Discharge generated by other radiation

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CPC
H01J37/32321

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32321Discharge generated by other radiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System and method for aligning electron beams in multi-beam inspect...
- Patent number 11,614,416
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Xuerang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a metal silicide interconnection nanowire struc...
- Patent number 10,930,472
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding device and method for producing plate-shaped bonded assembly
- Patent number 10,737,477
- Issue date Aug 11, 2020
- Dexerials Corporation
- Hiroyuki Usui
- B32 - LAYERED PRODUCTS
Information Patent Grant
Method and apparatus for removing paint on metallic components
- Patent number 10,400,350
- Issue date Sep 3, 2019
- IBC Materials & Technologies, Inc.
- Solomon Berman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metal silicide interconnection nanowire struc...
- Patent number 10,204,764
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shielded lid heater assembly
- Patent number 10,083,816
- Issue date Sep 25, 2018
- Applied Materials, Inc.
- Michael D. Willwerth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bonding device and method for producing plate-shaped bonded assembly
- Patent number 9,789,674
- Issue date Oct 17, 2017
- Dexerials Corporation
- Hiroyuki Usui
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method of fabricating two-dimensional layered chalcogenide film
- Patent number 9,691,611
- Issue date Jun 27, 2017
- G-FORCE NANOTECH LTD.
- Chao-Hui Yeh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Handheld LIBS analyzer end plate purging structure
- Patent number 9,395,243
- Issue date Jul 19, 2016
- SciAps, Inc.
- David R. Day
- G01 - MEASURING TESTING
Information Patent Grant
Shielded lid heater assembly
- Patent number 9,362,148
- Issue date Jun 7, 2016
- Applied Materials, Inc.
- Michael D. Willwerth
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and system for increasing the lifespan of a plasma
- Patent number 8,742,667
- Issue date Jun 3, 2014
- Ecole Polytechnique
- Andre Mysyrowicz
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Tunable uniformity in a plasma processing system
- Patent number 8,635,971
- Issue date Jan 28, 2014
- Lam Research Corporation
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shielded lid heater assembly
- Patent number 8,419,893
- Issue date Apr 16, 2013
- Applied Materials, Inc.
- Michael D. Willwerth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhancing plasma surface modification using high intensity and high...
- Patent number 8,399,795
- Issue date Mar 19, 2013
- FORCE Technology
- Niels Krebs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method
- Patent number 7,758,929
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Yohei Yamazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for generating high-density plasma
- Patent number 7,604,716
- Issue date Oct 20, 2009
- Zond, Inc.
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for plasma surface treatment and device for realizing the p...
- Patent number 7,288,293
- Issue date Oct 30, 2007
- APIT Corp. S.A.
- Pavel Koulik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning plasma reactor
- Patent number 7,270,724
- Issue date Sep 18, 2007
- UVTech Systems, Inc.
- David J. Elliott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for PECVD deposition of selected material films
- Patent number 7,196,020
- Issue date Mar 27, 2007
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing powder with composite grains and the device for...
- Patent number 7,172,790
- Issue date Feb 6, 2007
- APIT Corp. S.A.
- Pavel Koulik
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for PECVD deposition of selected material films
- Patent number 7,093,559
- Issue date Aug 22, 2006
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for generating high-density plasma
- Patent number 6,853,142
- Issue date Feb 8, 2005
- Zond, Inc.
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making films utilizing a pulsed laser for ion injection...
- Patent number 6,805,916
- Issue date Oct 19, 2004
- Research Foundation of the City University of New York
- Fred J. Cadieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generation using multi-step ionization
- Patent number 6,805,779
- Issue date Oct 19, 2004
- Zond, Inc.
- Roman Chistyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for making films utilizing a pulsed laser for ion injection...
- Patent number 6,799,531
- Issue date Oct 5, 2004
- Research Foundation of the City of University of New York
- Fred J. Cadieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for specific particle manipulation and deposition
- Patent number 6,777,880
- Issue date Aug 17, 2004
- Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- Gregor Morfill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of operating a dual chamber reactor with neutral density dec...
- Patent number 6,635,578
- Issue date Oct 21, 2003
- Applied Materials, Inc.
- Songlin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Procedure and device for specific particle manipulation and deposition
- Patent number 6,616,987
- Issue date Sep 9, 2003
- Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.
- Gregor Morfill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acoustically enhanced deposition processes, and systems for perform...
- Patent number 6,554,969
- Issue date Apr 29, 2003
- Advanced Micro Devices, Inc.
- Robert James Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for PECVD deposition of selected material films
- Patent number 6,291,341
- Issue date Sep 18, 2001
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
- Publication number 20230280293
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
- Publication number 20200124546
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Xuerang HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REMOVING PAINT ON METALLIC COMPONENTS
- Publication number 20190382913
- Publication date Dec 19, 2019
- IBC Materials & Technologies, Inc.
- Solomon Berman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A METAL SILICIDE INTERCONNECTION NANOWIRE STRUC...
- Publication number 20190172686
- Publication date Jun 6, 2019
- Applied Materials, Inc.
- Bencherki MEBARKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCING GAS-PHASE REACTION IN A PLASMA USING HIGH INTENSITY AND H...
- Publication number 20180122622
- Publication date May 3, 2018
- FORCE TECHNOLOGY
- Alexander BARDENSHTEIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BONDING DEVICE AND METHOD FOR PRODUCING PLATE-SHAPED BONDED ASSEMBLY
- Publication number 20170368814
- Publication date Dec 28, 2017
- DEXERIALS CORPORATION
- Hiroyuki Usui
- B32 - LAYERED PRODUCTS
Information Patent Application
ION BEAM ETCHING APPARATUS AND ION BEAM GENERATOR
- Publication number 20160351377
- Publication date Dec 1, 2016
- Canon ANELVA Corporation
- Naoyuki OKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS AND METHOD
- Publication number 20150162169
- Publication date Jun 11, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Hung CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DROPLET CUTTING METHOD AND DROPLET CROSS-SECTION ANALYSIS METHOD
- Publication number 20150135808
- Publication date May 21, 2015
- NITTO DENKO CORPORATION
- Youhei Maeno
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Application
SPARK DETECTION IN COATING INSTALLATIONS
- Publication number 20130344256
- Publication date Dec 26, 2013
- OERLIKON TRADING AG, TRUBBACH
- Arno Moosbrugger
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SHIELDED LID HEATER ASSEMBLY
- Publication number 20130189848
- Publication date Jul 25, 2013
- Michael D. WILLWERTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BONDING DEVICE AND METHOD FOR PRODUCING PLATE-SHAPED BONDED ASSEMBLY
- Publication number 20120247644
- Publication date Oct 4, 2012
- SONY CHEMICAL & INFORMATION DEVICE CORPORATION
- Hiroyuki Usui
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD AND SYSTEM FOR INCREASING THE LIFESPAN OF A PLASMA
- Publication number 20110254448
- Publication date Oct 20, 2011
- ECOLE POLYTECHNIQUE
- Andre Mysyrowicz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCING GAS-PHASE REACTION IN A PLASMA USING HIGH INTENSITY AND H...
- Publication number 20110048251
- Publication date Mar 3, 2011
- FORCE TECHNOLOGY
- Alexander Bardenshtein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCING PLASMA SURFACE MODIFICATION USING HIGH INTENSITY AND HIGH...
- Publication number 20100304146
- Publication date Dec 2, 2010
- FORCE TECHNOLOGY
- Niels Krebs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20100252198
- Publication date Oct 7, 2010
- TOKYO ELECTRON LIMITED
- Yohei YAMAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SILANIZATION SUPPORT METHOD AND SYSTEM
- Publication number 20100098885
- Publication date Apr 22, 2010
- United Technologies Corporation
- John H. Vontell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELDED LID HEATER ASSEMBLY
- Publication number 20090236315
- Publication date Sep 24, 2009
- Applied Materials, Inc.
- Michael D. Willwerth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR CONTAINMENT SHIELDING DURING PECVD DEPOSITION...
- Publication number 20080113107
- Publication date May 15, 2008
- Michael W. Stowell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for treating a workpiece with ionizing gas plasma
- Publication number 20070235427
- Publication date Oct 11, 2007
- Vinay G. Sakhrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tunable uniformity in a plasma processing system
- Publication number 20070235660
- Publication date Oct 11, 2007
- Lam Research Corporation
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20070228009
- Publication date Oct 4, 2007
- TOKYO ELECTRON LIMITED
- Yohei YAMAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATER, A...
- Publication number 20070190802
- Publication date Aug 16, 2007
- TOKYO ELECTRON LIMITED
- SHINTARO AOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PECVD DEPOSITION OF SELECTED MATERIAL FILMS
- Publication number 20060193996
- Publication date Aug 31, 2006
- Micron Technology, Inc.
- Sujit Sharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma generation using multi-step ionization
- Publication number 20050034666
- Publication date Feb 17, 2005
- Roman Chistyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for generating high-density plasma
- Publication number 20050006220
- Publication date Jan 13, 2005
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of producing powder with composite grains and the device for...
- Publication number 20040238345
- Publication date Dec 2, 2004
- Pavel Koulik
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLASMA GENERATION USING MULTI-STEP IONIZATION
- Publication number 20040182702
- Publication date Sep 23, 2004
- Roman Chistyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for generating high-density plasma
- Publication number 20040085023
- Publication date May 6, 2004
- Roman Chistyakov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing semiconductor device, substrate treater, a...
- Publication number 20040023513
- Publication date Feb 5, 2004
- Shintaro Aoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Discharge generated by other radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for aligning electron beams in multi-beam inspect...

Methods for forming a metal silicide interconnection nanowire struc...

Bonding device and method for producing plate-shaped bonded assembly

Method and apparatus for removing paint on metallic components

Methods for forming a metal silicide interconnection nanowire struc...

Shielded lid heater assembly

Bonding device and method for producing plate-shaped bonded assembly

Method of fabricating two-dimensional layered chalcogenide film

Handheld LIBS analyzer end plate purging structure

Shielded lid heater assembly

Method and system for increasing the lifespan of a plasma

Tunable uniformity in a plasma processing system

Shielded lid heater assembly

Enhancing plasma surface modification using high intensity and high...

Plasma processing apparatus and method

Methods and apparatus for generating high-density plasma

Process for plasma surface treatment and device for realizing the p...

Scanning plasma reactor

Method for PECVD deposition of selected material films

Method of producing powder with composite grains and the device for...

Method for PECVD deposition of selected material films

Methods and apparatus for generating high-density plasma

Method for making films utilizing a pulsed laser for ion injection...

Plasma generation using multi-step ionization

Method for making films utilizing a pulsed laser for ion injection...

Device for specific particle manipulation and deposition

Method of operating a dual chamber reactor with neutral density dec...

Procedure and device for specific particle manipulation and deposition

Acoustically enhanced deposition processes, and systems for perform...

Method for PECVD deposition of selected material films

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...

METHOD AND APPARATUS FOR REMOVING PAINT ON METALLIC COMPONENTS

METHODS FOR FORMING A METAL SILICIDE INTERCONNECTION NANOWIRE STRUC...

ENHANCING GAS-PHASE REACTION IN A PLASMA USING HIGH INTENSITY AND H...

BONDING DEVICE AND METHOD FOR PRODUCING PLATE-SHAPED BONDED ASSEMBLY

ION BEAM ETCHING APPARATUS AND ION BEAM GENERATOR

ETCHING APPARATUS AND METHOD

DROPLET CUTTING METHOD AND DROPLET CROSS-SECTION ANALYSIS METHOD

SPARK DETECTION IN COATING INSTALLATIONS

SHIELDED LID HEATER ASSEMBLY

BONDING DEVICE AND METHOD FOR PRODUCING PLATE-SHAPED BONDED ASSEMBLY

METHOD AND SYSTEM FOR INCREASING THE LIFESPAN OF A PLASMA

ENHANCING GAS-PHASE REACTION IN A PLASMA USING HIGH INTENSITY AND H...

ENHANCING PLASMA SURFACE MODIFICATION USING HIGH INTENSITY AND HIGH...

PLASMA PROCESSING APPARATUS AND METHOD

PLASMA SILANIZATION SUPPORT METHOD AND SYSTEM

SHIELDED LID HEATER ASSEMBLY

SYSTEM AND METHOD FOR CONTAINMENT SHIELDING DURING PECVD DEPOSITION...

Apparatus and method for treating a workpiece with ionizing gas plasma

Tunable uniformity in a plasma processing system

PLASMA PROCESSING APPARATUS AND METHOD

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATER, A...

METHOD FOR PECVD DEPOSITION OF SELECTED MATERIAL FILMS

Plasma generation using multi-step ionization

Methods and apparatus for generating high-density plasma

Method of producing powder with composite grains and the device for...

PLASMA GENERATION USING MULTI-STEP IONIZATION

Methods and apparatus for generating high-density plasma

Method for manufacturing semiconductor device, substrate treater, a...