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G03F7/70758

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70758Drive means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 12,216,410
- Issue date Feb 4, 2025
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator assemblies comprising piezo actuators or electrostrictive...
- Patent number 12,210,294
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Hans Butler
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
- Patent number 12,130,560
- Issue date Oct 29, 2024
- Canon Kabushiki Kaisha
- Hayato Hoshino
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate stage and substrate processing system using the same
- Patent number 12,111,582
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Displacement device based on hall-effect sensors and planar motors
- Patent number 12,068,655
- Issue date Aug 20, 2024
- Shanghai Yinguan Semiconductor Technology Co., Ltd.
- Chenyang Ding
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for fast loading substrates in a flat panel tool
- Patent number 12,061,422
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Benjamin M. Johnston
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator device for use in a positioning system as well as such pos...
- Patent number 12,021,432
- Issue date Jun 25, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius Van De Rijdt
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate holding apparatus, substrate processing apparatus having...
- Patent number 12,002,704
- Issue date Jun 4, 2024
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system having a magnetically levitated transportation stage
- Patent number 11,953,836
- Issue date Apr 9, 2024
- Massachusetts Institute of Technology
- Lei Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiphase linear motor, multiphase planar motor, stage, lithograph...
- Patent number 11,837,931
- Issue date Dec 5, 2023
- ASML Netherlands B.V.
- Maarten Hartger Kimman
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 11,762,299
- Issue date Sep 19, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
- Patent number 11,754,932
- Issue date Sep 12, 2023
- Canon Kabushiki Kaisha
- Hayato Hoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate stage, substrate processing system using the same, and me...
- Patent number 11,747,741
- Issue date Sep 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure machine
- Patent number 11,662,667
- Issue date May 30, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Bo Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fast high power pulsed light source system for high speed metrology...
- Patent number 11,573,498
- Issue date Feb 7, 2023
- Mitutoyo Corporation
- Paul Gerard Gladnick
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator, linear motor and lithographic apparatus
- Patent number 11,539,280
- Issue date Dec 27, 2022
- ASML Netherlands B.V.
- Niels Cornelis Petrus Johannes Geerts
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,520,233
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Piezoelectric actuator, actuator system, substrate support, and lit...
- Patent number 11,467,504
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Bas Jansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning system and a method for positioning a substage or a sta...
- Patent number 11,460,786
- Issue date Oct 4, 2022
- ASML Netherlands B.V.
- Yang-Shan Huang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
- Patent number 11,402,762
- Issue date Aug 2, 2022
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically-levitated transporter
- Patent number 11,393,706
- Issue date Jul 19, 2022
- Massachusetts Institute of Technology
- Lei Zhou
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Stage driving apparatus, lithography apparatus, and method of manuf...
- Patent number 11,381,196
- Issue date Jul 5, 2022
- Canon Kabushiki Kaisha
- Takayasu Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system having a magnetically levitated transportation stage
- Patent number 11,360,400
- Issue date Jun 14, 2022
- Massachusetts Institute of Technology
- David L. Trumper
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Detection apparatus, exposure apparatus, and article manufacturing...
- Patent number 11,333,986
- Issue date May 17, 2022
- Canon Kabushiki Kaisha
- Kazuki Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Actuator device for aligning an element, projection exposure appara...
- Patent number 11,320,749
- Issue date May 3, 2022
- Carl Zeiss SMT GmbH
- Boaz Pnini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,287,750
- Issue date Mar 29, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Shuping Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tubular linear actuator, patterning device masking device and litho...
- Patent number 11,262,663
- Issue date Mar 1, 2022
- ASML Netherlands B.V.
- Peter Michel Silvester Maria Heijmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration isolation system and lithographic apparatus
- Patent number 11,249,403
- Issue date Feb 15, 2022
- ASML Netherlands B.V.
- Franciscus Maria Joannes Linssen
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithographic apparatus, an operating method and device manufacturin...
- Patent number 11,243,477
- Issue date Feb 8, 2022
- ASML Netherlands B.V.
- Gudrun Ghilaine Agnes De Gersem
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate carrying device, and photoresist coating development device
- Patent number 11,237,488
- Issue date Feb 1, 2022
- MIANYANG BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Guofeng Jia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...
- Publication number 20250021023
- Publication date Jan 16, 2025
- Canon Kabushiki Kaisha
- Hayato Hoshino
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Rotary Substrate Support Having an Actuator for Aligning a Substrate
- Publication number 20240427255
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Nagesha JANSALE VENKATESHA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS STAGE COUPLING
- Publication number 20240402622
- Publication date Dec 5, 2024
- ASML NETHERLANDS B.V.
- Johannes Petrus Martinus Bernardus VERMEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE
- Publication number 20240377762
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...
- Publication number 20240361706
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...
- Publication number 20240339910
- Publication date Oct 10, 2024
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius VAN DE RIJDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...
- Publication number 20240329544
- Publication date Oct 3, 2024
- GUDENG EQUIPMENT CO., LTD.
- YIN-FENG CHAN
- G01 - MEASURING TESTING
Information Patent Application
IMPRINTING APPARATUS
- Publication number 20240329521
- Publication date Oct 3, 2024
- Koninklijke Philips N.V.
- Didier Mathijs Maria Justina Petit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD
- Publication number 20240329546
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...
- Publication number 20240313684
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20240290650
- Publication date Aug 29, 2024
- Canon Kabushiki Kaisha
- KAZUNORI NAKAJIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20240282619
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDER AND METHOD
- Publication number 20240264540
- Publication date Aug 8, 2024
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van de Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD
- Publication number 20240168395
- Publication date May 23, 2024
- ORBOTECH LTD.
- Tal Goichman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS
- Publication number 20240160117
- Publication date May 16, 2024
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD
- Publication number 20240152062
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Sukjong Bae
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20240126178
- Publication date Apr 18, 2024
- Nikon Corporation
- Masaki KATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...
- Publication number 20240085806
- Publication date Mar 14, 2024
- Canon Kabushiki Kaisha
- YUICHI OZAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Transport System Having a Magnetically Levitated Transportation Stage
- Publication number 20240085809
- Publication date Mar 14, 2024
- Massachusetts Institute of Technology
- Lei ZHOU
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
ACTIVE LINEAR MOTOR PARASITIC FORCE COMPENSATION
- Publication number 20240045345
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Ulrich MUELLER
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20230393486
- Publication date Dec 7, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...
- Publication number 20230375946
- Publication date Nov 23, 2023
- Canon Kabushiki Kaisha
- Hayato Hoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME
- Publication number 20230359133
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT FOR AN OPTICAL ELEMENT
- Publication number 20230236516
- Publication date Jul 27, 2023
- Carl Zeiss SMT GMBH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MAGNET ASSEMBLY, COIL ASSEMBLY, PLANAR MOTOR, POSITIONING DEVICE AN...
- Publication number 20230208269
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Gudrun Ghilaine Agnes DE GERSEM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20230119136
- Publication date Apr 20, 2023
- Canon Kabushiki Kaisha
- YUICHIRO MORIKUNI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AN ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH...
- Publication number 20230107002
- Publication date Apr 6, 2023
- VDL Enabling Technologies Group B.V.
- Johannes Hubertus Antonius VAN DE RIJDT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE MACHINE
- Publication number 20230064171
- Publication date Mar 2, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Bo LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE
- Publication number 20230048723
- Publication date Feb 16, 2023
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20230013155
- Publication date Jan 19, 2023
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Drive means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Exposure apparatus and method of manufacturing article

Actuator assemblies comprising piezo actuators or electrostrictive...

Control method of driving apparatus, driving apparatus, lithography...

Substrate stage and substrate processing system using the same

Displacement device based on hall-effect sensors and planar motors

Method for fast loading substrates in a flat panel tool

Actuator device for use in a positioning system as well as such pos...

Substrate holding apparatus, substrate processing apparatus having...

Transport system having a magnetically levitated transportation stage

Multiphase linear motor, multiphase planar motor, stage, lithograph...

Exposure apparatus and method of manufacturing article

Control method of driving apparatus, driving apparatus, lithography...

Substrate stage, substrate processing system using the same, and me...

Exposure machine

Fast high power pulsed light source system for high speed metrology...

Actuator, linear motor and lithographic apparatus

Substrate processing apparatus, substrate processing method, and st...

Piezoelectric actuator, actuator system, substrate support, and lit...

Positioning system and a method for positioning a substage or a sta...

Movable body apparatus, moving method, exposure apparatus, exposure...

Magnetically-levitated transporter

Stage driving apparatus, lithography apparatus, and method of manuf...

Transport system having a magnetically levitated transportation stage

Detection apparatus, exposure apparatus, and article manufacturing...

Actuator device for aligning an element, projection exposure appara...

Lithographic apparatus

Tubular linear actuator, patterning device masking device and litho...

Vibration isolation system and lithographic apparatus

Lithographic apparatus, an operating method and device manufacturin...

Substrate carrying device, and photoresist coating development device

Patents Applicationslast 30 patents

CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...

Rotary Substrate Support Having an Actuator for Aligning a Substrate

LITHOGRAPHIC APPARATUS STAGE COUPLING

SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE

A POSITION MEASUREMENT SYSTEM, A POSITIONING SYSTEM, A LITHOGRAPHIC...

ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH POS...

INNER POD HOLDING DEVICE CONDUCIVE TO REDUCING DUST CONTAMINATION A...

IMPRINTING APPARATUS

LITHOGRAPHY SYSTEM, SUBSTRATE SAG COMPENSATOR, AND METHOD

ELECTROMAGNETIC MOTOR SYSTEM, POSTION CONTROL SYSTEM, STAGE APPARAT...

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

SUBSTRATE HOLDER AND METHOD

VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD

PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS

MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD

EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD

STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...

Transport System Having a Magnetically Levitated Transportation Stage

ACTIVE LINEAR MOTOR PARASITIC FORCE COMPENSATION

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...

SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME

SUPPORT FOR AN OPTICAL ELEMENT

MAGNET ASSEMBLY, COIL ASSEMBLY, PLANAR MOTOR, POSITIONING DEVICE AN...

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

AN ACTUATOR DEVICE FOR USE IN A POSITIONING SYSTEM AS WELL AS SUCH...

EXPOSURE MACHINE

SUBSTRATE TABLE AND METHOD OF HANDLING A SUBSTRATE

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE