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Direction of beam or parts thereof in view of the optical axis
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Industry
CPC
H01J2237/24528
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/24528
Direction of beam or parts thereof in view of the optical axis
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