltd.
- Yong Hyun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDENSATE PRECURSORS AND CONTAMINANT PURGE APPARATUS AND METHODS
- Publication number 20240222068
- Publication date Jul 4, 2024
- FEI Company
- Jing Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...
- Publication number 20240186118
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- JAMES CARDUCCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSITION METAL DEPOSITION METHOD
- Publication number 20240133032
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...
- Publication number 20240124978
- Publication date Apr 18, 2024
- EUGENUS, INC.
- Behzad Mahmoudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FEEDING BLOCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20240052488
- Publication date Feb 15, 2024
- WONIK IPS CO., LTD.
- Choong Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STEAM DISTRIBUTION DEVICE AND METHOD RELATING TO SAME
- Publication number 20240026542
- Publication date Jan 25, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Bruno HEIMKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE CAPACITY DEPOSITION SYSTEM
- Publication number 20240026543
- Publication date Jan 25, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20230392259
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING GAS DIFFUSION NOZZLE
- Publication number 20230383410
- Publication date Nov 30, 2023
- ASM IP HOLDING B.V.
- Daiki Nojiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR FORMING THIN FILM
- Publication number 20230366092
- Publication date Nov 16, 2023
- AP SYSTEMS INC.
- Pil Seong JEONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...
- Publication number 20230332289
- Publication date Oct 19, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Hicham MASKROT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DI...
- Publication number 20230272530
- Publication date Aug 31, 2023
- Applied Materials, Inc.
- Suhail ANWAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND TUNGSTEN FILM
- Publication number 20230227976
- Publication date Jul 20, 2023
- TOKYO ELECTRON LIMITED
- Takuya KAWAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DIFFUSER HOUSINGS, DEVICES, AND RELATED METHODS
- Publication number 20230151490
- Publication date May 18, 2023
- Entegris, Inc.
- Michael Addorisio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE APPARATUSES FOR FLOW UNIFORMITY CONTROL IN PROCESS CHAMBERS
- Publication number 20230097346
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20230102839
- Publication date Mar 30, 2023
- ASM IP HOLDING B.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHOD AND ATOMIC LAYER DEPOSITION DEVICE
- Publication number 20220364235
- Publication date Nov 17, 2022
- MEIDENSHA CORPORATION
- Naoto KAMEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSITION METAL CHALCOGENIDE THIN-LAYER MATERIAL, PREPARATION METH...
- Publication number 20220316054
- Publication date Oct 6, 2022
- Huiming CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20220307135
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA POLYMERIZATION COATING WITH UNIFORMITY CONTROL
- Publication number 20220259728
- Publication date Aug 18, 2022
- Jiangsu Favored Nanotechnology Co., LTD
- Jian ZONG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TRANSITION METAL DEPOSITION METHOD
- Publication number 20220195599
- Publication date Jun 23, 2022
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHOD AND ATOMIC LAYER DEPOSITION DEVICE
- Publication number 20220090262
- Publication date Mar 24, 2022
- MEIDENSHA CORPORATION
- Naoto KAMEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spatial Atomic Layer Deposition
- Publication number 20210395886
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210388493
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Yuta SORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
- Publication number 20210335622
- Publication date Oct 28, 2021
- HITACHI HIGH-TECH CORPORATION
- Yoshihide Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Diffusion of reactive gas to substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Monolithic modular microwave source with integrated process gas dis...

Transition metal chalcogenide thin-layer material, preparation meth...

Thread profiles for semiconductor process chamber components

Plasma polymerization coating with uniformity control

Load assemblies for loading parts in a furnace

Hardware to prevent bottom purge incursion in application volume an...

Showerhead device for semiconductor processing system

Load assemblies for loading parts in a furnace

Transition metal deposition method

Monolithic modular microwave source with integrated process gas dis...

Spatial atomic layer deposition

Gas diffusion shower head design for large area plasma enhanced che...

Hardware to prevent bottom purge incursion in application volume an...

Method of making a semiconductor device including etching of a meta...

Cobalt deposition selectivity on copper and dielectrics

Showerhead device for semiconductor processing system

Atomic layer deposition method and atomic layer deposition device

Method for manufacturing display substrate

Apparatus for depositing chalcogenide thin films

Homogeneous and transparent protective coatings for precious metals...

Plasma polymerization coating with uniformity control

Surface-coated cutting tool and method for manufacturing same

Plasma treatment device and structure of reaction vessel for plasma...

Cyclical epitaxial deposition system and gas distribution module th...

Diffuser and semiconductor processing system using same

Method of removal of sharp corners from diffuser plate

Reliable deposition of thin parylene

Method for depositing a silicon nitride film and film deposition ap...

Method of forming film

Gas spraying apparatus for substrate processing apparatus and subst...

Patents Applicationslast 30 patents

PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION

NON-AXISYMMETRIC GAS DIFFUSER FOR PLASMA ENHANCED CHEMICAL VAPOR DE...

BACKING PLATE AND DIFFUSER PLATE ASSEMBLY

SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

THIN FILM DEPOSITION METHOD

CONDENSATE PRECURSORS AND CONTAMINANT PURGE APPARATUS AND METHODS

MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DIS...

TRANSITION METAL DEPOSITION METHOD

GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...

FEEDING BLOCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

STEAM DISTRIBUTION DEVICE AND METHOD RELATING TO SAME

LARGE CAPACITY DEPOSITION SYSTEM

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

SUBSTRATE PROCESSING APPARATUS INCLUDING GAS DIFFUSION NOZZLE

APPARATUS AND METHOD FOR FORMING THIN FILM

DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...

LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DI...

FILM FORMING METHOD AND TUNGSTEN FILM

GAS DIFFUSER HOUSINGS, DEVICES, AND RELATED METHODS

FLOW GUIDE APPARATUSES FOR FLOW UNIFORMITY CONTROL IN PROCESS CHAMBERS

SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM

ATOMIC LAYER DEPOSITION METHOD AND ATOMIC LAYER DEPOSITION DEVICE

TRANSITION METAL CHALCOGENIDE THIN-LAYER MATERIAL, PREPARATION METH...

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

PLASMA POLYMERIZATION COATING WITH UNIFORMITY CONTROL

TRANSITION METAL DEPOSITION METHOD

ATOMIC LAYER DEPOSITION METHOD AND ATOMIC LAYER DEPOSITION DEVICE

Spatial Atomic Layer Deposition

FILM FORMING APPARATUS AND FILM FORMING METHOD

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...