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Diffusion of reactive gas to substrate
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CPC
C23C16/45559
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/45559
Diffusion of reactive gas to substrate
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Patents Grants
last 30 patents
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Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
Patent number
11,952,663
Issue date
Apr 9, 2024
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead device for semiconductor processing system
Patent number
11,948,813
Issue date
Apr 2, 2024
ASM IP Holding B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Load assemblies for loading parts in a furnace
Patent number
11,932,941
Issue date
Mar 19, 2024
Rolls-Royce High Temperature Composites, Inc.
Jeffrey Crutchfield
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Transition metal deposition method
Patent number
11,885,020
Issue date
Jan 30, 2024
ASM IP Holding B.V.
Charles Dezelah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Monolithic modular microwave source with integrated process gas dis...
Patent number
11,881,384
Issue date
Jan 23, 2024
Applied Materials, Inc.
James Carducci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Spatial atomic layer deposition
Patent number
11,834,745
Issue date
Dec 5, 2023
Tokyo Electron Limited
Anthony Dip
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas diffusion shower head design for large area plasma enhanced che...
Patent number
11,692,268
Issue date
Jul 4, 2023
Applied Materials, Inc.
Soo Young Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
Patent number
11,643,725
Issue date
May 9, 2023
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of making a semiconductor device including etching of a meta...
Patent number
11,515,169
Issue date
Nov 29, 2022
HITACHI HIGH-TECH CORPORATION
Yoshihide Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cobalt deposition selectivity on copper and dielectrics
Patent number
11,476,158
Issue date
Oct 18, 2022
Entegris, Inc.
Philip S. H. Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead device for semiconductor processing system
Patent number
11,437,249
Issue date
Sep 6, 2022
ASM IP Holding B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition method and atomic layer deposition device
Patent number
11,414,755
Issue date
Aug 16, 2022
Meidensha Corporation
Naoto Kameda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing display substrate
Patent number
11,417,847
Issue date
Aug 16, 2022
BOE Technology Group Co., Ltd.
Youngyik Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for depositing chalcogenide thin films
Patent number
11,377,735
Issue date
Jul 5, 2022
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Remy Gassilloud
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Homogeneous and transparent protective coatings for precious metals...
Patent number
11,365,481
Issue date
Jun 21, 2022
City University of Hong Kong
Kwok Yan Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma polymerization coating with uniformity control
Patent number
11,332,829
Issue date
May 17, 2022
Jiangsu Favored Nanotechnology Co., LTD
Jian Zong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Surface-coated cutting tool and method for manufacturing same
Patent number
11,326,252
Issue date
May 10, 2022
Sumitomo Electric Hardmetal Corp.
Yasuki Kido
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Grant
Plasma treatment device and structure of reaction vessel for plasma...
Patent number
11,225,718
Issue date
Jan 18, 2022
CORE TECHNOLOGY, INC.
Toshiaki Yoshimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclical epitaxial deposition system and gas distribution module th...
Patent number
11,214,872
Issue date
Jan 4, 2022
GOLD CARBON CO., LTD.
Chien-Te Hsieh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Diffuser and semiconductor processing system using same
Patent number
11,183,404
Issue date
Nov 23, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Sheng-chun Yang
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method of removal of sharp corners from diffuser plate
Patent number
11,123,837
Issue date
Sep 21, 2021
Applied Materials, Inc.
Ilyoung Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reliable deposition of thin parylene
Patent number
11,077,462
Issue date
Aug 3, 2021
California Institute of Technology
Yu-Chong Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for depositing a silicon nitride film and film deposition ap...
Patent number
11,075,074
Issue date
Jul 27, 2021
Tokyo Electron Limited
Hitoshi Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming film
Patent number
10,927,458
Issue date
Feb 23, 2021
FLOSFIA INC.
Shingo Yagyu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas spraying apparatus for substrate processing apparatus and subst...
Patent number
10,923,326
Issue date
Feb 16, 2021
JUSUNG ENGINEERING CO., LTD.
Sung Bae Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor manufacturing apparatus and method for manufacturing...
Patent number
10,910,230
Issue date
Feb 2, 2021
HITACHI HIGH-TECH CORPORATION
Yoshihide Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for fabricating a semiconductor device
Patent number
10,876,208
Issue date
Dec 29, 2020
Taiwan Semiconductor Manufacturing Company Ltd.
Kai-Hsiang Chang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Flow passage structure and processing apparatus
Patent number
10,844,485
Issue date
Nov 24, 2020
Kabushiki Kaisha Toshiba
Shinya Higashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas distribution showerhead for semiconductor processing
Patent number
10,829,855
Issue date
Nov 10, 2020
Applied Materials, Inc.
Anh N. Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas distribution device and processing apparatus
Patent number
10,815,568
Issue date
Oct 27, 2020
Tokyo Electron Limited
Takumi Kabe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
TRANSITION METAL DEPOSITION METHOD
Publication number
20240133032
Publication date
Apr 25, 2024
ASM IP HOLDING B.V.
Charles Dezelah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...
Publication number
20240124978
Publication date
Apr 18, 2024
EUGENUS, INC.
Behzad Mahmoudi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FEEDING BLOCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20240052488
Publication date
Feb 15, 2024
WONIK IPS CO., LTD.
Choong Hyun LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STEAM DISTRIBUTION DEVICE AND METHOD RELATING TO SAME
Publication number
20240026542
Publication date
Jan 25, 2024
VON ARDENNE Asset GmbH & Co. KG
Bruno HEIMKE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LARGE CAPACITY DEPOSITION SYSTEM
Publication number
20240026543
Publication date
Jan 25, 2024
Ascentool, Inc.
George Xinsheng Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
Publication number
20230392259
Publication date
Dec 7, 2023
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING GAS DIFFUSION NOZZLE
Publication number
20230383410
Publication date
Nov 30, 2023
ASM IP HOLDING B.V.
Daiki Nojiri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR FORMING THIN FILM
Publication number
20230366092
Publication date
Nov 16, 2023
AP SYSTEMS INC.
Pil Seong JEONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST O...
Publication number
20230332289
Publication date
Oct 19, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Hicham MASKROT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DI...
Publication number
20230272530
Publication date
Aug 31, 2023
Applied Materials, Inc.
Suhail ANWAR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND TUNGSTEN FILM
Publication number
20230227976
Publication date
Jul 20, 2023
TOKYO ELECTRON LIMITED
Takuya KAWAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS DIFFUSER HOUSINGS, DEVICES, AND RELATED METHODS
Publication number
20230151490
Publication date
May 18, 2023
Entegris, Inc.
Michael Addorisio
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLOW GUIDE APPARATUSES FOR FLOW UNIFORMITY CONTROL IN PROCESS CHAMBERS
Publication number
20230097346
Publication date
Mar 30, 2023
Applied Materials, Inc.
Jiheng Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD DEVICE FOR SEMICONDUCTOR PROCESSING SYSTEM
Publication number
20230102839
Publication date
Mar 30, 2023
ASM IP HOLDING B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION METHOD AND ATOMIC LAYER DEPOSITION DEVICE
Publication number
20220364235
Publication date
Nov 17, 2022
MEIDENSHA CORPORATION
Naoto KAMEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRANSITION METAL CHALCOGENIDE THIN-LAYER MATERIAL, PREPARATION METH...
Publication number
20220316054
Publication date
Oct 6, 2022
Huiming CHENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
Publication number
20220307135
Publication date
Sep 29, 2022
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA POLYMERIZATION COATING WITH UNIFORMITY CONTROL
Publication number
20220259728
Publication date
Aug 18, 2022
Jiangsu Favored Nanotechnology Co., LTD
Jian ZONG
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
TRANSITION METAL DEPOSITION METHOD
Publication number
20220195599
Publication date
Jun 23, 2022
ASM IP HOLDING B.V.
Charles Dezelah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION METHOD AND ATOMIC LAYER DEPOSITION DEVICE
Publication number
20220090262
Publication date
Mar 24, 2022
MEIDENSHA CORPORATION
Naoto KAMEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Spatial Atomic Layer Deposition
Publication number
20210395886
Publication date
Dec 23, 2021
TOKYO ELECTRON LIMITED
Anthony Dip
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
Publication number
20210388493
Publication date
Dec 16, 2021
TOKYO ELECTRON LIMITED
Yuta SORITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
Publication number
20210335622
Publication date
Oct 28, 2021
HITACHI HIGH-TECH CORPORATION
Yoshihide Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PRODUCING ORGANIC-INORGANIC HYBRID MATERIALS
Publication number
20210292899
Publication date
Sep 23, 2021
CIC NANOGUNE - ASOCIACIÓN CENTRO DE INVESTIGACIÓN COOPERATIVA EN NANOCIENCIAS
Itxasne AZPITARTE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CYCLICAL EPITAXIAL DEPOSITION SYSTEM AND GAS DISTRIBUTION MODULE TH...
Publication number
20200385869
Publication date
Dec 10, 2020
GOLD CARBON CO.,LTD.
CHIEN-TE HSIEH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Surface-Coated Cutting Tool and Method for Manufacturing Same
Publication number
20200370173
Publication date
Nov 26, 2020
SUMITOMO ELECTRIC HARDMETAL CORP.
Yasuki KIDO
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LARGE-AREA HIGH-DENSITY PLASMA PROCESSING CHAMBER FOR FLAT PANEL DI...
Publication number
20200347499
Publication date
Nov 5, 2020
Applied Materials, Inc.
Suhail ANWAR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ENCLOSED-CHANNEL REACTOR SYSTEM WITH CONDUIT PLATE
Publication number
20200270751
Publication date
Aug 27, 2020
National Tsing-Hua University
Tsong-Pyng Perng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
Publication number
20200051828
Publication date
Feb 13, 2020
Hitachi High-Technologies Corporation
Yoshihide YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INFILTRATION APPARATUS AND METHODS OF INFILTRATING AN INFILTRATEABL...
Publication number
20190368040
Publication date
Dec 5, 2019
ASM IP HOLDING B.V.
Krzysztof Kamil Kachel
H01 - BASIC ELECTRIC ELEMENTS