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  • Information Patent Application

    CVD apparatus

    • Publication number 20030140941
    • Publication date Jul 31, 2003
    • Semiconductor Energy Laboratory Co., Ltd.
    • Takashi Inushima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Silicon wafers for CMOS and other integrated circuits

    • Publication number 20020142566
    • Publication date Oct 3, 2002
    • Intel Corporation
    • Kramadhati V. Ravi
    • C30 - CRYSTAL GROWTH