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H01J37/32577
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/32577
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate supporting apparatus and substrate treating apparatus inc...
Patent number
12,170,191
Issue date
Dec 17, 2024
Semes Co., Ltd.
Jong Gun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method for releasing sample
Patent number
12,148,633
Issue date
Nov 19, 2024
HITACHI HIGH-TECH CORPORATION
Masaki Ishiguro
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Symmetric plasma source to generate pie-shaped treatment
Patent number
12,142,458
Issue date
Nov 12, 2024
Applied Materials, Inc.
Anantha K. Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
12,119,211
Issue date
Oct 15, 2024
ASM IP Holding B.V.
ChangMin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer support device
Patent number
12,119,212
Issue date
Oct 15, 2024
Sumitomo Osaka Cement Co., Ltd.
Masaki Hirayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,087,556
Issue date
Sep 10, 2024
Kioxia Corporation
Yosuke Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Impedance match with an elongated RF strap
Patent number
12,080,518
Issue date
Sep 3, 2024
Lam Research Corporation
Felix Leib Kozakevich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
12,068,139
Issue date
Aug 20, 2024
Tokyo Electron Limited
Shin Matsuura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma reactor having a variable coupling of low frequency RF power...
Patent number
12,062,524
Issue date
Aug 13, 2024
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
Kui Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching apparatus and method for operating the same
Patent number
12,046,451
Issue date
Jul 23, 2024
Samsung Electronics Co., Ltd.
Nam Kyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Filter circuit and plasma processing apparatus
Patent number
12,033,833
Issue date
Jul 9, 2024
Tokyo Electron Limited
Koji Yamagishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and high-frequency power application me...
Patent number
12,027,347
Issue date
Jul 2, 2024
Tokyo Electron Limited
Naoki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for joining quartz pieces and quartz electrodes and other de...
Patent number
12,020,971
Issue date
Jun 25, 2024
Watlow Electric Manufacturing Company
Brent Elliot
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrostatic chuck assembly for plasma processing apparatus
Patent number
12,002,701
Issue date
Jun 4, 2024
Mattson Technology, Inc.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Voltage waveform generator, wafer processing apparatus and plasma p...
Patent number
12,002,651
Issue date
Jun 4, 2024
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ceramic susceptor
Patent number
11,990,322
Issue date
May 21, 2024
MiCo Ceramics Ltd.
Haneum Bae
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck (ESC) pedestal voltage isolation
Patent number
11,990,360
Issue date
May 21, 2024
Lam Research Corporation
Miguel Benjamin Vasquez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,990,316
Issue date
May 21, 2024
Tokyo Electron Limited
Masaki Hirayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma chamber and chamber component cleaning methods
Patent number
11,984,306
Issue date
May 14, 2024
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,978,612
Issue date
May 7, 2024
HITACHI HIGH-TECH CORPORATION
Isao Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition method and deposition apparatus
Patent number
11,972,932
Issue date
Apr 30, 2024
Ulvac, Inc.
Toshihiko Nakahata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma reactors
Patent number
11,961,717
Issue date
Apr 16, 2024
OZONE 1 PTY LTD
John Lionel Brauer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Symmetric VHF source for a plasma reactor
Patent number
11,935,724
Issue date
Mar 19, 2024
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,923,170
Issue date
Mar 5, 2024
Tokyo Electron Limited
Satoru Kawakami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,923,177
Issue date
Mar 5, 2024
Tokyo Electron Limited
Keiji Tabuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,908,664
Issue date
Feb 20, 2024
Tokyo Electron Limited
Naohiko Okunishi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sector shunts for plasma-based wafer processing systems
Patent number
11,887,820
Issue date
Jan 30, 2024
COMET Technologies USA, Inc.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing using pulsed-voltage and radio-frequency power
Patent number
11,848,176
Issue date
Dec 19, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,842,885
Issue date
Dec 12, 2023
HITACHI HIGH-TECH CORPORATION
Tooru Aramaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical vapor deposition apparatus and method of manufacturing dis...
Patent number
11,842,883
Issue date
Dec 12, 2023
Samsung Display Co., Ltd.
Jong-hoon Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
IMPEDANCE MATCH WITH AN ELONGATED RF STRAP
Publication number
20240395504
Publication date
Nov 28, 2024
LAM RESEARCH CORPORATION
Felix Leib Kozakevich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AFE (ACTIVE FAR EDGE) HEATER/BIPOLAR ESC WITH SIMPLIFIED AND OPTIMI...
Publication number
20240387154
Publication date
Nov 21, 2024
Applied Materials, Inc.
Juan Carlos ROCHA-ALVAREZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION
Publication number
20240387148
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company Limited
Che Wei Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240371609
Publication date
Nov 7, 2024
TOKYO ELECTRON LIMITED
Shin MATSUURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240331974
Publication date
Oct 3, 2024
HITACHI HIGH-TECH CORPORATION
Isao Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT INCLUDING MULTIPLE RADIO FREQUENCY (RF) ELECTRODES
Publication number
20240321560
Publication date
Sep 26, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yulin PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20240290587
Publication date
Aug 29, 2024
Semes Co., Ltd.
Dong Hun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSING POWER SUPPLY WITH POWERED CROWBAR
Publication number
20240282552
Publication date
Aug 22, 2024
EHT Ventures LLC
Kenneth Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic Chuck Assembly for Plasma Processing Apparatus
Publication number
20240282614
Publication date
Aug 22, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Maolin Long
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION
Publication number
20240266202
Publication date
Aug 8, 2024
LAM RESEARCH CORPORATION
Miguel Benjamin Vasquez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240249922
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Ryota SAKANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIPOLAR ELECTROSTATIC CHUCK ELECTRODE DESIGNS
Publication number
20240249924
Publication date
Jul 25, 2024
Applied Materials, Inc.
Jian Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
UPPER ELECTRODE STRUCTURE AND PLASMA PROCESSING APPARATUS
Publication number
20240249907
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Tetsuji SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PLACEMENT TABLE
Publication number
20240242943
Publication date
Jul 18, 2024
NGK Insulators, Ltd.
Tomohiro HARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER CONTROL METHOD AND DEVICE OF LOWER RADIO FREQUENCY POWER SUPP...
Publication number
20240234088
Publication date
Jul 11, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING SEMICONDUCTOR DEVICES USING MODIFIED PHOTOMASK...
Publication number
20240222118
Publication date
Jul 4, 2024
TOKYO ELECTRON LIMITED
Peng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING DEVICE
Publication number
20240162075
Publication date
May 16, 2024
TOKYO ELECTRON LIMITED
Akira NAGAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH POWER CABLE FOR HEATED COMPONENTS IN RF ENVIRONMENT
Publication number
20240105429
Publication date
Mar 28, 2024
Lam Reseach Corporation
Seyed Jafar JAFARIAN-TEHRANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20240079216
Publication date
Mar 7, 2024
PSK INC.
KWANG SUNG YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR GENERATING ATMOSPHERIC PRESSURE, LOW TEMP...
Publication number
20240066161
Publication date
Feb 29, 2024
TellaPure, LLC
Edgar Bryan Hill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS COOLED HIGH POWER CONNECTION ROD
Publication number
20240071729
Publication date
Feb 29, 2024
Kumaresan NAGARAJAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
Publication number
20240055285
Publication date
Feb 15, 2024
LAM RESEARCH CORPORATION
Edward Augustyniak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Glow Discharge Cell and Related Glow Discharge Assembly
Publication number
20240047177
Publication date
Feb 8, 2024
Eduardo Alonso Gil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20240038502
Publication date
Feb 1, 2024
ULVAC, Inc.
Toshihiko NAKAHATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CERAMIC SUSCEPTOR
Publication number
20240038509
Publication date
Feb 1, 2024
MICO CERAMICS LTD.
Haneum BAE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Measurement Apparatus for Alternating Currents and Voltages of Phys...
Publication number
20240038512
Publication date
Feb 1, 2024
Mario Hesse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE TREATING APPARATUS INC...
Publication number
20240038508
Publication date
Feb 1, 2024
SEMES CO., LTD.
Jong Gun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20240030002
Publication date
Jan 25, 2024
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230420227
Publication date
Dec 28, 2023
ASM IP HOLDING B.V.
ChangMin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
Publication number
20230420218
Publication date
Dec 28, 2023
LAM RESEARCH CORPORATION
Hyungjoon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...