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H01J2237/1507
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/1507
dynamically
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Overview
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Patents Grants
last 30 patents
Information
Patent Grant
Transmission electron microscope and inspection method using transm...
Patent number
12,170,184
Issue date
Dec 17, 2024
HITACHI HIGH-TECH CORPORATION
Toshie Yaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulation of rolling k vectors of angled gratings
Patent number
12,106,935
Issue date
Oct 1, 2024
Applied Materials, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulation of rolling k vectors of angled gratings
Patent number
11,670,482
Issue date
Jun 6, 2023
Applied Materials, Inc.
Joseph C. Olson
G02 - OPTICS
Information
Patent Grant
Modulation of rolling K vectors of angled gratings
Patent number
11,456,152
Issue date
Sep 27, 2022
Applied Materials, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In situ angle measurement using channeling
Patent number
11,387,073
Issue date
Jul 12, 2022
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulation of ion beam angle
Patent number
11,367,589
Issue date
Jun 21, 2022
Applied Materials, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning transmission electron microscope
Patent number
10,636,622
Issue date
Apr 28, 2020
Tescan Orsay Holding, A.S.
Petras Stanislav
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of reducing coma and chromatic aberration in a charged parti...
Patent number
10,297,418
Issue date
May 21, 2019
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Jürgen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and trajectory correction method in...
Patent number
9,484,181
Issue date
Nov 1, 2016
Hitachi High-Technologies Corporation
Hideto Dohi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for improving characteristic peak signals in anal...
Patent number
9,406,496
Issue date
Aug 2, 2016
Universitat de Barcelona
Sonia Estrade Albiol
G01 - MEASURING TESTING
Information
Patent Grant
Technique for ion beam angle spread control
Patent number
7,868,305
Issue date
Jan 11, 2011
Varian Semiconductor Equipment Associates, Inc.
Atul Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning systems and methods for providing ions from an ion beam to...
Patent number
6,992,310
Issue date
Jan 31, 2006
Axcelis Technologies, Inc.
Joseph Ferrara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjustment of particle beam landing angle
Patent number
6,028,662
Issue date
Feb 22, 2000
International Business Machines Corporation
Maris A. Sturans
G01 - MEASURING TESTING
Information
Patent Grant
Dynamic compensation of non-linear electron beam landing angle in v...
Patent number
5,285,074
Issue date
Feb 8, 1994
International Business Machines Corporation
Don F. Haire
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device manufacture involving lithographic processing
Patent number
5,258,246
Issue date
Nov 2, 1993
AT&T Bell Laboratories
Steven D. Berger
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF
Publication number
20240021404
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODULATION OF ROLLING K VECTORS OF ANGLED GRATINGS
Publication number
20200194227
Publication date
Jun 18, 2020
Applied Materials, Inc.
Joseph C. OLSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANAL...
Publication number
20130240728
Publication date
Sep 19, 2013
Universitat De Barcelona
Sonia Estrade Albiol
G01 - MEASURING TESTING
Information
Patent Application
Technique for ion beam angle spread control
Publication number
20060208202
Publication date
Sep 21, 2006
Atul Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING SYSTEMS AND METHODS FOR PROVIDING IONS FROM AN ION BEAM TO...
Publication number
20060033046
Publication date
Feb 16, 2006
Joseph Ferrara
H01 - BASIC ELECTRIC ELEMENTS