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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/02046
Dry cleaning only
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for the surface treatment of substrates
Patent number
11,901,172
Issue date
Feb 13, 2024
EV Group E. Thallner GmbH
Nasser Razek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of cleaning plasma processing apparatus and plasma processin...
Patent number
11,887,824
Issue date
Jan 30, 2024
Tokyo Electron Limited
Yasutaka Hama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
11,815,667
Issue date
Nov 14, 2023
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,772,138
Issue date
Oct 3, 2023
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Plasma purge method
Patent number
11,725,276
Issue date
Aug 15, 2023
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for dry etching compound materials
Patent number
11,605,542
Issue date
Mar 14, 2023
Tokyo Electron Limited
Peter Ventzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
11,555,987
Issue date
Jan 17, 2023
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning apparatus based on light irradiation and wafer clean...
Patent number
11,527,399
Issue date
Dec 13, 2022
Samsung Electronics Co., Ltd.
Byungkwon Cho
B08 - CLEANING
Information
Patent Grant
Fast response pedestal assembly for selective preclean
Patent number
11,515,130
Issue date
Nov 29, 2022
Applied Materials, Inc.
Lara Hawrylchak
B08 - CLEANING
Information
Patent Grant
Method of cleaning substrate processing apparatus
Patent number
11,488,819
Issue date
Nov 1, 2022
ASM IP Holding B.V.
HakJoo Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,446,714
Issue date
Sep 20, 2022
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Combination vacuum and over-pressure process chamber and methods re...
Patent number
11,367,640
Issue date
Jun 21, 2022
Yield Engineering Systems, Inc.
William Moffat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for wafer bonding
Patent number
11,348,790
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Yeong-Jyh Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of removing particles of substrate processing apparatus, and...
Patent number
11,344,931
Issue date
May 31, 2022
Tokyo Electron Limited
Shogo Fukui
B08 - CLEANING
Information
Patent Grant
Apparatus and methods for selectively etching films
Patent number
11,315,794
Issue date
Apr 26, 2022
ASM IP Holding B.V.
Fei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method and substrate processing apparatus
Patent number
11,251,034
Issue date
Feb 15, 2022
Tokyo Electron Limited
Hiroyuki Hayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ammonium fluoride pre-clean protection
Patent number
11,232,947
Issue date
Jan 25, 2022
Taiwan Semiconductor Manufacturing Company Limited
Li-Wei Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gallium arsenide substrate comprising a surface oxide layer with im...
Patent number
11,170,989
Issue date
Nov 9, 2021
Freiberger Compound Materials GmbH
Wolfram Fliegel
G01 - MEASURING TESTING
Information
Patent Grant
Integrated system for semiconductor process
Patent number
11,164,767
Issue date
Nov 2, 2021
Applied Materials, Inc.
Xinyu Bao
C30 - CRYSTAL GROWTH
Information
Patent Grant
Integrated epitaxy and preclean system
Patent number
11,164,737
Issue date
Nov 2, 2021
Applied Materials, Inc.
Lara Hawrylchak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning method
Patent number
11,087,979
Issue date
Aug 10, 2021
Applied Materials, Inc.
Christopher S. Olsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for dry etching compound materials
Patent number
11,056,347
Issue date
Jul 6, 2021
Tokyo Electron Limited
Peter Ventzek
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Epitaxy system integrated with high selectivity oxide removal and h...
Patent number
11,049,719
Issue date
Jun 29, 2021
Applied Materials, Inc.
Lara Hawrylchak
B08 - CLEANING
Information
Patent Grant
Pre-cleaning a semiconductor structure
Patent number
10,978,291
Issue date
Apr 13, 2021
SPTS Technologies Limited
Alex Theodosiou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drying high aspect ratio features
Patent number
10,971,354
Issue date
Apr 6, 2021
Applied Materials, Inc.
Eric J. Bergman
B08 - CLEANING
Information
Patent Grant
Pre-processing method, method for forming metal silicide and semico...
Patent number
10,916,417
Issue date
Feb 9, 2021
NEXCHIP SEMICONDUCTOR CORPORATION
Chih-Hsien Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for the surface treatment of substrates
Patent number
10,867,783
Issue date
Dec 15, 2020
EV Group E. Thallner GmbH
Nasser Razek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning method
Patent number
10,861,693
Issue date
Dec 8, 2020
Applied Materials, Inc.
Peter Stone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method for IGZO active layer and oxide thin film tran...
Patent number
10,797,166
Issue date
Oct 6, 2020
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
Yue Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
10,750,069
Issue date
Aug 18, 2020
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
Publication number
20240063000
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Yasutaka HAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS PURGE DEVICE AND GAS PURGING METHOD
Publication number
20240047251
Publication date
Feb 8, 2024
NANYA TECHNOLOGY CORPORATION
Meng-Liang WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20240027738
Publication date
Jan 25, 2024
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITION OF MOLYBDENUM FOR SOURCE/DRAIN C...
Publication number
20230298902
Publication date
Sep 21, 2023
ASM IP HOLDING B.V.
Jiyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR SEMICONDUCTOR SUBSTRATE PROCESSING
Publication number
20230212740
Publication date
Jul 6, 2023
ASM IP HOLDING, B.V.
Chiyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DRY-TYPE CLEANSING APPARATUS FOR WAFERS
Publication number
20230207304
Publication date
Jun 29, 2023
SEMES CO., LTD.
Kwang Ryul KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20230112466
Publication date
Apr 13, 2023
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
Publication number
20230086640
Publication date
Mar 23, 2023
Applied Materials, Inc.
Lara HAWRYLCHAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
Publication number
20220399210
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Tsunenaga Nakashima
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDU...
Publication number
20220367175
Publication date
Nov 17, 2022
ASM IP HOLDING B.V.
Xing Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC SUBSTRATE CLEANING SYSTEM AND METHOD
Publication number
20220359234
Publication date
Nov 10, 2022
KLA Corporation
Shai Mark
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING PRECLEAN METHODS AND APPARATUS
Publication number
20220301856
Publication date
Sep 22, 2022
ASM IP HOLDING B.V.
Chuang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR WAFER BONDING
Publication number
20220285156
Publication date
Sep 8, 2022
Taiwan Semiconductor Manufacturing company Ltd.
YEONG-JYH LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR SELECTIVELY ETCHING FILMS
Publication number
20220246436
Publication date
Aug 4, 2022
ASM IP HOLDING B.V.
Fei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS PURGE DEVICE AND GAS PURGING METHOD
Publication number
20220130698
Publication date
Apr 28, 2022
NANYA TECHNOLOGY CORPORATION
Meng-Liang WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PURGE METHOD
Publication number
20220081764
Publication date
Mar 17, 2022
TOKYO ELECTRON LIMITED
Hideomi HANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
Publication number
20220059342
Publication date
Feb 24, 2022
Applied Materials, Inc.
Lara HAWRYLCHAK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
Publication number
20220037133
Publication date
Feb 3, 2022
TOKYO ELECTRON LIMITED
Yasutaka HAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GALLIUM ARSENIDE SUBSTRATE COMPRISING A SURFACE OXIDE LAYER WITH IM...
Publication number
20220028682
Publication date
Jan 27, 2022
FREIBERGER COMPOUND MATERIALS GMBH
Wolfram FLIEGEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONDITIONING A PLASMA PROCESSING CHAMBER
Publication number
20210340668
Publication date
Nov 4, 2021
LAM RESEARCH CORPORATION
Chiara Helena Catherina Giammanco MACPHERSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Dry Etching Compound Materials
Publication number
20210296132
Publication date
Sep 23, 2021
TOKYO ELECTRON LIMITED
Peter Ventzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING SUBSTRATE WITH PATTERNED FILM
Publication number
20210200099
Publication date
Jul 1, 2021
Central Glass Company, Limited
Yuzuru KANEKO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
METHOD AND DEVICE FOR THE SURFACE TREATMENT OF SUBSTRATES
Publication number
20210125821
Publication date
Apr 29, 2021
EV GROUP E. THALLNER GMBH
Nasser RAZEK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHODS FOR SELECTIVELY ETCHING FILMS
Publication number
20210118687
Publication date
Apr 22, 2021
ASM IP HOLDING B.V.
Fei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRE-PROCESSING METHOD, METHOD FOR FORMING METAL SILICIDE AND SEMICO...
Publication number
20210013028
Publication date
Jan 14, 2021
Nexchip Semiconductor Corporation
CHIH-HSIEN HUANG
B08 - CLEANING
Information
Patent Application
BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING
Publication number
20200411342
Publication date
Dec 31, 2020
Applied Materials, Inc.
Christopher R. Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING APPARATUS BASED ON LIGHT IRRADIATION AND WAFER CLEAN...
Publication number
20200388484
Publication date
Dec 10, 2020
Samsung Electronics Co., Ltd.
Byungkwon Cho
B08 - CLEANING
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20200344391
Publication date
Oct 29, 2020
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHOD FOR WAFER BONDING
Publication number
20200258743
Publication date
Aug 13, 2020
Taiwan Semiconductor Manufacturing company Ltd.
YEONG-JYH LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Combination Vacuum And Over-Pressure Process Chamber And Methods Re...
Publication number
20200234986
Publication date
Jul 23, 2020
William Moffat
F27 - FURNACES KILNS OVENS RETORTS