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CPC
H01J2237/1507

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1507dynamically

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Transmission electron microscope and inspection method using transm...
- Patent number 12,170,184
- Issue date Dec 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of rolling k vectors of angled gratings
- Patent number 12,106,935
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of rolling k vectors of angled gratings
- Patent number 11,670,482
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Joseph C. Olson
- G02 - OPTICS
Information Patent Grant
Modulation of rolling K vectors of angled gratings
- Patent number 11,456,152
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ angle measurement using channeling
- Patent number 11,387,073
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of ion beam angle
- Patent number 11,367,589
- Issue date Jun 21, 2022
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning transmission electron microscope
- Patent number 10,636,622
- Issue date Apr 28, 2020
- Tescan Orsay Holding, A.S.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing coma and chromatic aberration in a charged parti...
- Patent number 10,297,418
- Issue date May 21, 2019
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and trajectory correction method in...
- Patent number 9,484,181
- Issue date Nov 1, 2016
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for improving characteristic peak signals in anal...
- Patent number 9,406,496
- Issue date Aug 2, 2016
- Universitat de Barcelona
- Sonia Estrade Albiol
- G01 - MEASURING TESTING
Information Patent Grant
Technique for ion beam angle spread control
- Patent number 7,868,305
- Issue date Jan 11, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning systems and methods for providing ions from an ion beam to...
- Patent number 6,992,310
- Issue date Jan 31, 2006
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustment of particle beam landing angle
- Patent number 6,028,662
- Issue date Feb 22, 2000
- International Business Machines Corporation
- Maris A. Sturans
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic compensation of non-linear electron beam landing angle in v...
- Patent number 5,285,074
- Issue date Feb 8, 1994
- International Business Machines Corporation
- Don F. Haire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device manufacture involving lithographic processing
- Patent number 5,258,246
- Issue date Nov 2, 1993
- AT&T Bell Laboratories
- Steven D. Berger
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF
- Publication number 20240021404
- Publication date Jan 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS
- Publication number 20200194227
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Joseph C. OLSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANAL...
- Publication number 20130240728
- Publication date Sep 19, 2013
- Universitat De Barcelona
- Sonia Estrade Albiol
- G01 - MEASURING TESTING
Information Patent Application
Technique for ion beam angle spread control
- Publication number 20060208202
- Publication date Sep 21, 2006
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING SYSTEMS AND METHODS FOR PROVIDING IONS FROM AN ION BEAM TO...
- Publication number 20060033046
- Publication date Feb 16, 2006
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS

dynamically

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transmission electron microscope and inspection method using transm...

Modulation of rolling k vectors of angled gratings

Modulation of rolling k vectors of angled gratings

Modulation of rolling K vectors of angled gratings

In situ angle measurement using channeling

Modulation of ion beam angle

Scanning transmission electron microscope

Method of reducing coma and chromatic aberration in a charged parti...

Charged particle beam apparatus and trajectory correction method in...

Method and system for improving characteristic peak signals in anal...

Technique for ion beam angle spread control

Scanning systems and methods for providing ions from an ion beam to...

Adjustment of particle beam landing angle

Dynamic compensation of non-linear electron beam landing angle in v...

Device manufacture involving lithographic processing

Patents Applicationslast 30 patents

CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF

MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS

METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANAL...

Technique for ion beam angle spread control

SCANNING SYSTEMS AND METHODS FOR PROVIDING IONS FROM AN ION BEAM TO...