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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70383
Direct write
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Patents Grants
last 30 patents
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Patent Grant
Long sweep length DUV microlithographic beam scanning acousto-optic...
Patent number
11,947,241
Issue date
Apr 2, 2024
Mycronic AB
Andrzej Karawajczyk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor lithography system and/or method
Patent number
11,921,430
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company Limited
Tsiao-Chen Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
11,899,379
Issue date
Feb 13, 2024
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
Patent number
11,804,360
Issue date
Oct 31, 2023
NuFlare Technology, Inc.
Tsubasa Nanao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determining the combination of patterns to be applied to a substrat...
Patent number
11,747,738
Issue date
Sep 5, 2023
ASML Netherlands B.V.
Coen Adrianus Verschuren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
11,599,032
Issue date
Mar 7, 2023
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Recurring process for laser induced forward transfer and high throu...
Patent number
11,554,549
Issue date
Jan 17, 2023
Mycronic AB
Torbjorn Sandstrom
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for manufacturing template
Patent number
11,467,487
Issue date
Oct 11, 2022
BOE Technology Group Co., Ltd.
Kang Guo
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor lithography system and/or method
Patent number
11,402,761
Issue date
Aug 2, 2022
Taiwan Semiconductor Manufacturing Company Limited
Tsiao-Chen Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for direct writing on an uneven surface of a workpiece that...
Patent number
11,284,517
Issue date
Mar 22, 2022
Micronic Mydata AB
Per Askebjer
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Photoexcitation method
Patent number
11,275,308
Issue date
Mar 15, 2022
Nanotronix Inc.
Evangelos Angelakos
G11 - INFORMATION STORAGE
Information
Patent Grant
Fluid flow device and method for making the same
Patent number
11,185,857
Issue date
Nov 30, 2021
University of Southampton
Robert Eason
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method and system for fabricating unique chips using a charged part...
Patent number
11,137,689
Issue date
Oct 5, 2021
ASML Netherlands B.V.
Marcel Nicolaas Jacobus Van Kervinck
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Exposure apparatus and exposure method
Patent number
11,079,688
Issue date
Aug 3, 2021
Dexerials Corporation
Asahiko Nogami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and exposure device for exposing at least one stored represe...
Patent number
11,029,608
Issue date
Jun 8, 2021
Robin Pagan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus comprising a plurality of individually contro...
Patent number
11,003,090
Issue date
May 11, 2021
Carl Zeiss SMT GmbH
Stefan Richter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for making direct writing screen plate and using method t...
Patent number
10,969,689
Issue date
Apr 6, 2021
JIANGSU GIS LASER TECHNOLOGIES INC.
Lloyd Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure system, exposure device and exposure method
Patent number
10,942,458
Issue date
Mar 9, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Ke Lan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Half tone scheme for maskless lithography
Patent number
10,935,890
Issue date
Mar 2, 2021
Applied Materials, Inc.
Christopher Dennis Bencher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Modular parallel electron lithography
Patent number
10,937,630
Issue date
Mar 2, 2021
John Bennett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for direct write maskless lithography
Patent number
10,928,736
Issue date
Feb 23, 2021
ASML Netherlands B.V.
Pieter Willem Herman De Jager
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-substrate processing on digital lithography systems
Patent number
10,928,743
Issue date
Feb 23, 2021
Applied Materials, Inc.
Chien-Hua Lai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask and fabrication method thereof, display panel and touch panel
Patent number
10,859,920
Issue date
Dec 8, 2020
BOE Technology Group Co., Ltd.
Liqing Liao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and device for calibrating multiple energy rays for the addi...
Patent number
10,725,446
Issue date
Jul 28, 2020
LAYERWISE
Peter Mercelis
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Individual beam detector for multiple beams, multi-beam irradiation...
Patent number
10,714,311
Issue date
Jul 14, 2020
NuFlare Technology, Inc.
Yoshikuni Goshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for direct write maskless lithography
Patent number
10,712,669
Issue date
Jul 14, 2020
ASML Netherlands B.V.
Erwin Paul Smakman
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Spatial light modulator with variable intensity diodes
Patent number
10,684,555
Issue date
Jun 16, 2020
Applied Materials, Inc.
Joseph R. Johnson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
10,678,150
Issue date
Jun 9, 2020
Applied Materials, Inc.
Uwe Hollerbach
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Half tone scheme for maskless lithography
Patent number
10,571,809
Issue date
Feb 25, 2020
Applied Materials, Inc.
Christopher Dennis Bencher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for direct write maskless lithography
Patent number
10,527,950
Issue date
Jan 7, 2020
ASML Netherlands B.V.
Erwin Paul Smakman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY
Publication number
20240111217
Publication date
Apr 4, 2024
Arkema France
Xavier Chevalier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20240094648
Publication date
Mar 21, 2024
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOLITHOGRAPHY PROJECTION LENS
Publication number
20240085667
Publication date
Mar 14, 2024
SUN YANG OPTICS DEVELOPMENT CO., LTD.
SHENG CHE WU
G02 - OPTICS
Information
Patent Application
DIRECT METAL NANO PATTERNING
Publication number
20240014004
Publication date
Jan 11, 2024
QATAR FOUNDATION FOR EDUCATION, SCIENCE AND COMMUNITY DEVELOPMENT
Hicham Hamoudi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM POSITION IMAGE OPTIMIZATION
Publication number
20240012336
Publication date
Jan 11, 2024
Mycronic AB
Anders SVENSSON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Multi Pattern Maskless Lithography Method and System
Publication number
20230400776
Publication date
Dec 14, 2023
ORBOTECH LTD.
Uri Gold
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH PRECISION PHOTONIC ALIGNMENT DEVICE
Publication number
20230375336
Publication date
Nov 23, 2023
Quantinuum LLC
Christopher Ertsgaard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OFFSET ALIGNMENT METHOD AND MICRO-LITHOGRAPHIC PRINTING DEVICE
Publication number
20230341788
Publication date
Oct 26, 2023
Mycronic AB
Anders SVENSSON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE CONTROL IN PHOTOLITHOGRAPHIC DIRECT EXPOSURE METHODS FOR M...
Publication number
20230333492
Publication date
Oct 19, 2023
Laser Imaging Systems GmbH
Christian SCHWARZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM A...
Publication number
20230244149
Publication date
Aug 3, 2023
Shin-Etsu Chemical Co., Ltd.
Tsutomu OGIHARA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
DEVICE AND METHOD FOR CONTROLLING FOCUS OF A LASER BEAM
Publication number
20230221615
Publication date
Jul 13, 2023
Mycronic AB
Pontus STENSTROM
G02 - OPTICS
Information
Patent Application
Three-Dimensional Micro-Nano Morphological Structure Manufactured b...
Publication number
20230213869
Publication date
Jul 6, 2023
SVG TECH GROUP CO., LTD
Linsen CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20230161274
Publication date
May 25, 2023
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED-PARTICLE-BEAM WRITING METHOD, MULTI-CHARGED-PARTICLE-...
Publication number
20230078311
Publication date
Mar 16, 2023
NuFlare Technology, Inc.
Taku YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...
Publication number
20230005711
Publication date
Jan 5, 2023
NuFlare Technology, Inc.
Tsubasa NANAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
Publication number
20220357671
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Company Limited
Tsiao-Chen Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LONG SWEEP LENGTH DUV MICROLITHOGRAPHIC BEAM SCANNING ACOUSTO-OPTIC...
Publication number
20220197108
Publication date
Jun 23, 2022
Mycronic AB
Andrzej Karawajczyk
G02 - OPTICS
Information
Patent Application
IN-SITU SYNTHESIS AND DEPOSITION OF HIGH ENTROPY ALLOY AND MULTI ME...
Publication number
20220121122
Publication date
Apr 21, 2022
Panasonic Factory Solutions Asia Pacific
Chidanand HEGDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Non-Destructive Coupon Generation via Direct Write Lithography for...
Publication number
20220113635
Publication date
Apr 14, 2022
TOKYO ELECTRON LIMITED
Anthony R. Schepis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING UNIQUE CHIPS USING A CHARGED PART...
Publication number
20220026815
Publication date
Jan 27, 2022
ASML NETHERLANDS B.V.
Marcel Nicolaas Jacobus van Kervinck
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
Publication number
20210364930
Publication date
Nov 25, 2021
Taiwan Semiconductor Manufacturing Company Limited
Tsiao-Chen Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20210341849
Publication date
Nov 4, 2021
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULAR PARALLEL ELECTRON LITHOGRAPHY
Publication number
20210335572
Publication date
Oct 28, 2021
John Bennett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM A...
Publication number
20210026246
Publication date
Jan 28, 2021
Shin-Etsu Chemical Co., Ltd.
Tsutomu OGIHARA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
HALF TONE SCHEME FOR MASKLESS LITHOGRAPHY
Publication number
20200264517
Publication date
Aug 20, 2020
Applied Materials, Inc.
Christopher Dennis BENCHER
G02 - OPTICS
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND ARTICLE MANUFA...
Publication number
20200249580
Publication date
Aug 6, 2020
Canon Kabushiki Kaisha
Michio Kono
G02 - OPTICS
Information
Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
Publication number
20200166852
Publication date
May 28, 2020
Carl Zeiss SMT GMBH
Stefan Richter
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20200159132
Publication date
May 21, 2020
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dose Map Optimization for Mask Making
Publication number
20200096876
Publication date
Mar 26, 2020
ASML US, LLC f/k/a/ ASML US, INC.
Jie Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-SUBSTRATE PROCESSING ON DIGITAL LITHOGRAPHY SYSTEMS
Publication number
20190369499
Publication date
Dec 5, 2019
Applied Materials, Inc.
Chien-Hua LAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY