Direct write

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CPC
G03F7/70383

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70383Direct write

Industries

Patents Grantslast 30 patents

Information Patent Grant
Composition for forming silicon-containing resist underlayer film a...
- Patent number 12,174,541
- Issue date Dec 24, 2024
- Shin-Etsu Chemical Co., Ltd.
- Tsutomu Ogihara
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Exposure control in photolithographic direct exposure methods for m...
- Patent number 12,169,370
- Issue date Dec 17, 2024
- Laser Imaging Systems GmbH
- Christian Schwarz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Offset alignment method and micro-lithographic printing device
- Patent number 12,147,168
- Issue date Nov 19, 2024
- Mycronic AB
- Anders Svensson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Composition for forming silicon-containing resist underlayer film a...
- Patent number 12,085,857
- Issue date Sep 10, 2024
- Shin-Etsu Chemical Co., Ltd.
- Tsutomu Ogihara
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Beam position image optimization
- Patent number 12,044,978
- Issue date Jul 23, 2024
- Mycronic AB
- Anders Svensson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-charged-particle-beam writing method, multi-charged-particle-...
- Patent number 12,046,447
- Issue date Jul 23, 2024
- NuFlare Technology, Inc.
- Taku Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-photon-polymerization laser direct writing system based on acou...
- Patent number 11,982,945
- Issue date May 14, 2024
- Huazhong University of Science & Technology
- Wei Xiong
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Grant
Long sweep length DUV microlithographic beam scanning acousto-optic...
- Patent number 11,947,241
- Issue date Apr 2, 2024
- Mycronic AB
- Andrzej Karawajczyk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 11,921,430
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamic generation of layout adaptive packaging
- Patent number 11,899,379
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Uwe Hollerbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
- Patent number 11,804,360
- Issue date Oct 31, 2023
- NuFlare Technology, Inc.
- Tsubasa Nanao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determining the combination of patterns to be applied to a substrat...
- Patent number 11,747,738
- Issue date Sep 5, 2023
- ASML Netherlands B.V.
- Coen Adrianus Verschuren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamic generation of layout adaptive packaging
- Patent number 11,599,032
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Uwe Hollerbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Recurring process for laser induced forward transfer and high throu...
- Patent number 11,554,549
- Issue date Jan 17, 2023
- Mycronic AB
- Torbjorn Sandstrom
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing template
- Patent number 11,467,487
- Issue date Oct 11, 2022
- BOE Technology Group Co., Ltd.
- Kang Guo
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 11,402,761
- Issue date Aug 2, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for direct writing on an uneven surface of a workpiece that...
- Patent number 11,284,517
- Issue date Mar 22, 2022
- Micronic Mydata AB
- Per Askebjer
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Photoexcitation method
- Patent number 11,275,308
- Issue date Mar 15, 2022
- Nanotronix Inc.
- Evangelos Angelakos
- G11 - INFORMATION STORAGE
Information Patent Grant
Fluid flow device and method for making the same
- Patent number 11,185,857
- Issue date Nov 30, 2021
- University of Southampton
- Robert Eason
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method and system for fabricating unique chips using a charged part...
- Patent number 11,137,689
- Issue date Oct 5, 2021
- ASML Netherlands B.V.
- Marcel Nicolaas Jacobus Van Kervinck
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 11,079,688
- Issue date Aug 3, 2021
- Dexerials Corporation
- Asahiko Nogami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and exposure device for exposing at least one stored represe...
- Patent number 11,029,608
- Issue date Jun 8, 2021
- Robin Pagan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus comprising a plurality of individually contro...
- Patent number 11,003,090
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Stefan Richter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for making direct writing screen plate and using method t...
- Patent number 10,969,689
- Issue date Apr 6, 2021
- JIANGSU GIS LASER TECHNOLOGIES INC.
- Lloyd Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure system, exposure device and exposure method
- Patent number 10,942,458
- Issue date Mar 9, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Ke Lan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Half tone scheme for maskless lithography
- Patent number 10,935,890
- Issue date Mar 2, 2021
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Modular parallel electron lithography
- Patent number 10,937,630
- Issue date Mar 2, 2021
- John Bennett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for direct write maskless lithography
- Patent number 10,928,736
- Issue date Feb 23, 2021
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-substrate processing on digital lithography systems
- Patent number 10,928,743
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Chien-Hua Lai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask and fabrication method thereof, display panel and touch panel
- Patent number 10,859,920
- Issue date Dec 8, 2020
- BOE Technology Group Co., Ltd.
- Liqing Liao
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
CHIP PREPARATION METHOD AND SYSTEM, AND CHIP
- Publication number 20240334843
- Publication date Oct 3, 2024
- TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
- Jingjing HU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PHOTOLITHOGRAPHY METHOD BASED ON BILAYER PHOTORESIST
- Publication number 20240295817
- Publication date Sep 5, 2024
- SHANGHAI MICROSTART PHOTOELECTRIC TECHNOLOGY CO., LTD.
- Yijiao GAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
- Publication number 20240248412
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Method for Imprinting Three-Dimensional Microstructure...
- Publication number 20240248395
- Publication date Jul 25, 2024
- JOANNEUM RESEARCH FORSCHUNGSGESELLSCHAFT MBH
- Ladislav KUNA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR MANUFACTURING NANOSTRUCTURE AND NANOSTRUCTURE
- Publication number 20240191168
- Publication date Jun 13, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Junjie Li
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
DRAWING APPARATUS AND DRAWING METHOD
- Publication number 20240168386
- Publication date May 23, 2024
- SCREEN Holdings Co., Ltd.
- Shota MAJIMA
- G02 - OPTICS
Information Patent Application
METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY
- Publication number 20240111217
- Publication date Apr 4, 2024
- Arkema France
- Xavier Chevalier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
- Publication number 20240094648
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Uwe HOLLERBACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLITHOGRAPHY PROJECTION LENS
- Publication number 20240085667
- Publication date Mar 14, 2024
- SUN YANG OPTICS DEVELOPMENT CO., LTD.
- SHENG CHE WU
- G02 - OPTICS
Information Patent Application
DIRECT METAL NANO PATTERNING
- Publication number 20240014004
- Publication date Jan 11, 2024
- QATAR FOUNDATION FOR EDUCATION, SCIENCE AND COMMUNITY DEVELOPMENT
- Hicham Hamoudi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM POSITION IMAGE OPTIMIZATION
- Publication number 20240012336
- Publication date Jan 11, 2024
- Mycronic AB
- Anders SVENSSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multi Pattern Maskless Lithography Method and System
- Publication number 20230400776
- Publication date Dec 14, 2023
- ORBOTECH LTD.
- Uri Gold
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH PRECISION PHOTONIC ALIGNMENT DEVICE
- Publication number 20230375336
- Publication date Nov 23, 2023
- Quantinuum LLC
- Christopher Ertsgaard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OFFSET ALIGNMENT METHOD AND MICRO-LITHOGRAPHIC PRINTING DEVICE
- Publication number 20230341788
- Publication date Oct 26, 2023
- Mycronic AB
- Anders SVENSSON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE CONTROL IN PHOTOLITHOGRAPHIC DIRECT EXPOSURE METHODS FOR M...
- Publication number 20230333492
- Publication date Oct 19, 2023
- Laser Imaging Systems GmbH
- Christian SCHWARZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM A...
- Publication number 20230244149
- Publication date Aug 3, 2023
- Shin-Etsu Chemical Co., Ltd.
- Tsutomu OGIHARA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
DEVICE AND METHOD FOR CONTROLLING FOCUS OF A LASER BEAM
- Publication number 20230221615
- Publication date Jul 13, 2023
- Mycronic AB
- Pontus STENSTROM
- G02 - OPTICS
Information Patent Application
Three-Dimensional Micro-Nano Morphological Structure Manufactured b...
- Publication number 20230213869
- Publication date Jul 6, 2023
- SVG TECH GROUP CO., LTD
- Linsen CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
- Publication number 20230161274
- Publication date May 25, 2023
- Applied Materials, Inc.
- Uwe HOLLERBACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED-PARTICLE-BEAM WRITING METHOD, MULTI-CHARGED-PARTICLE-...
- Publication number 20230078311
- Publication date Mar 16, 2023
- NuFlare Technology, Inc.
- Taku YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...
- Publication number 20230005711
- Publication date Jan 5, 2023
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
- Publication number 20220357671
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LONG SWEEP LENGTH DUV MICROLITHOGRAPHIC BEAM SCANNING ACOUSTO-OPTIC...
- Publication number 20220197108
- Publication date Jun 23, 2022
- Mycronic AB
- Andrzej Karawajczyk
- G02 - OPTICS
Information Patent Application
IN-SITU SYNTHESIS AND DEPOSITION OF HIGH ENTROPY ALLOY AND MULTI ME...
- Publication number 20220121122
- Publication date Apr 21, 2022
- Panasonic Factory Solutions Asia Pacific
- Chidanand HEGDE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Non-Destructive Coupon Generation via Direct Write Lithography for...
- Publication number 20220113635
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Anthony R. Schepis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING UNIQUE CHIPS USING A CHARGED PART...
- Publication number 20220026815
- Publication date Jan 27, 2022
- ASML NETHERLANDS B.V.
- Marcel Nicolaas Jacobus van Kervinck
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
- Publication number 20210364930
- Publication date Nov 25, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
- Publication number 20210341849
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Uwe HOLLERBACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PARALLEL ELECTRON LITHOGRAPHY
- Publication number 20210335572
- Publication date Oct 28, 2021
- John Bennett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM A...
- Publication number 20210026246
- Publication date Jan 28, 2021
- Shin-Etsu Chemical Co., Ltd.
- Tsutomu OGIHARA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Direct write

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Composition for forming silicon-containing resist underlayer film a...

Exposure control in photolithographic direct exposure methods for m...

Offset alignment method and micro-lithographic printing device

Composition for forming silicon-containing resist underlayer film a...

Beam position image optimization

Multi-charged-particle-beam writing method, multi-charged-particle-...

Two-photon-polymerization laser direct writing system based on acou...

Long sweep length DUV microlithographic beam scanning acousto-optic...

Semiconductor lithography system and/or method

Dynamic generation of layout adaptive packaging

Multi charged particle beam adjustment method, multi charged partic...

Determining the combination of patterns to be applied to a substrat...

Dynamic generation of layout adaptive packaging

Recurring process for laser induced forward transfer and high throu...

Method for manufacturing template

Semiconductor lithography system and/or method

System for direct writing on an uneven surface of a workpiece that...

Photoexcitation method

Fluid flow device and method for making the same

Method and system for fabricating unique chips using a charged part...

Exposure apparatus and exposure method

Method and exposure device for exposing at least one stored represe...

Lithography apparatus comprising a plurality of individually contro...

Apparatus for making direct writing screen plate and using method t...

Exposure system, exposure device and exposure method

Half tone scheme for maskless lithography

Modular parallel electron lithography

Method and apparatus for direct write maskless lithography

Multi-substrate processing on digital lithography systems

Mask and fabrication method thereof, display panel and touch panel

Patents Applicationslast 30 patents

CHIP PREPARATION METHOD AND SYSTEM, AND CHIP

PHOTOLITHOGRAPHY METHOD BASED ON BILAYER PHOTORESIST

SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD

Lithographic Method for Imprinting Three-Dimensional Microstructure...

METHOD FOR MANUFACTURING NANOSTRUCTURE AND NANOSTRUCTURE

DRAWING APPARATUS AND DRAWING METHOD

METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY

DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING

PHOTOLITHOGRAPHY PROJECTION LENS

DIRECT METAL NANO PATTERNING

BEAM POSITION IMAGE OPTIMIZATION

Multi Pattern Maskless Lithography Method and System

HIGH PRECISION PHOTONIC ALIGNMENT DEVICE

OFFSET ALIGNMENT METHOD AND MICRO-LITHOGRAPHIC PRINTING DEVICE

EXPOSURE CONTROL IN PHOTOLITHOGRAPHIC DIRECT EXPOSURE METHODS FOR M...

COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM A...

DEVICE AND METHOD FOR CONTROLLING FOCUS OF A LASER BEAM

Three-Dimensional Micro-Nano Morphological Structure Manufactured b...

DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING

MULTI-CHARGED-PARTICLE-BEAM WRITING METHOD, MULTI-CHARGED-PARTICLE-...

MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...

SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD

LONG SWEEP LENGTH DUV MICROLITHOGRAPHIC BEAM SCANNING ACOUSTO-OPTIC...

IN-SITU SYNTHESIS AND DEPOSITION OF HIGH ENTROPY ALLOY AND MULTI ME...

Non-Destructive Coupon Generation via Direct Write Lithography for...

METHOD AND SYSTEM FOR FABRICATING UNIQUE CHIPS USING A CHARGED PART...

SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD

DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING

MODULAR PARALLEL ELECTRON LITHOGRAPHY

COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM A...